3 Port Solenoid Valve Metal Seal/Rubber Seal, Body Ported Series VQZ100/200/300 1

L dimension 60.5 3 48 2 85.5 5 73 4 110.5 7 98 6 135.5 9 123 8 160.5 11 148 10 185.5 13 173 12 210.5 15 198 14 235.5 17 223 16 19 248 18 20 260.5 VZ 285.5 21 273 No.

TM

(mm) Mounting screw L2 H2 D W1 H1 P L1 W2 W3 Model (Nominal x Length) 6 3.25 72.5 4.5 5.5 6 6.5 6.5 10 5 7.5 8 12 12 8 10 11 12 12 17 21 23 25 25 6 4 2.2 2.8 2.8 3.2 3.2 2 x 6 2.6 x 8 2.6 x 8 3 x 8 3 x 8 TM-04 TM-06 TM-08 TM-10 TM-12 7.5 9.5 91.5 5.5 77.5 6 7.5 77.5 6 15 9 93 12.5 6.5 4.5 16.3 8.8 14.3 7.5 12 12 10 8 9.8 How to Use 2.

Rotary Actuated Air Gripper MHR2, MDHR2/MHR3, MDHR3

Lead wire length symbols: 0.5 m Nil (Example) M9N 1 m M (Example) M9NM 3 m L (Example) M9NL 5 m Z (Example) M9NZ MA D491 Series MHR2/MDHR2 Model/Specifications Nominal size 20 10 15 30 Double acting Action Gripping force (N) (1) External grip 33 12 58 24 (Effective value) at 0.5 MPa Internal grip 34 12 59 25 Finger closing width (mm) Finger opening width (mm) 16 10 19 14 Opening/ Closing

Digital Flow Switch (Integrated display type)

L/min (250 L type) [ P_2] Set value (OUT2) [F 2]/[ oUt2] Page 41 5% of maximum rated flow [ 0.20] 0.20 L/min (4 L type) [ 0.8] 0.8 L/min (16 L type) [ 2.0] 2.0 L/min (40 L type) [ 5] 5 L/min (100 L type) [ 12] 12 L/min (250 L type) [ H_2] Hysteresis (OUT2) [F 3]/[ RES] [ rES] Response time setting [ 1 .00] 1 second Page 45 [ oUt] Display of set value (OUT1) (Without temperature sensor) [

Toggle Type Air Gripper

V 12 V 5V, 12 V 12 V 5 V, 12 V 12 V IC circuit Solid state switch Reed switch IC circuit Relay, PLC Diagnosis (2-color indication) 24 V Grommet Yes IC circuit Water resistant (2-color indication) M9PAV M9BAV A96 A93 A90 A96V A93V A90V IC circuit IC circuit 5 V 12 V 3-wire (NPN equivalent) Yes Grommet 100 V Relay, PLC 2-wire 24 V No 5 V,12 V 100 V or less Water resistant type auto switches

E-P HYREG ® Series VY1 1

-6 VY150-6 1 1 1 0 2.5 5 7.5 10 0 2.5 5 7.5 10 0 2.5 5 7.5 10 V V V VY130-7 VY140-7 VY150-7 2 2 2 4 0 8 12 16 20 mA 4 0 8 12 16 20 mA 4 0 8 12 16 20 mA VY130-8 0 5 10 15 20 VY140-8 0 5 10 15 20 VY150-8 0 5 10 15 20 3 3 3 mA mA mA Command signal Command signal Command signal VY1700 1 VY1900 1 Input signal voltage (current) for starting the operation of a pilot valve VY1D0 (direct operated)

VNH

PA VNH 12(P1) 12(P1) Nozzle 2(A) 1(P) PAX Nozzle 1(P) 2(A) 3(B) Stop valve Tank Coolant pump PB Tank Coolant pump For reducing load to pump, coolant liquid is returned from B port to tank each time.

5.0 MPa Pilot Operated 2/3 Port Solenoid Valve & Check Valve Series VCH

Note) Compatible cable (cable O.D. 6 to 12 mm) Washer Rubber seal Binding head screw Tightening torque 0.5 to 0.6 Nm Gasket Note) For an outside cable diameter of 9 to 12 mm, remove the internal parts of the rubber seal before using. 240

DM

Cover mounting area Cover How to Order N 04 DM 6 Number of connecting tubes Accessory (Option) 1 cover (Single side) 2 covers (Both sides) C1 C2 6 12 6 12 Style Tube material Nil P S Multi-connector Plug side Socket side N Nylon Soft nylon Polyurethane NU Tubing O.D. 4 mm 6 mm 04 06 15-2-101 Series DM Dimensions: DM6/12 DM6 Panel mounting hole (with the cover at socket side) Panel mounting

Smooth Cylinder Series CQSY ø 12, ø 16, ø 20, ø 25

circuit Reed auto switch Solid state auto switch 12 V 5 V, 12 V IC circuit Diagnostic indication (2-color) Relay, PLC Yes Yes Grommet 24 V 12 V 5 V, 12 V IC circuit Water resistant (2-color indication) M9PAV M9PA M9BAV M9BA 12 V P3DW Magnetic field resistant (2-color indication) 2-wire (Non-polar) 3-wire (Equiv.

MIW/MIS

, PLC Yes Grommet 24 V IC circuit Diagnostic indication (2-color display) 5 V, 12 V 12 V Solid state auto switches marked with are produced upon receipt of order.

AC Servo Motor Driver (CC-Link Type)

Wiring . 12 3.1 Power Supply Wiring . 12 3.2 I/O signal connection . 13 3.2.1 Connection example (Sink I/O interfaces) . 13 3.2.2 Source I/O interfaces . 14 3.3 Wiring of PLC and driver . 15 4. Parameter list (Driver side) . 17 5.

ZQ-OM01301

Avoid abrupt temperature changes even within the specified temperature range. 12) Do not use in a location where the product is exposed to radiant heat from surrounding heat sources. This can cause operating failure. 12 - Doc. No.

IDX-OM-W014

.S 12 S IDU3E/4E/6E-10 12-1 IDU Series 12-1 12-1 IDX-OM-W014 12.S 12-2 L N PE M3 6.5mm 2 1.25mm 12-3 1-1 IDU Series 12-2 12-2 IDX-OM-W014 13 T 13 T 13-1 IEC 13-2 AC200V / 2A DC24V / 2A ( 20V / 5mA) 13-3 ON 3 () 5 /1 () IDU Series 13-1 13 1 IDX-OM-W014 13 T 13-4 PE 1 2 3 LN PE PE: LN: M3 6.5mm 1.25mm 2 () () IDU Series 13-4 13 2 IDX-OM-W014 13 T 13-5 IDU3E/4E

IDX-OM-V020

Option T . 12-1 12.1 SAFETY INSTRUCTIONS FOR USE . 12-1 12.2 OPERATION / ERROR SIGNAL OUTPUT . 12-1 12.3 REMOTE OPERATION . 12-2 12.4 CONNECT THE POWER CABLE AND SIGNAL CABLE . 12-3 12.5 ELECTRIC CIRCUIT . 12-4 Chapter 13 Option V . 13-1 13.1 SAFETY INSTRUCTIONS FOR USE . 13-1 13.2 SPECIFICATIONS . 13-1 13.3 MAINTENANCE . 13-2 Chapter 14 Inspection record . 14-1 14.1 INSPECTION RECORD .

Digital Pressure Switch ( compatible)

Apply a tightening torque of 8 to 12 Nm.

Mini-Rotary Actuator Series CRJ Rack-and-Pinion Type/Size: 05, 1

I1 = 0.03 x (0.02 + 0.01)/12 = 1.25 x 10-kgm I2 = 0.006 x (0.005 + 0.005)/12 + 0.006 x 0.007 = 0.32 x 10-kgm I = 1.25 x 10+ 0.32 x 10-6 I1 = m x (a + b)/12 I2 = m x (a + b)/12 + m x H I = I1 + I2 Inertial moment = 1.57 x 10-kgm Kinetic energy 6 1/2 x I x Allowable energy = 2 /t (: Terminal angular velocity) : Rotation angle (rad) 1/2 x 1.57 x 10-6 x (2 x ( /2)/0.2) Confirm that the load's

Series 10/11 -CQSX, -CQ2X Microspeed Cylinder for Clean Room Series 10-, 11-

, 16, 20 25, 32, 40 50, 63, 80 100 12, 16, 20 25, 32, 40 50, 63, 80 100 20, 25 32, 40 50, 63 32, 40 50, 63 80, 100 6, 10 16, 20 25, 32 10, 16 20 25, 32 12, 16 20, 25 32, 40 6, 10 15, 20 25, 32 6, 10 16 20, 25 32, 45 6, 10 16 20, 25, 32 40, 50 10, 15 25 12, 16 20, 25 Bore sizes (mm) 5 to 50mm/s 7 to 50 mm/s 5 to 50 mm/s 5 to 50mm/s Piston speed Shock absorber (optional for CX2) No rubber bumper

Short Stroke Electric Actuator Series LX

234 LXPB5 5 phase stepper 2 5 6 12 With brake 242 2 5 6 12 Without brake 250 LXSH2 2 phase stepper 2 5 6 12 With brake 258 High rigidity direct acting guide LXS 2 5 6 12 Without brake 266 LXSH5 5 phase stepper 2 5 6 12 With brake 274 CE Marking _ Page 282 Made to Order AC servomotor specification _ 288 Low particulate generation specification _ 294 Construction _ 296 Mounting _ 299

HRX-OM-W004

Name Alarm flag 1 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Name Alarm flag 2 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Bit Name Explanation 0 AL01 : Low level in tank abnormal 1 AL02 : Low level in tank 2 AL03 : Phase loss / phase reverse error 7 3 AL04 : Water leakage 1 4 AL05 : Pump inverter error 2 5 AL06 : Internal fan stop 3 Alarm flag 1 6 AL07 : Fan Inverter error 8 7 Unused 8 AL09