Hydraulic

Z (Example) A53Z 103 Tie-rod Type Low Pressure Hydraulic Cylinder Double Acting/Double Rod Series CHAW Models Light Principle parts are light weight aluminum alloy.

MK

C MK2B20-10 MK2B20-20 MK2B25-10 MK2B25-20 MK2B32-10 MK2B32-20 MK2B40-10 MK2B40-20 MK2B50-20 MK2B50-50 MK2B63-20 MK2B63-50 6 8.5 Moment of inertia (kgm2) 4 MK2l20/25 10.5 2 10 103 6 6 10.5 10.5 4 Operating range 2 9 104 50 100 200 66 120 Cylinder speed (mm/s) ITo attach and detach the arm to and from the piston rod, fix the arm with a wrench or vise and then tighten the bolt.

MXW

hexagon socket hole 2.5 J 12 6.5 MX MTS MY Width across flats 8 5H9 +0.030 depth 4.5 0 CY 6-M4 x 0.7 thread depth 6 (Helisert) 6 MG Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com CX 27 58 46 D-X (Y) 29 26 103 26 (Y) 20L 5H9 +0.030 depth 4.5 0 Data 10 15 15 K A 35

VK300

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 4-M3 x 0.5 depth 6 (Bracket mounting screw) L Dimension n: Stations n L 20 396 388 19 377 369 18 358 350 17 339 331 16 320 312 15 301 293 14 282 274 13 263 255 12 244 236 11 225 217 10 206 198 9 187 179 8 168 160 7 149 141 6 130 122 5 111 103 4 92 84

3 Port Direct Operated Poppet Solenoid Valve Series VKF300 1

1/8 1(P) port Applicable cable O.D. 4 to 6.5 MAX.10 71.5 78.5 71 Indicator light (Type DZ only) 67.5 59 32 17 2 2-4.5 (Mounting hole) P mPm P 19 35 Pg.7 2-Rc 1/8 1(P) port A A A 11 20 26 49 300 (lead wire length) 1 P = 19 13.5 L2 5.5 L1 47.5 11 5 n-Rc 1/8, M5 x 0.8 2(A) port 19 35 n-Rc 1/8 3(R) port 47.5 11 R R P = 19 19 L Dimension n: Stations n L 1 38 27 2 57 46 3 76 65 4 95 84 5 114 103

3 Port Solenoid Valve Series VQ100 1

125 135.5 82 93 113 137.5 148 92 103 123 150 160.5 102 113 133 162.5 173 112 123 143 162.5 173 122 133 153 175 185.5 132 143 163 187.5 198 142 153 173 200 210.5 152 163 183 212.5 223 162 173 193 212.5 223 172 183 203 225 235.5 182 193 213 237.5 248 192 203 223 250 260.5 202 213 233 262.5 273 212 223 243 262.5 273 4-12-13 14 Series VQ100 How to Order Manifold How to Order Manifold Assembly

SX

(5.5) (5.5) Light/Surge voltage suppressor (5.5) 75.3 67.6 (Both sides) Rc 1/4 EXH port Rc 1/4 SUP port 67.6 50.5 P E 18.5 18.5 9.5 9.5 58.2 60 1 1 26 L plug connector (L) M plug connector (M) 115.6 (Single, Double) 128.1 (Single, Double) 128.6 (3 position) 141.1 (3 position) 16.7 (Lead wire length) 300 300 (Lead wire length) 33.4 Stations n n: Stations (n1 + n2) 3 85 65 4 104 84 5 123 103

Proposals for Energy Saving

PFA703H--28 PFA703H--68 PFA706H--28 PFA706H--68 PFA703H--29 PFA703H--69 PFA706H--29 PFA706H--69 3000 3000 150 150 6000 6000 300 300 PFA712H--28 PFA712H--68 PFA712H--29 PFA712H--69 12000 12000 600 600 103 &RXUWHV\RI6WHYHQ(QJLQHHULQJ,QF5\DQ:D\6RXWK6DQ)UDQFLVFR&$ *HQHUDO For Water Digital Flow Switch Series PFW How to order PFW7 20 03 27 Integrated display type Flow rate range 0.5 to 4l/min

Table of Contents

(mm) Weight (g) L1 L2 L3 D1 D2 Model L1 Nylon Urethane KQ2V04-M5 KQ2V04-01S KQ2V06-M5 KQ2V06-01S KQ2V06-02S KQ2V08-01S KQ2V08-02S KQ2V08-03S KQ2V10-02S KQ2V10-03S KQ2V12-03S KQ2V12-04S KQ2V16-03S KQ2V16-04S 6 14 7 15 26 24 30 47 40 49 63 80 103 110 Reference dimensions after R thread installation. Note 1) D: Max. diameter Note 2) ( ): Values for soft nylon.

SMC Basic Pneumatics

Powet Preflx Svmbol Pourer Preflx Svmbol 10-1 deci d 101 Deka da fi2 Heclo h 1O-2 centi c iO-3 milli m 103 Kilo k 10-6 micro ], tO6 Mega M Table 3.2 Prefixes tor powers of ten This lads us to a kPa (kilo-pascal or 1/100 b ol a BAR) and an MPa (1,OOO,OO0 pascals or 10 BAF). Practice with these prefixes and pay attention to what th symbol represents in terms of powers of ten.

Electric Actuator Series LJ1H/LJ1S Made to Order Specifications

TSUBAKI CABLEVEYOR cross-sectional dimensions (mm) A Series A B H S LJ1 10 LJ1 20 LJ1 30 10 20 B H S H S 10 20 14 40 H S Example) For LJ1 10 2 3 6 4 8 8 4 Correct: 60% or less Incorrect: More than 60% 103 Made to Order/Clean Room Specification Series LJ1H10 Dimensions/LJ1H10 (X60) 1 2 Scale: 20% Dimensions inside ( ) are for the model with brake. 120 40 70 2-5H10 depth 8 4-Limit switch mounting

MXW Series Long Stroke Slide Table

only on B type(with shock absorber). 146 146 146 Long Stroke Slide Table MXW Series Dimensions MXW 12 Stroke: 100, 125, 150 Operating port 2-M5 x 0.8 Width across hexagon socket hole 2.5 (mm) J 12 Scale: 30% 6.5 5H9 +0.03 depth 4.5 0 Width across flats 8 6-M4 x 0.7 thread depth 6 (Helisert) 6 27 58 46 Y 29 26 103 26 Y L 5H9 +0.03depth 4.5 0 10 15 15 K A 35 20 26.5 A Z Bottom through hole

5 Port Solenoid Valve/Body Ported, Cassette Type Manifold, Series SY3000/5000/7000

plug connector Valve model Type of actuation DIN terminal Grommet type A, B Single 61 65 88 2 position Double 79 86 132 SY560--01 Rc(PT) 1/8 Closed center 3 position Exhaust center 85 92 138 Pressure center 2 position Single 85 89 112 Double 101 108 154 C4 SY560--C4 Pressure center ( ) 4 One-touch fitting Closed center 3 position Exhaust center 107 114 160 2 position 80 84 107 Single 96 103

High Vacuum Angle Valve, XL Series

B A Series XLA (mm) B mm Model Weight kg (lb) A mm Conductance l/s 40 XLA-16 XLA-25 XLA-40 XLA-50 Little heavy metal contamination The valve does not contain heavy metals such as Ni (nickel) or Cr (chrome) and a low sputtering yield also helps to minimize heavy metal contamination of semiconductor wafers. 103 0.25 (0.55) 5 50 113 0.45 (0.99) 14 65 158 1.1 (2.43) 45 70 170 1.6 (3.53) 80

3 Port Solenoid Valve, VQ100 Series, Base Mounted Type

125 135.5 5 82 93 113 137.5 148 6 92 103 123 150 160.5 7 102 113 133 162.5 173 8 112 123 143 162.5 173 9 122 133 153 175 185.5 10 132 143 163 187.5 198 L1 L2 (L3) (L4) (L5) 10 Base Mounted Plug-in SI Unit Series VQ100 VV3Q11-X11 (L5) (L4) (L3) L2 L2 (5.5) (35.0) (45.0) (23.5) (12.3) (21.5) Manual Override D Side U Side 1 2 3 4 5 n 2-M5x0.8 (E Port) 2-M5x0.8 (P Port) (42.9 ) (20.0) (15)

Series VC, Series VCB, Direct Operated 2 Port Solenoid Valve for Heated Water

74.5 48 84 26 1/4, 3/8 VCB41 M5 23 25 36 17 13.5 41 94 50 8 30 111.5 70 78.5 103 78.5 48 88 26 1/2 M5 28.2 30 36 17 17.5 41 102 60 8 35 119 70 86.5 103 86.5 48 96 26 3/4 4 Direct Operated 2 Port for Heated Water Series VCB Model Selection VCB (for heated water) 2 port solenoid valve Class Orifice size mm Model Material Port size Body Seal 4 3 2 7 5 10 1/8 (6A) 2 1/4 (8A) VCB (for heated

3 Port Direct Operated Poppet, Solenoid Valve, Series VKF300

(mounting holes) 67.5 59 19 17 2 R P P R 34 2.3 7 20 Pg.7 4-Rc(PT) 1/8 (ports P, R) A A A P = 19 13.5 L2 L1 4 1 7 8 26 47.5 Approx. 300 (lead wire length) n-Rc(PT) 1/8, M5 x 0.8 (port A) 7 20 34 2-4.5 (bracket mounting holes) 4-M3 x 0.5, depth 6 (bracket mounting screws) 7 8 47.5 15.5 20 25 49 4 L3 7 7 L: Dimension table n: Stations n L 1 35 27 13 2 54 46 32 3 73 65 51 4 92 84 70 5 111 103

EXxx-OMZ0016

(Wch: 120-127) Remote diagnostic information (Wch: 112-119) 19 Remote registration information (Wch: 8-15) Remote registration information (Wch: 1-7)*1 20 Remote registration information (Wch: 24-31) Remote registration information (Wch: 16-23) 25 Remote registration information (Wch: 104-111) Remote registration information (Wch: 96-103) 26 Remote registration information (Wch: 120-127)

MU

122 CB 23 27 31 37 48 CA 53 67 85 103 122 Size 25 32 40 50 63 Size 25 32 40 50 63 Part No.

70pvpump

= 0 1 10 100 1000 Viscosity (mPas) (103 m2/s) = (mPas)/(kg/m3) 17-5-154 15 Series PA Process Pump: Air Operated Type (External Switching Type) Working Principle: Air Operated Type Air supply port (AIR SUP) VC 5 port solenoid valves VDW Drive unit External solenoid valve VQ VX2 VX Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588