Plate Cylinder

8 !4 !1 r !0 !2 w y e u t !6 i o !7 B !3 B section MU25 Spring extend w i !0 o !8 t !5 q !7 r e u !1 !2 !6 y !4 A B !

End Lock Cylinder Series CBM2/ø20, ø25, ø32, ø40 Series CBA1/ø40, ø50, ø63, ø80, ø100 CL MLGC CNA CB CV/MVG Maintains the cylinder’s CXW original position even if the CXS air supply is interrupted. CXT MX

A B A B A B A B A B A B Hs Hs Hs Hs Ht Hs Ht Hs Hw Hs Hw 0 (0) 0 (0) 0 (2.5) 2 (6) 4 (7.5) 1 (0) 1 (0) 5.5 (1.5) 8.5 (4) 10.5 (6.5) 0 (0.5) 0 (0.5) 0 (3) 2.5 (6.5) 4.5 (8) 4.5 (1.5) 4.5 (1.5) 9 (5) 12 (7.5) 14 (10) 0 (2) 0 (2) 1 (4.5) 4 (8) 6 (9.5) 3 (0) 3 (0) 7.5 (3.5) 10.5 (6) 12.5 (8.5) 1 (4) 1 (4) 3 (6.5) 6 (10) 8 5 (2) 5 (2) 9.5 (5.5) 12.5 (8) 14.5 7.5 8.5 1.5 (0) 1.5 (0) 6 (2) 9 (4.5

Series 10-, 21- AR-B Regulator, Series 10-, 21- ARK-B Regulator with Backflow Function

Note 6) : For thread type: NPT only 1075 A 1021-AR-B Regulator 1021-ARK-B Regulator with Backflow Function Standard Specifications 10-/21-AR20(K)-B 10-/21-AR25(K)-B 10-/21-AR30(K)-B 10-/21-AR40(K)-B 10-/21-AR40(K)-06-B 10-/21-AR50(K)-B 10-/21-AR60(K)-B Model Port size 1/8, 1/4 1/4, 3/8 1/4, 3/8 1/4, 3/8, 1/2 3/4 3/4, 1 1 Pressure gauge port size 1/8 Air Preparation Equipment Pressure Control

CV/MVGQ

B B B B B B 0 (0.5) 0 (0.5) 0 (3) 2.5 (6.5) 4.5 (8) 3.5 (6.5) 3.5 (6.5) 5.5 (9) 8.5 (12.5) 10.5 (14) 0 (2) 0 (2) 1 (4.5) 4 (8) 6 (9.5) 1 (4) 1 (4) 3 (6.5) 6 (10) 8 (11.5) 8.5 (11.5) 8.5 (11.5) 10.5 (14) 13.5 (17.5) 15.5 (19) 0.5 (3.5) 0.5 (3.5) 2.5 (6) 5.5 (9.5) 7.5 (11) 0 (0) 0 (0) 0 (2.5) 2 (6) 4 (7.5) 1.5 (0) 1.5 (0) 6 (2) 9 (4.5) 11 (7) 7.5 (4.5) 7.5 (4.5) 12 (8) 15 (10.5) 17 (13) 3 (

1 High Purity Chemical Valve Compact Type Series LVD VC
Space saving, compact type is available. Space saving, compact type is available. VDW Compact type is introduced as a new series to complement VQ Body: New PFA Body: New PFA Body: New PFA conventio

Refer to the applicable tubing table to the left LQ LVN Variations Basic size With reducer LVD10 LVD20 Model LVD30 LVD40 LVD50 TI/ TIL Orifice diameter 2 4 8 10 16 Tubing O.D. Metric PA 4 4, 6 6, 8, 10 10, 12 12, 19 Inch Valve type Symbol Type 3, 1/8 1/8, 3/16, 1/4 1/4, 3/8 3/8, 1/2 1/2, 3/4 PAX Basic type N.C. PB PB PA PA N.O. PB B A B A B A N.C. N.O.

Booster Regulator/Air Tank

Rc 3/4 (A) D (B) (B) OUT OUT 355 256 256 205 4 x 13 4 x 13 50 50 150 150 500 250 250 824 (mm) Drain port Rc 1/4 A 531 570 494 527 576 B 444 479.8 444 479.8 C Rc 3/8 Rc 1/2 Rc 3/8 Rc 1/2 D Note) 519 543 Booster regulator model VBA20A VBA40A VBA22A VBA42A VBA43A Note) When option G (pressure gauge) is selected 20 38 R S 05 10 R S VBAT A1VBAT A1With safety valve With safety valve Safety

Programless controller (with stroke study) Step motor (servo 24 VDC)

Brown 12 Vcc B-4 Black 13 GND A-4 U Actuator cable type Red 7 A B-5 Black 6 A A-5 Nil Robotic type cable Orange 9 B B-6 Black 8 B A-6 S Standard cable 3 Controller side Electric actuator side (2) Actuator cable (8-20m) signal Terminal no.

VEX1

Body size Pilot style Stations Port size Valve stations Port size P Port R A Body size Pilot style Applicable Valve 2 2 stations Solenoid 1 Internal pilot VEX3222 6 2 02 1 4 6 stations Air operated: VEX3220 (1) Air operated 2 Common external pilot 8 stations 8 2 A B C 6 2 stations 3 8 1 4 VEX3422 Air operataed: VEX3420 (1) 1 Internal pilot 4 3 8 2 Common external pilot 1 2 3 8 6 stations

pa

B Control unit 1.

SMC Basic Pneumatics

The specifications ol the Carbon St6el Standard Gas Pipe (SGP) are: Nominal Width Outside Dia. mm Thicknesc mm Mass ks/m B 6 l/8 10.5 2.0 0.4t9 8 v4 13.8 0.652 l0 3/8 I t . J 0.851 l5 tn 21.7 2.8 1.310 20 3t4 27.2 2.8 1.680 25 34.O 3.2 2.430 3?

Step Motor Controller (Servo / 24 VDC)

Brown 2 A B-1 Red 1 A A-1 Cable length (L) Orange 6 B B-2 Yellow 5 B A-2 8 8m *1) Green 3 COM-A/COM B-3 Blue 4 COM-B/ A-3 A 10m *1) Shield B 15m *1) Cable color Terminal no. Vcc B-4 Brown 12 C 20m *1) GND A-4 Black 13 A B-5 Red 7 *1) produced upon receipt of order A A-5 Black 6 B B-6 Orange 9 Only Robotic type cable can be B A-6 Black 8 selected. 3 signal Terminal no.

A_HEC-OM-K001

/8 3/4x5/8 1/2x3/8 3/4x5/8 Recirculating fluid (Note 6,7,8) Pure water, Hydrofluoric acid, Ammonia hydrogen peroxide solution etc.

Rotary Table Vane Style Series MSU Size: 1, 3, 7, 20 1

-5-8 8 Series MSUA Rotary Table: High Precision Type Vane Style These drawings indicate the condition when the B port is pressurized.

Compact Vacuum Unit Ejector/ Vacuum Pump System

JIS B 8370: General rules for pneumatic equipment. JIS B 8361: General rules for hydraulic equipment. JIS B 9960-1: Safety of machinery Electrical equipment for machines. (Part 1: General requirements) JIS B 8433-1993: Manipulating industrial robots Safety, etc. *2) Labor Safety and Sanitation Law, etc.

Fieldbus system Digital unit

-B Dimensions EX600-DY B EX600-DY E -44No.EX-OMN0036-B EX600-DY F -45No.EX-OMN0036-B Digital I/O unit Model Indication and How to Order EX600-DM Digital I/O Connector and number of I/O Symbol Connector Number of inputs Number of outputs Input and Output type E D-sub connector (25 pin) 8 inputs 8 outputs Symbol Content F Spring type terminals (32 pin) 8 inputs 8 outputs P PNP N NPN Names and

LEF-OM002xx

300 400 500 600 V(mm/s) V (mm/s) V(mm/s) LEFS16 LEFS25 LEFS32 Vertical Transfer 12 50 B B B 20 A 10 A A 40 H W(kg) W(kg) H 8 W(kg) 15 30 6 10 20 4 5 2 10 0 0 0 0 200 400 600 800 1000 1200 0 100 200 300 400 500 600 0 200 400 600 800 1000 1200 V (mm/s) V (mm/s) V(mm/s) LEFS16 LEFS25 LEFS32 50 12 B B 20 B A 10 A 40 H H A W(kg) W(kg) W(kg) 15 8 30 6 10 20 4 5 10 2 0 0 0 0 100 200 300 400 500

Compact Cylinder

Hs A B (mm) D-M9 D-M9W D-M9V D-M9WV D-A9V D-A9 Bore size (mm) A B A B W Hs A B W A B Hs 32 40 50 63 12 [17] 9 1 12 [17] 9 29 8 [13] 5 3 (0.5) 8 [13] 5 27 16 11.5 1.5 16 11.5 32.5 12 7.5 5.5 (3) 12 7.5 30.5 14 <19> 14.5 4.5 14 <19> 14.5 38.5 10 <15> 10.5 8.5 (6) 10 <15> 10.5 36.5 16.5 17.5 7.5 16.5 17.5 42 12.5 13.5 11.5 (9) 12.5 13.5 40 The value in parentheses [ ] is for 5 mm stroke with

Process Pump

Class Symbol PAF341S 12 x 10 10 x 8 19 x 16 12 x 10 25 x 22 19 x 16 PAF541S PAF341S PAF541S tubing size (mm) tubing size (inch ) SMC SMC SMC 4 4 5 5 6 6 1 2 1 2 1 2 4 4 5 5 6 6 A B A B A B 1/2" x 3/8" 3/8" x 1/4" Panel mount union U P 3/4" x 5/8" Union 1/2" x 3/8" 1" x 7/8" 3/4" x 5/8" SMC Note) Select the fitting after confirming the IN / OUT side fitting size and fitting type.

HRX-OM-S004

. 8-7 8.2 Outline dimensions . 8-8 8.2.1 HRS100/150-A-20/40/46. 8-8 8.2.2 HRS100/150-W-20/40/46. 8-9 8.3 Flow diagram . 8-10 8.3.1 HRS100/150-A-20/40/46. 8-10 8.3.2 HRS100/150-W-20/40/46. 8-11 8.4 Cooling capacity . 8-12 HRS Series HRX-OM-S004 Contents 8.4.1 HRS100-A-20/40/46. 8-12 8.4.2 HRS150-A-20/40/46. 8-12 8.4.3 HRS100-W-20/40/46. 8-13 8.4.4 HRS150-W-20/40/46. 8-13 8.5 Pump capacity

MTS

-X 20Hv Data Proper Auto Switch Mounting Position Solid state switch Bore size (mm) 2-color indication solid state switch Reed switch D-A9 D-A9V D-M9 D-M9V D-F8 D-F9W A B Hv D-F9WV A B C A B Hv A B C A B Hv A B Hv A B C 36 25 16 36 25 15 32 21 20 32 21 17.5 18 7 25 32 21 20 32 21 17.5 8 Auto Switch Mounting Stroke for 8 Stroke (mm) Note Applicable auto switch Mounting condition Piping direction