AN

Model Model Model Port size Effective area Weight Dimensions (mm) R(PT) (mm2) (g) Model Port size Effective area Weight Dimensions (mm) R(PT) (mm2) (g) AN103-01 10 1 23.5 11 3 36 16 14 17 66 22 19 A B D A B D 1 8 1 4 2504-002 33.9 111 62 30 24 106 64 30 24 113 68 30 24 AN203-02 15 1 4 AN303-03 35 3 8 25 84 25 22 AN403-04 60 1 2 2505-003 45.9 3 8 2506-004 50.0 1 2 310 88.5 48 35 2507-006

High Purity Fluoropolymer

L H M W E Y N (L) LQ2H21-F LQ2H22-F LQ2H23-F LQ2H24-F LQ2H31-F LQ2H32-F LQ2H33-F LQ2H34-F LQ2H35-F LQ2H36-F LQ2H41-F LQ2H42-F LQ2H43-F LQ2H44-F LQ2H51-F LQ2H52-F LQ2H53-F LQ2H54-F 6 4 6 4 10 8 6 10 8 6 12 10 12 10 19 12 19 12 Rc (NPT) Port size W 1/8" 18.5 19 19.9 16 18 39.2 1/4" 21.5 (Y) (M) 44.2 1/4" 21.5 (E) H 43.7 22 26.2 24 24 Class 2, 3 46 3/8" 25 45.5 52 51 57 56 63.5 64.5 65 66

MHF2

hole) 32 31 31 Finger opening port M5 x 0.8 2-10 1.2 1.2 E-E +0.1 0 Close: 0 Open: 201 4-M6 x 1 thread depth 6 40 8-M4 x 0.7 thread depth 4 Mounting thread Attachment mounting thread 52 24 Groove for auto switch mounting 2.3 4 2-3H9 +0.025 0 depth 3 6 16 16 7.5 7.5 3 2-M6 x 1 thread depth 6 Mounting thread Groove for auto switch mounting 25 56 18 Series MHF2 Dimensions MHF2-20D1 Scale: 50% 66

MLGP

66

MLGP

66

AMP

80 90 J K L M N O P Q R S F 80 120 180 G 123 169 237 H AMP220 AMP320 AMP420 76 90 106 76 90 106 2 2.3 3.2 6 7 10 8 8 10 10 12 15 40 50 55 66 80 88 84 100 110 28 34 50 5 5 9 26 32 37 37 37 37 13 16 19 20 22 25 108 155 221 1/4, 3/8 3/8, 1/2 1/2, 3/4 3 Series AMP Model Selection Selection Caution Caution 1.

SYJ300/500/700

) P=16 18.5 (2.3) VP M5 x 0.8 (A port) S070 (Station n) (Station 1) VQ VKF 15 3 3 VQZ 14.5 L4 8 8 M3 x 0.5 (Bracket mounting screw) VZ L plug connector (L) M plug connector (M) DIN terminal (D) M8 connector (WO) VS VFN Approx. 300 (Lead wire length) Applicable cable O.D. 3.5 to 7 76.4 43.6 [50.6] Max. 10 75.1 68.9 28.2 57.6 M8 x 1 48.1 30.6 54.7 [61.7] Approx. 300 (Lead wire length) Pg7 66

3 Port Direct Operated Solenoid Valve Metal Seal, Body Ported 1

52 133 96 140 66 9 DC C Model VS3135-02 VS3135-03 VS3135-04 VS3145-04 VS3145-06 A B Port size Rc 1 4, 3 8, 1 2 64 50.8 163 196 68 60.5 1 2, 3 4 4-16-7

VFR

340 5 285 297 4 242 254 3 199 211 2 156 168 Stations L L1 L2 Formula L1 = 43 x n + 70 L2 = 43 x n + 82 E: Grommet terminal T: Conduit terminal D, Y: DIN terminal Applicable cable O.D. 4.5 to 7 Applicable cable O.D. 6 to 8 Max. 10 Max. 10 Applicable cable O.D. 2.3 to 2.8 : With light/surge voltage suppressor : With light/surge voltage suppressor : With light/surge voltage suppressor 3-5-66

VFS

(Manifold base) (2 position single) VV5FS3-01T-081-03-AP5 VFS3100-5FZ VFS3200-5FZ 1 4 2 1 4 Nil N Rc NPT NPTF G Rc Rc Rc M Mixed 3 8 1 2 T F VV5FS3-10-061-03-A VFS3110-5D 1 4 Option 3-8-65 66 Series VFS3000 Plug-in type, Non plug-in type Manifold with Control Plug-in type: VV5FS3-01T1-AP Station Port size Voltage for release valve Example for manifold Individual EXH spacer (VVFS3000-R-03

VHK

L2 Q L1 H 1(P) 2(A) L3 L4 L5 L6 C D E F G J K 1(P) R 2(A) 2(A) R 3(R)* VHK-01S-M5 VHK-M5-M5 11 41 1.2 26 23 11 3.5 11 M5 M5 M5 18 29.1 16.5 VHK-B1A 29 29.1 44.5 14.5 1 27 22 16.5 26 61.6 58.2 2.0 2.0 54 51 1 8 11 41 8.6 1.2 13 3.5 18 32.6 16.5 13 VHK-B1A 44.5 14.5 1 27 22 16.5 26 VHK-01S-01S 1 8 1 8 30 32.6 65.2 57 VHK-02S-01S 18 41 71.6 39 32.6 39 78 16.5 3.5 11 9.0 9.7 1.2 39 13 47 62 66

Exhaust Cleaner for Clean Rooms AMP Series

80 90 J K L M N O P Q R S F 80 120 180 G 123 169 237 H AMP220 AMP320 AMP420 76 90 106 76 90 106 2 2.3 3.2 6 7 10 8 8 10 10 12 15 40 50 55 66 80 88 84 100 110 28 34 50 5 5 9 26 32 37 37 37 37 108 155 221 13 16 19 20 22 25 1/4, 3/8 3/8, 1/2 1/2, 3/4 1in = 25.4mm 5

Series SYJ500 Rubber seal 3 Port Pilot Solenoid Valve

Station n L1 L2 Station 2 50 41 Station 20 338 329 3 66 57 4 82 73 5 98 89 6 114 105 7 130 121 8 146 137 9 162 153 10 178 169 11 194 185 12 210 201 13 226 217 14 242 233 15 258 249 16 274 265 17 290 281 18 306 297 19 322 313 Port size One-touch fitting 26 Series SYJ500 Type 41 Manifold: Side Ported/SS3YJ5-41Stations -M5, 01 [ ] for AC For 1/8 Grommet (G) For M5 (Pitch) P=16 18 (Pitch) P

Compact Low Friction Cylinder Series MQQ ø10, ø16, ø20, ø25, ø30, ø40

19 4-LD X X LG LS + Stroke Y Y LT 16 10 to 60 51.2 34 10 6.6 4 24 LX LZ 20 10 to 60 54.7 37.5 10 6.6 4 26 A + Stroke 25 10 to 50,75,100 61.2 42 12 6.6 4 30 30 10 to 50,75,100 67.7 48.5 12 6.6 4 33 25, 30, 40 L B + Stroke 40 10 to 50,75,100 70.2 50 12 9 5 39 Bore size (mm) LS LT LX LY LZ X Y M LY 10 19.5 2 38 33.5 48 8 5 LH 16 22 3.2 48 42 62 9.2 5.8 X X LG Y Y 4-LD LT 20 22.5 3.2 52 46 66

Compact Cylinder with Lock Series CLQ

Dimensions/20, 25 Foot type: CLQL/CDLQL Special cap bolt L G B + Stroke Foot type (mm) LY LH S Stroke range Without auto switch With auto switch Bore size (mm) B 78.2 85.7 19.5 22.5 68.2 75.7 A LS A B 34.5 38.5 LS X 5.8 5.8 X 4 3.2 29.5 32.5 44.5 48.5 5 to 50 5 to 50 20 25 4-6.6 LZ LX LS + Stroke A + Stroke Bore size (mm) G LH L L1 LX LY LZ X S 14.5 15 27 31 28.5 32.5 24 26 48 52 42 46 62 66

Compact Guide Cylinder with One-way Lock Series MLGP ø40, ø50, ø63

M10 x 1.5 9 32 32 46 22 8.6 14 1/4 47 40 130 60 146 110 130 50 M10 x 1.5 14 28 39 39 58 22 8.6 14 1/4 55 50 130 70 158 124 142 63 M10 x 1.5 9 M10 x 1.5 WA WB Bore size (mm) VB X XA XB XC XL YY YL Z st25 2566

Plate Cylinder with Lock Series MLU

D-79W D-F7NTL D-F7F D-F7BAL D-A73C D-A80C D-J79C D-A79W D-F7LF D-P5DWL D-F7V D-F7WV D-F7BAVL D-J79C D-A79W D-A7 D-A80 D-F7NTL D-A7 D-A80 D-A73C D-A80C D-P5DWL A Hs 34.5 41.5 49.5 58.5 A 9 9 9.5 11 Hs 37.5 44.5 52.5 61.5 A 2 2 2.5 4 Hs 35.5 42.5 50.5 59.5 A 5 5 0 1 Hs 39 46 54 63 A 5 5 5.5 7 Hs 33 40 48 57 Size A 4.5 4.5 5 6.5 Hs 32 39 47 56 Hs A 10 10 10.5 12 25 32 40 50 0.5 2 56.5 66

Non-rotating Double Power Cylinder Series MGZ ø40, ø50, ø63

(mm) Stroke range Bore size (mm) I J K M B D C E KA GA GB H 40 50 63 78 92 110 M6 x 1.0 M8 x 1.25 M8 x 1.25 25 25 25 10 14 14 45 55 68 21 26 32 36 46 53 34.5 40 46.5 40 45 50 46 55 66 59 71 82 23.5 28 34.5 to 1000 to 1000 to 1000 Stroke range Bore size (mm) MM XA XL Y ZZ MA MB MC N P S 40 50 63 M6 x 1.0 M8 x 1.25 M8 x 1.25 12 16 16 6 6 6 9.5 12.5 15 178 195 221 16 16 16 12 15 15 44 50 56

2 Finger, 3 Finger, 4 Finger Air Gripper Parallel Type Series MHS

AB 52 62 NA 18 24 L 4H9 6H9 NB 10h9 12h9 CA 9 12 CB 20 22 0 -0.036 0 -0.043 +0.030 0 +0.030 0 Model MHS2-50D MHS2-63D SC 12 14 RB 34 38 O 5 5.5 4H9 5H9 VA Q 14 17 RA 52 66 VB 4 5 WA WB 2 2.5 XA XB 4 5 YC 7 7.5 +0.030 0 +0.030 0 +0.074 0 +0.074 0 +0.030 0 +0.030 0 52H9 65H9 4H9 5H9 7

Hydraulic Cylinders

(mm) Rod end male threads a b c e f g h Bore size (mm) 20 11 15 M10 x 1.25 6 10 23 66 25 14 18 M12 x 1.25 6 12 26 71 32 21 25 M16 x 1.5 7 14 35 86 40 26 30 M20 x 1.5 7 19 40 95 50 31 35 M24 x 1.5 8 24 46 106 63 41 45 M30 x 1.5 9 30 58 125 80 56 60 M39 x 1.5 14 41 77 155 100 71 75 M48 x 1.5 21 50 101 197 7 Series CHKDB Auto Switch Specifications Auto Switches: Proper Mounting Positions and