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Loosen the nut y little by little uniformly. Remove the nut, spring washer and washer. 4-2. Lift the element assembly from the container by means of a dabit or any other lifting device out of the container. Then, lift it vertically so that the guide bar protecting the element does not touch the support ring too much. 4-3.

L NZ RR1 NX E1 L1 MM U1 ND A1 Cotter pin Polishing ball 12 Y-04C 40 16 +0.3 +0.1 38 M14 X 1.5 12 22 24 55 13 25 55.5 3 X 18l Polishing ball 12 Y-05C 50, 63 +0.3 +0.1 16 38 M18 X 1.5 12 27 28 60 15 27 55.5 3 X 18l Polishing ball 18 Y-08C 80 +0.3 +0.1 28 55 M22 X 1.5 18 37 36 71 19 28 76.5 4 X 25l Polishing ball 20 Y-10C 100 +0.3 +0.1 30 61 M26 X 1.5 20 37 40 83 21 38 4 X 30l 83 Knuckle pins

Material Note Description Aluminum alloy Hard anodized Cylinder tube q Aluminum bearing alloy Anodized Collar w Aluminum alloy Chromated Piston e Stainless steel Piston rod A r Stainless steel Piston rod B t Carbon tool steel Phosphate coating Snap ring y Carbon steel Nickel plated Rod end nut u Urethane Bumper i Aluminum alloy Chromated Switch spacer o Magnet !0 NBR Rod seal !

Bore (mm) QW RW S T W X Y Z CY1 32 60 33 140 19 157 33 10.5 7.5 40 84 35 180 21 187 39.5 11 8 MY1 Long stroke Slide bearing Standard stroke Long stroke Ball bushing bearing Standard stroke Long stroke (mm) SCXT Tube bore size A, #1(#1+#3) SCXT Tube bore size B, #1(#1+#3) X Y Z Bore (mm) Stroke range (mm) 32 125, 150, 175, 200, 250, 300 45.5 12.5 12.5 SCXT Tube bore size A, #2(#2+#3) SCXT

Y 4MM depth M XAH7 depth XL +0.2 0 I D 2 x 4J E MB MC KA MA N K N C S + Stroke H B ZZ + Stroke Allowable angle displacement of E to B is 1.5.

double knuckle joint Bracket pin 20: Y-02 25: Y-03 32: Y-04C 40: YHN-04 Material: Carbon steel Material: Rolled steel plate Material: Cast iron RR1 2-D drill through RR1 C1 Chamfer Cf7 NDH10 NDH10 MM C1 Chamfer E1 E1 B NZ NZ NX A NX U1 A1 A1 U1 L1 L1 Part no.

E1 L1 R1 E1 L1 MM NDH10 NX U1 NDH10 NZ A A1 R1 U1 MM NX 32 40 50, 63 80 100 125 32 40 50, 63 80 100 125 20 22 28 40 40 46 30 40 50 65 65 I-03M I-04M I-05M I-08M I-10M I-12M Y-03M Y-04M Y-05M Y-08M Y-10M Y-12M +0.058 0 +0.058 0 +0.070 0 +0.084 0 +0.084 0 +0.084 0 0.10 0.30 0.10 0.30 0.10 0.30 0.10 0.30 0.10 0.30 0.10 0.30 +0.30 +0.10 +0.30 +0.10 +0.30 +0.10 +0.30 +0.10 +0.30 +0.10 0.10 0.30

Loosen the nut y little by little uniformly. Remove the nut, spring washer and washer. 4-2. Lift the element assembly from the container by means of a dabit or any other lifting device out of the container. Then, lift it vertically so that the guide bar protecting the element does not touch the support ring too much. 4-3.

Dimensions [mm] X Metal stopper with bumper2 v v ZHF1 Rubber stopper v v ZHM1 Metal stopper v v ZLC1 Metal stopper Series X Y MM MQ MXQ6 20 11 M3 x 0.5 5 MXQ8 24 13 M4 x 0.7 6 MXQ12 29 17 M5 x 0.8 6 MXQ16 29 23 M6 x 1 10 MXQ20 35 28 M6 x 1 13 MXQ25 44 33.5 M8 x 1.25 15 Metal stopper with bumper2 v v ZLF1 Rubber stopper v v ZLJ1 Shock absorber/RJ v v Y 1 Only for use with a centralized adjuster

3 i y !2 Note) q w e r t i o !0!1 u u Note) Note) Valve element: SUS316 yNote) Piston seal: HNBR Body: Aluminum + Anodized B: 3 port valve VCC13-00 e y r t Note) q w Note) Component Parts Model Part no. Description Orifice body assembly Symbol Component Material Qty. Order qty. A-q A-w A-e A-r A-t A-y A-u A-!1 A-y A-u A-!2 A-!

Then valve element B y connected to the valve element A t is open. When the pilot operated solenoid valve !2 is energized, the pilot air supplied to the bottom of the piston u moves upward to open the valve element A t and closes the valve element B y. Because rod !0 is connected to valve element A t by parallel pin !1.

Table (1) Combination of solenoid valve, pilot valve and power supply voltage Applicable power supply voltage AC 100 Solenoid valve combination symbol Pilot valve symbol Nil Y Nil Nil Y Nil Nil Nil AC 200 AC 110 AC 220 DC 24 DC 12 K1 K1 K2 J1 J1 J2 Q1 Q2 q w e r t y u i Combinations (1) to (8) in the above table are the only possible options. 13-9-2 3 Compact Vacuum Ejector Series ZQ How

14 41 10.5 20 25.6 30 20 12.8 14 IY-G03SUS +0.5 +0.3 +0.058 0 +0.070 0 10 10 18 18 I-G04SUS Y-G04SUS 40 40 M14 x 1.5 42 14 22 30 M14 x 1.5 12 14 42 16 22 41.6 30 36 12 14 IY-G04SUS +0.5 +0.3 +0.5 +0.3 14 14 22 22 I-G05SUS Y-G05SUS 50, 63 50,63 M18 x 1.5 56 18 28 40 M18 x 1.5 16 20 56 20 25 50.6 40 44 16 20 IY-G05SUS +0.070 0 18 18 28 28 I-G08SUS Y-G08SUS 80 80 M22 x 1.5 71 21 38 50 M22 x

Y-P010 Y-P015 -XC19 Intermediate stroke (Spacer type) (25) 93 148 -XC22 Fluoro rubber seals 5 mm stroke is with one switch.

Note 2) Vacuum grease (Fluorine-based, Y-VAC2) is applied to the external seal of the vacuum components.

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com q y $0 $1 20 r !1 e @2 !2 #7 #3 #1 32 w 50, 63, 80 Double acting (DL, DM) @3 !3 !5 #6 o @5 @4 i @1 @6 !0 @7 @9 !6 t u !7 !8 q #8 $1 y Single acting, Spring extend (TL, TM) Double acting with spring (BL, BM) r $0 !1 !

Y-P010 Y-P015 -XC19 Intermediate stroke (Spacer type) (25) 93 148 -XC22 Fluoro rubber seals 5 mm stroke is with one switch.

Description Part number AMK20 AMK30 AMK40 4 Element AMK24P-060AS AMK34P-060AS AMK44P-060AS y 5 Bowl seal C2SFP-260S C32FP-260S C42FP-260S 6 Bowl assembly Refer to Bowl Assembly/Part Nos. When it is time to replace the element, refer to the maintenance instructions in the specific product precautions (page 30). Size 50/60 q w IN OUT t e r y Component Parts No.

N 9 T L A N 1 * S 1 9 T L A N ) a P M ( g i s p e r u s s e r p y l p p u s . x a M ) 5 . 1 ( 0 2 2 ) a P M ( g i s p e r u s s e r p g n i t a r e p o . x a M ) 0 . 1 ( 0 5 1 e g n a r . p m e t g n i t a r e p O ) C 0 6 ~ 5 ( F 0 4 1 ~ 3 2 t n a c i r b u l d e d n e m m o c e R ) 2 3 G V O S I ( 1 # l i O e n i b r u T y d o B C D A e r u s s e r p e n i l d n a k n a t n e e w t e

How to Order 90 AR 30 t y K 03 B Option/Semi-standard: Select one each for a to e. Option/Semi-standard symbol: When more than one specification is required, indicate in alphanumeric order.