Manifold Specifications

Series VZ3000/Body Ported Manifold Specifications Manifold Standard Manifold Specifications Type 20 Single base/B mount Common SUP/Common EXH 2 to 20 stations Valve Rc 1 8 Model Manifold type P(SUP)/R(EXH) Valve stations 4(A), 2(B) port location Port size 1(P), 3/5(R) port 4(A), 2(B) port M5 x 0.8, C4, C6 Flow Characteristics Flow characteristics 1 4/2 (P A/B) 4/2 5/3 (A/B R) Port size

JXCx-OMT0002

Terminal LE CP B Cable colour Terminal number number Brown 2 A B-1 Red 1 A A-1 Cable length [L] Orange 6 B B-2 Yellow 5 B A-2 8 8mNote) Green 3 COM-A/COM B-3 Blue 4 COM-B/ A-3 A 10mNote) (c) Shield B 15mNote) Cable colour Terminal number Brown 12 Vcc B-4 C 20mNote) Black 13 GND A-4 Red 7 A B-5 Note) Produced upon receipt Black 6 A A-5 Orange 9 B B-6 of order Black 8 B A-6 (Only "Robotic

3/5 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ1000/2000/3000

center 3 position closed center 3 position exhaust center 3 position exhaust center 3 position pressure center 3 position pressure center (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) Note 1) Except for VQZ1000 and metal seal Component Parts No

Digital Flow Switch (Manifold type)

Take special care. -10No.PF-OMW0004-B Model Indication and How to Order Integrated type: Basic type -11No.PF-OMW0004-B Integrated type: Straight type -12No.PF-OMW0004-B Remote type: Supply type -13No.PF-OMW0004-B Remote type: Return type -14No.PF-OMW0004-B Table 1. Return unit flow switch output specification OUT1 OUT2 Temp.

Aluminum High Vacuum Angle Valve

0 Body Valve side exhaust Refer to the back of page 465 for Maintenance Parts. 457 XLS Series Dimensions XLS/Without control power supply D E D F L J K 2 J K L 270 10 290 10 M J K J 33 25 C B 39 G G1/2 G1/2 C B B C A B C 6 to 9 G1/2 A DIN terminal (D) Terminal (T) Conduit (C) Grommet (G) XLS/With control power supply 41 26 J K 530 10 72 OPERATION V INPUT C B L (mm) Grommet (G) A B C

ZR

Rc 1/8 P port (Air supply port) 2 2 1 Ejector Bracket B Bracket B Note) 1 Dimensions for mounting bracket B 2 2 2 Dimensions for mounting spacer B Spacer B is used to leave space for maintenance (for replacement of silencer etc.) on side mounting.

Series 10-, 21- AW-B Filter Regulator

with level gauge With bowl guard Metal bowl with level gauge Metal bowl Semi-standard specifications B B B 10-/21-AW20-B 10-/21-AW30-B 10-/21-AW40-B 10-/21-AW40-06-B 10-/21-AW60-B 142.1 174.1 176.1 261.1 93.9 122.1 154.1 156.1 241.1 91.4 Dimensions B B B B Standard specifications Model Optional specifications Round type pressure gauge Bracket mounting size Panel mount Q R S T U V W Y Z

Fieldbus system PROFINET compatible SI Unit

11 No.EX-OMW0011-B 1.2.

5 Port Solenoid Valve Metal Seal/Rubber Seal Series SQ1000/2000 1

Note 4) Values for the low wattage (0.5 W) specifications. 2 position double (Double solenoid) (A) 4 (B) 2 (A) 4 (B) 2 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) Metal seal Rubber seal 3 position closed center 4 position dual 3 port valve (B) 3 position pressure center (A) 4 (B) 2 (A) 4 (B) 2 4 2 5 3 1 1 (P) 5 (R1) 3 (R2) N.O.

Vacuum Unit

C A B C A B C A B C A Black For supply valve (,+) + + + ZK2-ZSmBmm-A (PNP 2 outputs) + Pilot valve for supply + B C A LED (Red) White White White White Pilot valve for supply + Pilot valve for release Pilot valve for release + Pilot valve for release Pilot valve for release + B C A + + White White Connector cord assembly (ZK2-LWA20-A) Connector cord assembly (ZK2-LWB20-A) Brown

High Power Cylinder Series RHC

1-C 2-A 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 2-B 2-B 1-A 1-B 1-C 2-A 2-B 1-C 2-A 2-B 2-B 2-B 2-B 2-B 1-A 1-B 1-C 2-A 2-B 2-B 2-B 2-B 2-B 2-B 6 1/8,1/4 500 1.5 0 1,000 2,000 3,000 6 1/4, 3/8 10 1/4, 3/8 Maximum speed Vmax [mm/s] 1000 3 25 20 1500 4.5 Composite effective area So [mm] Composite effective area So [mm] Composite effective area So [mm] 10

JXCx-OMU0004

1 2 A A-1 1 LE-CP-1 L B B-2 6 1 1.5m B A-2 5 COM-A/COM B-3 3 3 3m COM-B/ A-3 4 5 5m Shield Vcc B-4 12 GND A-4 13 A B-5 7 A A-5 6 S B B-6 9 B A-6 8 3 14.2 2 1 8 14) B1 A1 17.7 6 5 2 1 18 B6 A6 16 15 L 11 30.7 11.2 [820m] A B-1 2 A A-1 1 LE-CP-1 L B B-2 6 B A-2 5 8 8m* COM-A/COM B-3 3 COM-B/ A-3 4 A 10m* Shield B 15m* Vcc B-4 12 C 20m* GND A-4 13 A B-5 7

Vacuum Pad: Large/Heavy Duty Type Series ZPT/ZPX

NBR (g) (g) ZPT40HBN-A14 -B 8 -B10 ZPT50HBN-A14 -B 8 -B10 ZPT63HBN-A16 -B 8 -B10 -B12 -B16 ZPT 80HBN-A16 -B 8 -B10 -B12 -B16 ZPT100HBN-A16 -B12 -B16 ZPT125HBN-A16 -B12 -B16 73 195 Pad dia.

15

flange to the housing B using motor flange fixing screws (included parts).

ISO Standards Air Cylinder: Standard Double Acting with End of Stroke Cushioning ø 32, ø 40, ø 50, ø 63, ø 80, ø 100, ø 125 Series CP96

C B A stroke A C 3) 2nd stage: B-A stroke operation Following the 1st stage, when the air pressure is supplied from the C port, the rod operates the B-A stroke. B B-A stroke B A C 4) Cylinder retraction When the air pressure is supplied from the B port, the rod retracts completely. B stroke A stroke A stroke or B stroke operation can be made individually.

Programless controller Step motor (servo 24 VDC)

A B-1 Brown 2 Cable length (L) A A-1 Red 1 B B-2 Orange 6 1 1.5m B A-2 Yellow 5 COM-A/COM B-3 Green 3 3 3m COM-B/ A-3 Blue 4 5 5m Shield Cable color Terminal no.

JXCx-OMT0062

Brown 2 A B-1 Red 1 A A-1 Cable length (L) Orange 6 B B-2 Yellow 5 B A-2 8m *1 8 Green 3 COM-A/COM B-3 10m *1 A Blue 4 COM-B/ A-3 Shield 15m *1 B Cable color Terminal no. Vcc B-4 Brown 12 *1) produced upon receipt of order. 20m *1 C GND A-4 Black 13 A B-5 Red 7 A A-5 Black 6 B B-6 Orange 9 Only Robotic type cable can be B A-6 Black 8 3 selected.

MB

D-K39 D-A5 D-A6 D-A59W D-F5NTL D-P5DWL Bore size (mm) A A B A B A A A A B B B B B 32 12 7 4.5 0 0.5 3.5 4 0.5 9.5 4.5 2 1 1.5 0 CJ1 40 12 7 4.5 0 0.5 3.5 4 0.5 9.5 4.5 2 1 1.5 0 50 12.5 7.5 5 0 1 4 4.5 1 10 5 2.5 1.5 2 0 CJP 63 12.5 7.5 5 0 1 4 4.5 1 10 5 2.5 1.5 2 0 80 15.5 10.5 8 2.5 4 7 7.5 4 14 9 6.5 5.5 6 2.5 CJ2 100 15.5 10.5 8 2.5 4 7 7.5 4 14 9 6.5 5.5 6 2.5 125 17.5 12.5 10 6 6

Conforming to ISO Standard Solenoid Valve (with M12 Connector) Series EVS7-6/7-8/7-10 (Size 1) (Size 2) (Size 3) 1

B 20 14 12 P = 43 A P = 43 PA 23 A A B B 14 12 A PA PA L1 L2 L2 L1 B B B 14 12 A A A A B 14 A A PA B B (2n 1/8) 4n-1/4, 3/8 2, 4 port PA L-side R-side L-side R-side D-side D-side 89 3 89 16 141 (Single) 141 (Single) 55 44 186 (Double) 186 (Double) 196 (3 position) 196 (3 position) 77.5 Bottom ported M12 connector L: Dimensions n: Stations 141.5 L n 1 Formula 2 3 4 5 6 7 8 9 10 121 5 1 12

CNA

JIS B 4636 CLS 10 40 2 point angle socket 10 JIS B 1181 Class 3 M8 x 1.25 JIS B 4636 13 2 point angle socket 13 50 JIS B 4636 CLQ 13 2 point angle socket 13 JIS B 4636 JIS B 4636 JIS B 1181 Class 3 M10 x 1.25 MLGP 63 17 13 2 point angle socket 17 2 point angle socket 13 4. Allow at least 0.5 seconds from a locked stop (intermediate stop of the cylinder) until release of the lock.