MLGP

Features 1 position within the entire stroke Low profile with compact lock unit Easy manual unlocking Locked Lock unit length: A/26.5mm to 51.5mm Unlocked A (mm) 40 to 100 Bore size (mm) A Flat head screw driver 20 25 32 40 50 63 80 100 26.5 30.5 31.5 34 35 38 43 51.5 20 to 32 Body length Manual unlocking bolt Body length is the same as the standard MGP Locking direction is selectable Extension

MQQ

6.6 8 39 48 16 FZ L B + Stroke 10 to 60 57.5 37.5 6.6 8 42 52 20 A + Stroke 2-FD 10 to 50,75,100 64 42 5.5 8 48 56 25 10 to 50,75,100 70.5 48.5 5.5 8 54 62 28 25, 28 Bore size (mm) FZ L M FV 55 18 10 60 20 16 FT FX 64 20 20 FZ 65 22 34 25 L B + Stroke 72 22 40 28 4-FD A + Stroke Rear flange type/MQQTG 10, 16, 20 25, 28 2-FD 4-FD (mm) Bore size (mm) Stroke range (mm) A L FV FV M 10 to

MXU

24 25 18 67.5 68 56.5 24 30 24 75.5 76 64.5 34 40 32 79.5 80 68.5 34 45 35 8-3-7 8 Series MXU Dimensions: MXU16 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com (mm) Stroke (mm) 5 10 15 20 25 30 TS Z S NS LS BS 65.5 66 52 24 24 20 65.5 66 52 24 24 20 75.5 76 62 34

MXW

Refer to pages 8-34-3 to 8-34-6 for Safety Instructions and Actuator Precautions. 2. If intermediate stops by external stopper are done, avoid ejection. If ejection occurs, it may cause damage.

5 Port Air Operated Valve Series SYA3000/5000/7000 1

27 M5 x 0.8 17 B 2-3.2 A (Pilot port) 35 2-4.5 (For mounting) (For manifold mounting) R1 P R2 63.3 34 8.5 2-3.2 (For mounting) (6.8) 18 35 (Bracket) 68.8 Manual override 1/8,1/4 15 (P, A, B port) (44) 29 (36) 21 14 65.6 (69.2) 54 55 (31.9) (34) (26) 1.8 (Bleed port) With fiflter (80 mesh) 40 25.5 1/8 20 11.5 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080

SYJ3000/5000/7000

60.9 53.4 12.7 42.1 M8 x 1 32.6 15.1 39.2 [46.2] Approx. 300 (Lead wire length) Pg7 54.1 [56.3] 44.3 [46.5] 64.1 63.2 53.2 45.8 20 20 20 54.1 39.3 20 3 38.1 23.3 3 3 3 103.4 [107.8] 123 [127.4] 11 11 11 141.2 121.2 143 11 2-2.6 (For mounting) 23 2-2.6 (For mounting) 23 23 23 2-2.6 2-2.6 (For mounting) 60.6 (For mounting) 27 Refer to page 1-5-79 for dimentions with connector cable. 1-5-33 34

VQ7-6/7-8

Dimensions inside are for sub-plate aperture Rc 3/4. 3-10-34 35 ISO Standard Solenoid Valve: Size 2 Metal Seal/Rubber Seal Series VQ7-8 Manifold Option Parts/Mounting Bolt Part No. VQ7-6 Mounting Bolt Part No. Number of options Single stack Double stack 0 No.

Clamp Cylinder with Lock Series CLK1

dislocation of home position due to weight of clamp arm Holding a clamped state Prevents work piece slippage and dropping due to work piece weight LOCK LOCK B A B A LOCK LOCK Clamped locking Unclamped locking Compact lock mechanism minimizes extension of length dimension Series CLK1 clamp cylinder with lock Extended dimension mm E CLK1 Bore size (mm) Series CK1 clamp cylinder (without lock) 40 34

5 Port Solenoid Valve, Series VQC

or less 44 or less (A) 4 (B) 2 2.0 Metal seal VQC2400 2.6 0.15 0.46 0.15 0.60 29 or less 38 or less 110 (0.24) Exhaust center 2.0 Rubber seal VQC2401 3.2 0.28 0.49 0.30 0.80 34 or less 44 or less 1 (P) 5 (R1) 3 (R2) 2.4 Metal seal VQC2500 2.0 0.17 0.57 0.18 0.46 29 or less 38 or less Pressure center 3-position closed center 3.2 Rubber seal VQC2501 2.2 0.28 0.80 0.31 0.60 34 or less 44 or

MXU

40 30 70.5 71 62.5 34 40 35 8-3-6 7 Compact Slide Series MXU Dimensions: MXU10 MX MTS MY CY MG CX D-X 20Data (mm) Stroke (mm) 5 10 15 20 25 30 TS Z S NS LS BS 52.5 53 41.5 14 14 10 57.5 58 46.5 14 19 14 62.5 63 51.5 24 25 18 67.5 68 56.5 24 30 24 75.5 76 64.5 34 40 32 79.5 80 68.5 34 45 35 8-3-7 8 Series MXU Dimensions: MXU16 (mm) Stroke (mm) 5 10 15 20 25 30 TS Z S NS LS BS 65.5 66 52 24

4/5 Port Air Operated Valve SYJA3000 Series

8.5 M5 x 0.8 (Pilot port) 2 x 4.3 (For mounting) M5 x 0.8 (Pilot port) B A 13 1 3 B A 34 27 SYA B A 1 1/8 (A, B port) 2 x 3.2 (For manifold mounting) 35 17 R1 R2 P Manual override SYJA SYJA 3.2 60.1 2 x 4.5 (For mounting) 35 (Bracket) 2 x 3.2 (For mounting) 10.8 68.8 VZA 1/8,1/4 (P , A, B port) Manual override (44) (36) VFA 21 28 25 14 VFRA 54 (3.6) 65.6 (26) (34) 40 1/8 (P , R1, R2 port

SY

SS5Y51, #2 + #4 L type plug connector .SS5Y51, #2 + #4 + #12 M type plug connector .SS5Y51, #2 + #4 + #15 28 Base Mounted Type Note) [ ]: Values for AC < >: Values with surge voltage suppressor Series SY5000 Dimensions 3 position closed center/exhaust center/pressure center Grommet (G), (H): SY5 40(R)-02 3 4 5 Scale: 35% G H With interface regulator 157 75.4 [81.9] 72.5 15 34 22 (59) With

Series VQ Metal Seal/Rubber Seal Body Ported

L 31 32 33 34 35 36 37 38 39 40 398 410.5 423 435.5 448 460.5 473 485.5 498 510.5 No.

Series MXQ 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

34 36 36 N 4 4 4 6 6 8 10 G 18 18 20 9 23 12 H 32 32 40 39 36 36 NN 2 2 2 3 3 4 5 GA 18 18 20 38 48 59 84 HA 32 32 40 39 39 72 72 I 12 12 14 15 13 17 17 J 34 34 42 58 70 110 135 K 26.5 36.5 46.5 56.5 66.5 91.5 116.5 KA 117.5 142.5 NA 4 4 4 4 4 8 8 M 67 67 77 94 104 148 173 Z 66 66 76 93 103 147 172 ZZ 95 95 105 122 132 176 201 13-/22-MXQ1210 13-/22-MXQ1220 13-/22-MXQ1230 13-/22-MXQ1240

42

Valve + SUP stop valve spacer (VVQ5000-37A1 5) q AXT632-25-5 (M4 x 82) 4 w AXT632-25-10 (M4 x 34) 2 Not necessary when mounting the sub-plate.

Vacuum Pad: Large/Heavy Duty Type Series ZPT/ZPX

34 Model A 63 ZPT63H-B8 B 65 C 14.5 D 26 E M8 x 1.25 Y 3.5 63 ZPT63H-B10 65 14.5 26 M10 x 1.5 3.5 63 ZPT63H-B12 65 14.5 26 M12 x 1.75 3.5 63 ZPT63H-B16 65 14.5 26 M16 x 1.5 3.5 80 ZPT80H-B8 82 16.5 28 M8 x 1.25 4.5 80 ZPT80H-B10 82 16.5 28 M10 x 1.5 4.5 Y 3.5 80 ZPT80H-A16 82 16.5 28 4.5 Model A 63 ZPT63H-A16 B 65 C 14.5 D 26 E 56 58 80 ZPT80H-B12 82 16.5 28 M12 x 1.75 4.5 80 ZPT80H-B16

Compact Cylinder with Air Cushion

A A1 E1 L1 MM U1 NZ L 0.2 0.4 +0.058 0 +0.058 0 +0.4 +0.2 +0.058 0 8 IY-G02 8 20 I-G02 34 8.5 16 25 M8 x 1.25 10.3 11.5 8.5 16 25 M8 x 1.25 10.3 11.5 16 21 Y-G02 8 8 20 34 0.2 0.4 +0.058 0 +0.4 +0.2 10 IY-G03 10 25 I-G03 20 M10 x 1.25 20 M10 x 1.25 41 10.5 30 12.8 14 10.5 30 12.8 14 20 25.6 Y-G03 10 10 25 41 +0.5 +0.3 0.3 0.5 +0.058 0 +0.070 0 +0.070 0 +0.058 0 10 IY-G04 18 32, 40 I-G04 M14

RQ

A A1 E1 L1 MM U1 NZ L 0.2 0.4 +0.058 0 +0.058 0 +0.4 +0.2 +0.058 0 20 I-G02 Y-G02 20 8 IY-G02 8 34 8.5 16 25 M8 x 1.25 10.3 11.5 8.5 16 25 M8 x 1.25 10.3 11.5 16 21 8 8 34 0.2 0.4 +0.058 0 +0.4 +0.2 25 I-G03 Y-G03 25 10 IY-G03 10 20 M10 x 1.25 20 M10 x 1.25 41 10.5 30 12.8 14 10.5 30 12.8 14 20 25.6 10 10 41 +0.5 +0.3 0.3 0.5 +0.058 0 +0.070 0 +0.070 0 +0.058 0 32, 40 I-G04 Y-G04 32, 40 10

MXF

For Safety Instructions and Actuator Precautions, refer to pages 8-34-3 to 8-34-6. 1. Body Tapped 2. Body Through-hole Mounting Caution L L 1. Do not scratch or dent the mounting side of the body, table or end plate. It causes play in the guide section and increases sliding resistance. the mounting side of the body, table or end plate. 2.

Refrigerated Air Dryers

IDF190D, 240D IDF370D IDF4E to 15E1 IDU3E to 15E1 (A) (A) No-fuse breaker D 40 Earth leakage breaker 60 A C Power connection B E Power cable outlet (17) 35 Grommet with membrane [mm] Dimensions Model A B C D E IDF4E, 6E, 8E, 11E 32 230 97 34 15 IDF15E1 43 258 102 82 IDU3E, 4E, 6E 32 97 34 15 IDU8E 42 100 37 Earth leakage breaker with cover 230 IDU11E 75 IDU15E1 43 258 102 82 Model A IDF190D