CXS

MTS Smaller and lightweight MY CY Dimensions/Weight Note) Bore size (mm) Dimensions (mm) Weight (kg) Series Height Width Overall length MG Overall length 0.057 CXSJ6 42 + Stroke 32 13.4 CX Basic type 6 Additional dimension for each bore size compared to the basic type 2 mm (20) 3 mm (25) 5 mm (32) CXS6 0.095 58.5 + Stroke 37 16 Series CXS 6, 10, 15, 20, 25, 32 D0.114 CXSJ10 56 + Stroke 42

Series CXS 10-/11-/12- Dual rod cylinder 21-/22- ø6, ø10, ø15, ø20, ø25, ø32

Note 2) Lead wire entry is inward when the product is shipped. 81 Dual rod cylinder CXSL 1221CXS / 10-/1122Basic style / CXS6, CXSL6 10-/1122122163.5+ST ST 50+ST 8 5.5 16 2-3.4 through 15+1/2ST M3 x 0.5 x 5L 2.75 19 26.5 counter bore depth 3.3 14 1 OUT 3 3 (Hexagon socket head set screw) 1 3.2 5.6 (16) 280.2 280.2 22.7 35 16 37 6.3 5 6 M2.5 x 0.45 x 6L M3 x 0.5 x 12.5L and M3 x 0.5 (Hexagon

VS 8-2/VS 8-4

(According to ISO1179-1), NPTF 1/8" Pilot exhaust port M4 x 7 earth thread 56.6 30 11.5 8 I E 95 65.4 41.2 3/5 3/5 2 2 2 2 14 12 39 4 4 4 4 30 21 1 1 181.5 24.5 13 17 2n x Rc, G (According to ISO1179-1), NPTF 3/8" 4(A), 2(B) port 2 x Rc, G (According to ISO1179-1), NPTF 1/2" 1(P) port 64.5 27 (n-1) x 27 33.5 Communication connector U side D side n Station number 4 2 1 3 L2 L1 5.5 47n + 37

7

Conduit VXR C E U 280 VXH 23 T VXF G1/2 VX3 A VXA OUT IN OUT IN M B J I F 2 x P Port size (D) L K Flat terminal 11 U E C T A B OUT IN OUT IN M 2 x P Port size J I F L K (D) (mm) Electrical entry Port size P A B C E F I J K L Model Flat terminal Conduit terminal Conduit D M T T U U V T U 55 (61) 99.5 68.5 55 (61) 47.5 61 (67) 23 3/8, 1/2 96.5 (102.5) 25.5 30 4 B VXD2 70 20 11.5 14 50 33 37

Air Preparation Equipment Degrees of quality Max. particle diameter ( µ m) Min. pressure dew point ( ° C) Max. oil density (mg/m 3 ) International Standard ISO 8573-1: 1991 Degrees of Quality Japanese Industrial Standard JIS B 8392-1: 2000 Degrees of Qual

AT6C-04 AFF4B-04 IDF6DAM250-04 AMD350-04 7.5 1.0 HAA15-10 HAW22-14 AT11C-06 AFF8B-04 IDF8DAM350-04 AMD350-04 11 1.5 HAA15-10 HAW22-14 AT11C-06 AFF8B-06 IDF11CAM350-06 AMD450-06 15 2.0 HAA22-14 HAW22-14 AT22C-14 AFF11B-06 IDF15CAM450-06 AMD450-06 22 3.0 HAA37-14 HAW37-14 AT22C-14 AFF22B-10 IDF22C1-3 AM550-10 AMD550-10 27 3.5 HAA37-14 HAW37-14 AT37C-14 AFF22B-10 IDF22C1-3 AM550-10 AMD550-10 37

Compact Cylinder with Air Cushion

Add the stroke to calculate the length of intermediate strokes. 7 Compact Cylinder with Air Cushion Series RQ Mounting Bracket Dimensions Foot type Foot type/RQL, RDQL mm B + Stroke L Bore size (mm) Stroke range (mm) A B LS L L1 LD 20 to 100 32 37 6.6 61.2 21 17 38.5 20 to 100 40 44 6.6 68.2 28 17 38.5 Special cap bolt LH LY 30 to 100 50 49.5 9 75.7 26.5 18 43.5 mm LX X X LG Y Y Bore size

MK

48 14 14 17 17 20 24 30 35 7 7 8 9 4.5 5 7 7 6.5 6.5 7.5 7.5 14 14 19 19 16 16 20 20 3 3 3.5 3.5 M10 x 1.5 M10 x 1.5 M6 x 1.0 M6 x 1.0 17 17 22 28.5 101.5 76 70 81.5 85 37 29.5 34 35 7.5 8 10.5 10.5 0.15 0.15 Data 102.5 0.15 0.15 M12 x 1.75 M8 x 1.25 122 0.15 0.15 14 depth 10.5 M12 x 1.75 M10 x 1.5 125 0.15 0.15 Note 1) This cylinder rod is retracted.

RZQ

345.5 382.5 40 606 37 355 392 CE2 50 631 41 355.5 396.5 ML2B 63 631 44.5 357.5 402 C J G5-S qA port pressurization at initial (retracted) position.

RQ

Add the stroke to calculate the length of intermediate strokes. 7-7-10 10 Series RQ Compact Cylinder with Air Cushion Double Acting, Single Rod Mounting Bracket Dimensions Foot Style Foot style: RQL/RDQL B + Stroke L Bore size (mm) Stroke range (mm) A B LS L L1 LD 32 20 to 100 61.2 37 21 17 38.5 6.6 40 20 to 100 68.2 44 28 17 38.5 6.6 Special cap bolt LH LY 50 30 to 100 75.7 49.5 26.5 18

CXS

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 0.057 CXSJ6 42 + Stroke 32 13.4 CX Basic type 6 Additional dimension for each bore size compared to the basic type 2 mm (20) 3 mm (25) 5 mm (32) CXS6 0.095 58.5 + Stroke 37 16 Series CXS 6, 10, 15, 20, 25, 32 D0.114 CXSJ10 56 + Stroke 42 CXS basic type

CXWM/CXWL

San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com for fixing adjusting bolt (M6) 2-Rc 1/8 Cylinder port 8H7 +0.015 0 2-M6 x 1.0 thread depth 7 2 x 2-MB x 1.25 thread depth 15 2 x 2-8H7 depth 12 +0.015 0 4-6.9 through 4-11 counterbore depth 7 (mm) ZZ Z G SS S Q P L F Model CXWM32-25 CXWM32-50 163 123 27.5 96 27 143 22 41 37

MGQ

50 63 80 100 40 42 52 62 80 90 100 110 140 170 18 22 26 32 38 38 44 44 56 62 36 38 46 56 M4 x 0.7 M5 x 0.8 M5 x 0.8 M6 x 1 M8 x 1.25 M8 x 1.25 M10 x 1.5 M10 x 1.5 M12 x 1.75 M14 x 2 C dimension for a bore size of 32 to 100 is identical to the A dimension. 8-20-4 5 Compact Guide Cylinder Series MGQ Operating Conditions Allowable Lateral Load (Ordinary load) F (N) Stroke (mm) 40 13 21 22 37

Magnetically Coupled Rodless Cylinder Series CY3 B R /CY1 1

TF G 1/8 G 1/8 G 1/8 G 1/4 TN NPT 1/8 NPT 1/8 NPT 1/8 NPT 1/4 Nil M5 x 0.8 Rc 1/8 Rc 1/8 Rc 1/8 Rc 1/4 CY3B15 CY3B20 CY3B25 CY3B32 CY3B40 b C H B d M10 x 1.0 M20 x 1.5 M26 x 1.5 M32 x 2.0 H 4 8 8 10 B 14 26 32 41 C 16.2 30 37 47.3 Part no.

Mechanically Jointed Rodless Cylinder Series MY3 ø16, ø25, ø40, ø63 1

Height (H) (mm) Auto Switch Series 63 16 25 40 MY3A MY3B Can be mounted on both sides from the front direction. 84 27 37 54 MY1B (with air cushion) MY1B 116 37 54 84 Centralized Piping Integrated piping in the head cover is possible. (Refer to page 8-14-26.)

Electric Actuator High Rigidity and High Precision Slider Type Circular arc grooves allow for high rigidity and high precision. Moment resistance*1 *2 61% Improved by up to Table displacement*1 50% Reduced by up to With internal battery-less absolute e

a 4-row circular arc on each side for high rigidity and high precision (zero clearance) MImproved moment resistance Improved Dynamic Allowable Moment 4-row circular arc Steel ball rotation center Work load [kg] (Overhang: 300 mm) Size Moment direction High rigidity guide LEKFS LEFS Rail guide (Rolling contact surface) 7.5 (10% increase) 6.8 25 Pitching (Mep) 32 18 (35% increase) 13.3 40 37

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B 0.2 A 0.2 Bore size A [mm] B [mm] Hexagon socket head cap screw 12 (10 x 2) 52 11 M3 x 0.5 16 (12 x 2) 57 11 M4 x 0.7 20 (16 x 2) 75 14 M4 x 0.7 25 (20 x 2) 84 17 M5 x 0.8 32 (25 x 2) 98 21 M6 x 1.0 40 (32 x 2) 107 27 M8 x 1.25 50 (40 x 2) 135 37 M8 x 1.25 63 (45 x 2) 146 40 M10 x 1.5 80 (56 x 2) 184 50 M12 x 1.75 100 (71 x 2) 219 62 M14 x 2 8.

Compact Guide Cylinder

B 0.2 A 0.2 Bore size [mm] A [mm] B [mm] Hexagon socket head cap screw 12 (10 x 2) 52 11 M3 x 0.5 16 (12 x 2) 57 11 M4 x 0.7 20 (16 x 2) 75 14 M4 x 0.7 25 (20 x 2) 84 17 M5 x 0.8 32 (25 x 2) 98 21 M6 x 1.0 40 (32 x 2) 107 27 M8 x 1.25 50 (40 x 2) 135 37 M8 x 1.25 63 (45 x 2) 146 40 M10 x 1.5 80 (56 x 2) 184 50 M12 x 1.75 100 (71 x 2) 219 62 M14 x 2 7.

Direct Operated Pilot Operated 2-Port Solenoid Valve Refer to pages 7, 9, 11, 25, 35, and 39 for details.

Size 1/8, 1/4, 3/8 Body Material Brass p. 19 JSX20, 30 Port Size 1/8, 1/4, 3/8 Body Material Aluminum p. 21 Bracket Options p. 23 Zero Differential Pressure Type Pilot Operated 2-Port Solenoid Valve JSXZ Series p. 35 How to Order, Flow Rate Characteristics, Applicable Fluid Checklist p. 35 Construction, Common Specifications p. 36 High Flow/ Power Saving Type Working Principle p. 37

Thermo-chiller/Rack Mount Type

HRR050 How to Order yPiping Conversion Fitting (For Water-cooled Refrigeration) p. 37 uPower Supply Cable p. 37 Air-cooled Refrigeration (Single-phase 200 to 230 VAC) p. 17 iCaster Adjuster-foot Kit p. 38 Water-cooled Refrigeration (Single-phase 200 to 230 VAC) p. 17 Specifications VCooling Capacity Calculation Air-cooled Refrigeration (Single-phase 200 to 230 VAC) p. 18 Required

Series 10-SV1000/2000/3000/4000 5 Port Solenoid Valve

Fujitsu Limited 30 31 32 33 34 35 36 37 38 39 No. 473 485.5 498 510.5 523 535.5 548 560.5 573 585.5 L dimension 85.1 87.4 89.6 91.9 94.1 96.4 98.6 100.9 103.1 Weight (g) 105.4 40 41 42 43 44 45 46 47 48 49 No. 598 610.5 623 635.5 648 660.5 673 685.5 698 710.5 L dimension 107.6 109.9 112.1 114.4 116.6 118.9 121.1 123.4 125.6 Weight (g) 127.9 50 51 52 53 54 55 56 57 58 59 No. 723 735.5 748