SFOD-OMT0005CN

(P.52) 8.3 / 8.4 () JXC91 ( 12) (ON )No 13.3 (P.57) -31- 9 9.1 (1) Offset (Word) 0 1 2 () 3 () 4 5 6 () 7 () 8 12 9 34 10 11 12 13 14 15 16 17 -32- (2) Word0 Word Bit 0 OUT0 DRIVE OFF No. Bit No.

AS-FG/ASD-FG

(ANR) Flow rate l/min (ANR) Effective area mm Effective area mm 12 10, 11 1000 10, 11, 12 08, 09 10 15 8 500 06, 07 10 6 500 4 5 2 0 0 5 10 0 5 10 0 Number of needle revolutions Number of needle revolutions 11 Series ASD-FG Construction ASD230FG ASD330FG/430FG ASD530FG/630FG ASD530FG-02 Parts list Material Note Description Note Description No. 12 Material No. 1 Body A Elbow body Knob Body

VQ5000

How to Calculate the Flow Rate SOL.A VQZ100-47-A For obtaining the flow rate, refer to pages 2-1-8 to 2-1-11.

High Purity Fluoropolymer Fittings HYPER FITTING ® Series LQ1 1

Description Body class Type LQ-GP J Type 3 03 03 10 10 10 12 12 12 19 19 19 25 25 1/8" 03 03 03 03 3/16" 05 05 1/4" 07 07 07 3/8" 11 11 1/2" 13 13 3/4" 19 19 1" 25 6 06 06 06 8 08 4 04 04 04 04 Insert pin holder assembly (with the parts case) Insert pin/ Holder type 1 2 1 2 3 4 5 6 J Insert pin material (J/K type only) Nil N Metric sizes Inch sizes Nil S Resin Stainless steel

Speed Controller with One-touch Fitting Stainless Steel Series Elbow Type/Universal Type AS-FG Series

18.5 27.2 36.4 8 15.2 3/16" 11.4 16.5 NPT 1/4 AS221FG-02-10 AS221FG-N02-07 25.2 17.5 34.5 36 21 39.9 35.3 18.3 34.4 34.9 44.5 10 18.5 1/4" 13.2 29.4 17 34 18.5 AS321FG-02-06 AS221FG-N02-09 18.2 27.2 36.4 60 17 27.8 39.3 6 12.8 5/16" 15.2 18.5 36 AS321FG-02-08 AS221FG-N02-11 18.8 35.3 44.5 63 18.5 29.5 41 8 15.2 3/8" 17.9 21 23 37.8 43.3 48.3 19 42.8 21.3 R 1/4 AS321FG-02-10 AS321FG-N02-07

Precision Air Slide Table Series MXP ø6, ø10, ø12, ø16

M Stroke: S MXP16-20B Width across flats 12 A M8 x 1 H 24.3 17.1 14.4 40.8 MA 10.5 11 11 8.5 27.3 34 Operating port 2-M5 x 0.8 (Plug: M-5P) A 19 6.5 30 4-M6 x 1 Prepared hole dia. 5.1 4-M5 x 0.8 depth 7 32 0.05 W D B 80.05 47 13 Operating port 2-M5 x 0.8 J 8 Mounting reference planes B D 16.5 14.5 Section AA MXP16-30B Without magnet and switch rail 2-M3 x 0.5 depth 3.5 For rail mounting

Speed Controller with One-touch Fitting Stainless Series Series AS-FG Elbow Type/Universal Type 1

18.5 27.2 36.4 15.2 11.4 8 3/16" 17 NPT 1/4 AS221FG-02-10 AS221FG-N02-07 17.5 25.2 34.5 20 36 21 33.9 43.2 18.5 13.2 10 1/4" 40.4 35.4 34.4 29.4 18.5 34 18.5 AS321FG-02-06 AS221FG-N02-09 27.2 36.4 60 17 27.8 39.3 12.8 15.2 6 5/16" 20 21 36 AS321FG-02-08 AS221FG-N02-11 33.9 43.2 63 18.5 29.5 41 15.2 17.9 8 3/8" 23 43.8 48.8 21.8 19 42.8 37.8 R 1/4 AS321FG-02-10 AS321FG-N02-07 27.8 39.3 67

Air cylinder (Series compatible with secondary batteries)

Table 7 Auto Switch Mounting Height Auto switch model D-A9-900 D-M9V-900 D-M9-900 D-M9WV-900 D-M9W-900 Bore size(mm) Hs Ht Hs Ht 40 30 30 34 30 50 34 34 38 34 63 41 41 44 41 80 49.5 49 52.5 49 100 56.5 56 61 56 14 Table 8 Minimum Stroke for Auto Switch Mounting n:Number of auto switches(mm) brackets other Center trunnion Number of Auto switch model than autoswitches 40 50 63 80 100 center

Sine Rodless Cylinder Series REBR Direct Mount Type

Contents Replacement parts: Seal kits 10 REBH15-PS Above numbers 29, 30, 31, 32, 33, 34, 35 15 REBH25-PS 77 Series REBH Construction/25, 32 Dual axis type/REBHT @0 !9 q !4 !3 !8 !7 @7 #1 @9 !0 t y e i u !2 !1 w #3 !6 @4 @5 @2 @1 r #0 #4 #2 o !5 @8 @3 REBHT32 @6 Parts list Parts list No. Description Material Note No.

Speed Controller with One-touch Fitting Stainless Steel Series Elbow Type/Universal Type Series AS-FG

18.5 27.2 36.4 8 15.2 3/16" 11.4 16.5 NPT 1/4 AS221FG-02-10 AS221FG-N02-07 25.2 17.5 34.5 36 21 39.9 35.3 18.3 34.4 34.9 44.5 10 18.5 1/4" 13.2 29.4 17 34 18.5 AS321FG-02-06 AS221FG-N02-09 18.2 27.2 36.4 60 17 27.8 39.3 6 12.8 5/16" 15.2 18.5 36 AS321FG-02-08 AS221FG-N02-11 18.8 35.3 44.5 63 18.5 29.5 41 8 15.2 3/8" 17.9 21 23 37.8 43.3 48.3 19 42.8 21.3 R 1/4 AS321FG-02-10 AS321FG-N02-07

ZPT/ZPX

H A 30 ZPNA-M22 34.6 Bolts Dimensions (mm) A 11 d M3 x 0.5 12 7 M4 x 0.7 B 5.5 L 8 8 10 15 8.5 M5 x 0.8 13-11-82

CXS

A C MTS D-F9W, D-M9 D-A93 D-A90, D-A96 D-M9V, D-F9WV Bore size (mm) CXSJ15 to 32 B D A 15.5 25.5 31.5 39 40 49 D 9.5 7 0 3 5 5.5 C 9.5 19.5 25.5 33 34 43 B 6 9 11 11.5 B 0.5 3 10 13 15 15.5 A 15.5 25.5 31.5 39 40 49 A 19.5 29.5 35.5 43 44 53 C 11.5 21.5 27.5 35 36 45 D 5.5 3 4 7 9 9.5 D 8 5.5 1.5 4.5 6.5 7 B 6 9 11 11.5 B 0.5 3 10 13 15 15.5 C 13.5 23.5 29.5 37 38 47 C 11 21 27 34.5 35.5

IDG

(Refer to page 14-19-11.)

CXS

A C MTS D-F9W, D-M9 D-A93 D-A90, D-A96 D-M9V, D-F9WV Bore size (mm) CXSJ15 to 32 B D A 15.5 25.5 31.5 39 40 49 D 9.5 7 0 3 5 5.5 C 9.5 19.5 25.5 33 34 43 B 6 9 11 11.5 B 0.5 3 10 13 15 15.5 A 15.5 25.5 31.5 39 40 49 A 19.5 29.5 35.5 43 44 53 C 11.5 21.5 27.5 35 36 45 D 5.5 3 4 7 9 9.5 D 8 5.5 1.5 4.5 6.5 7 B 6 9 11 11.5 B 0.5 3 10 13 15 15.5 C 13.5 23.5 29.5 37 38 47 C 11 21 27 34.5 35.5

Speed Controller with One-touch Fitting Stainless Steel Series Elbow Type/Universal Type Series AS-FG

18.5 27.2 36.4 8 15.2 3/16" 11.4 16.5 NPT 1/4 AS221FG-02-10 AS221FG-N02-07 25.2 17.5 34.5 36 21 39.9 35.3 18.3 34.4 34.9 44.5 10 18.5 1/4" 13.2 29.4 17 34 18.5 AS321FG-02-06 AS221FG-N02-09 18.2 27.2 36.4 60 17 27.8 39.3 6 12.8 5/16" 15.2 18.5 36 AS321FG-02-08 AS221FG-N02-11 18.8 35.3 44.5 63 18.5 29.5 41 8 15.2 3/8" 17.9 21 23 37.8 43.3 48.3 19 42.8 21.3 R 1/4 AS321FG-02-10 AS321FG-N02-07

CL

Bore size (mm) H1 NA P PG PH PL PW S TA TB TC l H ZZ e f h ZZ Stroke range Rc 1/8 Rc 1/8 Rc 1/8 Rc 1/8 33 38 39 44 55 62 62 70 19.5 24 24 24 16 17 17 17 20 24 24 24 30 30 35 35 38 41 41 41 178 193 196 221 141 151 154 169 35 40 40 50 Up to 200 Up to 300 Up to 300 Up to 300 11 11 11 12 5 6 6 8 11 11 10 10 24 29 36 44 M5 x 0.8 M6 x 0.75 M8 x 1 M10 x 1.25 198 215 218 241 20 25 32 40 0.25 stroke

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

-10} at ambient temperature, excluding gas permeation Internal Leakage Pam3/s 1.3 x 10-11{1 x 10-11} at ambient temperature, excluding gas permeation External Flange type KF (NW), CF KF (NW) KF (NW), CF KF (NW) Principle materials Body: SCS13 (Conforms to Stainless steel SUS304) Bellows: Stainless steel SUS316L Bellows holder: Stainless steel SUS304.

F

35.3 13.2 27.8 17 1/4 19.4 39.3 NAS321F-U03-07 53.9 37.6 32.6 45 40 15.2 29.5 18.5 5/16 41 NAS321F-U03-09 54.9 21 17.9 31.8 3/8 43.3 NAS321F-U03-11 56.6 24 17.9 33.6 21 1/2 3/8 28.6 22.4 47.9 NAS421F-U04-11 93.6 44.5 37 54.6 47.1 21.7 35.2 22 1/2 49.5 NAS421F-U04-13 95.4 Courtesy of Steven Engineering, Inc. !

XM, XY

x 10-11 (FKM) 1.3 x 10-9 CYV Q1 R1 R2 R3 S1 T1 U1 Kalrez 4079 SS592 SS630 SSE38 1232-70 3310-75 1.3 x 10-10 (FKM) Note 1) Values at ambient temperatures, excluding gas permeation.

PF-OMM0004_C

30 42 48 58 4.5 5 1.5 PF3W711 44 36 48 58 70 5.5 7 2 -81No.PF-OMM0004-D PF3W721 A AA B D E F G H J K L N P 11/4,11/2 104 74 31 52 39.5 G 11/4 108 76 33 54 41.5 PF3W721 56 91 71.6 28.5 54 25 27.5 3.5 14 G 11/2 112 78 35 56 43.5 -82No.PF-OMM0004-D PF3W704/720/740/711/721() A AA PF3W704--T 81 50 PF3W720--T 89 54 PF3W740--T 109 71 PF3W711--T 135 92 PF3W721--T 115 74 PF3W721-F12-T 119 76