3 Port Solenoid Valve/

VP542-X536 8.9 0.16 2.2 8.9 0.20 2.1 350 VP742-X536 15.1 0.21 3.6 15.3 0.22 3.7 590 VP544-X538 6.5 0.08 1.3 6.7 0.10 1.3 930 VP744-X538 10.3 0.08 2.3 9.7 0.08 2.1 1510 VP544-X555 5.2 0.06 1.1 6.7 0.10 1.3 1105 VP744-X555 9.8 0.08 2.1 9.7 0.08 2.1 2000 Needle Valve / Flow Rate Characteristics (VP544/744-X555) 600 2 1.5 1 Flow rate (L/min [ANR]) 500 0.7 MPa 400 0.5 MPa 300 0.25 MPa 200 100 00

Plug-in Unit

Base Mounted Series VQC4000 Plug-in Unit Manifold Option Blanking plate assembly VVQ4000-10A-1 Individual SUP spacer VVQ4000-P-102 03 Individual EXH spacer VVQ4000-R-1SUP/EXH block plate VVQ4000-16A 02 03 VQC SQ VQ0 ^{VQ4 Residual pressure release valve perfect spacer VVQ4000-25A-1 Note 1) SUP stop valve spacer VVQ4000-37A-1 Interface regulator ARBQ4000-00}

Manifold Specifications

Series VS3115/3110 Manifold Specifications Specifications Manifold type Max. number of stations B mount 10 stations Port location/Port size P A E P A E Port direction Applicable valve model Exhaust type Side Side Side Side Bottom Side VS3114-00 Base Base Base Common 1 4 3 8 3 8 Accessory AXT338-17A Blanking plate (With gaskets and screw) How to order manifold VVS31 1 0 05 Thread type EXH

Aluminum High Vacuum Angle Valve

Temperature specifications 160 XLA160-30-1 XLA160A-30-1 XLA160-30-1H XLA160A-30-1H XLAV160-30-1 XLAV160A-30-1 XLC160-30-1-1 XLC1 60-30-1H-1 XLF160-30-1 XLF160A-30-1 XLF160-30-1H XLF160A-30-1H XLFV160-30-1 XLFV160A-30-1 XLD160-30-1 XLD160-30-1H XLDV160-30-1 XLG160-30-1-1 XLG160-30-1H-1 100 XLA100-30-1 XLA100A-30-1 XLA100-30-1H XLA100A-30-1H XLAV100-30-1 XLAV100A-30-1 XLC100-30-1-1 XLC1 00

High Vacuum Angle Valve

Temperature specifications 160 XLA160-30-1 XLA160A-30-1 XLA160-30-1H XLA160A-30-1H XLAV160-30-1 XLAV160A-30-1 XLC160-30-1-1 XLC1 60-30-1H-1 XLF160-30-1 XLF160A-30-1 XLF160-30-1H XLF160A-30-1H XLFV160-30-1 XLFV160A-30-1 XLD160-30-1 XLD160-30-1H XLDV160-30-1 XLG160-30-1-1 XLG160-30-1H-1 100 XLA100-30-1 XLA100A-30-1 XLA100-30-1H XLA100A-30-1H XLAV100-30-1 XLAV100A-30-1 XLC100-30-1-1 XLC1 00

ZSE5/ISE5

.%4S 40 30 39 II i ~g: D Sll:PR,~~RE~'mCil 0 0 M N '" 6 ;e;V 'P -$~ 11:rn I~ tP 00 lR ;l=i I I 12.3 I , 28 SMC CORPORATION ~. 1164,SH1MBASHI,MINATO-KU,TOKYO 10S,JAPAN Tel:03-3502-2740 Fax:03-52517240 l si printing January 1995.0-036,P-46(M) Augusl 1996, 49(RP) Specifications are subject 10 change without prior notice Printed In Smgapore and any obligation on the part of the manufacture,

•

Bodv PST Seat NSR 0 Lead wire Vinvtchloride (V,nvl sheath) Pressure sensor SUS630 G Fittings SUS304 2 Digital Pressure Switch Series ZSE6/ISE6 URJ'/4 Scale:75% (mm) Dimensions 30 (Union Ring JOint) 39 LCD W.lh back hght o -A '" '" ~ 00 '" []I-: 1DOWN button UP bulton [ ,~ LED (red) LED (green) I SET bunoo [, t::t::;I UAJ~ L 12.3 Sensor Depth 6.5 kj--t==:;A/ Welded section 2-flf2.7 20

Counter/Extension Cable

Settings can be made from 00 to 99. Store the setting with the SET key. 10-12-37 Series CE Glossary (Functions of CEU5) BCD Output Bank Function This is a system which expresses one digit of a decimal number with a 4 digit binary number. The count value is expressed by the ON/OFF state of each BCD output terminal.

MY1

Height 27mm ew w 27 40 High precision guide type MY1H10 Basic type MY1B10 30 Strok can be 20 10 00 The stroke adjusting unit (H unit) does not protrude above the table height. en when equipped h a floating cket, the height is y 28.5mm. 10 28.5 Centr type (s 20 New ries variations ries variations Air cushion Floating bracket Stroke adjusting unit Bore size (mm) Side support 10

NCA1

) .. 25-31 Rod Boot . 32 Oversized Rod / Non-Rotating (XB5 / X119US) 33-36 Adjustable Stroke Extended (XC8) .. 37 Adjustable Stroke Return (XC9) . 38 Dual Operation Double Rod (XC10) . 39 Dual Operation Single Rod (XC11) .. 40 Special Rod End Modifications . 41 Accessories . 42 Auto Switch Options . 43 Precautions . 51 4 Medium Duty Air Cylinder Series NCA1 How To Order NC D A1 B 150 04 00

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

Angle adjustment range 3 Angle adjustment range 3 Angle adjustment range 3 Auto switch Key Direction indicating label Key Direction indicating label Magnet A Magnet B +4 0 +4 0 0 90 18 90 ve 00 ve o ve o 1 o ro A port B port gr o e A port B port g v o y y o e gr e o k k r f g o f y o e y g e e n e Auto switch R ra g k k n n io ra at f ot f o o n e io g at e Angle adjustment range 3 ot

Mini-rotary Actuator Rack & Pinion Style Series CRJ Size: 05, 1 1

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Basic type For 90 and 100 For 180 and 190 CRA1 Single flat Single flat CRQ2 MSQ MRQ D+10 0 B port A port B port A port +8 0 00 20t 1 0 t 9 fla la gle e f gl sin sin of of ge ge an an n r tio ta n r Ro +8 0 io Ro tat tat Ro 80 io t 1 n r fla an ge gle

Table of Contents

Load voltage Lead wire length (m) Indicator light Auto switch model Lead wire type Type Electrical entry Applicable load Applicable size Wiring (Output) DC AC 0.5 (Nil) 3 (L) None (N) 5 (Z) 90 Parallel cord IC circuit Reed switch Solid state switch Solid state switch Reed switch 5 V, 12 V 5 V, 12 V, 24 V No Yes Yes No Yes 90A 5 V, 12 V, 100 V 5 V, 12 V, 24 V, 1 00 V Heavy-duty cord 97 Parallel

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

Load voltage Lead wire length (m) Indicator light Auto switch model Lead wire type Type Electrical entry Applicable load Applicable size Wiring (Output) DC AC 0.5 (Nil) 3 (L) None (N) 5 (Z) 90 Parallel cord IC circuit Reed switch Solid state switch Solid state switch Reed switch 5 V, 12 V 5 V, 12 V, 24 V No Yes Yes No Yes 90A 5 V, 12 V, 100 V 5 V, 12 V, 24 V, 1 00 V Heavy-duty cord 97 Parallel

CE

Settings can be made from 00 to 99.

Table of Contents

Settings can be made from 00 to 99.

NCA1

Compact and lightweight design The square covers are made of an aluminum die-casting and provide a lower cost, lighterweight product. 6-15-2 6-15-3 3 NFPA Interchangeable Cylinder: Standard Type Double Acting, Single Rod (Medium Duty) Series NCA1 Inch size: 1.5", 2", 2.5", 3.25", 4" How to Order NC D A1 B 150 04 00 A54 XB5 Option Built-in magnet Oversized rod High temperature Low temperature

MY1

Interchangeability Interchangeability The bodies and workpiece mountings are interchangeable between Series MY1M and MY1C. 8-11-2 3 27 Height 27 mm 40 High precision guide type MY1H10 Basic type MY1B10 30 20 MX MTS 10 MY 00 The stroke adjusting unit (H unit) does not protrude above the table type.

Body: Manifold, Valve Specification: Non (Standard), Port Size: 00 [w/o Connection Port (For Manifold)], Voltage: 24 VDC, Electrical Entry: Grommet, Lead Wire Length 300mm, Surge Voltage Suppressor: -, Manual Override: -, Thread: -, CE-Compliant: -

Body: Manifold, Valve Specification: Non (Standard), Port Size: 00 [w/o Connection Port (For Manifold)], Voltage: 24 VDC, Electrical Entry: Conduit Terminal, Surge Voltage Suppressor: -, Manual Override: -, Thread: -, CE-Compliant: -