Seal Type: Metal, Configuration: 3-Position, Pressure Center, Number of Solenoids: Double, Voltage: 24VDC, Pilot: External Individual Pilot Exhaust, Subplate: w/o Subplate, Option: External Pilot Supply

Seal Type: Metal, Configuration: 3-Posiiton, Closed Center, Number of Solenoids: Double, Voltage: 24VDC, Pilot: External Individual Pilot Exhaust, Subplate: w/o Subplate, Option: External Pilot Supply

Seal Type: Metal, Configuration: 3-Position, Dual Exhaust Center, Number of Solenoids: Double, Voltage: 24VDC, Pilot: External Individual Pilot Exhaust, Subplate: w/o Subplate, Option: External Pilot Supply

Seal Type: Metal, Configuration: 2-position, Dual Pressure, Number of Solenoids: Double, Voltage: 24VDC, Pilot: External Individual Pilot Exhaust, Subplate: w/o Subplate, Option: External Pilot Supply

Seal Type: Metal, Configuration: 3-Position, Exhaust Center, Number of Solenoids: Double, Voltage: 24VDC, Pilot: External Individual Pilot Exhaust, Subplate: w/o Subplate, Option: External Pilot Supply

Seal Type: Metal, Configuration: 2-position, Number of Solenoids: Double, Voltage: 24VDC, Pilot: External Individual Pilot Exhaust, Subplate: Side 1/4, Option: External Pilot Supply

Seal Type: Metal, Configuration: 2-position, Number of Solenoids: Double, Voltage: 24VDC, Pilot: External Individual Pilot Exhaust, Subplate: Side 3/4, Option: External Pilot Supply

Seal Type: Metal, Configuration: 2-position, Number of Solenoids: Double, Voltage: 24VDC, Pilot: External Individual Pilot Exhaust, Subplate: Side 1/2, Option: External Pilot Supply

Modular F.R.L. Units

*10 *10 *10 *10 *10 *7 For pipe thread type: NPT.

MLGP

/Z80 10 10 10.5 10.5 10.5 11.5 11.5 12 D-Y5/Y6 D-Y7P/Y7PV D-Y7W/Y7WV 7.5 7 6.5 6 7 8 9.5 10 D-Y7BAL 5 5 6 6 6 6 6 6.5 CL D-P5DWL 4 4 5 4 4 Since this is a guideline including hysteresis, not meant to be guaranteed.

MLGP

/Z80 10 10 10.5 10.5 10.5 11.5 11.5 12 D-Y5/Y6 D-Y7P/Y7PV D-Y7W/Y7WV 7.5 7 6.5 6 7 8 9.5 10 D-Y7BAL 5 5 6 6 6 6 6 6.5 CL D-P5DWL 4 4 5 4 4 Since this is a guideline including hysteresis, not meant to be guaranteed.

Air cooled Thermo-con (Compact type)

Terminating resistance FG FG FG FG Connector Connector Connector shell shell shell 2201/2W + + + + 1 1 1 2 2 2 9 9 9 SG 5 SG 5 SG 5 SG Internal connection Internal connection Internal connection Pin No. Symbol Pin No. Symbol Pin No.

VQ4000

A A 215 15 P = 25 44 L1 L2 B 2 A 4 5 B 2 A 4 5 L1 L2 B 2 A 4 26.5 38 50.5 P = 25 4 26.5 38 50.5 P = 25 B 2 A 4 4 B B Indicator light B B B 2 A 4 3 B 2 A 4 3 P = 25 B 2 A 4 2 B 2 A 4 2 B 2 A 4 1 B 2 A 4 1 44 Stations X Indicator light Manual override Stations U side D side U side D side 12 16.5 43.5 12 16.5 43.5 D side entry (LD) AMC610-10 Exhaust cleaner 29 215 AMC610-10 Exhaust cleaner

Series VQ Metal Seal/Rubber Seal Body Ported

Kit (D-sub connector) 15 pin F Kit (Flat cable connector) 10 pin, 16 pin, 20 pin P How to Order Manifold How to Order Manifold 06 FSA D VV5Q14 06 P SC VV5Q14 D Ex.) Ex.)

Dedicated Controller

For ordering information, refer to the option part numbers on page 82. 74 3 Controller Series LC1 Performance/Specifications General specifications Model LC1-1H1 LC1-1H2 Item 100/110V AC 10%, 50/60Hz (100V AC, 50/60Hz for LC1-1HV1) 200/220V AC 10%, 50/60Hz (200V AC 10% for LC1-1H32) (200V AC, 50/60Hz for LC1-1HV2) Power supply Leakage current 5mA or less Dimensions 80 x 120 x 244mm Weight

Table of Contents

Purchasing order is available in units of 10 pieces.

CEx-OMQ0011

c. d. - 3. 3. 3. 3. 1. 1. 1. 1. a.560 b.2585%RH c. d. e.

Ionizer

circuit (Photocoupler) Yellow: OUT2 Isolation circuit (Photocoupler) Purple: OUT3 Isolation circuit (Photocoupler) Analog input Load Dark green: OUT4 10 k or more PNP output Ionizer Brown: DC1 (+) Blue: DC1 () 0 V: 24 VDC 10% +24 V: Ionizer driving power supply FG Input/Output signal circuit Red: DC2 (+) Black: DC2 () 0 V: 24 VDC 10% +24 V: Input/Output signal power supply +24 V OUTPUT PLC

VQ5000

Specify the wiring specifications on the manifold specification sheet. 12 12 stations Note 1) U D U D Note 2) Note 3) 2-6-10 11 Base Mounted Series VQ5000 Plug-in Unit Electrical wiring specifications Standard wiring D-sub connector assembly (AXT100-DS25) Wire colors 015 030 050 D-sub connector Terminal no.

,

117.5 75.5 27.5 (14 port) 27.5 (12 port) 10.5 (4 port) 10.5 (2 port) 14 4 2 12 12 26 35 45 14 Indicator light 5 1 3 Manual override 39 36.5 41.5 2-5.5 mounting holes 44 M12 connector 20 (12, 14 port) 10.5 (2, 4 port) 85.5 72.5 10.5 PE port 29 14 SMC M5-2 ports 12, 14 port 1/8, 1/4-2 ports 2, 4 port 1/8, 1/4-2 ports 3, 5 port 21 21 1/8, 1/4 1 port EVS1-01-F G-D-M0 H J I EVS1-01-FG-D-M0 151