Bag Filter

NBR FGFS5-60 AL-27S 1 FGFC5-60 11 O-ring FGFL3-40 AL-23S 1 FGFR3-40 FKM FGFL5-60 AL-24S 1 FGFR5-60 FGFS3-40 3 FGFC3-40 AL-20S NBR FGFS5-60 5 FGFC5-60 12 Gasket FGFL3-40 3 FGFR3-40 FKM AL-21S FGFL5-60 5 FGFR5-60 Note 1) Refer to How to Order on page 47 for the part of the model number.

Rubber seal Series 10-SYJ3000/5000/7000 4/5 port solenoid valve

It is already built-in to the rectifier circuit. 50 60 100 VAC Hz 1 2 200 VAC Hz 50 60 50 60 110 VAC Hz [115 VAC Hz] 3 Electrical entry 50 60 50 60 50 60 DIN terminal D With connector 4 220 VAC Hz [230 VAC Hz] DO Without connector DC specifications of type "D" and "DO" is only available with 12 and 24 V DC. Power saving circuit is not available in the case of "D", "DO" type.

240

10 6 0.01 0.1 0.01 0 20 40 60 80 100 0 20 40 60 80 100 0 20 40 60 80 100 Overhang L (mm) Overhang L (mm) Overhang L (mm) Graph b b Load Eccentricity 100 mm Graph , Load Eccentricity 100 mm Graph 1 Load Eccentricity 100 mm 1 10 10 Mass m (kg) Mass m (kg) Mass m (kg) 1 20 16 20 16 20 16 10 6 0.1 1 10 0.1 10 6 6 0.01 0 20 40 60 80 100 0.01 0.1 0 20 40 60 80 100 0 20 40 60 80 100 Overhang L

VXD21/22/23

DC AC, DC 60 40 1 80 60 10(1) 40 60 60 40 Maximum Minimum 10 5(2) Note 1) Dew point: 10C or less Note 2) 50 cSt or less Note 3) D, E, N, P etc. in parentheses are option symbols.

76

Note) Air flow capacity (scfm [ANR]) Applicable air compressor (kW) 50 Hz Model Power supply voltage (Frequency) Port size 60 Hz IDF1E 3.53 4.24 0.75 Single-phase 100 VAC (50 Hz) Single-phase 100/110 VAC (60 Hz) IDF2E 7.06 8.30 1.5 Rc3/8 IDF3E 11.3 13.1 2.2 IDF4E 18.4 20.1 3.7 Rc1/2 Single-phase 100/200 VAC (50 Hz) IDF6E 26.5 29.0 5.5 Single-phase 100/110 VAC, 200/220 VAC (60 Hz) IDF8E 43.1

Table of Contents

Note 2) The flange can be mounted on the rotary actuator at 60-degree intervals.

MXH

MTS MY CY Long strokes up to 60 st are standardized.

Tie-rod Type Low Pressure Hydraulic Cylinder Double Acting/Single Rod Series CHA ø 40, ø 50, ø 63, ø 80, ø 100, ø 125, ø 160

60 44 18 25 14 17.5 9.5 18 9 47 160 8 44 77 10 20 M14 x 1.5 30 22 50 9 19 50 25 73 73 53 20 28 17 17 13 M10 x 1.5 20 11 52 172 10 53 88.5 12 22 M16 x 1.5 30 26 63 8 21 55 28 80 80 60 22.4 30 17 17 13 M10 x 1.5 22 11 55 190 10 60 95 12 25 M18 x 1.5 30 26 80 8 26 65 32 100 100 75 28 32 22 20 15 M12 x 1.75 26 13 65 207 12 75 115 14 29 M22 x 1.5 35 30 100 6.5 34 80 38 118 118 90 35.5 35 27 19

e-Rodless Actuator

E-MY2H/M2 E-MY2H/M3 50 60 50 60 50 60 30 30 30 20 20 20 Moment (Nm) Moment (Nm) Moment (Nm) 10 10 10 E-MY2H25 E-MY2H25 E-MY2H25 5 5 5 4 4 4 3 3 3 E-MY2H16 E-MY2H16 2 2 2 E-MY2H16 1 1 1 100 200 300 400500 1000 1500 100 200 300400500 1000 1500 100 200 300400500 1000 1500 Speed (mm/s) Speed (mm/s) Speed (mm/s) Load weight / E-MY2H E-MY2H/m1 E-MY2H/m2 E-MY2H/m3 60 50 60 60 50 50 30 30 30 20 20

Prevents Micro-Bubbles

87 60 112 112 17-5-37 35 Series LV Fitting Assembly Procedure Assemble fittings following the procedure shown below.

AZ1000

30 0.21 0.34 50 0.28 20 0.14 40 0.21 30 0.14 20 10 0.07 0.00 0.07 0 10 0 0.00 0 20 40 60 80 Flow rate (slpm, N2) 0 100 200 300 400 Flow rate (slpm, N2) Hastelloy is a registered trademark of Haynes International.

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

Applicable size LA1 LA2 LB1 LB2 LC LD LE LF LG LH LJ1 LJ2 LK LM T 50 63 80 100 P411020-5 P411030-5 P411040-5 P411050-5 78 100 111 141 70 90 100 126 45 56 63 80 50 36 44 46 55 25.5 30 32 39.5 10 12 12 14 4.5 5 6 6 45 60 65 80 7.5 9.5 9.5 11.5 34 39 48 60 66 83 94 120 60.5 75.5 88.5 108.5 84 110 120.5 150.5 48 52 60 80 Note 1) The foot bracket (with bolt, nut, and washer) is not mounted on

Aluminum High Vacuum Angle Valve

VAC, 50/60 Hz XLA 3 110 VAC, 50/60 Hz 4 220 VAC, 50/60 Hz U XL XL 5 24 VDC 6 12 VDC S type: Not available for AC.

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

Note 2) The flange can be mounted on the rotary actuator at 60-degree intervals.

VXZ

PA 02 200 VAC 50/60 Hz 01 100 VAC 50/60 Hz 08 48 VAC 50/60 Hz 01 02 03 04 07 08 05 06 002 Applicable valve model No. 13 24 VAC 50/60 Hz VXZ22 VXZ23 03 110 VAC 50/60 Hz 23 440 VAC 50/60 Hz PAX 003 AC 04 220 VAC 50/60 Hz 51 6 VDC Coil combination code 05 24 VDC 53 48 VDC PB 06 12 VDC 55 100 VDC 56 110 VDC (Refer to the table below.) 07 240 VAC 50/60 Hz DC Note) The voltage codes

IIIIIIIIII

PP-700-5 PP-700-15 PP-700-30 PP-700-60 PP-700-100 1 1 1 3 5 5 15 30 60 100 30 60 60 120 120 0.2 0.3 0.3 0.5 0.7 0.4 0.6 1.0 2.0 3.5 PPMOUNTING STYLE BARBED FITTING (FM & PM ONLY) VALVE FUNCTION RANGE (PSI) FM = FLUSH MOUNT PM = PANEL MOUNT PT = PIPE THREAD MM = MANIFOLD B80 = NYLON 1/16" I.D. TUBE B85 = NYLON 1/8" I.D.

CRB2/CRBU2/CRB1

Auto switch unit + 2 switches Angle adjuster 9 10 19 25 25 19 10 9 30 46.5 30 50 60 46.5 60 50 30 30 30 203 47 90 150 203 150 90 47 30 3 Series CRB2 A shaft can be replaced with a different shaft type except for standard shaft type (W).

C95

60 80 105 110 115 1, 2 A5 15 + 55 (n 2)/2 20 + 55 (n 2)/2 60 + 55 (n 4)/2 60 + 55 (n 4)/2 80 + 55 (n 4)/2 105 + 55 (n 4)/2 110 + 55 (n 4)/2 115 + 55 (n 4)/2 n A6 n = 2, 4, 6, 8 n = 2, 4, 6, 8 n = 4, 8, 12, 16 n = 4, 8, 12, 16 n = 4, 8, 12, 16 n = 4, 8, 12, 16 n = 4, 8, 12, 16 n = 4, 8, 12, 16 15 20 60 70 85 110 115 120 2 20 + 55 (n 2)/2 25 + 55 (n 2)/2 65 + 55 (n 4)/2 70 + 55

Cylinder with Lock

Bore size B TA TL TU TC TX TZ TO TR TT TS TH TF TY1 TY2 Z TDH10 32 151 40 169 50 187 63 199 80 247 100 266 MB-S03 32 46 62 45 8.5 62 50 74 12 7 13 10 35 47 49 71 148 12+0.070 0 MB-S04 40 52 80 60 10 80 63 97 17 9 17 12 45 60 58 77.5 166 16+0.070 0 50 65 80 60 10 92 75 109 17 9 17 12 45 60 71 91 183 16+0.070 0 MB-S06 63 75 100 70 15 110 90 130 20 11 22 14 60 80 87 103 195 20+0.084 0 80 95

Guide Cylinder Series MGG

3 600st 2 400st 500st st: Stroke (mm) 100st 200st 300st 0 1 0 20 40 60 80 100 120 140 160 180 200 220 240 260 Allowable end load F (N) 5 Guide Cylinder Series MGG MGGM 63Stroke 7.5 7 (Slide bearing type) 6 Deflection Y (mm) 5 1100st 1000st 4 900st 3 800st 700st 2 600st 400st 500st st: Stroke (mm) 1 100st 200st 300st 0 0 20 40 60 80 100 120 140 160 180 200 220 240 260 280 300 320 340 360