3 Port Solenoid Valve/

M12 connector pin number X X VP544(R)/744(R)-X538 Internal pilot External pilot External pilot/With check valve 2(A) 2(A) 2(A) y t r y t r y t r w q e w q e w q e 3(R) 3(R) 3(R) y t r y t r y t r w q e w q e w q e 3(R) 3(R) 3(R) 1(P) 1(P) 1(P) X X VP544(R)/744(R)-X555 Internal pilot External pilot External pilot/With check valve 2(A) 2(A) 2(A) y t r y t r y t r 3(R) w q e 3(R) w q e w q e

Rotary Actuator: Free Mount Type/Vane Style Series CRBU2

Applicable shaft type: W (mm) Y L2 L2 max Size (mm) E3 = E1 = Y = 10 3 to 8 5 ( 8 Y) to (Y 1) Y-1 L1 L3 max X Size L2 = L4 = 10 9 (14 X) to (X 1) 15 3 to 9 6 ( 9 Y) to (Y 1.5) Y-1.5 3 to 14 X 1 L1 = 15 10 (18 X) to (X 1.5) 20 3 to 10 7 (10 Y) to (Y 1.5) Y-1.5 3 to 18 X 1.5 L3 = X = 20 10 (20 Xs) to (X 1.5) 30 5 to 13 8 (13 Y) to (Y 2) Y-2 3 to 20 X 1.5 30 12 (22 X) to (X 2) 40 7 to 15 9 (

Air Cylinder

(Rc, NPT, G) Width across flats KA 8 x J H1 MM CJ1 D I C B CJP 15 LH LT Width across flats B1 CJ2 AL A Z W X Y Y X W M LZ LX C 2 x LC (Knock pin position) JCM K 4 x LD LS + Stroke ZZ + Stroke CM2 CM3 With air cushion 2 x P (Rc, NPT, G) Cushion valve, Width across flats WH GA WA GB WB W 10 CG1 CG1 CG3 JMB MB MB1 With rod boot 8 8 h + l 8 h + l CA2 CS1 IJ IJ e e CS2 JH f f l l JW ZZ + l + Stroke

Magnetically Coupled Rodless Cylinder Series CY3 B R /CY1 1

W D 1.6 x P 0.1 x W + W D 5.0 x P 20Data W W > Wv P > Pv Determination of allowable load weight & pressure Inclined operation (For vertical operation, refer to page 8-15-64.)

REA/REB

D 5.0 x P First tentative bore size determination 0.1 x W + W D 5.0 x P W W > WV P > PV Determination of allowable load weight & pressure Inclined operation W WV P PV (For vertical operation, refer to page 10-2-79.)

REA/REB

Inclined operation Vertical operation Horizontal operation Review of load weight and operating pressure First tentative bore size determination W D 1.6 x P First tentative bore size determination 0.1 x Wcos + Wsin D 5.0 x P First tentative bore size determination 0.1 x W + W D 5.0 x P W W > WV P > PV Determination of allowable load weight & pressure Inclined operation W WV P PV

NCA1

1 9/16 1/8 1 1/8 1 1/8 3/8 0.551 5/16-24 2.5 0.3 3/8 3/8 1.26 1.06 1 3/4 1 1.71 2.4 3 5/8 6 5 5/8 6.197 250 (2.5) 7/16-20 3/4 3.1 3/8 3 1/8 1 5/8 1 9/16 1/8 1 1/8 1 1/8 3/8 0.551 5/16-24 3 0 3/8 3/8 1.3 1.06 2 1/4 1 1.75 2.48 3 3/4 6 1/4 5 3/4 6.321 Non-Rotating Rod Front Flange Mounting Type NC A1KF (in) Bore (in) KK A AA B BA C D DD E EA EE F FB G J R TF UF W WF Y LF P ZB 150 (1.5) 7/16

LJ1H

/60Hz) Nil W None N.C.

CA2

3 y e q w !7 r !4 !8 !6 !2 t u !5 o C85 C95 CP95 NCM NCA D!1 !0 i -X Component Parts 20Material Description Note No.

Clean Air Filter

Document No.DOC1018377 PRODUCT NAME Clean Air Filter MODEL / Series / Product Number SFD110- Document No.DOC1018377 Contents Safety Instructions P.2 1. Application P.7 2. Standard specification P.7 3. How to order P.7 4. Construction and Replacement parts P.8 5. Maintenance P.8 6. How to mount P.8 7.

Fluoropolymer Piping Equipment

W is width across flats dimension. (E) Class 6 Class 2 to 5 Metric sizes Inch sizes Connection threads Rc/NPT E H L M Min. port size W Y Connection threads Rc/NPT E H L M Min. port size W Y Model Applicable tubing O.D. Model Applicable tubing O.D.

New

(with surge voltage suppressor) Grommet (DC) W W Specifications Specifications For Air/ U U X X U1 U1 X1 X1 z 11.8 Q F D D z 11.8 Q F 2 x 0.13 Mounting hole 2 x 0.13 Mounting hole Water For Air For Medium R C C R E Vacuum For Oil Construction Dimensions Construction Dimensions E B1 B1 2 x P Port size 2 x P Port size B B DIN terminal Conduit terminal Y Y W W U U X X U1 U1 X1 X1 Cable 0.24

1

e, r, t, y q, w, t, y t Hexagon socket head plug r Plate mounting bolt MB Specifications and external dimensions other than above are the same as standard type.

modular-press-e

Straight type V Elbow type Fitting size One-touch fittings for regulator Straight V 2.5 3 6.5 Elbow W 6 6.5 6 Elbow X 11 11 11.5 Elbow Y 35.5 36 38.5 4, 5/32 6 1/4 8, 5/16 W X Y Note) The O-ring is attached.

Modular F.R.L. Pressure Control Equipment

Straight type V Elbow type Fitting size One-touch fittings for regulator Straight V 2.5 3 6.5 Elbow W 6 6.5 6 Elbow X 11 11 11.5 Elbow Y 35.5 36 38.5 4, 5/32 6 1/4 8, 5/16 W X Y Note) The O-ring is attached.

NCA1

P + Stroke AA D across flats 2-EE (NPTF) C 4-FB (Hole) KK EA MM BA CJ1 B R E CJP CJ2 F W J G TF CM2 WF LF + Stroke UF A ZB + Stroke CG1 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com MB MM KK E A AA B BA C D EA EE F W FB G J R TF UF WF Y P ZB LF Bore size (in) 150

Vacuum Unit

, Optional Specifications/Functions/Applications p. 42 Specific Product Precautions p. 44 Quality of Supply Air p. 51 8 Ejector System Vacuum Unit ZK2mA Series Single Unit Ejector + With Valve + Without Energy Saving Function How to Order w q e r t y ZK2 A A K 5 A L 12 08 u i q Body/Exhaust type e Combination of supply valve and release valve w Nominal nozzle size Symbol Nominal nozzle

NCA1

P + Stroke AA D across flats 2-EE (NPTF) C 4-FB (Hole) KK EA MM BA CJ1 B R E CJP CJ2 F W J G TF CM2 WF LF + Stroke UF A ZB + Stroke CG1 MB LF ZB P Y WF UF TF R J G FB W F EE EA D C BA B AA A KK MM E Bore size (in) 150 (1.5") 3 5/8 4 3/4 2.36 1.71 1 3 3/8 2 3/4 1.43 1.1 1.26 5/16 5/8 3/8 3/8 0.3 9/16 3/8 1 1/8 1 1/8 2.02 3/4 7/16-20 5/8 2 MB1 200 (2") 3 5/8 4 3/4 2.4 1.71 1 4 1/8 3 3/8 1.84

Series VQ Metal Seal/Rubber Seal Body Ported

P kit F kit T kit PS (Side entry) FS (Side entry) Note 1) S kit is composed of a flat cable housing assembly (AXT1002PU20) of q SI unit and w P kit (20 pin).

CRQ2

8 @0 @0 @2 q w r @5 y !5 !6 i q w r @5 y !5 !