SMC Corporation of America
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.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com ZSE3 Vacuum Q CE marked products Note) Only available with output specifications 21 and 23.

Construction 3 1 Component Parts Description Material No. q w e r t y u 4 Solenoid coil Body Fixed armature Armature Return spring Poppet Diaphragm assembly Resin Stainless Steel Stainless Steel Stainless Steel NBR NBR, Resin 2 5 6 7 4.3-5 Series VQ20/30 Dimensions/Series VQ20 In-line style/Grommet(G) VQ21A1-mGm-m Dotted line: Bracket mounting style (-F) 4.3-6 Series VQ20/30 For Dry Air,

Case Replacement Parts q Gasket for cover case AL-204H AL-205H ZFA100 Part no. ZFA200 No. Description Selection Warning 1.

Material Surface treatment Description NBR, Silicone rubber, Urethane rubber, Fluoro rubber, EPR ZM Pad q Adapter plate Aluminum w e ZH Piston rod r Stainless steel Spring Carbon steel Hard chrome plated ZU Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com t Aluminum

5 0 8 9 , 4 2 2 A O 0 7 1 + 0 0 0 3 80mm t-08 3 5 8 1 4 6 (26) (28 o:3') (91) (36) (71) 225\ (37) | , A 0 0 0 3 9 ' ' ' 0 0 r 2 M26x1 5 0 9 6 1 1 0 I 79 + 0.0033 1 5 7 4 1 3 1 4 6 3 2 7 t-10 (28) (30 T31) (105) (37) (40) (83) e0 +o oa4) Millimeters in Parentheses DOUBLE CLEVIS BORE PAFT# Al dE, Lr MM R, v, dND NX NZ 0 4 7 + 0 0 0 3 1 0 6 M 1 8 x 1 5 2 3 6 1 0 6 1 1 0 1 5 0 v v v + 0 m 3 q

OTo reuse the lubing, cut off the previously lodged portion of lhe lubeOThen pull it back gently to make sure that il has a positive seal. o Rectangular Multi-Connector Series KDI/t Dimensions ..) q E a 6 L 7 4 1 . = z a 3i' -l _*r>'L ;l ann , l:i Panel mount cutout 5/32" l4mm) KDM20 .9 g 7.64" (194) | Panel mount cutout 3-hexagonal screws 5/32" l4mm) Rectangular Multi-Connector Series KDM

Operation tinre @ntinuous (ShourVday) =1.Syears Clean Air for Clean Room Seruice Clean roorn Comgessed ait C Supa Mist Seoarator q/silem B/Blcrrviq air b partsdebning ODerry pcint: -58'F or less (Atnospheric p(essure), OEfficiency: Less than 100 particles 0.3 microns ol1 larger per cubic foot.

Part No. cD-P11 cD,p12 Load voltage 100 vAC ziovac 24VDC 2smA 12.5mA 5omA Inch Contacl Proleqtion gox/Dimensions 0.80 1_20 1.40 ot7,.., 15 iffiqffi Hou To MountThe Auto Stoitch fllL_ #F*t-q -s-ffi*""*"-'" *-jil-|--.e*',**" @712 OTo set swikh posili,m, loGen tfie scre$/ and rno f|e sviitcfr to fie desircd po6itbn. f ighten tre soewtotre recommended brque (0.9" 1.1 lb indr). o Series NCDJP

1.06 V4-16 0.88 i1.62 o.78 5.12 15O (1%l o.437 '14-20 0.75 o.749 0.34 1.56 o.25 0.63 1.25 o.aa 1.50 0.91 4.50 Series NCM Rear Piuot NCMC o Series NCMW Parts Lid kit:at ivl#tat ns|}gks ) Fhd co\,t Aluminum alloy Vvhite alumite ) q&d.tib Stainless steel Pirao.l Aluminum all,oy Chrqnate a Pistfr!

Contact Drotection bg)dlnternal circuit cD.P11 Oul Blue (black) (+)oLn Browll (rcd) C)Out Blue (brack) Solid State Wiring Method 3 vi irc q'51rn U/hen potte| solrce lor siu bh and load s commom) --19toul_Jn.a1 .

(l) 3 Vertical movement '1 .9+lo 13.23 o".2.55 l"+3 a 5.25 l"+35 a.17.5 44.O 3.4+l; aa.2 _ 4.2+la lo: D$tance iiom mounling sudace to cenler ,q'60 lo+6.0 cr.105 lo+7[ o:Drslance I'on moJnLnq sLnace Io load s co.1er ol . Nore) Priicipally, itbe@ms imposible 10 operal.

Be sure to loosen the locknut before adjusting the knob by hand. r After adjustment, tighten lock screw for tamper proof operation, Fluid-Air/Supply 1 05psig (7 kgt / cm2l NSR 1110 to-32^lrn {l',151 NSR 3110 NSR 4110 %tlPf 75 75 g q 6 0 il IJ I 6 a 60 d 5 F "ff 45 * 3 0 d 30 1 5 0 o o 7 1 4 2 1 2 A 3 FWSSM P r e ssur e C -lwr a ct eri st i e s Supply pressure 1OOpsig (7kgt/cm2l, Secondary

B Locking ' Special Order option t Consult factory for availability NVF 1100-ODO{IT (drx ) Lamp and Sorga Protec-tion Z rv/Lamp/Surge Protection S dsurqe Protection Onlv L.mp and S dsurge Only BRACKET (Sutfix "F') .[ otMEr{stoNs A B c D E F 1.35 (34.41 1.34 (34.11 0.61 115.4) 0.83 Q 1 t 1.76 1.77 (44.9) Millamte.s in Parenthe$s rxfENsroNs A B c D E F G H J K It N o P o R 64.7) 0.83 (21) l.t

Information that can be copied includes the following: q Pressure set values, w Range settings, e Display Units, r Output modes, t Response times. 5% R.D. Displayed pressure value When CH1 is copied to CH2, CH3, and CH4, information of OUT1 in CH1 will be copied. When CH2, CH3, or CH4 is copied to CH1, information of OUT1 in CH2, CH3, or CH4 will be copied only to OUT1 in CH1.

76 64.5 34 40 32 79.5 80 68.5 34 45 35 8-3-7 8 Series MXU Dimensions: MXU16 (mm) Stroke (mm) 5 10 15 20 25 30 TS Z S NS LS BS 65.5 66 52 24 24 20 65.5 66 52 24 24 20 75.5 76 62 34 35 30 75.5 76 62 34 35 30 85.5 86 72 40 45 40 90.5 91 77 40 50 45 8-3-8 9 Compact Slide Series MXU Construction MXU6 (6) MXU10 (10) MX MTS MY CY MG CX MXU16 (16) D-X With auto switch 20Data Component Parts No. q

Under certain circumstances, the use of an electronic type pressure gauge is recommended. 22 0 0 43.5 58 72.5 87 101.5 Supply pressure (psig) 142 Return to Menu Specialty Regulators NARM Series Regulator for Manifold NARM1000, 2000 Dimensions Dimensions Symbol A B C D E F G H J K M P Q R Model NARM1000 .18 .98 1.34 .83 .71 2.20 .63 .35 .71 .75 2.05 .35 .45 .19 (4.5) (25) (34) (21) (18) (

0 q 9 Valve seat PTFE IRV 10 O-ring Fluororubber u w 11 Diaphragm Fluororubber VEX 12 Gasket Fluororubber SRH 13 Pressure regulator spring Steel wire Pressure regulator screw assembly 14 SRP SRP SRF ITV Dimensions IC ITVH 30.5 Bracket ITVX PVQ 40 A B SMC P K U C S O H L 36 VY1 51 31 30 Panel mounting hole VBA VBAT 40 AP100 8.5 28 20 72.5 (when set = 75.5) Bleed exhaust hole 6.5 28 1.6 Port

Guide) Flow Rate/Operating Frequency (Supply pressure 0.25 MPa, 24 VDC, Duty ratio 1:1) Flow rate 150 High flow 2 High frequency type Medium flow 100 3 1 Super energy-saving type Ultra high frequency type Low flow 50 150 250 350 400 500 550 650 1200 (Hz) (L/min) Operating frequency Specifications Driver Continuous energization Power consumption OFF response time 50 L/min 100 L/min 150 L/min q

9 12 Adjusting bolt Stainless steel q 13 Return spring Stainless steel @2 @3 14 Cushion Polyurethane elastomer !0 15 Poppet Polyurethane elastomer 16 Plate Steel + Electroless nickel plated @4 17 Spring Stainless steel !8 18 Guide ring Resin e 19 Guide ring Resin !

How to Order VFN212 02 N 5 F D Z CE marking NAMUR Interface Nil Q CE marked product Voltage Thread type 1 100 VAC, 50/60 Hz 2 200 VAC, 50/60 Hz 3 110 to 120 VAC, 50/60 Hz 4 220 VAC, 50/60 Hz 5 24 VDC 6 12 VDC 7 240 VAC, 50/60 Hz Nil Rc (PT) F G (PF) N NPT Electrical entry Solenoid G Grommet E Grommet terminal T Conduit terminal D DIN terminal Nil Single solenoid D Double solenoid Manual