PSxx-OMU0008CN

DC(+) 5 OUT1 4 OUT2 3 FUNC 2 DC(-) 1 -21No.PS-OMU0008CN-D ZSE20C(F)/ISE20C(H)-S/-R () NPN 2 DC(+) Max.28 V80 mA 1 V R15 V OUT1 1 k S420 mA OUT2 12 V 300 24 V 600 DC(-) 50 DC(+) -S/-R () OUT1 NPN 2 OUT2 Max.28 V80 mA 1 V DC(-) DC(+) -X () -S/-R () OUT1 NPN 2 OUT2 Max.28 V80 mA 1 V DC(-) -22No.PS-OMU0008CN-D -V/-T () PNP 2 DC(+) Max.80 mA 1 V T15 V OUT1 1 k V420 mA OUT2

Clean Air Module

IDFB Pressure outlet port Digital flow switch With differential pressure indicator IDH ON/OFF valve Regulator Restrictor ID Filter IDG PB PA IDK AMG AFF AM Variations AMD Flow switch P Regulator R Regulator + Pressure outlet port R1 ON/OFF valve V (V1/V2) Restrictor S Filter F (F1) Weight (kg) AMH AME LLB3 LLB4 AMF 0.36 0.84 ZFC 0.52 1.18 0.47 1.10 SF 0.41 1.09 0.52 1.35 SFD 0.63 1.44 0.57

SMC CORPORATION OF JAPAN

. 6-6 6.8.5 To Edit Time Switches . 6-6 6.8.6 To Delete Time Switch Data . 6-6 6.9 The COUNTER Block . 6-7 6.10 The UP/DOWN COUNTER Block . 6-7 6.11 The COMPARE Block . 6-8 6.12 The OFFSET Block . 6-8 6.13 The DISPLAY Block . 6-9 6.13.1 Displaying Data Onscreen . 6-9 6.13.2 Editing Data Onscreen . 6-9 6.14 The ZONE COMPARE Block .6-10 6.15 The Schmitt Trigger .6-10 6.16 The Hour Meter .6

IZ-OMU0031-CN

-2No.IZ*-OMU0031 1 1.5 3) 3) 1 1 () [] -3No.IZ*-OMU0031 () () () () -4No.IZ*-OMU0031 () * UL * FG * 6 33 () () 10 m 10mm DC(-)() -5No.IZ*-OMU0031 UL1310 2 UL1585 2 UL * () CE 050 * 2030 1 LCD 33OFF * -6No.IZ*-OMU0031 IZE11 3 C 2 A B C + 1 L 0 NPN2+15V 1 NPN2+420mA 2 PNP2+15V 3 PNP2+420mA / ZS-28-A 2 m ZS-28-B M3X5 L (2 ) ZS-28-C 1 ZS-27-C M3X8 L(2) + ZS-27-D M3X8

PSxx-OMU0002CN

DC(+) 5 OUT1 4 OUT2 3 FUNC 2 DC(-) 1 -19No.PS-OMU0002CN-D Z/ISE20A(F)-S/-R () DC(+) NPN 2 Max.28 V80 mA 1 V R15 V OUT1 1 k OUT2 S420 mA DC(-) 12 V 300 24 V 600 50 DC(+) -S/-R () OUT1 NPN 2 OUT2 Max.28 V80 mA 1 V DC(-) DC(+) -X () -S/-R () OUT1 NPN 2 OUT2 Max.28 V80 mA 1 V DC(-) -20No.PS-OMU0002CN-D -V/-T () DC(+) PNP 2 Max.80 mA 1 V T15 V OUT1 1 k OUT2 V420 mA DC(

LFE-OMZ0012

Without bracket (Bottom view) Bracket thickness is approx. 1.6mm Model Piping port size A B C D E F G H I J K L LFE13(Z) 3/8 90 73 40 23.5 56 83 89 24 6 1.6 96 87 LFE14(Z) 1/2 104 73 40 23.5 56 83 89 28 6 1.6 96 87 LFE26(Z) 3/4 105 78 50 29 67 94 100 35 6 1.6 115 106 LFE38(Z) 1 120 90 55 32 73 100 106 41 6 1.6 115 106 Model M N O P Q R S T U Bracket weight LFE13(Z) 48 39 4.6 12 11.5 52 28

PSxx-OMU0005CN

1/4 1~1.5Nm (ZS-46-N) -01-N01 23 3~5 Nm -C4L-C6L 1/61/4 1~1.5Nm -17No.PS-OMU0005CN-C -18No.PS-OMU0005CN-C () TU0425( 42.5) -19No.PS-OMU0005CN-C FG -20No.PS-OMU0005CN-C Z/ISE20B(F)-S/-R () NPN 2 Max.28 V80 mA 1 V R15 V 1 k S420 mA 12 V 300 24 V 600 50 -S/-R () NPN 2 Max.28 V80 mA 1 V -X () -S/-R () NPN 2 Max.28 V80 mA 1 V -21No.PS-OMU0005CN-C -V/-T () PNP 2 Max.80 mA 1 V T15 V

Seal Type: Metal, Configuration: 2-position, Number of Solenoids: Single, Voltage: 100VAC/50Hz, 115VAC/60HZ, Pilot: Pilot Exhaust through Footprint, Subplate: Side 1/2, Option: External Pilot Supply

Seal Type: Metal, Configuration: 2-position, Number of Solenoids: Single, Voltage: 24VDC, Pilot: Pilot Exhaust through Footprint, Subplate: Side 3/4, Option: External Pilot Supply

Seal Type: Metal, Configuration: 2-position, Number of Solenoids: Single, Voltage: 24VDC, Pilot: External Individual Pilot Exhaust, Subplate: Side 3/4, Option: External Pilot Supply

Seal Type: Metal, Configuration: 2-position, Number of Solenoids: Single, Voltage: 100VAC/50Hz, 115VAC/60HZ, Pilot: Pilot Exhaust through Footprint, Subplate: Side 1/2, Option: External Pilot Supply

AS-FS Series Speed Controller with Indicator/ Elbow Type: Uni Thread Type

Flow Rate and Sonic Conductance Model AS22l1FSl-U01 AS22l1FSl-U02 AS32l1FSl AS42l1FSl Flow Direction Symbols on Body Meter-out Meter-in Metric size 3.2 4 6 8 10 3.2 4 6 8 10 6 8 10 12 10 12 16 Symbol Tubing O.D.

PF-OMN0009_C

PF3W520S 112 54 63.6(Max. 68.6) 74.2 34 62.5 18 13.6 2.7 10 19 6 PF3W540S 142 71 75.25(Max. 81) 94.5 44 79 28 16.8 2.7 10 28 7 S T PF3W504S 56.5 22 PF3W520S 60.5 22 PF3W540S 78 30 -44No.PF-OMN0009CN-F PF3W504/520/540(+) A AA D K S PF3W504S--T 115 50 81.2 69.5 67.5 PF3W520S--T 123 54 85.2 73.5 71.5 PF3W540S--T 153 71 105.5 90 89 -45No.PF-OMN0009CN-F PF3W511-U25/PF3W521-U30(PVC ) 2X A

EX250-SPR_eng

(Allowable SW power supply range: 19.2 V to 28.8 V) Fig. a Fig. b Summary of Product elements Double Single Double Double Double Single Double Double No. 0 2 4 6 Side A No. 5 Side A 0 2 3 5 Station Station 1 2 3 4 1 2 3 4 6 No. 1 3 5 7 Side B No. 1 4 6 Side B R O I PROCESS FIELD BUS F R P Voltage drop of max.1 V B U S PWR(V) RUN DIA BF H L H L ADDRESS + EX250 Free EX250 DIA BF PWR(V) RUN

Non-Standard Motor Compatible Drivers Matsushita Electric Industrial Co., Ltd. Drivers for LJ1, LG1, LX

Deviation counter clear input Brake interlock signal output Pin no. 14 15 16 17 18 32 33 34 35 36 Signal description Servo ON input P actuation input Signal PULS PULS SIGN SIGN CLR CLR BK COIN SG P-IN Signal S-ON P-ON P-OT N-OT ALMRST PCO SG ALM SG FG Pin no. 1 2 3 4 5 6 7 8 10 13 Driver model SGDE-A5AP SGDE-A5BP SGDE-01AP SGDE-01BP SGDE-02AP SGDE-02BP A B Normal rotation suppression input

NVEPA|VEFseies

O F , < F , Q r '=r, @ r,> r, Pressure Raies (P1 =Primary Pressure) (P2=Secondary Pressure) NVEP3l2O-2 NVEP314O-'r -04 Primary Pressure P1 = 45 PSIG (3 KSI/cmr) E t2 I { t r S F g t o o E 28 (r. a ( 1 ) E a E a NVEHtl4O-1 E t ^ *t 6 S (0.15) (0.s) t . 5 ( 0 1 ) F 5 (0.05) NVEE NVEP CONSTRUCTION DETAIL Flow Raie'lvpo: VEF212O (2 Pdts) NVEF:112O (3 Porb) Pressuro llrp: NVEP3I2O (3 Porb) l l

Electro-Pneumatic Valve NVEP/NVEF Series

O F , < F , Q r '=r, @ r,> r, Pressure Raies (P1 =Primary Pressure) (P2=Secondary Pressure) NVEP3l2O-2 NVEP314O-'r -04 Primary Pressure P1 = 45 PSIG (3 KSI/cmr) E t2 I { t r S F g t o o E 28 (r. a ( 1 ) E a E a NVEHtl4O-1 E t ^ *t 6 S (0.15) (0.s) t . 5 ( 0 1 ) F 5 (0.05) NVEE NVEP CONSTRUCTION DETAIL Flow Raie'lvpo: VEF212O (2 Pdts) NVEF:112O (3 Porb) Pressuro llrp: NVEP3I2O (3 Porb) l

EXxx-OMV0018_ENG

This product is not designed to be explosion proof. 4 4 4 6 6 6 ON Connected load: 24 VDC Solenoid valve with surge voltage suppressor of 1.5 W or less (manufactured by SMC) Current consumption of power supply for SI unit operation: 0.1 A max.

Seal Type: Metal, Configuration: 2-position, Number of Solenoids: Single, Voltage: 100VAC/50Hz, 115VAC/60HZ, Pilot: Pilot Exhaust through Footprint, Subplate: Side 3/8, Option: -

Seal Type: Metal, Configuration: 2-position, Number of Solenoids: Single, Voltage: 200VAC/50Hz, 230VAC/60Hz, Pilot: -, Subplate: -, Option: -