Cylinder with Lock 0 Description Shield plate Switch ass'y Piston PT fittings Adjustment screw Pointer Spring Scale plate Miniseal Y type Magnet No. q w e r t y u i o !
ASV AK ASS ASR ASF 15-9-73 3 Construction w r y t u !2 e !1 No. q w e r t y u i o !0 !1 !
VXZ2230 VXZ2232 VXZ2240 VXZ2242 VXZ2350 VXZ2352 VXZ2360 VXZ2362 H Y F X E W D U V C S T B K R A J N Q N 79.5 87.5 101.5 106.5 L 108 117 130 135 1 4 3 8 , 28 35 43 45 26 30 38 43 14 17 22 22 7.5 8.5 9 9 24 33 42 47 1.6 2.3 2.6 2.6 22 28 36 42 5.5 6.5 6.5 6.5 40 52 65 70 6 7 7 7 11 14 18 21 93 102 115.5 120.5 25 25 28 28 89 97 112 117 67 75 87 92 50 63 80 90 23 23 25.5 25.5 35 35 40 40 25.5
Refer to pages 15-18-3 to 15-18-4 for Safety Instructions and Common Precautions on the products mentioned in this catalog, and refer to pages 15-8-6 to 15-8-8 for Precautions on every series. 3 Construction w r y t u !2 e !1 No. q w e r t y u i o !0 !1 !
lines in clean room environments TPH 06 04 B 20 Tube O.D.
Option symbol Y DI Control Kit HRW0ll-H1-Y Applicable model HRW0ll-H2-Y Y HRW 60% ethylene glycol aqueous solution Deionized water 0 to 20 0 to 20 Note) Allowable circulating fluid DI level display range DI level set range Solenoid valve hysteresis for control DI level reduction alarm set range MNcm MNcm MNcm MNcm DI control kit 0 to 0.9 0 to 20 Select this option if you want to maintain
NPT fittings Option symbol Y DI Control Kit Y HRZ HRZ00-L1-Y HRZ00-H1-Y HRZ00-W1-Y HRZ010-W1S-Y HRZ00-L2-Y HRZ010-W2S-Y Applicable model DI control kit Select this option if you want to maintain the electric resistance ratio (DI level) of the circulating fluid at a certain level. However, some components have to be fitted by customer.
VV5K3-20-06 [Option] Note) CE-compliant: For DIN terminal only VV5K3-40-06-M5 Common SUP/Common EXH How to Order Type 20: Body ported (A, B port top ported) 20 05 VV5K3 Applicable solenoid valve VK3120--M5(-Q) VK3120--01(-Q) VK332--M5(-Q) VK332--01(-Q) A port: Rc 1/8, M5 x 0.8 A, B port Rc 1/8, M5 x 0.8 VK3120 Valve stations VK332 Thread type Q CE-compliant Nil CE-compliant 01 1 station
2 w y r u e ASN !2 t AQ ASV AK VCHC ASR ASQ i q o !0 !1 i q o !0 !
If connections are made incorrectly, failure may occur not only in the manifolds and valves, etc., but also in the PLC (control side) and power supply, etc. 9 Series SZ3000 Construction JIS symbol 2 position single 2 position single w e q r t y u o !0 (A) 4 (B) 2 5 (EA) 1 (P) 3 (EB) 4(A) 2(B) 5(EA) 1(P) 3(EB) i JIS symbol 2 position double 2 position double (A) 4 (B) 2 w e q r t y u o !
AR-OMT0015 PRODUCT NAME REGULATOR MODEL/ Series AR20K-(F,N)01 (F,N)02(B,E,G,H,M)(-1,N,R,Y,Z)-B AR25K-(F,N)02 (F,N)03(B,E,G,H,M)(-1,N,R,Y,Z)-B AR30K-(F,N)02 (F,N)03(B,E,G,H,M)(-1,N,R,Y,Z)-B AR40K-(F,N)02 (F,N)04(B,E,G,H,M)(-1,N,R,Y,Z)-B AR40K-(F,N)06(B,E,G,H,M)(-1,N,R,Y,Z)-B AR50K-(F,N)06 (F,N)10(B,E,G,M)(-1,N,R,Y,Z)-B AR60K-(F,N)10(B,E,G,M)(-1,N,R,Y,Z)-B Contents PAGE 1.
O.D. 6 I.D. 4 1051 Specialty Lubricators NALF Series Auto Feed Lubricators NALF400, 400-06, 500, 600, 800, 900 Lubricator NALF400 Tank NALT-5 s n o i t a c i f i c e p S F L A N e b u L d e e F o t u A 0 0 4 F L A N 6 0 N 0 0 4 F L A N 0 0 5 F L A N 0 0 6 F L A N 0 0 8 F L A N 0 0 9 F L A N ) a P M ( g i s p e r u s s e r p y l p p u s . x a M ) 5 . 1 ( 0 2 2 ) a P M ( g i s p e r u s s e
Cable wire color Terminal 1 Brown DC+ q 2 Not used N.C. w 3 Blue DC e 4 White IN: 1 to 5 V r Power supply / Output connector (8P) Power supply / Output connector (accessory) i u y t r e w q Pin no. Pin no. Terminal 7 Green CH4_OUT1 8 Yellow N.C.
Table (1) Combination of solenoid valve, pilot valve and power supply voltage Applicable power supply voltage AC 100 Solenoid valve combination symbol Pilot valve symbol Nil Y Nil Nil Y Nil Nil Nil AC 200 AC 110 AC 220 DC 24 DC 12 K1 K1 K2 J1 J1 J2 Q1 Q2 q w e r t y u i Combinations (1) to (8) in the above table are the only possible options. 13-9-2 3 Compact Vacuum Ejector Series ZQ How
Y .. ".,.. , ",. ,." ,. ,." , .. .' .
Metal clamp A Steel plate Steel olate wFS4000-5-24 o Metal joint B Gasket NBR wF400G.7 o Gasket NBR WF4OOG'S O-ring NBH A5568-OOr (t O-ring NBR ASs6A{06 Terminal ass y wF4000-6A Conduit cover ass'y wFS4000-4A-i Nole) Manilold Base/Construction shown: Plug-in type with lerminal block. Note) NVFR/NVFS Series manifolcls are constructed using the same parls Main Parts sub-assl No.
Metal clamp A Steel plate Steel olate wFS4000-5-24 o Metal joint B Gasket NBR wF400G.7 o Gasket NBR WF4OOG'S O-ring NBH A5568-OOr (t O-ring NBR ASs6A{06 Terminal ass y wF4000-6A Conduit cover ass'y wFS4000-4A-i Nole) Manilold Base/Construction shown: Plug-in type with lerminal block. Note) NVFR/NVFS Series manifolcls are constructed using the same parls Main Parts sub-assl No.
Stations 3 2 1 D D D D How to Order Valve 10-SV 1 1 0 0 F 5 Note) q w r e t y u i Air Preparation Equipment Pressure Control Equipment Flow Control Equipment Pressure Switches/ Pressure Sensors q Series r Back pressure check valve Note) Available with manifold block for station additions.
3 q q AS-FG i i y AS-FP AS-FP !5 AS-FM Meter-in type M5 type AS-D AS-T ASP ASN AQ ASV AK VCHC ASR ASQ Component Parts No.