2.0% F.S. or less (0 to 50C, based on 25C)NPN open collector Max. load current: 80 mA; Max. applied voltage: 30 V; Internal voltage drop: 1 V or less (with load current of 80 mA)PNP open collector Max. load current: 80 mA; Internal voltage drop: 1.5 V or less (with load current of 80 mA)NPN or PNP open collector Flow rate per pulse: 100 l/pulse, 10.0 ft3/pulseON time per pulse

Precision Clean Regulator

100 120 140 0 10 20 30 40 50 60 70 80 90 100 Flow rate L/min (ANR) Flow rate L/min (ANR) SRP1101-01 Conditions/Inlet pressure: 0.5 MPa SRP1-01 Conditions/Inlet pressure: 0.7 MPa 0.25 0.50 0.20 0.40 Outlet pressure MPa Outlet pressure MPa 0.15 0.30 0.10 0.20 0.05 0.10 0.00 0.00 0 20 40 60 80 100 120 140 160 180 200 0 20 40 60 80 100 120 140 Flow rate L/min (ANR) Flow rate L/min (ANR) Pressure

2.0% F.S. or less (0 to 50C, based on 25C)NPN open collector Max. load current: 80 mA; Max. applied voltage: 30 V; Internal voltage drop: 1 V or less (with load current of 80 mA)PNP open collector Max. load current: 80 mA; Internal voltage drop: 1.5 V or less (with load current of 80 mA)NPN or PNP open collector Flow rate per pulse: 100 l/pulse, 10.0 ft3/pulseON time per pulse

50 kPa to 0.75 MPa1.0 MPa0 to 999999 lNPN open collector Maximum load current: 80 mA; Internal voltage drop: 1 V or less (with load current of 80 mA) Maximum applied voltage: 30 V; 2 outputsPNP open collector Maximum load current: 80 mAInternal voltage drop: 1.5 V or less (with load current of 80 mA); 2 outputsNPN or PNP open collector (same as switch output)Illuminates up when output is

50 kPa to 0.75 MPa1.0 MPa0 to 999999 lNPN open collector Maximum load current: 80 mA; Internal voltage drop: 1 V or less (with load current of 80 mA) Maximum applied voltage: 30 V; 2 outputsPNP open collector Maximum load current: 80 mAInternal voltage drop: 1.5 V or less (with load current of 80 mA); 2 outputsNPN or PNP open collector (same as switch output)Illuminates up when output is

50 kPa to 0.75 MPa1.0 MPa0 to 999999 lNPN open collector Maximum load current: 80 mA; Internal voltage drop: 1 V or less (with load current of 80 mA) Maximum applied voltage: 30 V; 2 outputsPNP open collector Maximum load current: 80 mAInternal voltage drop: 1.5 V or less (with load current of 80 mA); 2 outputsNPN or PNP open collector (same as switch output)Illuminates up when output is

50 kPa to 0.75 MPa1.0 MPa0 to 999999 lNPN open collector Maximum load current: 80 mA; Internal voltage drop: 1 V or less (with load current of 80 mA) Maximum applied voltage: 30 V; 2 outputsPNP open collector Maximum load current: 80 mAInternal voltage drop: 1.5 V or less (with load current of 80 mA); 2 outputsNPN or PNP open collector (same as switch output)Illuminates up when output is

50 kPa to 0.75 MPa1.0 MPa0 to 999999 lNPN open collector Maximum load current: 80 mA; Internal voltage drop: 1 V or less (with load current of 80 mA) Maximum applied voltage: 30 V; 2 outputsPNP open collector Maximum load current: 80 mAInternal voltage drop: 1.5 V or less (with load current of 80 mA); 2 outputsNPN or PNP open collector (same as switch output)Illuminates up when output is

50 kPa to 0.75 MPa1.0 MPa0 to 999999 lNPN open collector Maximum load current: 80 mA; Internal voltage drop: 1 V or less (with load current of 80 mA) Maximum applied voltage: 30 V; 2 outputsPNP open collector Maximum load current: 80 mAInternal voltage drop: 1.5 V or less (with load current of 80 mA); 2 outputsNPN or PNP open collector (same as switch output)Illuminates up when output is

50 kPa to 0.75 MPa1.0 MPa0 to 999999 lNPN open collector Maximum load current: 80 mA; Internal voltage drop: 1 V or less (with load current of 80 mA) Maximum applied voltage: 30 V; 2 outputsPNP open collector Maximum load current: 80 mAInternal voltage drop: 1.5 V or less (with load current of 80 mA); 2 outputsNPN or PNP open collector (same as switch output)Illuminates up when output is

50 kPa to 0.75 MPa1.0 MPa0 to 999999 lNPN open collector Maximum load current: 80 mA; Internal voltage drop: 1 V or less (with load current of 80 mA) Maximum applied voltage: 30 V; 2 outputsPNP open collector Maximum load current: 80 mAInternal voltage drop: 1.5 V or less (with load current of 80 mA); 2 outputsNPN or PNP open collector (same as switch output)Illuminates up when output is

50 kPa to 0.75 MPa1.0 MPa0 to 999999 lNPN open collector Maximum load current: 80 mA; Internal voltage drop: 1 V or less (with load current of 80 mA) Maximum applied voltage: 30 V; 2 outputsPNP open collector Maximum load current: 80 mAInternal voltage drop: 1.5 V or less (with load current of 80 mA); 2 outputsNPN or PNP open collector (same as switch output)Illuminates up when output is

50 kPa to 0.75 MPa1.0 MPa0 to 999999 lNPN open collector Maximum load current: 80 mA; Internal voltage drop: 1 V or less (with load current of 80 mA) Maximum applied voltage: 30 V; 2 outputsPNP open collector Maximum load current: 80 mAInternal voltage drop: 1.5 V or less (with load current of 80 mA); 2 outputsNPN or PNP open collector (same as switch output)Illuminates up when output is

50 kPa to 0.75 MPa1.0 MPa0 to 999999 lNPN open collector Maximum load current: 80 mA; Internal voltage drop: 1 V or less (with load current of 80 mA) Maximum applied voltage: 30 V; 2 outputsPNP open collector Maximum load current: 80 mAInternal voltage drop: 1.5 V or less (with load current of 80 mA); 2 outputsNPN or PNP open collector (same as switch output)Illuminates up when output is

50 kPa to 0.75 MPa1.0 MPa0 to 999999 lNPN open collector Maximum load current: 80 mA; Internal voltage drop: 1 V or less (with load current of 80 mA) Maximum applied voltage: 30 V; 2 outputsPNP open collector Maximum load current: 80 mAInternal voltage drop: 1.5 V or less (with load current of 80 mA); 2 outputsNPN or PNP open collector (same as switch output)Illuminates up when output is

50 kPa to 0.75 MPa1.0 MPa0 to 999999 lNPN open collector Maximum load current: 80 mA; Internal voltage drop: 1 V or less (with load current of 80 mA) Maximum applied voltage: 30 V; 2 outputsPNP open collector Maximum load current: 80 mAInternal voltage drop: 1.5 V or less (with load current of 80 mA); 2 outputsNPN or PNP open collector (same as switch output)Illuminates up when output is

50 kPa to 0.75 MPa1.0 MPa0 to 999999 lNPN open collector Maximum load current: 80 mA; Internal voltage drop: 1 V or less (with load current of 80 mA) Maximum applied voltage: 30 V; 2 outputsPNP open collector Maximum load current: 80 mAInternal voltage drop: 1.5 V or less (with load current of 80 mA); 2 outputsNPN or PNP open collector (same as switch output)Illuminates up when output is

50 kPa to 0.75 MPa1.0 MPa0 to 999999 lNPN open collector Maximum load current: 80 mA; Internal voltage drop: 1 V or less (with load current of 80 mA) Maximum applied voltage: 30 V; 2 outputsPNP open collector Maximum load current: 80 mAInternal voltage drop: 1.5 V or less (with load current of 80 mA); 2 outputsNPN or PNP open collector (same as switch output)Illuminates up when output is

50 kPa to 0.75 MPa1.0 MPa0 to 999999 lNPN open collector Maximum load current: 80 mA; Internal voltage drop: 1 V or less (with load current of 80 mA) Maximum applied voltage: 30 V; 2 outputsPNP open collector Maximum load current: 80 mAInternal voltage drop: 1.5 V or less (with load current of 80 mA); 2 outputsNPN or PNP open collector (same as switch output)Illuminates up when output is

50 kPa to 0.75 MPa1.0 MPa0 to 999999 lNPN open collector Maximum load current: 80 mA; Internal voltage drop: 1 V or less (with load current of 80 mA) Maximum applied voltage: 30 V; 2 outputsPNP open collector Maximum load current: 80 mAInternal voltage drop: 1.5 V or less (with load current of 80 mA); 2 outputsNPN or PNP open collector (same as switch output)Illuminates up when output is