SMC Corporation of America
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SMC's PFM dual color digital flow switch was developed initially to detect microchip component adsorption in vacuum, and early clogging in both filter and nozzle applications.  The series is incredibly compact and lightweight compared to existing flow sensors.  The PFM is available in four maximum flow rate options 10, 25, 50 and 100 /min, and is suitable for use with air, nitrogen, argon

4 6N J 2 1 R 1 DIN 10 10 )DIN I/O (m) 16 16 2 0 2 0 25 25 1.5 1 1 L L 3 3 3 3 5 5 5 5 K K 2 LECP6 ( NPN NPN (mm) PNP PNP 10 LECP1 1 LECP1 ( 1 NPN NPN 1P 1P PNP PNP 4 4 10 (CR) AN LECPA ( AP AN LECPA 6 6 16 16 NPN NPN (FKM) K K 20 10 20 10 AP PNP PNP S S (m) 25 14 25 14 8 8 8 8 A A 1.5 1 1.5 1 10 10 ( B B 3 3 3 3 15 15 F F C C 5 5 5 20 20 5 ( () R R S S 15 - / P.42

2.7 k DC24 V DC24 V 3 0 V 3 0 V 4 4 1 1 2.7 k 2.7 k 5 5 FE FE FE FE IP67 -20No.EX-OMN0035CN-A (2)EX600-DXC 1 24 V() 3 0 V() 4 EX600-DXPC EX600-DXNC 1 24 V 1 24 V *1 DC24 V 3 0 V DC24 V 3 *2 0 V 4 4 2.7 k 2.7 k 1EX600-DXPC1 2EX600-DXNC1 IP67 2 OFF 0.5 mA () OFF 0.5 mA 3 0.5 mA SI -21No.EX-OMN0035CN-A (3)EX600-DXE 1 0 2 2 3 4 4 6 5 8 6 10 7 12 8 14 9 NC 10 24 V()

-10 (INC) c 10[mm] 0 10 20 30 40 50 [mm] -27- 4 a b c d e f g h i j k No. 1 2 mm/s mm mm/s^2 mm/s^2 % % mm/s % mm mm mm 0 ABS 100 20.00 3000 3000 80 40 30 100 10.00 20.00 20.00 No.00[mm] 20[mm]20[mm] 1 10 W [mm] c [mm] k 20 0 10 20 30 40 50 [mm] INP 2 k INPON g 30 W [mm] c [mm] k 20 0 10 20 30 40 50 [mm] INP INPOFF () k g BUSYONOFF -28- 5 a b c d e f g h i j k No. 1 2 mm/

10mm/s LESH8R LESH16R LESH25R J K J K J K 4 6 15 23.5 43 77 7 10.5 25 39 71.5 128.5 [N] 10 15 35 55 100 180 *20%F.S.

/min. (28 LPM) RECOMMENDED FILTRATION 5 micron Model Number Description V-800-10-W/K 0-10" Hg Vacuum regulator with adjusting knob V-800-10-W/S 0-10" Hg Vacuum regulator with 1/4" adjusting shaft V-800-10-W/OS 0-10" Hg Vacuum regulator with slotted adjusting shaft V-800-30-W/K 0-30" Hg Vacuum regulator with adjusting knob V-800-30-W/S 0-30" Hg Vacuum regulator with 1/4" adjusting shaft V-

Ma = K Mmax Work piece mounting coefficient K: Fig. 3 Allowable moment coefficient : Graph 2 Max. allowable moment Mmax: Table 4 Mar = 36 Mrmax = 36 K = 1 = 1 ' = 0.39/36 = 0.011 May = 1 x 1 x 18=18 Mymax = 18 K = 1 = 1 = 0.39/18 = 0.022 Find the load factor of the static moment.

Model Product series AC20/AC25/AC30/AC50/AC55/AC60 AC20A/AC30A/AC40A/AC50A/AC60A AC20B/AC25B/AC30B/AC50B/AC55B/ AC60B AC20C/AC25C/AC30C/AC40C AC20D/AC30D/AC40D AR20 (K) /AR25 (K) /AR30 (K) /AR40 (K) / AR50 (K) /AR55 (K) /AR60 (K) AW20 (K) /AW30 (K) /AW40 (K) /AW60 (K) F.R.L. combination Option/Part No.

D e D e Effective thread Effective thread 13 13 ZZ + 2 strokes S + Stroke 9 A K f N N f h + Stroke K A l + Stroke 9 l h Without air cushion S ZZ Stroke range Bore size (mm) Effective thread length Width across flats C B MB J K MM N P V W S ZZ A D Ee11 F G H 32 40 50 63 80 100 32.5 38 46.5 56.5 72 89 84 84 94 94 114 114 13 14 15.5 16.5 19 19 4 4 5 5 5 5 M6 x 1.0 M6 x 1.0 M8 x 1.25 M8 x 1.25

mounting groove (4 locations) Width across flats 8 (4 locations) 18.2 M5 x 0.8 (Finger closing port) 4 x M5 x 0.8 (Piston rod thread and rack thread) 5.5 2 x M5 x 0.8 Vacuum port H 7 8.4 16.8 0.5 7 9 7 12.5 8 6 6 O S 15 31 (46) 20 K 12.4 15 15 7 7 4 4 20 When open F 10 4 x M4 x 0.7 through (Thread for mounting attachment) 34 10 When open G (mm) J 24 39 57 H 116 158 196 G 92 134 172 F 72

.: J (NPT thread: K inch) Purge air for dehumidification Purge air for dehumidification (Maintenance space 100mm or more) Option: P Port size L A B C D E Model F G J H K 97 224 8 119 [126] 5/16 114 249 10 147 [154] 3/8 83 187 53 165 62 113 212 54 190 82 IDG10, IDG10H IDG20, IDG20H Values inside [ ] are for NPT threads 1/4, 3/8 15 Membrane Air Dryer Series IDG Dimensions (mm) 1in = 25.4mm

Flat Finger Type [3] 4-MM thread depth L Attachment mounting thread K J A A D G B D B K J F C S W O Unit: mm Weight g F G Open Closed 2 2.5 3 4 J K MM L B C D Model A W 5.4 7.4 4.45 5.8 7.45 8.9 M2.5 x 0.45 M3 x 0.5 M4 x 0.7 M5 x 0.8 5 6 8 10 55 115 235 420 5.2 8.3 10.5 13.1 10.9 14.1 17.9 21.8 2.45 3.05 3.95 4.9 6 8 10 12 5 8 10 12 +2.2 0 2H9 2.5H9 3H9 4H9 1.4 1.4 1.6 2 0 -0.2 0 -0.2 0 -

H S + Stroke ZZ + Stroke NA I 3 (mm) Effective thread length (mm) IA (tolerance) Bore size (mm) Stroke range (mm) A B1 B2 D F GA GB H H1 H2 I K MM P S NN N NA NB NC ZZ -0.020 -0.053 -0.020 -0.053 -0.025 -0.064 -0.025 -0.064 20 18 13 26 10 16 12 8 41 5 8 30 5 M8 x 1.25 1/8 81 M22 x 1.5 13 26 19 15 138 23 f8 15.5 to 800 25 22 17 32 12 16 12 8 46 6 8 32 5.5 M10 x 1.25 1/8 81 M24 x 1.5 13 28

LJ1H1021B-K (12mm lead) LJ1H2021A-K (10mm lead) It is not necessary to mount a regenerative absorption unit when the work piece load, speed, and stroke are within the actuator rating. However, use of a regenerative absorption unit is recommended under all conditions.

2-M3 x 0.5 depth 3.5 For rail mounting 8 2-M2 x 0.4 depth 3 For magnet mounting 8.5 10.7 6-M5 x 0.8 depth 7 20 20 L (mm) L K J V H S Z M MA W Model 36 40 93 82 58 20 102 40 30 65 MXP16-20B 42 50 119 108 70 30 128 56 46 75 MXP16-30B 14

Basic (B): CG1WB 1011With rubber bumper 2 x M5 x 0.8 Relief port F GA F GA Port on rod end Port on rod end Width across flats KA 2 2 Width across flats KA RA RA 2 x Rc P 1 1 0 E0.05 MM H1 H1 MM D D I 0 E0.05 C R0.4 R0.4 ZZ + 2 Stroke S + Stroke H A AL Width across flats B1 Width across flats B1 H + Stroke A AL K K 8 x J NA C Female rod end effective depth A1 MM ZZ + 2 Stroke H + Stroke H

LJ1H102PB-K 100W to 600 Non-standard motor LJ1H102NB-K 100W to 600 Matsushita Electric Industrial Co., Ltd.

Surface of panel Surface of panel OUT SMC MPa MPa MPa MPa MPa MPa K K K K K K P P P P P P C C C C C C U U U U U U O O O O O O S S S S S S L L L L L L H H H H H H to to to to to to IN 58 Bottom of panel Bottom of panel 45 1 I N 1 I N 1 I N C S M C S M C S M 1 I N 1 I N 1 I N 2 OUT 2 OUT 2 OUT C S M C S M C S M 2 OUT 2 OUT 2 OUT In case of ARG30, dimension in height can be reduced by approx

LJ1H102PB-K 100W to 600 Non-standard motor LJ1H102NB-K 100W to 600 Matsushita Electric Industrial Co., Ltd.