Series 10-SY3000/5000/7000/9000 5 Port Solenoid Valve

6 V Grommet Double 5 V Single 3 V P.43 10-SY320 0.65 Body ported Base mounted Body ported Base mounted 10-SY520 2.4 10-SY720 3.3 10-SY920 8.6 P.58 10-SY340 1.1 10-SY540 2.8 10-SY740 A B 4.5 Air Preparation Equipment Pressure Control Equipment Flow Control Equipment Pressure Switches/ Pressure Sensors PE 10-SY940 10 Valve option P, EA, EB port size Manual override A, B port size Oil resistant

Auto Switch Guide Reed Switches/Solid State Switches For Rotary Actuators (Air Grippers) 1

-www.stevenengineering.com 5 to 40 mA 1.5 V or less (0.8 V or less at load current 10 mA) 4 V or less Internal voltage drop 0.8 V or less D-1 D-2 100 A or less at 24 VDC 0.8 mA or less at 24 VDC Red LED lights when ON.

ø 40, ø 50, ø 63, ø 80, ø 100 Series CLA2 Fine Lock Cylinder Double Acting, Single Rod

conduit 3-wire (NPN) Solid state auto switch G39C G39 2-wire K39C K39 12 V M9NW V V V v v G59W V V v v 3-wire (NPN) 5 V, 12 V IC circuit Diagnostic indication (2-color indication) Relay, PLC Yes 3-wire (PNP) M9PW V V V v v G5PW V V v v 2-wire 12 V M9BW V V V v v 24 V K59W V V v v Grommet 3-wire (NPN) 5 V, 12 V M9NA** v v V v v 3-wire (PNP) M9PA** v v V v v Water resistant (2

MGP

75mm stroke V = 200mm/s 20 20 25 10 10 25 Load weight m (kg) Load weight m (kg) 20 20 5 5 16 16 1 10 50 100 200 1 10 50 100 200 Eccentric distance l (mm) Eccentric distance l (mm) MGPL32 to 63 7 25mm stroke V = 200mm/s 8 Over 25mm stroke V = 200mm/s 100 100 63 63 50 50 50 50 Load weight m (kg) Load weight m (kg) 40 40 32 32 10 10 5 10 50 100 200 5 10 50 100 200 Eccentric distance l (mm)

Auto Switch Guide

VDC) Power supply voltage 10 mA or less Current consumption 24 VDC (10 to 28 VDC) 28 VDC or less Load voltage Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 5 to 40 mA 80 mA or less 40 mA or less Load current 0.8 V or less 1.5 V or less (0.8 V or less at 10 mA

CRB2/CRBU2/CRB1

L1 10 5(8Y) to (Y1) 3 to 8 Y1 10 5 to 14 9-(14-X) to (X-3) X-3 15 6(2Y) to (Y1.5) 3 to 9 Y1.5 L4 = L2 = L3 = 15 8 to 18 X-4 10-(18-X) to (X-4) 7(10Y) to (Y1.5) 20 3 to 10 Y1.5 L1 = 20 X-4.5 10 to 20 10-(20-X) to (X-4.5) 8(13Y) to (Y2) 30 5 to 13 Y2 X = 30 9(15Y) to (Y4.5) 10 to 22 X-5 12-(22-X) to (X-5) 40 7 to 15 Y4.5 E4 = E2 = Symbol: A15 Symbol: A14 Applicable to single vane type only

SX

ADDRESS 4632 4632 4632 1 1 1 9 9 9 PW LRUN ON POWER ALARM COMM Name of terminal block, LED Note Cable wiring 2 2 2 1 ON 8 8 8 O N 3 3 3 7 7 7 4632 4 4 4 6 6 6 SD RD LERR. 5 5 5 POWER SEND x 10 x 1 1 2 3 4 5 6 7 8 OFF DG 24 V 0 V D G D G 0 V 24 V 24 V 0 V A B SG FG 0 V 24 V 24 V 0 V +24V 24G DA DB FG Description LED ON for SI unit power supply input Description LED Description LED POWER COMM

Rotary Actuator

Load voltage Auto switch model Lead wire length [m] Pre-wired connector Applicable load DC AC Perpendicular In-line 0.5 (Nil) 1 (M) 3 (L) 5 (Z) Indicator light Type Special function Electrical entry Wiring (Output) M9NV M9N V V V v v IC circuit 3-wire (NPN) Solid state auto switch 5 V, 12 V 3-wire (PNP) M9PV M9P V V V v v 2-wire 12 V M9BV M9B V V V v v 3-wire (NPN) 5 V, 12 V M9NWV M9NW

EXxx-OMN0037CN

10 9 8 7 6 5 4 3 2 1 0 0 0 0 0 MSB AD LSB Byte2 Byte3 CH1 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 0 0 0 0 MSB AD LSB -20No.EX-OMN0037CN-A -1010 V-55 V-2020 mA AD (ab) [V] [mA] 16 10 -1010 V -55 V -2020 mA F 65535 10.5 5.25 21 F9E8 63976 10 5 20 BCF4 48372 5 2.5 10 8000 32768 0 0 0 430C 17164 -5 -2.5 -10 0618 1560 -10 -5 -20 0 0 -10.5 -5.25 -21 Byte0 Byte1 CH0 15 14 13 12 11 10 9 8 7

TABLE OF CONTENTS

O 5/32 P 3/16 U 7/32 R 1/4 A 9/32 S 5/16 T 3/8 V 5/64 B 1/2 C 5/8 D 1 E 1 1/2 Y 3/4 F 2 W 3 D No Option Ports T Metering (1/32 1/8 orif.)

Direct Operated 2 Port Solenoid Valve For Water, Oil, Steam, Air Series VX21/22/23 1

Table (3) Rated Voltage Electrical Option Class B Solenoid valve (Port size) Orifice symbol (diameter) 1 (2 mm) 2 (3 mm) 3 (4.5 mm) 4 (6 mm) 5 (8 mm) 6 (10 mm) Rated voltage S L Z VX21 Model VX22 VX23 Voltage symbol Voltage With surge voltage suppressor With light and surge voltage suppressor With light AC/ DC 01 ( ) 1 8 100 V 200 V 110 V 220 V 240 V 48 V 230 V 24 V 12 V 1 2 3 4 7 8 J 5

CQS

12 16 5, 10, 15, 20 25, 30 7-4-20 20 25 5, 10, 15, 20 25, 30, 35, 40 45, 50 Series CQS 12, 16 20, 25 12 16 20 25 5, 10 7-4-12 Solid state switch D-M9N/M9NV D-M9P/M9PV D-M9B/M9BV D-F9NW/F9NWV D-F9PW/F9PWV D-F9BW/F9BWV D-F9BAL Series CQSK 12 16 5, 10, 15, 20 25, 30 7-4-28 20 25 5, 10, 15, 20 25, 30, 35, 40 45, 50 Series CQSS 12 16 5, 10, 15, 20 25, 30 (1) 7-4-36 20 25 5, 10, 15, 20 25, 30,

Tie-rod Type Hydraulic Cylinder

, 12 V 12 V IC circuit Terminal conduit M9NW 3-wire (NPN) Relay PLC Yes G59W 5 V, 12 V Diagnostic indication (2-color indicator) IC circuit M9PW 3-wire (PNP) G5PW 24 V M9BW 2-wire 12 V K59W Grommet M9NA1 M9PA1 M9BA1 3-wire (NPN) 3-wire (PNP) 5 V, 12 V IC circuit Water resistant (2-color indicator) 12 V 2-wire G5BA G59F F59F 4-wire (NPN) 5 V, 12 V IC circuit IC circuit Diagnostic output (2

Rotary Actuator: Free Mount Type/Vane Style Series CRBU2

port S99 Heavy-duty cord 3-wire (NPN) Yes Yes Yes Yes No No Change threaded hole to through-hole S99V 5 V, 12 V For 10 and 15 Change the screw position S9P Relay, PLC 3-wire (PNP) IC circuit 24 V Grommet Change rotation range S9PV Change rotation range between 0 and 200 90 5 V, 12 V 5 V, 12 V, 24 V Parallel cord Change rotation range between 0 and 110 5 V, 12 V, 100 V 5 V, 12 V, 24 V, 100

Vacuum System Peripherals:

12 VDC 6 C Lead wire length 0.6 m 1 Symbol 2 3 4 5 6 7 8 Order of manifold (Station) Connector type 6 VDC V CL CN Lead wire length 3 m Without connector 5 VDC S 05 07 10 Ejector unit nozzle diameter 3 VDC R Note) When F is required, it is Nil.

CL

(PNP) IC circuit 5 V, 12 V Grommet 2-wire 12 V Connector Relay, PLC 3-wire (NPN) 3-wire (PNP) IC circuit 24 V Diagnostic indication (2-color indication) 5 V, 12 V Grommet 2-wire Water resistant (2-color indication) 12 V H7BA With diagnostic output (2-color indication) H7NF 4-wire (NPN) IC circuit 5 V, 12 V Lead wire length symbols: 0.5 m Nil(Example) C73C 1 m L (Example) C73CL 5 m

XL

G 59 60 63 H 48 58.5 64 64 63 J 47 48 51 51 (Unit: inch) 1/4 1/4 1/4 3/8 8 10 10 10 3 5 5 5 XSA12S(V) XSA22S(V) XSA3-32S(V) XSA3-43S(V) 34 High Vacuum Angle Valve Series XL 1 With pilot pressure at 0.5MPa (72psi) XLA Normally closed XLC Double acting (dual operation) Valve type Model 1200 1200 1000 1000 800 800 T msec T msec 600 600 Bellows seal 400 400 200 200 0 0 16 25 40 50 63 80 16

Digital Flow Switch

(Voltage input: 1 to 5 V/Current input: 4 to 20 mA) Pressure switch/Flow switch can be displayed. B A is displayed for 1 V (or 4 mA). B is displayed for 5 V (or 20 mA). The range can be set as required. Display Select NPN or PNP A NPN PNP Voltage input 1 V 5 V Current input 4 mA 20 mA Analog output of 0 to 10 V is also available.

M8/M12 Connector PCA/EX9/EX500 Series EX260 Type 1 EX123/124/126 EX500 Type 2 EX600 EX245 Type 3 EX250 EX120/121/122 ¡Communication Cable/Connector EX140 Type 1 EX180 EX510 Type 2 M8/M12 ATEX

Brown: 24 VDC +10%/5% (Valve power supply) 1 2 3 4 5 White: 0 V (Valve power supply) Made to Order Connections Black: 0 V (Power supply for control) Blue: 24 VDC10% (Power supply for control) Gray: Not connected Cable length 10 mm p. 247 #0PCA1401807 14.8 44.5 L 50 22.5 2 1 5 Cable length (L) 1401807 1500 mm 1401808 3000 mm 1401809 5000 mm 5 4 3 Marker tag Marker tag Socket connector pin

EXxx-OMS0026CN

Enable 1 Disable -10..10 V -5..5 V -20..20 mA 0..10 V 2 -10..10 V 0..5 V 1..5 V 0..20 mA 4..20 mA Offset binary 3 PLC Sign & Magnitude 2s complement 2 None 2AVG 2 4 4AVG 4 8AVG 8 Enable 0.5 5 Disable Enable 0.5 6 Disable Enable 7 Disable Enable 8 Disable 1 -49No.EX-OMS0026CN -10..+10 V -10.50+10.45 V -10.45+10.50 V -5..+5 V -5.25+5.22 V -5.22+5.25 V -20..+20 mA