1

A Series MGC 20 to 50 SZ + Stroke B D port C port A, B port B port A C port A port D port A View A-A GD GD Front mounting flange SB + Stroke B SA + Stroke A ZZ + Stroke A + Stroke B Bracket mounting With R Without R Stroke A stroke Stroke A + Stroke B ( ) Bore size (mm) W1 W2 SB SA GD ZZ GC SZ availability 30 30 Up to 200 96 50 9 176 21 20 35 st or more 89 110 30 30 96 50 9 183 21 25 60 st

Fluoropolymer Piping Equipment

Connection threads R/NPT A B E F G H L1 L2 M N Min. port size Model Applicable tubing O.D.

VFR

2, Metal joint q, w, Gasket B r, Guard !3, Steel ball !2 End plate (D) !2, Metal joint q, w, Gasket B r, Guard !

Aluminum High Vacuum Angle Valve

N P R Port P (Pressure port) In case of double solenoid valve Port R (Exhaust port) Q K L M B EB EA P A In case of single solenoid valve Port R (Exhaust port) (mm) P K L M N Q R Model XLCV-50 XLCV-63 XLCV-80 12.5 9.5 9.5 1 1 23.5 52.6 17.4 9.5 9.5 1 1 18.6 62.3 23.5 9.5 9.5 1 1 12.4 70.8 Other dimensions are the same as the XLC.

VQ7-6/7-8

A B L1 L2 L2 L1 B A PA A B Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com B SMC A PA A B B A (A, B port) 4n-1/4, 3/8 PA A L side R side L side R side (2n-1/8) 38 D side D side 68.5 68.5 3 120.5 (Single) 16 120.5 (Single) 145 (Double) 44 145 (Double) 155 (3 position

Air Fittings & Tubing

Port A size Port B size Number of Port A Porting Port A Port B Model 4 8 10 12 Rc(PT) Rc(PT) 6 8 10 6, R(PT) 6, R(PT) 6, R(PT) 8 ,R(PT) 8, R(PT) 8, R(PT) 10, R(PT) 10, R(PT) 10, R(PT) 6 8 10 4 6 6 8 One-touch fitting One-touch fitting 6, 10 KM11 1 4 3 8 Rc(PT)female thread 6, 10 One-touch fitting KM12 One-touch fitting One-touch fitting 3 KM13 1 8 1 4 3 8 1 8 1 4 3 8 KM11 One-touch fitting

Rotary Actuator/Vane Type

Single vane Double vane 90, 100D 270S 180S 90S 0 5 g e n a 2 0 Note 1) r 7 +4 0 0 n Note 1) +4 0 o g n e 0 a ti r 1 0 Note 1) 8 n a 9 0 o 1 +4 0 t ti e o a e g Note 1) t R +4 0 n o g a R r n n ra 0 o 9 ti n a e t io o g R at n a ot r R n (90) (90) o ti a t o R Chamfer Chamfer (45) Chamfer (45) B port Chamfer Note 2) A port B port A port B port (40) B port A port A port * For size 40 actuators

Direct Operated Pilot Operated 2-Port Solenoid Valve Refer to pages 7, 9, 11, 25, 35, and 39 for details.

How to Order JSXZ 3 1 C N 02 R 5 G D B w y e r t u o !

New

B B DIN terminal Conduit terminal F Q Cable 0.24 to 0.47 D S G1/2 1.34 Qp0.08 F (1.73) 1.24 0.99 T C C R R E G1/2 E 2 x P Port size A 2 x P Port size A B1 Sp0.08 B B1 B Conduit Faston type Q F D Q F 0.44 z11 G1/2 0.90 R C C R E E 2 x P Port size A 2 x P Port size B1 A B1 B B Terminal part Faston connector (inch) 250 Series Electrical entry Size Port size Grommet (with surge P A B B1 C D E

Rubber seal 5 Port Solenoid Valve Series SYJ5000

4-4.5 (For mounting) 9 + 45.6 13.4 + + 2.5 2.5 12.5 15.2 2 123 [127.4] 107 [111.4] 10 18.5 23.5 One-touch fitting 6, 1/4" (A, B port) R P R R P R 16.5 16.5 A B A B A B A B A B 77.6 [79.8] 45 49 77 [79.2] 65 Applicable tubing O.D.: 4, 5/32", 6, 1/4" 82.8 16.5 + + + + + (3.2) Triangle mark 52.8 1/8 (P, R port) (Pitch) P = 17.5 21 (Station 1) (Station n) (Light/surge voltage suppressor) 48.6

Rotary Actuator

Metering valve A regulates the clockwise rotation speed of the shaft and throttle valve B regulates the counterclockwise speed to the shaft. 9 0 y 1 a y w a y e w k y of e e SOL.1 k g n of ra e n io g at ot n R ra R +4 0 n ot io at 0 ot at R 8 io 1 R n +4 0 y a ra ot w 0 n y g e e at k of 9 io 1 n y A B a ra w n y g e e k of Metering Valve with Silencer 204 Rotary Actuator with Solenoid

VFS

2, Metal joint q, w, Gasket B r, Guard !3, Steel ball End plate (D side) assembly !2 AXT625-3A-20 End plate (D) !2, Metal joint q, w, Gasket B r, Guard !3, Steel ball End plate (D) !2, Metal joint q, w, Gasket B r, Guard !

VQ7-6/7-8

+ 0.77 (n: stations) Rc3/8 Rc1/2 Rc1/2 Rc3/4 22 Series VQ7-8 DIN Connector Type VV72-142 118 142 118 9 2n-Rc3/8, 1/2 67 20 Indicator light 14 34 9 (4-Rc1/8) Port P, R1, R2 for Rc3/4 only U side U side 18 Manual override 23 R4.5 R4.5 P= 56 60 (73) 60 (73) P= 56 B B B B B 14 42 18 13 13 A B SMC SMC SMC B B B A A A A A PA PA PA A B A B L1 L2 L1 L2 A B SMC PA A B PA L side R side L side R side

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

Size: 30 Size: 50 to 100 Key Angle adjustment range 3 Angle adjustment range 3 Angle adjustment range 3 Direction indicating label Key CRB2 Direction indicating label CRBU2 +4 0 +4 0 CRB1 90 0 0 ve 1 90 o ve A port B port o gr oo ve 0 MSU y e gr oo k 18 of y B port A port gr ke e g ve n ra of y n io e at e oo ot R g k CRJ Stopper screw B +4 0 n ra of gr 0 n io at 8 ot e R R 1 y g ot e

ZP3

ZP3-T-A w w e q q ZP3-T-A-B ZP3-T-A-(02/04) w t r q Component Parts No.

SZ3000

ports) [With external pilot] 4-One-touch fitting (P, R ports) Applicable tube O.D.: 8 13.3 (Pitch) P= 10.5 13.3 24 24 16.2 16.2 17 34 34 36.7 B 2 B 2 B 2 2 B 2 B 2 B 2 B 2 B 2 B 2 B 2 PE R 3 R 3 R 3 R 3 P 1 P 1 P 1 P 1 X A 4 A 4 A 4 4 A 4 A 4 A 4 A 4 A 4 A 4 A 4 2-One-touch fitting (X,PE ports) Applicable tube O.D.: 6 2n2-One-touch fitting (A, B ports) Applicable tube O.D.: 4 6 Applicable

Shock Absorbers and Rate Controls

5,0 0.3-3.30 74.0 70,000 4.400 13.0 26.0 r,330 285 In0tMt.0(Bl 2.7 25,0 0.08-1.30 14.0 70,000 4,400 r3.0 26.0 2,016 285 tR0Etil.0 r(B) 2.7 ?

Title not found

ro 40mm cn y q c k r l o B e .

Stability of suction position,

0 are used for both the flat type with groove and the bellows type with groove. 63 to 125 Male thread Female thread r i r i r i r o r i o % b !

I

M a n i f o l d m o u n t e d v e r s i o n s o f t h e V YH y r e g a r e a v a i l a b l e .