Series ARP20 to ARP40 10- 10- 21- 21- Direct฀Operated฀Precision฀Regulator Series ARP20K to ARP40K 10- 10- Direct฀Operated฀Precision 21- 21- Regulator฀with฀Backflow฀Function

Fittings & Tubing Air Cylinders Rotary Actuators -ARP20/ARP20K 10 21 -ARP30/ARP30K 10 21 -ARP40/ARP40K 10 21 Clean room compliant, copper-free, fluorine-free, silicone-free Air Preparation Equipment Clean room compliant Description Symbol Body size Body size 30 20 40 20 40 30 Nil 1 Note 4) 3 Note 4) Set pressure c 0.005 to 0.4 MPa setting 0.005 to 0.2 MPa setting 0.008 to 0.6 MPa setting

Air Suction Filter With One-touch Fittings ZFB Series

M Element Replacement Procedure Body Model A B C D E F G H I J K L M N Size ZFB100-04 ZFB100-06 ZFB200-06 ZFB200-08 ZFB300-08 ZFB300-10 12.8 4 6 53 54 8.5 14.4 15.5 50 15 17.5 24 12.5 26 22.5 48 Metric size Inch size 15.2 6 8 9.5 16.6 17.5 61 16 19.5 27 13.5 28 65 24.5 52 Collar part arrow 57 8 10 69.5 70 18.5 11 18 21.5 65 17 21 29.5 14.5 30 27 Transparent cover 3 16 1 4 " 1 4 " 3 8 " 1

FGD-C

FGDTF*-04 FGD-CV005-06 FGDTF*-06 (5) FGD-CV006-03 FGDCE*-03 FGD-CV006-04 FGDCE*-04 FGD-CV006-06 FGDCE*-06 FGD-OP001 FGD*B (10) KT-FGDC FGDC KT-FGDE FGDE (2)(4)(6)(13)(16) KT-FGDT FGDT KT-FGDF FGDF FGD-CA002 FGDT,F(L250) (7)(9)(11)(12)(13) (14)(15)(16)(17) FGD-CA003 FGDT,F(L500) L500 (18) FGD-CA004 FGDC,E(L250) FGD-CA005 FGDC,E(L500) 7/11 FGX-OM-L007-C 2. 2.

Speed Controller with Uni One-touch Fitting Series AS Elbow Type/Universal Type 1

M Weight (g) AS221F-U01-23 AS221F-U01-04 AS221F-U01-06 AS221F-U01-08 AS221F-U01-10 AS221F-U02-04 AS221F-U02-06 AS221F-U02-08 AS221F-U02-10 AS321F-U02-06 AS321F-U02-08 AS321F-U02-10 AS321F-U02-12 AS321F-U03-06 AS321F-U03-08 AS321F-U03-10 AS321F-U03-12 AS421F-U04-10 AS421F-U04-12 Model Applicable tubing O.D. d 3.2 4 6 8 10 4 6 8 10 6 8 10 12 6 8 10 12 10 12 27.9 28.2 29.6 32.4 40.2 32.5 33.1

ARJ1020F

Description ARJM104, 6, 10 Manifold base How to Order ARJ1020F-M5-06 ARJ1020F-M5-04 M5 ARJ 20 10 F 04 1 Option Miniature regulator 1 Set at 0.2MPa Port size Only the adjusting spring is different from standard.

Series IDG

IDG60S to IDG100S IDG3 to IDG50 IDG3H to IDG50H IDG30L/ IDG50L Port size With separator regulator Symbol Bore Size 3 5 10 20 30 50 60 75 100 V IDG60 to IDG100 IDG60H to IDG100H IDG60L to IDG100L 01 1/8 02 1/4 IDG60S to IDG100S Note) Note) 03 3/8 04 1/2 Note 1) Specifications with element service indicator are also available. See the order made section on page 33.

CE

7 -X NBR Valve retainer seal #7 Since there is a possibility of improper operation, please contact SMC regarding the replacement of seals. 20Data 10-12-21 21 Series CE1 Dimensions: 12, 20 Both ends tapped style: CE1B Bore size Stroke 2-P (Port size) 2-N through 4-O thread depth R Metal connector 500 or 3000 M14 x 1 B + Stroke A + Stroke A B C D E G H I K L M Bore size (mm) 12 20 Standard

CE

7 -X NBR Valve retainer seal #7 Since there is a possibility of improper operation, please contact SMC regarding the replacement of seals. 20Data 10-12-21 21 Series CE1 Dimensions: 12, 20 Both ends tapped style: CE1B Bore size Stroke 2-P (Port size) Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800)

NCA1

21 Series NCA1 Rod Boot Rod Boot Material Material Nylon Neoprene Max. temperature 140F (60C) 230F (110C) Suffix for option J K Max. temperature is for boot only.

CE

B H NTJ-015A NT-02 NT-04 NT-05 M5 x 0.8 7.8 9.2 12 8 4 H B M8 x 1.25 12.5 15.0 20 13 5 M14 x 1.5 21.0 25.4 32, 40 22 8 M18 x 1.5 26 31.2 50, 63 27 11 Electrical Wiring Input/Output The input/output of the scale cylinder is performed by a 7 shielded twisted pair wire from the sensor section plus a connector.

AC Servo Motor Driver (SSCNET Type)

Initial Test Drive .14 6.2.1 Start up the Setup software (MR Configurator2TM) . 15 6.2.2 System Settings . 16 6.2.3 Model Selection . 16 6.2.4 Driver ON LINE Check . 17 6.2.5 Help Function . 17 6.3 Parameter setting (Driver side) .18 6.3.1 Change of parameter block . 19 6.3.2 Reading parameters . 20 6.3.3 Parameter setting method . 20 6.3.4 The recommended parameters for each actuator . 21

NCA1

21 Series NCA1 Rod Boot Rod Boot Material Material Nylon Neoprene Max. temperature 140F (60C) 230F (110C) Suffix for option J K Max. temperature is for boot only.

NCA1

NCA1-P325 NCA1-P800 NCA1-P1000 CB 1 1/4 1 1/2 2 CD 3/4 1 1 3/8 DD 17/32 21/32 21/32 E 3 1/2 4 1/2 5 F 5/8 3/4 7/8 FL 1 7/8 2 1/4 3 LR 1 1/4 1 1/2 2 1/8 M 3/4 1 1 3/8 MR 7/8 1 1/4 1 5/8 R 2.56 3.25 3.81 Weight (lbs) 3.11 5.80 10.42 Note: Pivot pin is not included Clevis Bracket CB CW CW CD MR BA E LR DD AA M F E FL Dimensions Part No.

For Water Digital Flow Switch Series PFW

Note 4) Window comparator mode Since hysteresis is 3 digits, separate P1 and P2 by 7 digits or more. 1 digit is the minimum setting unit (refer to the table above). 21 Series PFW How to order PFW5 20 03 Remote Type Sensor Unit Wiring specification Flow rate range Nil N 3m lead wire with connector Without lead wire 0.5 to 4l/min 2 to 16l/min 5 to 40l/min 04 20 40 Port size Thread type Size

Refrigerated Air dryer Series IDU/IDF

Accessories 21 to 24 (Options) 25 Technical Data Pressure dew pointCondensed water calculation chart, Pressure dew point temperatureAtmospheric pressure dew point temperature conversion cart Note) l/min (ANR) is for reference conditions of 20C, 1 ATM and 65% relative humidity.

Shuttle Valve/AND Valve, with One-Touch Fittings, SeriesVR12

F

Dimensions Model Metric size D2 D1 H1 H2 H3 H4 H5 L1 L2 L3 Inch size TMH-05 21 8.3 8.5 15.4 7.7 9.3 6.4 6.3 3.3 11.7 TMH-06 13.1 TMH-07 26.5 10.6 11 20 10 11 7.2 7.1 4.3 13.5 10 TMH-08 TMH-09 15.5 TMH-10 18.5 34 14.6 14.2 28 14 14 9.6 9.5 4.3 TMH-11 18.8 5

PFA/PFW

DC (+) 1 NC 2 Flow direction DC () 3 OUT 4 8 Digital Flow Switch for Water Series PFW How to order 20 03 27 PFW7 Flow rate range 0.5 to 4l/min 2 to 16l/min 5 to 40l/min 04 20 40 Wiring specifications 1l/min=0.0353SCFM 3m lead wire with connector Without lead wire Nil N Thread type Rc NPT G Nil N F Output specifications 27 67 NPN (2 outputs) PNP (2 outputs) Piping port size 03 04 06 3/8 1

VHS

Left IN1(P) Piping VHS500-06 VHS501-06 VHS400-04 VHS401-04 VHS400-03 VHS401-03 VHS400-02 VHS401-02 Right IN1(P) 3 4 1 2 3 8 1 4 Port size Effective area (mm2)(CV) Weight (kg) 93(5.22) 57(3.20) 35(1.97) 21(1.18) 105(5.90) 76(4.27) 54(3.03) 35(1.97) 0.29 1(P)2(A) 2(A)3(R) 0.34 0.25 0.27 Left or right to the front face of the handle.

Shuttle Valve/AND Valve with One-Touch Fittings

How to Order VR 12 1 1 F 06 Body size Applicable tubing outside diameter Metric sizes Inch sizes 1 1/8 standard 3.2 23 04 06 01 03 07 1/8" 5/32" 1/4" 4 6 Use 1/8" tubing for 3.2.

Air Suction Filter With One-touch Fittings Series ZFB 1

How to Order ZFB 100 04 IN/OUT applicable tubing O.D.