PSxx-OMU0005CN

8370: JIS B 8361: JIS B 9960-1: -1 ) JIS B 8,433: *2) 1. 2. 3. 1. 2. 3. 4

Ionizer Nozzle type IZN10 Series IZS

Maintenance detection signal ON OFF Output Requirement for maintenance detected ON OFF Input External switch signal 1, 2 455 IZN10 Series Dimensions 06 07 06 07 Energy saving static neutralization nozzle/IZN10-01 High flow rate nozzle/IZN10-02 20 Note 1) (110) 16 100 5 5 46 A 3.4 18.5 11 6 5 6 A 8 7 (Tap for ground wiring) M3 x 0.5 depth 4 40 25 12 A 93.6 A-A (mm) A Model 01 02 01 02 IZN1006

Miniature Regulator Series ARJ310

ARJF310F-01 y e !

Series AP500

Delivery pressure Bonnet option Delivery pressure 100 mm Hg absolute to 10 psig (-88 kPa to 0.07 MPa) Code Code Bonnet Standard Panel installation 4) 01 No code P Material 4) Panel mounting hole: dia 1.56 inch (39.6 mm).

Series REC 10- ø20, ø25, ø32, ø40 11- Sine Cylinder

Caution REC25 101110-AS2001F-06-X214 10-AS2301F-01-06-X214 10-AS2201F-01-06-X214 REC32 101110-AS3001F-08-X214 10-AS2301F-01-06-X214 10-AS2201F-01-06-X214 REC40 101110-AS3001F-08-X214 10-AS3301F-02-08-X214 10-AS3201F-02-08-X214 2. Speed control is possible with meter-in and meter-out types of speed controllers.

VSA4

0.31 0.31 0.30 0.33 b 0.34 0.47 0.51 0.34 0.47 0.51 0.34 0.44 0.48 0.33 0.48 0.53 Cv 1.0 1.2 1.4 1.0 1.2 1.4 1.0 1.2 1.3 1.1 1.2 1.3 1 8 1 4 3 8 1 8 1 4 3 8 1 8 1 4 3 8 1 8 1 4 3 8 1 8 Rc VSA4120-01 VSA4120-02 VSA4120-03 VSA4220-01 VSA4220-02 VSA4220-03 VSA4320-01 VSA4320-02 VSA4320-03 VSA4420-01 VSA4420-02 VSA4420-03 2 position single VA 1 4 1 8 Rc 0.60 1 8 Rc 1 8 Rc SA 2 position double

ZSE40/ISE40

For compound pressure None Bracket A (ZS-24-A) 10.0 to 101.3 kPa 100.0 to 100.0 kPa Z I SE1 2 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com ZSP A ISA2 Piping specifications IS Bracket B (ZS-24-B) W1: Rc 1/8 01: R 1/8 (With M5 female threads) T1: NPT 1/8 (With M5

Series 10-SV1000/2000/3000/4000 5 Port Solenoid Valve

With external pilot specifications (Pitch) 20.5 15.8 9.5 17.5 P = 16 11.9 9.2 25.2 11.8 5.4 30.6 4 A 4 A 4 A 4 A 4 A 4 A 4 A 4 A 4 A 4 A 49.9 E 3/5 E 3/5 E 3/5 E 3/5 63.5 2 B 2 B 2 B 2 B 2 B 2 B 2 B 2 B 2 B 2 B P 1 1 P P 1 1 P PE One-touch fitting [1(P), 3/5(E) port] Applicable tubing O.D.: 10 3/8" PE X X One-touch fitting [4(A), 2(B) port] Applicable tubing O.D.: 4, 5/32" 6, 1/4" 8, 5/16

Fieldbus System

A B A B A B A A A B For the I/O Unit part number mounted, refer to the following pages.

Table of Contents

Slide Bearing Felt Holder Ball bushing Spacer Aluminum alloy Replacement Parts: Seal Kit Bore size (mm) Contents Kit no. 20 25 32 40 50 MGP20-B-PS MGP25-B-PS MGP32-B-PS MGP40-B-PS MGP50-B-PS Set of nos. above @1, @2, @3, @4, #2, #3, $1, $2 Seal kit includes @1 to @4, #2, #3, $1, $2.

VQC

SUP block plate VVQ2000-16A EXH block plate VVQ2000-19A Port plug Note 1) A B A B A B A B A B A B A B A B A B A B A B A B A B A B A B A B A B A B A B A B A B A B A B A B C4 (N3) With 4 (5/32") One-touch fitting Side port Cylinder port sizes Fill out in case of mixed sizes (CM/LM/NM).

5 Port Solenoid Valve, Series VQC

B SOL. B (+) () () (+) 2 2 SOL. A SOL. A (+) () () (+) 3 3 Flat ribbon cable connector assemblies (optional) Station 2 Station 2 SOL. B SOL. B (+) () () (+) 4 4 SOL. A SOL. A Cable length (L) Part no. (+) () () (+) 5 5 Station 3 Station 3 SOL. B SOL. B 20P AXT100-FC20-1 AXT100-FC20-2 AXT100-FC20-3 26P AXT100-FC26-1 AXT100-FC26-2 AXT100-FC26-3 (+) () () (+) 6 6 SOL. A SOL.

Series 10-, 21- AW-B Filter Regulator

Model Option 10-/21-AW20(K)-B 10-/21-AW30(K)-B 10-/21-AW40(K)-B 10-/21-AW40(K)-06-B 10-/21-AW60(K)-B Bracket assembly Note 1) AW23P-270AS AR33P-270AS AR43P-270AS AW62P-270AS Set nut Note 2) AR23P-260S AR33P-260S AR43P-260S 10: G49-10-01, 21: G49-10-01-MS-X3 Round type Note 3) Pressure gauge Note 4) Standard 10: G49-4-01, 21: G49-4-01-MS-X3 0.02 to 0.2 MPa setting Note 1) Assembly of a bracket

Vacuum Unit

C A B C A B C A B C A Black For supply valve (,+) + + + ZK2-ZSmBmm-A (PNP 2 outputs) + Pilot valve for supply + B C A LED (Red) White White White White Pilot valve for supply + Pilot valve for release Pilot valve for release + Pilot valve for release Pilot valve for release + B C A + + White White Connector cord assembly (ZK2-LWA20-A) Connector cord assembly (ZK2-LWB20-A) Brown

VFA3000

1 8 1 4 1 8 1 4 1 8 1 4 VFA32302 position double 0.17 1 8 14.4 (0.8) 18 (1) 01 02 (EXH: ) 1 8 VFA3330-X1 3 position closed center 0.32 1 8 11.7 (0.65) 14.4 (0.8) 01 02 Base mounted (EXH: ) 1 8 VFA3430-X1 3 position exhaust center 0.32 1 8 14.4 (0.8) 18 (1) 01 02 (EXH: ) 1 8 VFA3530-X1 3 position pressure center 0.32 1 8 14.4 (0.8) 9.9 (0.55) 16.2 (0.9) 10.8 (0.6) 01 02 (EXH: ) 1 8 1 4 3

Series 10-, 21- AR-B Regulator, Series 10-, 21- ARK-B Regulator with Backflow Function

Model Option 10-/21-AR20(K)-B 10-/21-AR25(K)-B 10-/21-AR30(K)-B 10-/21-AR40(K)-B 10-/21-AR40(K)-06-B 10-/21-AR50(K)-B 10-/21-AR60(K)-B Bracket assembly Note 1) AR50P-270AS Note 2) AR20P-270AS Note 3) Note 3) AR25P-270AS AR30P-270AS AR40P-270AS Set nut AR20P-260S AR25P-260S AR30P-260S AR40P-260S 10: G49-10-01, 21: G49-10-01-MS-X3 Standard Pressure gauge Note 4) 10: G49-4-01, 21: G49-4-01

With Factory Installed

B B B p AW3001 220.5 213.5 219.5 240.5 AW4001 272 265 271 292 IN-OUT reversal mounting "'" DimenSions except B are same as the standard type.

Speed Controller with One-touch Fitting Elbow Type/Universal Type Series AS

-23 AS221F-01-01 1/8" 20.4 3.2 9.3 20.4 16 27.5 27.5 16 9.3 12.7 12.7 AS221F-01-04 AS221F-01-03 5/32" 4 20.4 27.5 27.5 20.4 17 9.3 9.3 14.2 13.4 13.4 17 12 12 AS221F-01-06 AS221F-01-05 35.2 30.2 32.1 13.5 27.1 3/16" 6 23.1 16.5 30.2 35.2 30.2 32.1 27.1 27.5 20.4 14.2 1/8 17 11.6 1/8 11.4 (12.7) (12.7) AS221F-01-08 AS221F-01-07 1/4" 8 23.9 18.5 32.4 25.3 15.2 18.5 13.2 31 19 19 AS221F-01-

Stainless Steel One-touch Fittings Series KG

L B D MS-5H-4 MS-5H-6 15.5 16.5 6.5 8.5 2.1 4.0 2.5 3.7 7 8 7 8 1.8 2.5 Hose elbow: MS-5HLH-4, -6 B Effective orifice(mm 2) Weight (g) Part No.

Speed Controller with Indicator In-line Brass Stainless steel Electroless nickel plated In-line Type “Made to Order” “Made to Order” section has been added. Pages 3, 8 section has been added. ¡Lubricant: Vaseline -X12 The numerical indication of ¡Greas

0.2 0.1 0.2 C and b values are for controlled flow with the needle fully open and free flow with the needle fully closed.