MXS Series Air Slide Table

port 2-M5 X 0.8 11 3 J 10 Max.13.5 (With stroke adjuster at retraction end) I 5.5 12 6 Basic type 12 9.5 10 10 5.5 5.5 NA-M5 X 0.8 thread 5.5 deep 21 K KA 21 Stroke adjuster at retraction end 37.5 (With stroke adjuster at extension end) 6 12 3.5 (With stroke adjuster at retraction end) Stroke adjuster at extension end N-M5 X 0.8 thread 6 deep (Helisert) 6 4-M5 X 0.8 thread 7 deep 1 18 (With

REC

Reed switch Solid state switch Relay, PLC 100 V, 200 V Yes Connector Terminal conduit DIN terminal Grommet 12 V 2-wire 24 V PLC Relay, PLC 100 V, 200 V Diagnostic indication (2-color indication) 3-wire (NPN) 3-wire (PNP) 5 V, 12 V IC circuit Grommet 2-wire 12 V Connector IC circuit 3-wire (NPN) 2-wire Terminal conduit 5 V, 12 V Relay, PLC Yes 24 V 12 V 3-wire (NPN) 3-wire (PNP)

3

wire (NPN equivalent) 100 V 12 V Relay, PLC 2-wire 24 V A90V No IC circuit 5 V,12 V 100 V or less 1 Water resistant type auto switches can be mounted on the above models, but in such case SMC cannot guarantee water resistance.

Series MXP/MXPJ6 11- ø6, ø10, ø12, ø16 22- Air Slide Table

M5 x 0.8 Prepared hole diameter 4.2 20 W 0.50.05 D B Vacuum port M5 x 0.8 Piping port 2 x M5 x 0.8 33 32 10 J depth 1.5 3 5.5 5 12 9.5 +0.030 0 4 Section AA B D Mounting base side +0.030 0 depth 1.5 3 Q QL 11-/22-MXP12-25 Without magnet and switch rail 2 x M2 x 0.4 depth 3 8 5.7 3.5 L 20 20 6 x M4 x 0.7 depth 4.5 2 x M3 x 0.5 depth 3.5 (mm) G H J K L M Q QL S V W Z Model 11-/22-MXP12-15

VK300

: M5 x 0.8 [01: 1/8] [14] M5: M5 x 0.8 [01: 1/8] (Mounting hole for manifold) Manual override (Non-locking) 300 2 x M2.5 x 0.45 (Mounting screw) (Mounting screw) Applicable cable O.D: 3.5 to 7 Pg7 (Mounting hole) 3 4 2 x 3.5 63.4 57.9 (Mounting hole) (Bleed hole) 50.4 (P, A, R port) 2 x M5 x 0.8 24 21 3R 1P 62.8 2.3 Refer to grommet type for other dimensions. [ ]: For port size 01 Dimensions

Compact

If the adjusting screw of the speed controller is loosened, the operating speed will increase, so the screw should be tightened completely. m Impact force MXZ12 MXZ16 1.4 2.5 V = mm/s V = mm/s 1.2 2.0 Load weight m [kg] Load weight m [kg] 1.0 1.5 0.8 0.6 1.0 V = 50 V = 50 0.4 V = 100 V = 100 V = 200 V = 200 0.5 V = 500 V = 500 0.2 0.0 0.0 60 50 40 30 20 10 0 0 5 20 15 10 25 30 35 40 45 50

0.4

C3: 3.2 One-touch fitting C4: 4 One-touch fitting C6: 6 One-touch fitting M5: M5 thread Stations 1 2 3 D side U side 2n x C3, C4, C6, M5 C3: 3.2 One-touch fitting C4: 4 One-touch fitting C6: 6 One-touch fitting M5: M5 thread Dimensions Formula L1 = 11n + 20 n: Station (Maximum 24) n L 1 2 3 4 5 6 7 8 9 10 11 12 L1 L2 L3 152 141 130 119 108 64 97 53 86 31 42 75 175 162.5 150 137.5 125

Rotary Gripper Series MRHQ

x 0.5 M5 x 0.8 14.6 closed (mounting screw attachment ) Finger closing port 4 15 3 Max. 7.3 7 +0.03 0 3-4H9 42 78 Depth 6 (one each on three sides) 22.5 M5 x 0.8 Finger opening port 3-R2 29 15 16 10 22 8 31 51.5 18 40 Angle adjustment bolt 6 2-5.5 through 4-M5 x 0.8 3-R2 2-9.5 depth of counter bore 3 Depth 8 (two on opposite side) 11 2 10 +0.03 0 3-4H9 long groove depth 4 M5 x 0.8 Port A

MTS

x 0.8 Rc 1/8 Rc 1/8 M5 x 0.8 M5 x 0.8 M5 x 0.8 M3 x 0.5 Except lock unit, 0.12 MPa for 12 and 16; 0.10 MPa for 20 to 40 respectively.

NVZ1000//3000/5000 4,5 Port Solenoid Valve/Rubber Seal Type

(M5) Type 41 NVVsZ3-41-(05 )1-M5 =r _T Stationsa aslze ot A, B port TtlZ statro^Ms-lto-3, fiomlMst i l : 20 I 20 stations TypE 42 Nvv5z3-42-60rrfrD -.T:tI g"tion"l lfiire ot a, B po* ofr | % NPTF _ B7T | one touch fitting lor /4" tube Type 43 NVV5Z3-4g-6S1-esr --l_T Ststionsa .Slze ot A, B port otTtstatrc.s -T, 20 | 20 stations 83il ffi hrclr fittl.g l"V t b" NVZ3000 Proper Combinatiott"s

Title not found

(M5) Type 41 NVVsZ3-41-(05 )1-M5 =r _T Stationsa aslze ot A, B port TtlZ statro^Ms-lto-3, fiomlMst i l : 20 I 20 stations TypE 42 Nvv5z3-42-60rrfrD -.T:tI g"tion"l lfiire ot a, B po* ofr | % NPTF _ B7T | one touch fitting lor /4" tube Type 43 NVV5Z3-4g-6S1-esr --l_T Ststionsa .Slze ot A, B port otTtstatrc.s -T, 20 | 20 stations 83il ffi hrclr fittl.g l"V t b" NVZ3000 Proper Combinatiott"s

CLQ

CLQB/Without built-in magnet Mounting bolt Mounting bolt Mounting bolt Mounting bolt Model C Model C Model C Model C D D D D M5 x 55l x 60l x 65l x 70l x 75l x 80l x 85l x 90l x 95l x 100l M5 x 60l x 65l x 70l x 75l x 80l x 85l x 90l x 95l x 100l x 105l M5 x 65l x 70l x 75l x 80l x 85l x 90l x 95l x 100l x 105l x 140l x 165l M5 x 75l x 80l x 85l x 90l x 95l x 100l x 105l x 110l x 115l x 150l

High Vacuum Angle Valve

Chemraz is a registered trademark of Greene, Tweed Technologies, Inc. 4 XLA/XLA V Series Specifications Model XLA(V)-16-2 XLA(V)-25-2 XLA(V)-40-2 XLA(V)-50-2 XLA(V)-63-2 XLA(V)-80-2 Valve type Normally closed (Pressurize to open, Spring seal) Fluid Inert gas under vacuum Operating temperature [C] XLA 5 to 60 (High-temperature type: 5 to 150) XLAV 5 to 50 Operating pressure [Pa(abs)] 1 x 106

Table of Contents

The lead wire entry is on D side (LD) in this case. 2n-C3, C4, C6, M5 C3: One-touch fitting for 3.2 C4: One-touch fitting for 4 C6: One-touch fitting for 6 M5: M5 thread Note) 3 position types need two stations.

MGQ

Bore size Standard stroke (mm) MM YY L X K W J V H GA GB TA TB U G T F S DA R C Z NN Q B ML P PW YL (mm) 12 16 20 25 18 50 13 5 16 40 58 5 7.5 5 36 29 56 8 22 6 48 29 12 14 39 7 10, 20, 30, 40, 50, 75, 100 M4 x 0.7 10 M4 x 0.7 M5 x 0.8 7 M4 x 0.7 11 22 54 15 7 18 42 64 2.5 8 5.5 38 33 62 8 25 8 52 33 13 16 43 8 10, 20, 30, 40, 50, 75, 100 M5 x 0.8 13 M5 x 0.8 M5 x 0.8 5 M5 x 0.8 11 20, 30

Air Slide Table Long Stroke Type Series MXY ø6, ø8, ø12 1

Auto switch model Lead wire length (m) 0.5 (Nil) 3 (L) 5 (Z) Load voltage Indicator light Applicable load Perpendicular In-line Special function Type Electrical entry Wiring (Output) AC DC 100 V A90 A90V 5 V, 12 V 100 V or less IC circuit No Relay PLC 24 V Reed switch Solid state switch 2-wire A93 A93V 12 V Grommet Yes A96 A96V IC circuit 5 V 3-wire (NPN equiv.)

CQSY/CQ2Y/CM2Y/CG1Y/CA2Y

NPN) 2-wire 3-wire (NPN) 3-wire (PNP) 2-wire 3-wire (NPN) 3-wire (PNP) 2-wire 3-wire (NPN) 3-wire (PNP) Reed switch Solid state switch A96V A96 5 V IC Yes Yes Grommet A93 M9N M9P M9B F9NW F9PW F9BW F9BA A93V M9NV M9PV M9BV F9NWV F9PWV F9BWV 100 V 24 V 12 V Relay, PLC 5 V, 12 V IC 12 V 5 V, 12 V IC Relay, PLC 24 V Grommet 12 V Diagnostic indication (2-color) 5 V, 12 V IC 12 V 2-wire

CQSY/CQ2Y/CM2Y/CG1Y/CA2Y

NPN) 2-wire 3-wire (NPN) 3-wire (PNP) 2-wire 3-wire (NPN) 3-wire (PNP) 2-wire 3-wire (NPN) 3-wire (PNP) Reed switch Solid state switch A96V A96 5 V IC Yes Yes Grommet A93 M9N M9P M9B F9NW F9PW F9BW F9BA A93V M9NV M9PV M9BV F9NWV F9PWV F9BWV 100 V 24 V 12 V Relay, PLC 5 V, 12 V IC 12 V 5 V, 12 V IC Relay, PLC 24 V Grommet 12 V Diagnostic indication (2-color) 5 V, 12 V IC 12 V 2-wire

Clean Room Rodless Cylinder Series CYP ø15, ø32 1

Auto switch model Electrical entry direction Lead wire length (mm) Load voltage Type Electrical entry Indicator light Wiring (Output) Special function Applicable load 5 (Z) AC DC 0.5 (Nil) 3 (L) Perpendicular In-line Z76 5 V IC circuit 3-wire Yes Reed switch Z73 12 V 100 V Grommet Relay, PLC 24 V 2-wire Z80 5 V, 12 V 100 V or less No IC circuit Y59A Y69A 3-wire (NPN) IC circuit 5 V, 12

2 Finger, 3 Finger Rotary Actuated Air Gripper Series MHR2/MHR3 1

of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com C A 54 M5 x 0.8 Finger opening port M5 x 0.8 Finger closing port 14 M5 x 0.8 Finger opening port M5 x 0.8 Finger closing port 25 25 6-M5 x 0.8 thread depth 10 (A, B, C common view) 50 3-5 depth 10 +0.02 0 16h9 0 0.043 (A, B,