HRX-OM-M090

5.17.1 Data reset function . 5-51 5.17.2 Method of resetting data reset function . 5-51 5.18 Accumulated time reset function . 5-52 5.18.1 Accumulated time reset function . 5-52 5.18.2 Method of resetting accumulated time reset function . 5-52 5.19 Communication function . 5-54 5.19.1 Communication function . 5-54 5.19.2 Communication function setting and checking . 5-54 Chapter 6 OptionOptional

HRX-OM-R016

5.18.1 Accumulated time reset function . 5-51 5.18.2 Method of resetting accumulated time reset function . 5-51 5.19 Communication function . 5-53 5.19.1 Communication function . 5-53 5.19.2 Communication function setting and checking . 5-53 Chapter 6 OptionOptional Accessories . 6-1 6.1 Option J [Automatic fluid filling] . 6-1 6.1.1 Option J [Automatic fluid filling] . 6-1 6.2 Option M

HRX-OM-W038

5.18.1 Accumulated time reset function . 5-51 5.18.2 Method of resetting accumulated time reset function . 5-51 5.19 Communication function . 5-53 5.19.1 Communication function . 5-53 5.19.2 Communication function setting and checking . 5-53 Chapter 6 OptionOptional Accessories . 6-1 6.1 Option J [Automatic fluid filling] . 6-1 6.1.1 Option J [Automatic fluid filling] . 6-1 6.2 Option M

HRX-OM-O021

5.18.1 Accumulated time reset function . 5-51 5.18.2 Method of resetting accumulated time reset function . 5-51 5.19 Communication function . 5-53 5.19.1 Communication function . 5-53 5.19.2 Communication function setting and checking . 5-53 Chapter 6 OptionOptional Accessories . 6-1 6.1 Option J [Automatic fluid filling] . 6-1 6.1.1 Option J [Automatic fluid filling] . 6-1 6.2 Option M

HRX-OM-R005

5.18.1 Accumulated time reset function . 5-51 5.18.2 Method of resetting accumulated time reset function . 5-51 5.19 Communication function . 5-53 5.19.1 Communication function . 5-53 5.19.2 Communication function setting and checking . 5-53 Chapter 6 OptionOptional Accessories . 6-1 6.1 Option J [Automatic fluid filling] . 6-1 6.1.1 Option J [Automatic fluid filling] . 6-1 6.2 Option M

AC Servo Motor Driver (Pulse input type/Positioning type)

Overload alarm margin The margin until the load reaches the overload (AL.50, AL.51) alarm level is displayed in %. An overload alarm will occur when margin is 0%. 0.1% 19 Excessive error alarm margin The margin until the error reaches the excessive error (AL.52) alarm level is displayed in encoder pulses.

KA

51 22 1 4 3 8 KAU12-U02 KAU12-U03 53 52 61 55 20.9 12 20.9 22 22 45.4 45.4 1 2 KAU12-U04 62.5 54.5 52 Reference dimensions after Uni thread installation.

VHK

(mm) Model H 1(P) 2(A) L3 L4 L5 L6 Q L1 L2 M1 C D E F G J K 1(P) R 2(A) 2(A) R 3(R)* VHK-M5-04F VHK-M5-06F 2.0 1.2 19 49 11 21 50 13 M5 4 6 VHK-B1A 44.5 14.5 1 27 22 16.5 26 29.1 53.9 24.3 29.6 52.9 23.8 15.8 16.8 3.5 11 18 41 16.5 VHK-01S-04F VHK-01S-06F VHK-01S-08F 62.2 26.2 36 18.7 31 58 17 18 41 55.4 23.8 31.6 56.9 24.3 32.6 16.5 3.5 15.8 16.8 11 7.2 9.7 3.4 1.2 21 51 11 23 53 13 4 6

Antistatic One-touch Fittings Series KA

51 22 1 4 3 8 KAU12-U02 KAU12-U03 53 52 55 61 12 20.9 20.9 22 22 45.4 45.4 1 2 KAU12-U04 62.5 54.5 52 Reference dimensions after Uni thread installation.

AC Servo Motor Driver (Pulse input type)

(SeeLECSB Operation Manual (Simplified Edition), section 5.3.2 for uploading.) 51 - 5.8.2 To Load saved Parameters From the Project menu in the setup software, select Open. Please select the "drive path name project name" that you want to read parameters are stored. Click Open.

AC Servo Motor Driver (SSCNET /H Type)

(SW1) (SW1) (SW2-3, SW2-4) (SW2-3, SW2-4) 0 33 0 49 1 34 1 50 2 35 2 51 3 36 3 52 4 37 4 53 5 38 5 54 6 39 6 55 ON ON 7 40 7 56 8 41 8 57 1 2 3 4 1 2 3 4 9 42 9 58 A 43 A 59 B 44 B 60 C 45 C 61 D 46 D 62 E 47 E 63 F 48 F 64 -14- 5. Parameter list (Driver side) Please configure the appropriate parameters to enable correct driver operation. Refer to [5.

1

This means that the output can become energized anywhere between 49 to 51 [kPa]. (Refer to the chart below.) Note: If the pressure switch allows an error of 1 [% F.S.], the output turns ON at 51 [kPa]. Taking the repeatability into account, the output turns ON at 50 to 52 [kPa] and, in the same way, the pressure display turns 50 [kPa] at 49 to 51 [kPa]. (Refer to the chart below.)

VHK

18 41 6 60.4 62.4 36.1 38.1 31 54 56 17 14 41 1 8 1 4 3 8 8 18 41 62.2 26.2 36 16.5 3.5 18.7 11 9.7 1.2 31 58 17 VHK-B1A 44.5 14.5 1 27 22 16.5 26 VHKl-08F-01S VHKl-08F-02S VHKl-08F-03S 65.2 66.2 39 40 32 59 60 19 22 40 1 4 3 8 1 2 10 22 46 73.8 30.5 43.3 21.5 4 20.8 14 16.1 3.2 49 VHK-B2A 49 17 1 30 25 21.5 31 VHKl-10F-02S VHKl-10F-03S VHKl-10F-04S 74.8 78.2 44.3 47.7 51 68 17 19 72 70

XL

) 46.5(57) 46.5(57) 50(66) 8.5 11.5 11.5 11.5 22 25 25 25 20 23 25.5 25.5 56 61 61 65 64 75.5 82 82 30 35 40 40 XSA12S(V) XSA22S(V) XSA3-32S(V) XSA3-43S(V) P DIN terminal M L Model G 59 60 63 H 48 58.5 64 64 63 J 47 48 51 51 (Unit: inch) 1/4 1/4 1/4 3/8 8 10 10 10 3 5 5 5 XSA12S(V) XSA22S(V) XSA3-32S(V) XSA3-43S(V) 34 High Vacuum Angle Valve Series XL 1 With pilot pressure at 0.5MPa (72psi

7

45.5 D-P4DW 0.5 0.5 3 A 32 4 B D-P79WSE D-P74 23.5 23.5 18 Hs 57.5 51 47.5 D-M9 D-M9W D-M9A 10.5 10.5 13 33.5 33.5 28 51.5 44.5 39 6.5 6.5 9 D-A9 29.5 29.5 24 51.5 44.5 39 Note) The above drawing is the switch rod mounting example for the D-P4DWS.

Series MXQ 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

This could cause an auto switch malfunction. 14 30 14 Vacuum suction port Rc1/8 (NPT1/8, G1/8) Extension end adjuster 45.5 (Extension end adjuster) 15 6 N x M5 x 0.8 thread depth 8 Note 1) Note 2) Retraction end adjuster 6 14.5 (Extension end adjuster) 31 33 70 35 1.5 30 3 60 17.5 5H9 ( ) depth 5 +0.030 0 F 7 4 x M5 x 0.8 thread depth 8 18 2 N 1 x F 51 3 x M6 x 1 thread depth 13 5H9 ( )

Series REC 10- ø20, ø25, ø32, ø40 11- Sine Cylinder

NA N LX LD D C A B 16 13 13 13 8 F Bore size K H1 H 8 6 6 5 H2 I 41 32 32 26 B2 54 47 47 40 B1 Stroke range 50 45 45 41 M10 x 1.25 M8 x 1.25 30 40 32 25 20 5.5 5.5 5 200 to 1000 150 to 1000 150 to 700 150 to 700 10 8 8 8 26.5 22 20 20 12.5 11 10 10 24 22 22 18 46.5 37.5 33.5 22 17 17 13 21 19.5 19.5 15.5 55.5 49.5 45.5 40 7 6.8 6.8 6.8 30 28 28 25 227 199 186 186 55 40 40 40 75 55 55 55 51

15

51 67.5 76.5 Note 1) The values in the above list are used as a guide for the auto switch mounting position for end of stroke detection.

Escapements Series MIW/MIS ø8, ø12, ø20, ø25, ø32 1

650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com RHC Scraper Can be mounted on standard products MK(2) Theoretical Output RS Q G Unit: N Operating pressure MPa Rod size (mm) Bore size (mm) Operating direction Piston area (mm2) RS H A 0.3 0.2 0.4 0.5 0.6 0.7 15 10 OUT 36 31 26 20 50 8 4 RZQ 11 7 IN 26 23 19 15 38 34 23 OUT 79 68 57 45 113 12 6 MI W S 26 17 IN 60 51

Non-rotating Double Power Cylinder/ Double Power Cylinder (without non-rotating mechanism) Series MGZ/MGZR ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

(mm) Stroke range Bore size (mm) I J K M B D C E KA GA GB H 51 57 66 78 92 110 144 M5 x 0.8 M5 x 0.8 M6 x 1 M6 x 1 M8 x 1.25 M8 x 1.25 M12 x 1.75 8 8 10 10 14 14 20 11 12 22 25 25 25 25 25 30 36 45 55 68 87 11 12 16 21 26 32 36 21 24 30 36 46 53 65 16 26 28.5 34.5 40 46.5 54 20 21 35 40 45 50 50 29 33 38 46 55 66 86 39 43 49 59 71 82 106 20 25 32 40 50 63 80 12.5 18 19.5 23.5 28 34.5 36 Up