HRX-OM-Q033

Name Alarm flag 1 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Name Alarm flag 2 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Name Alarm flag 3 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Name Alarm flag 4 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Bit Name Explanation 0 Low level in tank 1 High circulating fluid discharge temp. 2 Circulating fluid discharge temp. rise 3 Circulating fluid discharge

Refrigerated Air Dryers

Finalize the model number. 7 Refer to pages 7, 11, 14, 19. Refer to pages 22 and 25.

Direct Operated Pilot Operated 2-Port Solenoid Valve Refer to pages 7, 9, 11, 25, 35, and 39 for details.

Direct Operated Pilot Operated Refer to pages 7, 9, 11, 25, 35, and 39 for details. 2-Port Solenoid Valve Improved environmental resistance due to the stainless steel coil cover [IP67 enclosure] Refer to pages 46 to 50 for details.

Refrigerated Air Dryer

Power cable outlet 0.7 [17 mm] (Wire diameter 0.4 [9 to 11 mm]) IDFB6E to 15E-11 IDF-S0086 ZFC F One-touch fitting (KQ2H1002AS) is not included.

Series 10-SZ3000 5 Port Solenoid Valve Cassette Type Manifold

Power supply terminal Power supply terminal The circuits above are for the double wiring specification with up to 11 or 12 stations. Connect to SOL.A for a single solenoid.

DOC1001322

Displays the run and stop status of the product. (4) Operating condition display P.5-11 (5) Compressor operating condition display Displays the run and stop status of the compressor. P.5-11 (6) Pump Operating condition display Displays the run and stop status of the pump.

IDX-OM-W013

Specification for Option R 11 1 Safety instructions . 11 1 11 2 Specifications . 11 1 11 3 Power supply connection procedure . 11 2 11 4 Cautions for handling the GFCI . 11 3 11 5 Electric circuit . 11 3 Chapter 12 Specification for Option S 12 1 Safety instructions . 12 1 12 2 Specifications . 12 1 12 3 Electric circuit . 12 1 Chapter 13 Specification for Option T 13 1 Safety instructions

VFS

12 11 12 10 11 11 12 11 11 6.3 6.8 12 12 12 12 10 11 10 10 11 11 6.5 6.8 0.18 0.15 0.18 0.15 0.18 0.18 0.16 0.15 0.22 0.22 2 position 3 position 40 or less 0.63 1,000 Single VFS4100 1 2 VFR 3 8 15 or less 0.75 Double VFS4210 VFS4200 1,200 1 2 3 8 1 2 3 8 1 2 3 8 1 2 VP4 Closed center Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650

ARM10/11

1 Compact Manifold Regulator Series ARM10/11 F.R.L.

Valve Single Unit

) SY3000-11-24 Mounting Screw Tightening Torques SX5000 SY5000-11-10 M2: 0.17 Nm M3: 0.8 Nm M4: 1.4 Nm SX7000 SY7000-11-9 Warning When mounting a valve or spacer on the manifold base or sub-plate, etc., those mounting directions are determined.

IDX-OM-W011

M 11 M IDF4E/6E/8E/11E/15E1 11-1 ( ) 11-2 ADM200 IDF4E15E1-10-M IDF4E15E1-20-M IDF-S0087 IDF-S0090 1.0MPa 1 1 2 / AC100V(50/60Hz) AC200V(50/60Hz) 4W IDF Series 11-1 11 1 IDX-OM-W011 11 M 11-3 Rc1/2 32 25 1) 2830Nm 30 (5) (17)(30) 2 2 Rc1/2 11-4 1-1 IDF Series 11-3 11 2 IDX-OM-W011 12 R 12 R IDF4E/6E/8E/11E/15E1 12-1 12-2 1 AC100V AC200V INOUT IDF4E

Precision Air Slide Table Series MXP ø6, ø10, ø12, ø16

Specifications W A D With shock absorber (mm) 11-MXPJ6 11-MXP10 11-MXP12 11-MXP16 Model MXPJ6 MXP10 MXP6 MXP12 MXP16 Model Cylinder bore size (mm) 6 10 12 16 Surface C to surface A 0.02 Parallelism Surface D to surface B 0.02 M5 x 0.8 M3 x 0.5 Port size Surface C to surface A 0.004 Traveling parallelism Fluid Air Surface D to surface B 0.004 Action Double acting M dimension tolerance 0.05

Air Cylinder Series MB

11 11 D-A59W 13 13 13 14 14 15 D-A3, A44 9 9 10 11 11 11 10 D-Y59, Y69 D-Y7P, Y7V D-Y7W, Y7WV 7 5.5 5.5 7 7.5 6.5 5.5 D-Y7BAL 6 3.5 3.5 3.5 4 4.5 5 D-F5, J5 D-F5W, J59W D-F5BAL, F5NTL D-F59F 3.5 4 4 4.5 4.5 4.5 5 5.5 5.5 6 6 6 D-F5LF 5 9 4 9 4 9 4 10 4.5 10 4 11 6 D-G39, K39 11 D-P5DWL 4.5 4.5 These values are given as guidelines including the hysteresis and are not guaranteed.

Compact Manifold Regulator

PBT Material 30 40 0.5 g Weight 30 6.5 (R) 2 4.5 1 16 4 11 745 ARM10F Series Made to Order Specifications: Please contact SMC for detailed dimensions, specifications and lead times.

Speed Controller with One-touch Fitting Stainless Steel Type Elbow Type/Universal Type AS-FG Series Push-lock type

-02-11(S)A 3/8" 15.9 17.4 23 41.2 26.1 62.5 15.6 46 (46) AS33l1FG-03-07(S)A 1/4" 3/8 19 11.2 12.9 16.6 20.2 36 21.4 50.1 42.3 40.7 37.1 35.5 13.3 32 (33) AS33l1FG-03-09(S)A 5/16" 13.2 37.1 23.5 52.2 14.2 33 (34) AS33l1FG-03-11(S)A 3/8" 15.9 17.4 23 41.2 26.1 54.8 15.6 37 (38) AS43l1FG-04-11(S)A 3/8" 1/2 24 (23.8) 15.9 17.4 18.8 25.6 46.4 (46.3) 26.1 61.2 50.8 49.2 43.7 42.1 15.6 58 (57) AS43l1FG

Speed Controller with One-touch Fitting Stainless Steel Series Elbow Type/Universal Type AS-FG Series

AS431FG Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa 12, 13 10, 11 10, 11, 12 Flow rate (L/min (ANR)) Flow rate (L/min (ANR)) 08, 09 06, 07 Number of needle rotations Number of needle rotations 681 AS-FG Series Construction: Elbow Type Meter-out type M5 type U10/32 type AS3201FG-02 Meter-in type M5 type U10/32 type AS3211FG-02 No.

Rotary Actuator

Size A B C D (g6) DD (h9) F H J K With auto switch Without auto switch U W BA CA CB Valve dimensions Key dimensionsNote) S SB SC SD SE S VH VJ VK VL b l 50 62 48 46 15 25 2.5 36 M8 x 1.25 depth 8 5 156 (189) 1.5 5 14.5 33 144 (177) 98 17 17 9.5 7.5 39.5 4 21 8 5 0 0.030 25 63 76 60 57 17 30 2.5 41 M10 x 1.5 depth 12 5 175 (213.5) 1.5 5 21.5 33 163 (201.5) 117 19.5 20 11 8 39.5 11 21 8 6

High Vacuum Angle Valve

55 41 67 29 XLC-50-2 70 181 79 31 11 75 52 76 29 9 XLC-63-2 88 206 100 39 11 87 95 70 77 33 9 XLC-80-2 90 244 117 46 11 114 110 83 104 39 9 *1 The E dimension applies when the heater option is included.

ARM10/11

1 Compact Manifold Regulator Series ARM10/11 F.R.L.

CXWM/CXWL

Note 3) For 16, 20 and 25, strokes up to 275, and for 32, strokes up to 225 are 11 available as made-to-order. (-XB11) Applicable Auto Switch/Refer to page 8-30-1 for further information on auto switches.