SMC Corporation of America
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Tight mounting is possible for panel mount in vertical or horizontal position. 34.5 103.5 Compact profile Setting/Display resolution: 1/1000 More user-friendly controls Compound pressure: 0.2kPa Positive pressure: 0.001Mpa Raised rubber button controls are clearly set apart, simple to operate, soft to the touch.

S = 38mm VCA21 200 300 400 500 600 700 VCA21 VCA31 VCA31 VCA41 VCA41 VCA41 Other 200 400 400 600 800 1000 1200 1. Material HNBR: Nitrile hydride rubber 500 700 500 1000 1500 800 1000 1200 1000 500 Flow rate Q l/min (ANR) Viewing the graph The sonic range pressure to generate a flow rate of 500l/min (ANR) is P = 0.64MPa for a 3 orifice, and P = 0.35MPa for a 4 orifice.

1000 1000 800 800 Smooth exhaust valve T msec 600 600 400 400 200 200 0 0 25 40 50 63 80 25 40 50 63 80 Size Size Response time when closed (including pneumatic valve) Operation time when closed (vacuum valve only) Response time when open (including pneumatic valve) Operation time when open (vacuum valve only) 35 Series XL High Vacuum Angle Valve 2 As a function of pilot pressure 1MPa =

Lead wire length Nil 6 10 15 20 25 30 300 mm (Standard) 600 mm 1000 mm 1500 mm 2000 mm 2500 mm 3000 mm How to order When requiring a vacuum unit equipped with valves with lead wires of 600 mm or more, specify the vacuum module valves without the standard connectors and order the required connector ass'ys separately. Example) ZR120S1-K15MZ-EC . 1 pc.

VDC Pressure Characteristics Pressure Characteristics 1 i 6 _ 102 9 s 3 o t 5 o 1000 2000 3000 4000 5000 F ow rale f/min(ANBI 20 30 40 200 400 600 400 looo Fow rale i/m n(ANF) 1 3 1 102 e7 T3 d 7 3 58 a a a 29 1 5 1 5 o 4 8 1 2 1 6 2 A 2 4 2 8 400 800 1200 1.in 2004 2400 200 400 600 800 1000 Belief flo\i/ i.

E/P Pressure Regulator Manufacturing Pneumatics Worldwide Electro-Pneumatic Regulator Compliant Electronic Vacuum Regulator How to Order ITV 2030 SEN DUQ00833 2 X26 Port Size 1 2 3 4 1/8 (1000) 1/4 (1000, 2000) * 3/8 (2000, 3000) * 1/2 (3000) Body Size 1010 1030 1050 2010 2030 2050 2090 3010 3030 3050 Made to Order * Note: 2090 available with 1/4 port only.

Supersonic cleaning Drying Double-packing Sensor Clean room class 1000 Shipment 381 For Deionized Water and Chemical Liquids Digital Flow Switch PF2D Series RoHS How to Order Remote Type Sensor Unit PF2D5 13 20 1 C Flow rate range Option (Refer to page 391.) 04 20 40 None e-con connector x 1 pc.

Minimum Bending Radius (mm) 1/8 9.4 5/32 12.7 3/16 19.1 1/4 25.4 5/16 31.8 3/8 38.1 1/2 50.8 5/8 63.5 3/4 76.2 Minimum Burst Pressure (psi) at 24C (75F) 1000 1200 1200 1200 1000 1000 950 900 800 Material Nylon 12 (Polyamide) *Note: Recommended operating fluid and temperature range provides best performance and longest life.

Flow Rate Characteristics Relief Characteristics IR3220-04-A Supply pressure: 0.7 MPa IR3220-04-A Back pressure: 0.7 MPa 0.7 0.7 0.6 0.6 Set pressure [MPa] Set pressure [MPa] 0.5 0.5 0.4 0.4 0.3 0.3 0.2 0.2 0.1 0.1 0 0 1000 2000 3000 4000 5000 6000 0 0 1000 2000 3000 4000 5000 Flow rate [L/min (ANR)] Flow rate [L/min (ANR)] Pressure Characteristics Supply pressure: 0.3 to 1.0 MPa Set pressure

Refer to the LECA Operation Manual for installation. e CC-Link direct input type (LECPMJ) is not CE-compliant. t Lead [mm] Symbol LEFS16 LEFS25 LEFS32 LEFS40 A 10 12 16 20 B 5 6 8 10 y Stroke [mm] 50 50 to to 1000 1000 * Refer to the applicable stroke table.

Standard Strokes Bore size (mm) Standard strokes (mm) 40 50 63 80 100 125 160 25 to 1000 Accessories (Options) 25 to 1000 25 to 1000 25 to 1300 Bracket pin, Knuckle bracket, Knuckle pin, Knuckle, Y-type knuckle, Rod end nut 25 to 1500 50 to 1300 Refer to pages 408 and 409 for part numbers and dimensions. 50 to 1500 Note) Refer to pages 232 and 233 to determine stroke limitation depending

Symbol LEFS16 LEFS25 LEFS32 LEFS40 A 10 12 16 20 B 5 6 8 10 Stroke [mm] 100 100 to to 1000 1000 Refer to the applicable stroke table. [UL-compliant products] When conformity to UL is required, the electric actuator and controller/driver should be used with a UL1310 Class 2 power supply.

Note 11) If the product is used at altitude of 1000 m or higher, refer to Operating Environment/Storage Environment (page 210) Item 14 * For altitude of 1000 m or higher. 198 A

Fig. 9-6 EX9-AWTS -38No.EX-OMY0014-A For power supply connector (1) Cable with power supply connector Part number: EX500-AP0 1 0S Connector specifications S Straight A Angle Cable length (L) 1 1000 [mm] 5 5000 [mm] EX500-AP0x0-S EX500-AP0x0-A Item Specifications Pin No.

(Example: If a product for 0 to 1 MPa can indicate pressure by 0.001 MPa, the indication resolution is 1/1000.) Indication resolution Indication LED The LED that turns on when the switch output is ON. Indication unit The unit of pressure used in the display. K Key lock function Function that prevents changes to the settings of the Pressure switch (disables button operation).

(Example: If a product for 0 to 1 MPa can indicate pressure by 0.001 MPa, the indication resolution is 1/1000.) Indication resolution Indication LED The LED that turns on when the switch output is ON. Indication unit The unit of pressure used in the display. K Key lock function Function that prevents changes to the settings of the Pressure switch (disables button operation).

(Example: If a product for 0 to 1 MPa can indicate pressure by 0.001 MPa, the indication resolution is 1/1000.) Indication resolution Indication LED The LED that turns on when the switch output is ON. Indication unit The unit of pressure used in the display. K Key lock function Function that prevents changes to the settings of the Pressure switch (disables button operation).

(Example: If a product for 0 to 1 MPa can indicate pressure by 0.001 MPa, the indication resolution is 1/1000.) Indication resolution Indication LED The LED that turns on when the switch output is ON. Indication unit The unit of pressure used in the display. K Key lock function Function that prevents changes to the settings of the Pressure switch (disables button operation).

(Example: If a product for 0 to 1 MPa can indicate pressure by 0.001 MPa, the indication resolution is 1/1000.) Indication resolution Indication LED The LED that turns on when the switch output is ON. Indication unit The unit of pressure used in the display. 11 - NO. ZQ-OM01501 No.

12 11 10 9 8 7 6 5 4 3 2 1 0 Data Pressure measurement value Diagnosis OUT2 OUT1 Unit specification and pressure measurement value (PD) Series Unit Rated pressure range Display / settable range MPa 0 to 1.0 -0.105 to 1.050 * kPa 0 to 1000.0 -105 to 1050 kgf/cm2 0 to 10.197 -1.07 to 10.71 ISE20B bar 0 to 10.000 -1.05 to 10.50 psi 0 to 145.04 -15.2 to 152.3 Pressure measurement value (PD) 1000