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For details, refer to page 2-5-15. 2-5-14 Base Mounted Series VQ4000 Plug-in Unit 2-G 3/4 Electrical entry VQC Stations are counted starting from the first station on the D side. SQ Electrical wiring specifications Special Wiring Specifications VQ0 Standard wiring Wiring with control unit Double wiring (connected to SOL. A and SOL.

NBR Weight Body 22 g 32 g 34 g 25 g 26 g 27 g 28 g 28 g 34 g Lead wire with connector +35 g Cable specifications Conductor area 0.15 mm2 (AWG26) Insulator Outside diameter 1.0 mm Color Brown, Blue, Black (3 core) Sheath Finished outside diameter 3.4 -63No.PS-OMS0007-H Dimensions M5 type 01/N01 type Piping specifications Port size A 01 R1/8 Width across flats 10 N01 NPT1/8 Width across flats

M5 x 0.8 SYJA514-01 0.32 0.46 1.1 0.32 0.41 1.2 64 (Without subplate 34) N.C. Base mounted (with sub-plate) 1/8 0.34 0.48 1.2 0.33 0.37 1.3 N.O. SYJA524-01 SYJA712-01 SYJA722-01 SYJA714-01 SYJA714-02 0.76 0.69 0.69 0.66 0.63 0.64 0.51 0.42 0.34 0.33 0.45 0.48 2.5 2.4 2.7 2.6 2.3 2.3 0.77 0.72 0.71 0.74 0.70 0.68 0.43 0.38 0.32 0.31 0.21 0.31 2.8 2.7 2.9 3.0 2.8 2.7 N.C.

Bore size With One-touch fitting U01 U02 U03 U04 1 8 1 4 3 8 1 2 Needle Valve/Flow Characteristics AS2201F-01, AS2211F-01 AS2301F-01, AS2311F-01 AS2201F-02, AS2211F-02 AS2301F-02, AS2311F-02 Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa Flow rate (/min (ANR)) Flow rate (/min (ANR)) Effective area (mm2) Effective area (mm2) Number of needle rotations Number of needle rotations AS3201F, AS3211F

threads 5-wire oil resistant heavy-duty cord (0.15 mm2) 01/T1 types approx. 60 g, W1 type approx. 80 g, C4/C6/M5 types approx. 92 g (Each including 0.6 m lead wires) Port size Lead wire Weight Note) When equipped with auto shift function, the following ranges can be set.

C 1. ##0016 ## 00 01 1 02 2 03 3 04 4 05 5 06 6 07 7 08 8 09 9 10 10 11 11 12 12 13 13 14 14 15 15 16 16 2. **No. 3.

Inch Size [mm] Model d T H D1 D3 L1 L2 L3 L4 Note 1) A Note 2) M W1 W2 X Y Weight [g] Unlocked Locked Unlocked Locked AS22l1FSl-U01-01 1/8" 7.2 12 19.1 26.1 (26) 19.1 43.9 42.4 40.8 39.3 13.3 20 21.5 6.5 15 13 (13) AS22l1FSl-U01-03 5/32" 8.2 AS22l1FSl-U01-07 1/4" 11.2 20.8 27.8 (27.7) 14 (13) AS22l1FSl-U01-09 5/16" 13.2 22.4 29.4 (29.3) 14.2 15 (14) AS22l1FSl-U02-01 1/8" 1/8 13 (12.7) 7.2

Note 2) 52-SY9000 has no bracket. 5 7 9 52-SY5000 52-SY7000 52-SY9000 Thread type Type of actuation Nil F N T Rc G NPT NPTF 2-position single 2-position double 3-position closed centre 3-position exhaust centre 3-position pressure centre 1 2 3 4 5 A, B port size (Body ported type) Piping type Port size Applicable series Symbol 01 C4 C6 C8 N3 N7 N9 02 C8 C10 N9 N11 02 03 C8 C10 C12 N9 N11

Port size NPT Model Model 10-32 UNF M5 3/8 1/8 1/4 1/2 3/8 1/8 1/4 1/2 AKH04 AKH06 AKH08 AKH10 AKH12 AKH03 AKH07 AKH09 AKH11 AKH13 4 6 8 10 12 5/32" 1/4" 5/16" 3/8" 1/2" From one-touch fitting to male thread B Bushing Type AKB 01 A 01 S With sealant (standard) Body size Port size 01 1/8 01 1/8 Thread type 02 1/4 02 1/4 03 3/8 Nil R 03 3/8 04 1/2 N NPT 04 1/2 Check valve free flow direction

N01 C4L C6L M50.8 R1/8 NPT1/8 4 mm 5/32 inch 6 mm () PBTCB156PPSO HNBR C3604 SUS304NBR POMSUS304NBRC3604 24 g 34 g 36 g 30 g 30 g +39 g 0.15 mm 2(AWG26) 1.0 mm (5 ) 3.5 -78No.PS-OMU0005CN-C M5 7 3.5 01/N01 A 01 R1/8 10 N01 NPT1/8 12 C4LC6L 4 A B C4L 17.5 8.2 C6L 18.3 10.4 -79No.PS-OMU0005CN-C A B -80No.PS-OMU0005CN-C 0.5~7 + 0.5~7 -81No.PS-OMU0005CN-C 2 (n ) <> <> 31n +3.5

Port size NPT Model Model 10-32 UNF M5 3/8 1/8 1/4 1/2 3/8 1/8 1/4 1/2 AKH04 AKH06 AKH08 AKH10 AKH12 AKH03 AKH07 AKH09 AKH11 AKH13 4 6 8 10 12 5/32" 1/4" 5/16" 3/8" 1/2" From one-touch fitting to male thread B Bushing Type AKB 01 A 01 S With sealant (standard) Body size Port size 01 1/8 01 1/8 Thread type 02 1/4 02 1/4 03 3/8 Nil R 03 3/8 04 1/2 N NPT 04 1/2 Check valve free flow direction

( 01, -02 and -03 after model no. means port size{01 1/8,02' 114,03 3/8,04 1/2} 5 Filter I Regulator Series AW e How to Order AW 01 Filte~ Regulator '-Optional specifications 0.02~0.2MPa 1 (0.2 ~ 2.0kgf/cm2) setting Accessory (optional) 20 1/8 Type of thread Body size _-1 2 Metal bowl 6 Nylon bowl Description Applicable model Symbol 8 Metal bowl with level gauge ~ ~ ~ ( pn 0 (Only AW3001

M1 M2 Weight (g) ASV310F-01-06S ASV310F-01-08S ASV310F-02-06S ASV310F-02-08S ASV410F-01-08S ASV410F-01-10S ASV410F-02-08S ASV410F-02-10S ASV410F-03-08S ASV410F-03-10S ASV510F-02-10S ASV510F-02-12S ASV510F-03-10S ASV510F-03-12S ASV510F-04-10S ASV510F-04-12S 71.9 73.8 71.9 73.8 83.1 85.2 83.1 85.2 83.1 85.2 90.2 91.8 90.2 91.8 90.2 91.8 16.8 19.3 16.8 19.3 19.3 23.3 19.3 23.3 19.3 23.3 23.3

5 Port Air Operated Valve Series VFA3000 How to Order Thread type (Including pilot port) Nil Rc G NPT NPTF Port size (P, A, B port) F N T 01 02 1 8 1 4 R1, R2 port are 1/8. Option F Foot bracket Mounting bracket are supplied, but unattached.

If these conditions are not satisfied, the applicable parameters will not be switched although the other parameters shown in this table will be switched. 5-53 5 Adjustments (2) Manual Gain Switching Manual gain switching uses G-SEL of the servo command output signals (SVCMD_IO) to switch between gain setting 1 and gain setting 2.

MQ 1.23 10% M4 CUX32-PS Grease pack (10 g): 1 pc. 2.55 10% M5 It is impossible to replace seals in bore size 10 mm. RHC 4.02 10% M6 Operating Precautions 2. Grease pack When maintenance requires only grease, use the following part numbers to order. Grease pack part no.: GR-L-005 (5 g) GR-L-010 (10 g) GR-L-150 (150 g) RZQ Warning 1.

1 8 (Rc, NPT, G) 1 8 Supply port [PV] Port size Exhaust port [EXH] Mass 1 station: 73 g (50 g per additional station) Note 1) PD port: Blank Note 2) Exhaust air from both sides for 4 or more stations of ZX1103 manifold.

ZQ1 3M-K1 L-E G-00. ZQ1 3M-K2 L-E G-00. ZQ1 3M-J1 L-F -00. ZQ1 3M-Q1 L-E G-00. In case of ZQ1 3M-F -00, the overall length is 91.7.

470 g 650 g 1,100 g Port size (Rc, NPT, G) Note 1) The system accuracy when combined with PF2W3.

470 g 650 g 1,100 g Port size (Rc, NPT, G) 3/8 3/8, 1/2 1/2, 3/4 3/4, 1 Note 1) The system accuracy when combined with PF2W2/3.