Model: 5 (VP500), Pilot: R (External Pilot), Pressure Specifications: Nil (Standard (0.7MPa)), Rated Voltage: 5 (24 VDC), Electrical Entry: DZ (DIN terminal with connector, with light/surge voltage suppressor), Safety limit switch/Wiring: S1 (M12 connector, made by Rockwell Automation), Flow Direction: Nil (left to right), No. of Residual Pressure Exhaust Valves: D (Dual), Soft Start-up:

Model: 7 (VP700), Pilot: Internal Pilot, Pressure Specifications: K (High Pressure (1.0MPa)), Rated Voltage: 5 (24 VDC), Electrical Entry: DZ (DIN terminal with connector, with light/surge voltage suppressor), Safety limit switch/Wiring: S1 (M12 connector, made by Rockwell Automation), Flow Direction: Nil (left to right), No. of Residual Pressure Exhaust Valves: D (Dual), Soft Start-up: S

SMC's VP300/500/700 series solenoid valve, offers high flow capacity and reduced power consumption (1.55W standard, 0.55W with power saving circuit).  The series may be used as either a selector valve, or a divider valve.  It is vacuum applicable up to –101.2kPa.  Series VP3145/3165/3185 is a large size, 3 port solenoid valve with a rubber seal.  It is possible to use the series in vacuum

Controller/Driver LEC/JXC Series <Single Axis Controllers> Step Data Input Type Page 560 Gateway Unit Page 572 Programless Type Page 576 Step Motor LEC-G Series Step Motor Servo Motor (Servo/24 VDC)/ (Servo/24 VDC)/ (24 VDC)/ LECP6 Series LE

(Example: LEFS16B-100B-S1) * For the SpeedWork Load graph of the actuator, refer to the LECPA section on the model selection page of the electric actuators Web Catalog. Specifications For the setting of functions and operation methods, refer to the operation manual on the SMC website.

CEx-OMG0106

Program P1 P2 P3 P16 S1 S1 S1 S1 S2 S2 S2 S2 Step S32 S32 S32 S32 Following are CEU2s special feature: 1. Predictive Control & Learning Function (Allow High Repeatability and Precision. 0.5mm) With learning function, after every execution, brake point will be amended, according to the deviation of stopping position from setting position.

CEx-OMQ0011

P16 S1 S1 S1 S1 S2 S2 S2 S2 ... ... ... ... S32 S32 S32 S32 0.5mm) 1 2 2. 3.

AC Servo Motor Driver (MECHATROLINK-III type)

The station address is set using the rotary switches S1 and S2. (1) Settings of the Rotary Switches S1 and S2 Set the station address using the rotary switches S1 and S2.

SMCs?VP300/500/700 series solenoid valve, offers high flow capacity and?reduced power consumption (1.55W standard, 0.55W with power saving circuit).? The?series may be?used as either a?selector valve, or a divider valve.? It is vacuum applicable up to ?101.2kPa.? Series VP3145/3165/3185 is a large size, 3 port solenoid valve with a rubber seal.? It is possible to use the series in vacuum

XM, XY

XSA Seal material Part numbers indicating changed seal material and leakage XVD Compound No. 1349-80 2101-80 Symbol Changed part Note 2) Leakage (Pam3/s or less) Note 1) Internal 1.3 x 10-10 (FKM) 1.3 x 10-8 Seal material FKM EPDM Barrel Perfluoro Symbol External 1.3 x 10-11 (FKM) 1.3 x 10-9 Nil N1 XGT w, e w e Nil A B C P1 70W 1.3 x 10-8 1.3 x 10-11 (FKM) 1.3 x 10-9 CYV Q1 R1 R2 R3 S1

Digital Gap Checker

This reduces noise considerably compared with A much lower air consumption is required than the current model. the current model. 1: Conditions: Unseated for 5 seconds and seated for 20 seconds (For G type) Comparison of detection circuit ISA3 New New Current model (ISA2) A B EXH port EXH port P1 Sensor Sensor SUP port S1 S3 SUP port S2 Sensor S1 S4 S2 Detection port P2 Detection port C D

Dedicated Controller

LC1-1-S1 PC-98 (MS-DOS) LC1-1-W1 (Windows 95 Japanese) LC1-1-W2 (Windows 95 English) and LC1-1-R (dedicated communication cable) (Refer to pages 80, 81, and 85.)

Electric Actuator with Integrated Guide

LC1-1-S1 PC-98 (MS-DOS) LC1-1-W1 (Windows 95 Japanese) LC1-1-W2 (Windows 95 English) and LC1-1-R (dedicated communication cable) (Refer to pages 80, 81, and 85.)

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

material Part numbers indicating changed seal material and leakage Leakage Pa m3/s or less Note 1) Compound No. 1349-80 Symbol Nil N1 Seal material FKM EPDM BARREL PERFLUORO Changed part Note 2) Symbol External 1.3 x 10-11 (FKM) 1.3 x 10-9 Internal 1.3 x 10-10 (FKM) 1.3 x 10-8 2101-80 2, 3 2 3 Nil A B C P1 70W 1.3 x 10-11 (FKM) 1.3 x 10-9 1.3 x 10-8 Kalrez 1.3 x 10-10 (FKM) Q1 R1 R2 R3 S1

SMC's VP300/500/700 series solenoid valve, offers high flow capacity and reduced power consumption (1.55W standard, 0.55W with power saving circuit).  The series may be used as either a selector valve, or a divider valve.  It is vacuum applicable up to –101.2kPa.  Series VP3145/3165/3185 is a large size, 3 port solenoid valve with a rubber seal.  It is possible to use the series in vacuum

SMC's VP300/500/700 series solenoid valve, offers high flow capacity and reduced power consumption (1.55W standard, 0.55W with power saving circuit).  The series may be used as either a selector valve, or a divider valve.  It is vacuum applicable up to –101.2kPa.  Series VP3145/3165/3185 is a large size, 3 port solenoid valve with a rubber seal.  It is possible to use the series in vacuum

Model: VP700, Body: Base Mounted, Pilot: External Pilot, Valve Electrical Entry: DIN Terminal w/Connector, w/Pitch 8mm Standard, Port: 1/2, VP700, Thread: Rc, Bracket: None, Switch Electrical Entry: M12 Connector, OMRON, Check Valve, External Pilot Only: None

Model: 7 (VP700), Body: 44 (Base Mounted), Pilot: R (External Pilot), Valve Electrical Entry: Y (DIN Terminal w/Connector, w/Pitch 8mm Standard), Port: 04 (1/2, VP700), Thread: Rc, Bracket: None, Switch Electrical Entry: M (M12 Connector, OMRON), Check Valve, External Pilot Only: None

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

U S1 [mm] Size S1 T2 U 25 47 91 1 32 61 117 1 63 84 142 4 T2 T2 Note) When the motor is mounted on the left or right side in parallel, the groove for auto switch on the side to which the motor is mounted is hidden. 742 Electric Actuator/Rod Type LEY Series AC Servo Motor 25, 32, 63 Size Dimensions: In-line Motor Encoder Z-phase detecting position F1 LEF Rod operating range Note 1) (Stroke

ITVH

(Error number 5) Vs : Power supply 24 VDC A : Input signal 4 to 20 mA DC 0 to 20 mA DC Vs : Power supply 24 VDC Vin : Input signal 0 to 5 VDC 0 to 10 VDC 4 points preset input type Brown Blue S1 White Vs Black S2 Vs: Power supply 24 VDC (Negative common) One of the preset pressures P1 through P4 is selected by the ON/OFF combination of S1 and S2.

15

U S1 [mm] Size S1 T2 U 25 47 91 1 32 61 117 1 63 84 142 4 U T2 T2 Note) When the motor is mounted on the left or right side in parallel, the groove for auto switch on the side to which the motor is mounted is hidden. 858 Electric Actuator/Rod Type LEY Series Motorless Type 25, 32 Size Refer to the Motor Mounting on page 873 for details about motor mounting and included parts.