Pilot: R (External Pilot), Voltage: 5 (24VDC), Lead Wire: D (DIN Connector), Surge Suppressor: None, Port Size: 04 (1/2), Thread: F (G), Passage: External Pilot (N.O/N.C), Option: Standard, CE Compliant: Q (CE Compliant)

Rated Flow Range: 11 (1 to 100 L/min), Flow Adjustment Valve: S (With Flow Adjustment Valve, Straight), Port Size: N2 (NPT1/4), Output Specification: L2 (Out 1: IO-Link or NPN/PNP, Out 2: NPN, PNP, or Input), Lead Wire: Q (w/M12 Conversion Lead Wire and Connector, 0.1m), Unit Specification: Unit Selection Function, Bracket/Panel Mount Adapter: No Bracket, Calibration Certificate: None, Made

Function: 3 (3 Position Closed Center), Piping: 4 (Base Mounted), Exhaust: 3 (Common), Specifications: Standard, Voltage: 5 (24VDC), Lead Wire: L (L Plug Connector w/Lead Wire 0.3m), Surge Suppressor: U (Indicator Light w/Surge Suppressor Non-polar), Manual Override: None, Port Size: 01 (Base Mounted w/Sub-plate 1/8), Thread: F (G), Option: None, CE Compliant: Q (CE Compliant)

Rated Flow Range: 21 (2 to 200 L/min), Flow Adjustment Valve: None (Straight), Port Size: F2 (G1/4), Output Specification: L3 (Out 1: IO-Link or NPN/PNP, Out 2: Analog 1-5V), Lead Wire: Q (w/M12 Conversion Lead Wire and Connector, 0.1m), Unit Specification: Unit Selection Function, Bracket/Panel Mount Adapter: R (Bracket, w/o Flow Adjustment Valve)

Function: 1 (Normally Closed), Piping: 4 (Base Mounted), Body Option: Individual EXH, Specifications: Standard, Voltage: 5 (24VDC), Lead Wire: L (L Plug Connector w/Lead Wire 0.3m), Surge Suppressor: U (Surge Suppressor w/Light Non-polar), Manual Override: Non-locking Push Style, Port Size: 01 (Base Mounted w/Sub-plate 1/8), Thread: F (G), Bracket: None, CE-Compliant: Q (CE-Compliant)

Function: 2 (Normally Open), Piping: 4 (Base Mounted), Body Option: Individual EXH, Specifications: Standard, Voltage: 5 (24VDC), Lead Wire: L (L Plug Connector w/Lead Wire 0.3m), Surge Suppressor: U (Surge Suppressor w/Light Non-polar), Manual Override: Non-locking Push Style, Port Size: 01 (Base Mounted w/Sub-plate 1/8), Thread: F (G), Bracket: None, CE-Compliant: Q (CE-Compliant)

Model: 40 (Standard, AC Type), Bar Length: 130 (1300mm), Emmiter Cartridge, Material: D (High Speed De-ionizing Cartridge, Tungsten), High-voltage Cable Length: 2 (2m), One-touch Fitting: AH (ø10 Straight), Plug Position: Q (High-voltage Cable Side), Bar Bracket: B (w/Bracket 1)

Symbol: 15R3 (2 Port, N.C., Port 1 IN, Port 2 OUT), Function: Y (Standard w/Power Saving Circuit), Voltage: 5 (24VDC), Wetted Part Material: B (Plate: PEEK; Diaphragm: FKM), Sub-plate Material/Port Size/ Reverse Mounting Prevention Pin: 1U (1/4-28UNF, PVDF), Lead Wire Length: 6 (600mm), CE Compliant: Q (CE Compliant)

Symbol: 15R3 (2 Port, N.C., Port 1 IN, Port 2 OUT), Function: HY (High-pressure w/Power Saving Circuit), Voltage: 5 (24VDC), Wetted Part Material: A (Plate: PEEK; Diaphragm: EPDM), Sub-plate Material/Port Size/ Reverse Mounting Prevention Pin: w/o Sub-plate, Lead Wire Length: 6 (600mm), CE Compliant: Q (CE Compliant)

AU

None Float type auto-drain 00 11 q Replacement Parts AU100 has no auto-drain type. Element Bowl guard Material Model Port size Description No.

CL

178 12 12 12 13 14 14 14 15 201 to 350 301 to 400 301 to 450 301 to 800 11 11 11 12 20 25 32 40 9-2-32 Series CLG1 Fine Lock Cylinder Double Acting, Single Rod Construction With rubber bumper: CLG1BN CL CL1 MLGC CNG MNB With air cushion: CLG1BA CNA CNS CLS CLQ MLGP RLQ Component Parts MLU Material Note Description Material Note Description Rolled steel Rolled steel Carbon tool steel No. q

Rotary Actuator: Free Mount Type/Vane Style Series CRBU2

This specification is not available for the rotary actuator with auto switch unit. 2 d Body (B) (mm) (mm) M N Size d Size Q 10 9.5 8.5 3.4 10 M3 15 10 11 3.4 15 M3 Body (A) 20 13 14 4.5 20 M5 DQ N 30 A port B port (Standard) (Altered) A port 14 15.5 B port 5.5 30 M5 40 20 21 5.5 40 M5 M 113 Series CRBU2 Symbol: C4 Applicable to single vane style only Symbol: C3 Change the position of the

INFORMATION Modular Connection Type Residual Pressure Relief 3 Port Solenoid Valve For connecting to F.R.L. units AC25-A AC30-A AC40-A VP500 IN OUT VP700 Allows for space saving and reduced piping labor. Power consumption: 0.35 W (Without light) EXH Exam

Assembly example qResidual pressure relief 3 port solenoid valve VP517Y-5DZ1 1 pc. wAir combination AC30C-03DG 1 pc. eSpacer with bracket Y300T-A1 pc. tPiping adapter *1 *2 rSpacer Y300-A1 pc. tPiping adapter E300-03-A1 pc. q Residual pressure relief 3 port solenoid valve Applicable Combinations/Attachment Part Nos.

VXA31/32

Fluid Seal material NBR, FKM, EPDM Manifold body, Base (2) Aluminum Air Liquid Non-leak, Vacuum q 106 Pam3/s or less (1) 1 cm3/min or less 0.1 cm3/min or less Valve assembly NBR, Polyacetal Aluminum FKM/EPDM w Note 1) Differs depending on the operating conditions such as pressure, etc. Note 2) Value on option V (Non-leak, Vacuum).

VXH

VXB Solenoid Specifications VXE Apparent power (VA) Inrush Holding Power consumption (W) (Holding) Temperature rise (C) (Rated voltage) 7.5 6 60 50 Frequency (Hz) 50 53 18 60 44 12 Power source VXP AC VXR VXH VXH How to Order VXF VXH2230 02 1 G Symbol 2 VX3 CE-compliant VXA 2 port valve for high pressure CE-compliant Nil Q 1 For DIN terminal only Bracket Valve/Body None With bracket Nil

Water Strainer

WR110--X224/WR110--X215 Body material: Brass Body material: Special brass Best Pneumatics 14-E627 Port size Set pressure range (-X224): 0.08 to 0.39 MPa Rc1/8, Rc1/4 Set pressure range (-X215): 0.05 to 0.69 MPa Rc1/8, Rc1/4 NPT1/8, NPT1/4 Port size: Rc1/8 Port size: Rc1/4, 3/8, 1/2 Series WF300 14-E628 Series WF300 Dimensions 25 25 A A 14 41 54 29 66.5 Construction A-A Component Parts q

Water Regulator

Flow Rate Characteristics Conditions/Fluid: Water, Port size: Rc1/4 WR110-02-X224 WR110-02-X215 Inlet pressure: 0.6 MPa Inlet pressure: 0.8 MPa 0.4 0.3 0.4 0.5 0.6 0.7 0.8 Outlet pressure [MPa] Outlet pressure [MPa] 0.3 0.2 0.1 0.2 0.1 Flow rate [L/min] 0 0 Flow rate [L/min] 0 0 1 2 3 4 5 6 1 2 3 4 5 6 Dimensions Construction 40.5 e w u 40.5 y IN OUT r M30 x 1.5 Panel cut dimension 30.5 q

Slit Valve

The product should be operated after thoroughly reading the manual and understanding its contents. 530 Slit Valve XGT Series Construction i u w q !2 t !0 y r !1 OPEN o e CLOSE OPEN For 200 mm wafer For 300 mm wafer XGT22 XGT31 XGT22 (200 mm wafer type) Component Parts XLA No.

Smooth Vent Valve

0 Initial air supply valve pilot port S @0 Bonnet assembly q Main air supply valve pilot port M !9 Diaphragm (Material: Stainless steel 304) u Valve seat (Material: FKM) y External seal (Material: FKM) e Bellows (Material: Stainless steel 316L) !

ZSE5/ISE5

Emergency display Display: Red/display the error code on Lt;;D Pressure display 3 1/2 Digit LCD Se ~ diagnosIs functIOn Excess pressure/Data error/ NoIe2) Excess current/Pressure during O-clear Operating temp.range O~50 'C I Bottom mode Noise resistance 500Vp~p pulse width 1 itS standing 1 nS fbl/nn lULl Insulation resistance Between whole wires and case 2M Q (SOVDC by megameter) Vibration