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Specifications Table 1 Specifications Product No. VXFC06D VXFC10D VXFC06D-6 VXFC10D-6 Number of outputs 6 10 6 10 Common 6 in 1 10 in 1 6 in 1 10 in 1 Common common common common Power supply voltage 24VDC to 48VDC 5% 12VDC 5% Load output voltage *1 24VDC to 48VDC 12VDC Same as the input power Same as the input power supply voltage. supply voltage.

Due to the individual product difference, the setting range varies 10% F.S. Blue DC() -26 Analog output type 1 to 5 V (2.5% F .S.) Output impedance: 1 k Bring the pressure back to atmospheric pressure and try using the zero out function.

-2NO.ZK2-OM00801-B / 1 1.5 *3) 3) 1 1 () -3NO.ZK2-OM00801-B () () () () -4NO.ZK2-OM00801-B () * (100 ) JIS B 8392-1 1.1.21.6.2:2003 () -5NO.ZK2-OM00801-B * 16 FG (20 N ) ,() -6NO.ZK2-OM00801-B * () 6 33 ( ) ( ) 10 m DC(-)() * () () CE CE -7NO.ZK2-OM00801-B 550 * ON , 1015 10 1% 1744 A 1 OFF 4 OFF * -8NO.ZK2-OM00801-B A ZK2-ZSV-A A NPN :ZK2A () :ZK2B :ZK2G B PNP L :

Doc No.MH*-OMY0021 PRODUCT NAME Magnet Gripper for Collaborative Robots MODEL / Series / Product Number MHM-25D-X7400A-(DTP/HC10DT/HC10)-(N/P) Contents Safety Instructions . 2 1. List of included items . 4 2. Parts description of the magnet gripper . 6 3. Product Specifications . 8 3-1. How to order . 8 3-2. Specifications . 9 3-3. Gripping force . 10 3-4.

MH*-OMG0035 PRODUCT NAME Rotary Actuated Air Gripper MODEL / Series / Product Number M(D)HR3-10 M(D)HR3-15 Contents Safety Instructions 1. Product Specifications 2. Operating method or operation 2-1. Design precautions 2-2. Selection 2-3. Mounting 2-4. Air supply 2-5. Piping 2-6. Operating environment 2-7. Lubrication 3. Maintenance 3-1. Notes 3-2. Structural drawing / Parts List 3-3.

) 2 (same surface) 2 (different surfaces) 1 3 (same surface) 3 (different surfaces) 2 (same surface) 2 (different surfaces) 1 90 55 50 15 10 105 60 60 15 10 105 65 65 15 10 115 75 65 25 15 35 10 5 45 10 5 40 15 10 45 5 5 30 5 5 55 15 10 40 15 10 60 15 15 3 2 1 3 2 1 3 2 1 3 2 1 3 2 1 3 2 1 3 2 1 3 2 1 D-C7 D-C80 D-A7H D-A80H D-H7 D-H7W D-H7BAL D-H7NF Band mounting D-A79W Rail mounting D-F7

R3/8, NPT3/8, G3/8 22 7/8 R1/2, NPT1/2, G1/2 27 1-1/16 (4)For M5, 10-32UNF Tightening method First, tighten it by hand, then give it an additional 1/6 turn to 1/4 turn with a wrench. Refer to the table below for reference values.

Heater specifications Model XLH-16 XLH-25 XLH-40 XLH-50 Flange (valve) size 16 25 40 50 Valve type Manual type Fluid Vacuum of inert gas Operating temperature oC 5 to 150 Operating pressure Pa Atmospheric pressure to 1 x 10-6 Conductance l/s Note 1) 5 14 45 80 Internal 1.3 x 10-10 for the standard material (FKM) Leakage at ambient temperatures , excluding gas permeation Pam3/s External 1.3

(Example) SS3YJA3-41-03-M3 . 1 set SYJA314. 1 set SYJA324. 1 set SYJ300-10-2A . 1 set The asterisk denotes the symbol for assembly.

5.5 M3 x 0.5 M4 x 0.7 M5 x 0.8 M6 x 1.0 32 38 47 52 5 6 8 10 3.5 3.5 4.5 5 15.5 20 25.5 28 3.5 3.5 5.4 5.4 M4 x 0.7 M4 x 0.7 M6 x 1.0 M6 x 1.0 6.5 6.5 9 9 7.5 7.5 9 11 7 7 10 10 4 4 7 7 0.5 0.5 1 1 Note 1) Threaded through hole is used for the standard of 20 with 5 to 10 mm strokes and 25 with a 5 mm stroke. 3

speed (mm/s) 0.025 0.5 0.06 1 0.06 1 0.035 (0.025) 1 (0.5) 32, 40 32, 40 10, 16 10, 16 0.01 0.5 0.05 0.5 Figures in ( ) are for 11-CQ2X 20, 25, 32 50, 63, 80, 100 Air Cylinder Series CM2X Air Cylinder Series 10-/11-CM2X Compact Cylinder Series CQSX Compact Cylinder Series 10-/11-CQSX Bore sizes (mm) Min. operating pressure (MPa) Min. operating pressure (MPa) Min. piston speed (mm/s) Min.

10 Detail of part U QL Q (n-1) x Q -Mounting reference planes D B PR PR max18 B B PH PH Type of centralized piping on one side without switch rail Type of shock absorber (Only for MXY12) FH M LA L JH FW J MA HR HA MB F H MM FL Model M5 x 0.8 (Width across flats 2.5) MXY6 M3 x 0.5 28 32 8.5 24 60 0.5 18 3 21.5 2 20 4 12 M6 x 1 (Width across flats 3) M8 x 1 (Width across flats 4) MXY8 M4 x

IN ZFC100-04 Cover B Element Cover A 1 ZFC100-06 ZFC200-06 Replacement Parts ZFC200-08 0.1 1 10 100 Description Part no.

C 10 100 PF2A521 D 20 200 PF2A551 E 50 500 Analogue output A B Voltage output 1 V 5 V Current output 4 mA 20 mA Rated flow range [L/min] Model Min.

No.EX-OMP0004CN-I SI (CC-Link ) // EX260-SMJ 2 8 9 10 10 11 LED 16 21 26 26 27 28 -1No.EX-OMP0004CN-I (ISO/IEC)(JIS) 1) 2) *1) ISO 4414: Pneumatic fluid power -General rules relating to systems ISO 4413: Hydraulic fluid power -General rules relating to systems IEC 60204-1: Safety of machinery -Electrical equipment of machines (Part 1: General requirements) ISO 10218: Manipulating

D OUT OUT IN E 2 x A (Port size) F SMC J C H 4 x K Bracket mounting thread A C D E F G H J K Model AF30-02 to 03-X2230 AF40-02 to 04-X2230 AF40-06-X2230 AF50-06 to 10-X2230 AF60-10-X2230 57 118 Rc 1/4, 3/8 Rc 1/4, 3/8, 1/2 Rc 3/4 Rc 3/4, 1 Rc 1 M4 x 0.7 x 0.5 M5 x 0.8 M5 x 0.8 M6 x 1 M6 x 1 44 35 53 14 53 258 245 169 165 78 73 60 60 63 59 47 47 73 73 95 90 70 70 24 24 20 18 95 90 75 70 1056

BORE B D GA'GA K MM N P x LD LH H zz h 1 3 8 (35) 2.76 2.05 t52l 0 7 9 l:20) 1.57 1.39 (10) 0.67 M8x1.25 J.2A t7l M18rl 5 1 . 1 4 3 5 4 l90l 1.06 lz7) 1 5 1 o3) 3 5 4 ls0J 2.24 (58) 1188) 2.05 (52) '11.21 2.60 (66) s T o 7 7 2 (196) 1 3 8 (35) 3.35 (85) 2.52 079 (20) 1 5 7 1.39 (10) 0.67 M10x1.25 i.2a l7l M18x1 5 1.22 (31) 3 8 6 l93l 1.34 (341 1.63 (16) 0.45 1 1 1 . 5 ) 1 9 7 t50l 6 5 4 t1661

Valve size 16 25 40 50 63 80 Bellows assembly u XL1A16-2-101 XL1A25-2-101 XL1A40-2-101 XL1A50-2-101 XL1A63-2-101 XL1A80-2-101 Nut assembly o XL1A16-10-1 XL1A25-10-1 XL1A40-10-1 XL1A50-10-1 XL1A80-10-1 Bellows assembly * Bellows assembly includes the valve seal 1 (Standard material: FKM).

Abnormal (19 V or less) Output area mapping Output data Offset MSB LSB MSB LSB (Word) 15 8 7 0 0 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 1 31 30 29 28 27 26 25 24 23 22 21 20 19 18 17 16 -45No.EX-OMX1001 Dimensions -46No.EX-OMX1001 Revision history 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL https://www.smcworld.com Note: Specifications

Doc.No.MH*-OMY0023-A PRODUCT NAME Magnet Gripper Unit for Collaborative Robots MODEL / Series / Product Number MHM-25D-X7400A-CRX Contents Safety Instructions .2 1. List of included items .4 2. Parts description of the magnet gripper .5 3. Product Specifications .6 3-1.How to order .6 3-2. Specifications .7 3-3.Gripping force .8 3-4. Dimensions .10 3-5.