Dedicated Controller

BIT 2 5 Program designation <1> BIT 3 Pro-no. bit2 5 18 STP-NO BIT 1 Pro-no. bit3 18 6 BIT 2 Stp-no. bit1 6 19 BIT 3 Stp-no. bit2 19 7 BIT 4 20 Stp-no. bit3 7 The terminal that designates the step to be executed. Used when executing steps (position movement). (Set by the binary system.)

Smooth Cylinder Series CQSY

5.5 M3 x 0.5 M4 x 0.7 M5 x 0.8 M6 x 1.0 32 38 47 52 5 6 8 10 3.5 3.5 4.5 5 15.5 20 25.5 28 3.5 3.5 5.4 5.4 M4 x 0.7 M4 x 0.7 M6 x 1.0 M6 x 1.0 6.5 6.5 9 9 7.5 7.5 9 11 7 7 10 10 4 4 7 7 0.5 0.5 1 1 Note 1) Threaded through hole is used for the standard of 20 with 5 to 10 mm strokes and 25 with a 5 mm stroke. 3

Diaphragm Type Direct Acting 2/3 Port Solenoid Valve for Chemicals Series LVM

M5 thread OUT IN Symbol Plate PEEK PEEK PEEK Diaphragm EPDM FKM Kalrez A B C 11R 2 N.C. (Symbol 1) IN (Symbol 2) OUT Option Nil Nil Bracket Manual override Bracket, Manual override 1 2 3 12R N.O.

VF1000-OMP0001

5000 5 5 5 5 / / / / ( ( ( ( ) ) ) ) ( ( ( ( ) ) ) ) 3 5m 30 ( ) 1 ()ISO VG32 2 ()ISO VG32 7 VF1000-OMP0001 VF1000/3000/5000 VF1000/3000/5000 VF1000/3000/5000 VF1000/3000/5000 (E) (T) DIN (D) L (L) M (M) DC +DIN +-1 2 (G) A C S DIN DIN DIN DIN DIN D 68mm Y 4.57mm T 68mm E 2.32.8mm E, T 1.25-3, 1.25-3S, 1.25Y-3N, 1.25Y-3S D,Y R Y Z EZTZDZLZMZ AC24V (+) D C S VF1000 VF1000 VF1000

2/3 Port Solenoid Valve for Chemicals

M5 thread OUT IN Symbol Plate PEEK PEEK PEEK Diaphragm EPDM FKM Kalrez A B C 11R 2 N.C. (Symbol 1) IN (Symbol 2) OUT Option Nil Nil Bracket Manual override Bracket, Manual override 1 2 3 12R N.O.

Clean Exhaust Filter

A One-touch fittings KP series B Dimensions (mm) Model A B C SFE4G 6 68.5 16.5 SFE5H 8 79 20.5 SFE7J 10 89 24 Bracket SFE-BR3 14 5 3.4 (15.5) 12.5 5.4 5.4 14 24 (20) SFE-BR4/5/7 B C (J) H D (F) G A E E Dimensions (mm) Model A B C D E F G H J SFE-BR4 30 16 7 4.5 7.5 (24.5) 17 15.5 (19.5) SFE-BR5 30 10 8.2 4.5 8.1 (29) 20 18 (23) SFE-BR7 34 14 7.35 4.5 9.8 (35) 24 20 (27.3) ( ): Reference dimensions

Compact Guide Cylinder with One-way Lock Series MLGP ø40, ø50, ø63

GC GA XAH7 depth XL 2-Rc P PB A + Stroke E B + Stroke FA FB C + Stroke PA + Stroke GB Q G J K IE S XAH7 depth XL (mm) MLGPM, MLGPL common dimensions Standard stroke (mm) Bore size (mm) B C DA FA FB G GA GB GC H HA IA IB IC ID IE 14 11 100 44 16 12 44 54 10 120 M6 34 52 14 4 14 40 25, 50, 75 100, 125, 150, 175 200, 250, 300, 350 12 13 107 44 20 16 47 64 148 M8 35 64 19 50 11 7 14 115 49 20

Wireless System

Various actuators Applicable Manifold Solenoid Valves SY Series (IP67) SV Series (IP67) S0700 Series (IP40) VQC Series (IP67) 5 C O N T E N T S Wireless System EX600-W Series Wireless slave unit Wireless master unit Accessories How to Order qEnd Plate Bracket p. 17 Wireless Unit p. 7 wValve Plate p. 17 Digital Input Unit p. 7 eReinforcing Brace p. 17 Digital Output Unit p. 7 rSeal

EXxx-OMQ0015CN

Content 0 1 1 1 2 Reserved 3 1 4 1 5 Reserved 6 1 7 1 -67No.EX-OMQ0015CN Unit diagnostic status 0 7 6 5 4 3 2 1 0 Byte 2 Bit No. Content 0 10 1 11 2 12 3 13 4 14 5 15 6 16 7 17 Unit diagnostic status 1 7 6 5 4 3 2 1 0 Byte 3 Bit No.

Series MXQ 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

Bottom view of MXQ8-30 132214.6 K 3.8 7 27 23 6 4 23 Z ZZ G (NN 1) x H H 12.5 12.5 5.7 5.7 A B 3.2 3.2 6.5 7 7 14 1 3H9 ( ) depth 3 +0.025 0 A B 4 3H9 ( ) depth 3 +0.025 0 NN x M4 x 0.7 thread depth 8 HA GA A-A B-B (mm) Model F 25 25 26 32 46 50 N 4 4 6 6 6 6 G 7 14 8 8 31 H 25 28 31 29 30 NN 2 2 3 3 4 4 GA 13 14 29 39 37 61 HA 19 28 27 31 58 60 I 11 10 12 14 13 12 J 17 28 40 52 78 105

Refrigerated Air Dryer

MPa C C C 0.7 IDF FS 40 32 10 Three-phase 380 VAC 35 25 3 Three-phase 400 VAC IDFA IDFA Outlet air pressure dew point Power supply voltage Power consumption Operating current Electric specifications kW A 2.5 4.5 2.7 5.3 2.7 5.9 2.8 5.1 3.4 6.3 3.4 6.3 IDFB Applicable circuit breaker capacity Note 4) IDH A 15 Heat discharge from condenser kW 7 8 10 7.5 9 11.5 ID Refrigerant Refrigerant charge

LG1H

A: Acceleration time B: Constant velocity time C: Deceleration time D: Resting time (0.4sec.)

Series MHZ2 11- ø10, ø16, ø20, ø25 22- Air Gripper

Fittings & Tubing Air Cylinders Rotary Actuators Side tapped mounting [1/N1] Through-holes in open/close direction [2/N2] 4 x MM through Thread for mounting attachment C C B A 4 x H through Hole for mounting attachment S S O O B A (mm) (mm) MM M2.5 x 0.45 M3 x 0.5 M4 x 0.7 M5 x 0.8 C 2 2.5 4 5 H 2.9 3.4 4.5 5.5 B 5.7 7 9 12 B 5.7 7 9 12 Model A 3 4 5 6 Model A 3 4 5 6 11221122112211221 N1

FQ1

glycol 1, 4-dioxane 49.5 (43) Ether MTBE TAME INLET OUTLET Pyridine Amine Butyl amine Fuel C: Methanol = 75/25 Gasohol Fuel C: Methanol = 50/50 Fuel C: Methanol = 25/75 Consult SMC for fluids other than those listed. 6 Series FQ1 Made to Order Consult SMC for detailed dimensions, specifications and lead times. 4 Nonstandard Elements for Precision Cleaning -X0 X0 FQ101 Option Element size

Filter for Cleaning Solvent Quick Change Filter Series FQ1

glycol 1, 4-dioxane 49.5 (43) Ether MTBE TAME INLET OUTLET Pyridine Amine Butyl amine Fuel C: Methanol = 75/25 Gasohol Fuel C: Methanol = 50/50 Fuel C: Methanol = 25/75 Consult P/A for fluids other than those listed. 6 Series FQ1 Made to Order Consult P/A for detailed dimensions, specifications and lead times. 4 Nonstandard Elements for Precision Cleaning -X0 X0 FQ101 Option Element size

Tie-rod Type Low Pressure Hydraulic Cylinder Double Acting/Single Rod Series CHA ø 40, ø 50, ø 63, ø 80, ø 100, ø 125, ø 160

d (H8) M A B C D G L F E K J H N Applicable cylinder type Bore size (mm) Spring pin P Order no.

ITV-E

W hi t e I nput si gnal Bl ue G N D ( CO M M O N ) Bl ack M oni t or out put Brow n Bl ue W hi t e Bl ack W i ri ng di agram ( Pow er suppl y and i nput si gnal ) Current /Vol t age t ypeI TV 0 0I TV 0 1I TV 0 2I TV 0 3 Pow er suppl y 24VD C I TV 0 0Brow n + 1215VD C I TV 0 1Bl ue Pow er suppl y I nput si gnal 420m AD C I TV 0 0 W hi t e 020m AD C I TV 0 1 + Bl ack 0 5VD C I TV

O

W hi t e I nput si gnal Bl ue G N D ( CO M M O N ) Bl ack M oni t or out put Brow n Bl ue W hi t e Bl ack W i ri ng di agram ( Pow er suppl y and i nput si gnal ) Current /Vol t age t ypeI TV 0 0I TV 0 1I TV 0 2I TV 0 3 Pow er suppl y 24VD C I TV 0 0Brow n + 1215VD C I TV 0 1Bl ue Pow er suppl y I nput si gnal 420m AD C I TV 0 0 W hi t e 020m AD C I TV 0 1 + Bl ack 0 5VD C I TV

O

W hi t e I nput si gnal Bl ue G N D ( CO M M O N ) Bl ack M oni t or out put Brow n Bl ue W hi t e Bl ack W i ri ng di agram ( Pow er suppl y and i nput si gnal ) Current /Vol t age t ypeI TV 0 0I TV 0 1I TV 0 2I TV 0 3 Pow er suppl y 24VD C I TV 0 0Brow n + 1215VD C I TV 0 1Bl ue Pow er suppl y I nput si gnal 420m AD C I TV 0 0 W hi t e 020m AD C I TV 0 1 + Bl ack 0 5VD C I TV

Support Guide/11-LEFG Series

58 74 6H9 (+0.030 0 ) depth 7 7 A (Table traveling distance) L (86) 13 61 90 13 85 68 53.8 (68) 33.5 31 Vacuum port Rc1/8 n x 6.6 76 B D x 150 (= E) 150 60 Dimensions [mm] Dimensions [mm] Model L A B n D E 11-LEFG40-S-150 354 157 328 4 150 11-LEFG40-S-200 404 207 378 6 2 300 11-LEFG40-S-250 454 257 428 11-LEFG40-S-300 504 307 478 11-LEFG40-S-350 554 357 528 8 3 450 11-LEFG40-S-400 604 407