T

(mm) W White R Red H Black (B) White (W) BU Blue Tubing model Y Yellow Blue (BU) Red (R) D G Green C Clear Yellow (Y) Green (G) Clear (C) Orange (YR) MS Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com YR Orange T Length per roll VMG 20 20 m roll Fluid Air/Water Max

Thermo-chiller

Note q Overflow port assembly 1 w Automatic fluid fill assembly 1 e Automatic fluid fill tank assembly PE 1 r M4 screw 2 For securing automatic fluid fill assembly t M6 screw 2 For securing overflow port assembly y Hose clamp 1 For securing automatic fluid fill assembly hose u Hose clamp 1 For securing overflow port assembly hose i Automatic fluid fill label 1 w q r t x 2 x 2 y u i uBall

Mechanically Jointed Rodless Cylinder With Protective Cover Series MY1  W ø16, ø20, ø25, ø32, ø40, ø50, ø63 1

1 u t q w e y !2 i r !4 !0 MX MTS MY CY !9 !8 !5 !7 MG Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com CX MY1WK with side seal D@5 @0 @3 @4 @2 @1 -X 20Data Component Parts No. q w e r t y u i o !0 !

Mechanically Jointed Rodless Cylinder With Protective Cover Series MY1  W ø16, ø20, ø25, ø32, ø40, ø50, ø63 1

1 u t q w e y !2 i r !4 !0 MX MTS MY CY !9 !8 !5 !7 MG CX MY1WK with side seal D@5 @0 @3 @4 @2 @1 -X 20Data Component Parts No. q w e r t y u i o !0 !

Modular F.R.L. Unit

for maintenance A G G H M AW30, 40 Panel fitting dimension D Y T J N W Bracket (option) U IN OUT S Z B C Q Plate thickness AW30: Max. 3.5 AW40: 5 P V IN OUT K Pressure gauge (option) OUT Pressure gauge port size Square embedded type pressure gauge (option) Port size E Drain Min. clearance for maintenance A AW10, AW20 AW30, AW40, AW40-06 Applicable model Drain cock with barb fitting With

Electric Actuator with Integrated Guide

w With single end support and table moved to the end of the stroke Load point distance Load point distance Figure 2.

REA/REB

4 r y !5 w !6 !3 i !0 t !8 u Parts list Description Material Description Material Note Note No. No.

Integrated Controller

Calculate the load factor for each direction. x = Xc/Lx, y = Yc/Ly, z = Zc/Lz 5. Confirm the total of x, y, and z is 1 or less. x + y + z 1 When 1 is exceeded, please consider a reduction of acceleration and work load, or a change of the work load center position and series. Acceleration [mm/s2]: a Work load [kg]: m Work load center position [mm]: Xc/Yc/Zc z y 1. Horizontal 3.

53

Description w HRZD q DI filter vessel (Resin) Circulating fluid return port w Mounting bracket HRW e DI filter inlet tube !0q r DI filter outlet tube HECR t Tapping screw (4 pcs.) u y Mounting screw (4 pcs.) Circulating fluid outlet To circulating fluid outlet HEC u DI control piping assembly e i DI sensor assembly HEB o Nipple (2 pcs.) o !

Air Cylinder: Standard/Non-rotating Rod Double Acting/Single Acting, Single Rod/Double Rod Series NCM ø3/4", ø7/8", ø1 1/16", ø1 1/4", ø1 1/2", ø2" 1

4 6-14-10 11 Series NCM Construction: Single Acting, Spring Return t y q !1 !2 e r !0 w o CJ1 CJP CJ2 CM2 CG1 !

SYJ300/500/700

(For details, refer to page 4-4-25.) 4-4-20 21 3 Port Pilot Operated Solenoid Valve Rubber Seal Series SYJ500 Construction q e r t w y q e r t w y N.C. N.O.

KJ

e r t y No. q w e r t y u i o !

Stopper Cylinder

4 y q r e w @1 @2 !5 !6 t u i o !7 !9 !8 @0 u i !8 !9 !6 @0 o 20 32, 40, 50 w @2 @1 !5 !4 t i i u !8 !9 w @2 u !5 !4 y q !9 @0 @1 t e @0 !6 !6 !8 o y q e o Double acting with spring loaded (B) !0 20, 32, 40, 50 12, 16 !0 Single acting / spring extend (T) !1 !2 !0 12, 16 20, 32, 40, 50 !0 !3 Component Parts No.

Prevents Micro-Bubbles

Dimensions LLCA--C Stations 4-Mounting hole for W Y A K D L3 L2 L1 (Max.

240

e r t y u i o !

CJ2

Component Parts No. q w e r t y u No. i o !0 !1 !2 !3 !

Modular Type Filter Regulator Series AW

w w t t t q q q e IN OUT IN OUT IN OUT y y y e e r r r u u u Drain Drain Drain Parts list Material No.

High Rigidity Slider Type Ball Screw Drive/11-LEJS Series

LEF How to Order LEJ 11 Vacuum type LEJS 11 40 S2 A 500 H LEL Clean series q w e r y u i o !0 !

Table of Contents

w y HA Purge air for dehumidification Purge air for dehumidification AT ID AMG Component Parts AFF Material Description No.

F

..3/8 U04 ..1/2 U32 ..10-32UNF 01 ... 1/8 02 ... 1/4 03 ... 3/8 04 ... 1/2 W I T H O N E-T O U C H F I T T I N G S T Y P E 2 Elbow 3 Universal C O N T R O L M E T H O D 0 Meter Out 1 Meter In Courtesy of Steven Engineering, Inc. !