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on condition r C = 0.90 based on condition r 2 2 Based on condition t, A and C Corrected air flow = 350 (0.75 x 1.00) = 467 l/min (ANR) 3 Based on condition t, B and C Corrected air flow = 1200 (0.95 x 0.90) = 1400 l/min (ANR) 3 Based on condition y; IDUS4E is selected as the model to process an air flow larger than 467 l/min (ANR) with a 50Hz power supply, according to data D-1.

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condition r C = 0.90 based on condition r 2 2 Based on condition t, A and C Corrected air flow = 350 (0.75 x 1.00) = 467 l/min (ANR) 3 Based on condition t, B and C Corrected air flow = 1200 (0.95 x 0.90) = 1400 l/min (ANR) 3 Based on condition y; IDUS4E is selected as the model to process an air flow larger than 467 l/min (ANR) with a 50Hz power supply, according to data D-1.

condition r C = 0.90 based on condition r 2 2 Based on condition t, A and C Corrected air flow = 350 (0.75 x 1.00) = 467 l/min (ANR) 3 3 Based on condition t, B and C Corrected air flow = 1200 (0.95 x 0.90) = 1400 l/min (ANR) Based on condition y; IDUS4E is selected as the model to process an air flow larger than 467 l/min (ANR) with a 50Hz power supply, according to data D-1.

G Rear flange F Front flange L Foot C Male rear clevis D Female rear clevis 1.8-29

FV4 FV4 w FV4 FV4 FV4 FV4 r 2PW 3PW 3PW 4PW 0 L L MPA MPA 2PW 3PW 4PW 10 qIN wOUT eGauge port (Inlet) rGauge port (Outlet) 1) Other range available.

Furthermore, foreign matter captured inside the element will not spill over into the c a s e i n t e r i o r o r t h e surrounding area. Select from a wide range of filtration accuracy. With band-lock mechanism Nominal filtration accuracy 5, 10, 25, 50, 100 m Improved functionality and operability Renewed for easier use!

Barrel Perfluoro R is a registered trademark of Matsumura Oil Co.,Ltd. Kalrez R is a registered trademark of E.I. du Pont de Nemours and Company or its affiliates. Chemraz R is a registered trademark of Greene, Tweed Technologies,Inc. ULTIC ARMOR R is a registered trademark of Nippon Valqia Industries, Ltd. 6 XL*-OMJ0005-C 3. Specifications 3-1. Valve specifications 3-2.

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Note 3) A particulate generation test has been conducted in a vacuum environment of 10-Pa. a t e l u g c 2 Stainless steel linear guide & low particulate generation vacuum grease e i t n r a e p r a 0.0 10 0 20 10 w t i o o n L Operation cycles a t e l u g c e 1 i t n r a e Particulate generation from the linear guide unit has been reduced with the use of a stainless steel linear guide and

Leakage voltage Take special precautions if a resistor is used in parallel with the switching element or a C-R element (for surge voltage protection) is used for protection of the switching element. The valve may fail to turn off due to leakage current flowing through the resistor or C-R element. PF2 IF Data Switching element OFF Caution R C Leakage voltage Power supply 1.

Note 3) A particulate generation test has been conducted in a vacuum environment of 10-Pa. a t e l u g c 2 Stainless steel linear guide & low particulate generation vacuum grease e i t n r a e p r a 0.0 10 0 20 10 w t i o o n L Operation cycles a t e l u g c e 1 i t n r a e Particulate generation from the linear guide unit has been reduced with the use of a stainless steel linear guide and

Note 3) A particulate generation test has been conducted in a vacuum environment of 105 Pa. a t e l u g c Stainless steel linear guide & low particulate generation vacuum grease e i 2 t n r a e p r a 0.0 10 0 20 10 w t i o o n L Operation cycles a t e l u g c e i t n 1 r a e Particulate generation from the linear guide unit has been reduced with the use of a stainless steel linear guide and

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Leakage test result a t e l u g c Stainless steel linear guide & low particulate generation vacuum grease e i 2 t n r a e CX p r a 0.0 10 0 20 10 w 10-10 0 5 10 t i o o n L DTime [min] Operation cycles -X e e a a l l k k a t e l u w w g a a c 2 e i o

A AL B B1 C D E F G H H1 J K KA M MM N P S ZZ 32 Up to 300 22 19.5 42 17 31 10 24 8 9 38 6 M5 x 0.8 5.5 8 8 M10 x 1.25 18 1/8 63 109 40 Up to 300 24 21 48 22 37 14 32 9 9 44 8 M5 x 0.8 8 12 8 M14 x 1.5 18 1/8 62 114 45 Up to 300 24 21 52 22 41 14 32 9 9 44 8 M5 x 0.8 8 12 8 M14 x 1.5 18 1/8 62 114 50 Up to 400 35 32 60 27 45 18 38 10 9 55 11 M6 x 1 7 16 11 M18 x 1.5 18 1/8 63 129 56 Up to

4-7-17 2 Series VT325 Flow Characteristics/Weight Flow characteristics 1 2 (P A) 2 3 (A R) 3 2 (R A) 2 1 (A P) Weight Valve model Grommet Port size C [dm 3/(sbar)] b Cv C [dm 3/(sbar)] b Cv C [dm 3/(sbar)] b Cv C [dm 3/(sbar)] b Cv VT325 VT325V (Vacuum spec. type) VT325 VT325V (Vacuum spec. type) 0.55 kg (For AC) 0.60 kg (For DC) Note) Values for a single valve unit.