Model: Top-Ported, Serial Interface, SI Unit Specification: PROFINET - 16 Outputs - Connector M12, SI Unit Output Polarity: Negative Common, Valve Stations: 6 Stations, P, E Port Location: U Side, SUP/EXH Block: Internal Pilot, P, E Port Size (One-touch Fitting): ø3/8", Mounting: -, DIN Rail Option: -

Model: Top-Ported, Serial Interface, SI Unit Specification: EtherNet/IPâ„¢ - 32 Outputs - Connector M12, SI Unit Output Polarity: Negative Common, Valve Stations: 14 Stations, P, E Port Location: Both Sides, SUP/EXH Block: Internal Pilot, P, E Port Size (One-touch Fitting): ø3/8", Mounting: DIN Rail Mounting w/o DIN Rail, DIN Rail Option: -

Model: Top-Ported, Serial Interface, SI Unit Specification: EtherNet/IPâ„¢ - 32 Outputs - Connector M12, SI Unit Output Polarity: Positive Common (or None), Valve Stations: 8 Stations, P, E Port Location: Both Sides, SUP/EXH Block: Internal Pilot, P, E Port Size (One-touch Fitting): ø3/8", Mounting: DIN Rail Mounting, w/DIN Rail, DIN Rail Option: for 15 Stations; Longer Rail than Total Length

Model: Top-Ported, Serial Interface, SI Unit Specification: EtherNet/IPâ„¢, Input Block Stations: None, Input Block Type, Common Spec: w/o Input Block, Valve Stations: 8 Stations, P,E Port, SUP/EXH Block Assembly: Port Location Both Sides, Internal Pilot, P, E Port Size: ø10 One-touch Fitting, Mounting: DIN Rail Mounting w/DIN Rail

AS-FPQ/AS-FPG

0 w w u TMH u r r ASD t e AS e !4 AS-FE !4 !3 KE !3 q q AS-FG i i y AS-FP AS-FP !5 AS-FM Meter-in type M5 type AS-D AS-T ASP ASN AQ ASV AK VCHC ASR ASQ Component Parts No.

AS

Dimensions Meter-out type Meter-in type F E D B A C J G K H L B Model A MIN. MAX. MIN. MAX.

Speed Controller with Residual Pressure Release Valve with One-touch Fitting AS  FE Series

Flow Direction Symbols on Body How to Order Meter-out type Meter-in type Indication symbol 2 1 01 06 2 AS 1 F E S K Hexagonal lock nut Body size 2 3 4 1/8, 1/4 standard 3/8 standard 1/2 standard With seal Symbol Applicable tubing O.D.

Speed Controller with One-touch Fitting Stainless Series Series AS-FG Elbow Type/Universal Type 1

Description Material Note ASF Body A PBT q Handle PBT w Body B Stainless steel 303 e Needle Stainless steel 303 r Needle guide Stainless steel 303 t Seat ring Stainless steel 303 y Lock nut Stainless steel 303 u U seal HNBR i Cassette POM, Stainless steel o Seal NBR !0 O-ring NBR !1 O-ring NBR !2 O-ring NBR !3 O-ring NBR !4 Gasket M5 type only NBR/stainless steel 304 !

Speed Controller with One-touch Fittings Panel Mount Type Series AS



1F-3 In-line Type 1

2 e !1 No. q w e r t y u i o !0 !1 !2 Material Note Description Body A Handle Body B Needle Needle guide Lock nut Panel nut U seal Spacer Cassette Packing O-ring PBT PBT Brass Brass Brass Brass Brass HNBR PBT POM, Stainless steel NBR NBR Electroless nickel plated Electroless nickel plated Electroless nickel plated Electroless nickel plated Electroless nickel plated Note) !

AS-FPQ/AS-FPG

0 w w u TMH u r r ASD t e AS e !4 AS-FE !4 !3 KE !3 q q AS-FG i i y AS-FP AS-FP !5 AS-FM Meter-in type M5 type AS-D AS-T ASP ASN AQ ASV AK VCHC ASR ASQ Component Parts No.

CG5-S

X165US inch rod option dimensional changes R V Integral clevis type (E)/CG5ENS Dim.

Series 10-MGF ø40, ø63, ø100 Guide Table

Fittings & Tubing Air Cylinders Rotary Actuators V D C D C E F H A + Stroke B + Stroke GB GA T X PP (Rc, NPT, G): Relief port 2 x P (Rc, NPT, G) Port for extension Port for retraction When the cylinder is extended KA: T-slot for hexagon bolt 4 x M K KB KC 6-K (6 positions) 10 10 M12 x 1.75 M10 x 1.5 M8 x 1.25 M Bore size Standard stroke (mm) GB D A 170 140 10 10 38 38 36.5 E B F KC 11 11

Series MHZ2 11- ø10, ø16, ø20, ø25 22- Air Gripper

(Mounting thread) Note) If the fitting attached to the port interferes with the auto switch, please use the extension fitting assembly supplied with the air gripper. 4 x AA thread depth AB (Mounting thread) Prepared hole diameter AC through (Mounting hole) Note) AD depth AE AF depth AG S H When open AS When closed AR When closed AT M T D P B R N G Q F E C A 2 x AH thread depth AJ (Mounting

Slit Valve

1 OPEN o e CLOSE OPEN For 200 mm wafer For 300 mm wafer XGT22 XGT31 XGT22 (200 mm wafer type) Component Parts XLA No.

Vacuum Saving Valve

Construction Vacuum generator side Vacuum generator side u w r t No.0.8 e y For the direction of the product, refer to 4 of back page 3. Pad side q u Description Component Parts Material Surface treatment No.

ZSE5/ISE5

~~===rr-N"~e-_ ~~ =4It PNP, and analog output.

CV/MVGQ

Applicable series: CVJ5, CVJ3 e Installation and removal of the sockets containing lead wires OInstallation: Insert the sockets into the square holes of the connector (marked and , respectively), pinch the lead wires to push them in entirely, allowing the hook on each socket to engage with the seat of the connector, thus locking the socket in place.

Related Products: Heavy Duty Auto Drain Series ADH4000 1

Description Body Material Note Baking finish q Aluminum alloy w w Baking finish Aluminum alloy Housing e Baking finish Aluminum alloy Drain guard y r Foam rubber Float IN t Pilot valve Stainless steel + Rubber y Lever Resin u Flushing button Brass t i Orifice r o Diaphragm Rubber Replacement Parts 10-1 e No. Description Part no. ADH-D400 Note 10-2 !

CJ1

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Component Parts MB No. q w e r Description Material Brass Brass Stainless steel Brass Body Brass Gasket PVC NBR NBR NBR Steel Steel Note Electroless nickel plated Electroless nickel plated Rod cover Cylinder tube Piston Seal retainer MB1 Electroless nickel

MGC

View A-A Bore size (mm) Stroke range (mm) AF AE AD AC AB AA A G F E D C B AP H 20 25 32 40 50 75, 100, 125, 150, 200 25 62 15.5 13 11 84 5.6 90 45 24 106 M5 x 0.8 depth 10 9.5 depth 6 22 M6 x 1 depth 10 30 65 16.5 13 15 89 6.8 103 45 26.5 120 11 depth 8 M6 x 1 depth 12 M8 x 1.25 depth 14 27 75, 100 125, 150 200, 250 300 35 70 16.5 13 15 94 6.8 118 50 26.5 135 11 depth 8 M6 x 1 depth 12 M8