Symbol: 15R3 (2 Port, N.C., Port 1 IN, Port 2 OUT), Function: Y (Standard w/Power Saving Circuit), Voltage: 5 (24VDC), Wetted Part Material: B (Plate: PEEK; Diaphragm: FKM), Sub-plate Material/Port Size/ Reverse Mounting Prevention Pin: 1U (1/4-28UNF, PVDF), Lead Wire Length: 6 (600mm), CE Compliant: Q (CE Compliant)
Symbol: 15R3 (2 Port, N.C., Port 1 IN, Port 2 OUT), Function: HY (High-pressure w/Power Saving Circuit), Voltage: 5 (24VDC), Wetted Part Material: A (Plate: PEEK; Diaphragm: EPDM), Sub-plate Material/Port Size/ Reverse Mounting Prevention Pin: w/o Sub-plate, Lead Wire Length: 6 (600mm), CE Compliant: Q (CE Compliant)
AU None Float type auto-drain 00 11 q Replacement Parts AU100 has no auto-drain type. Element Bowl guard Material Model Port size Description No.
178 12 12 12 13 14 14 14 15 201 to 350 301 to 400 301 to 450 301 to 800 11 11 11 12 20 25 32 40 9-2-32 Series CLG1 Fine Lock Cylinder Double Acting, Single Rod Construction With rubber bumper: CLG1BN CL CL1 MLGC CNG MNB With air cushion: CLG1BA CNA CNS CLS CLQ MLGP RLQ Component Parts MLU Material Note Description Material Note Description Rolled steel Rolled steel Carbon tool steel No. q
This specification is not available for the rotary actuator with auto switch unit. 2 d Body (B) (mm) (mm) M N Size d Size Q 10 9.5 8.5 3.4 10 M3 15 10 11 3.4 15 M3 Body (A) 20 13 14 4.5 20 M5 DQ N 30 A port B port (Standard) (Altered) A port 14 15.5 B port 5.5 30 M5 40 20 21 5.5 40 M5 M 113 Series CRBU2 Symbol: C4 Applicable to single vane style only Symbol: C3 Change the position of the
Assembly example qResidual pressure relief 3 port solenoid valve VP517Y-5DZ1 1 pc. wAir combination AC30C-03DG 1 pc. eSpacer with bracket Y300T-A1 pc. tPiping adapter *1 *2 rSpacer Y300-A1 pc. tPiping adapter E300-03-A1 pc. q Residual pressure relief 3 port solenoid valve Applicable Combinations/Attachment Part Nos.
Fluid Seal material NBR, FKM, EPDM Manifold body, Base (2) Aluminum Air Liquid Non-leak, Vacuum q 106 Pam3/s or less (1) 1 cm3/min or less 0.1 cm3/min or less Valve assembly NBR, Polyacetal Aluminum FKM/EPDM w Note 1) Differs depending on the operating conditions such as pressure, etc. Note 2) Value on option V (Non-leak, Vacuum).
VXB Solenoid Specifications VXE Apparent power (VA) Inrush Holding Power consumption (W) (Holding) Temperature rise (C) (Rated voltage) 7.5 6 60 50 Frequency (Hz) 50 53 18 60 44 12 Power source VXP AC VXR VXH VXH How to Order VXF VXH2230 02 1 G Symbol 2 VX3 CE-compliant VXA 2 port valve for high pressure CE-compliant Nil Q 1 For DIN terminal only Bracket Valve/Body None With bracket Nil
WR110--X224/WR110--X215 Body material: Brass Body material: Special brass Best Pneumatics 14-E627 Port size Set pressure range (-X224): 0.08 to 0.39 MPa Rc1/8, Rc1/4 Set pressure range (-X215): 0.05 to 0.69 MPa Rc1/8, Rc1/4 NPT1/8, NPT1/4 Port size: Rc1/8 Port size: Rc1/4, 3/8, 1/2 Series WF300 14-E628 Series WF300 Dimensions 25 25 A A 14 41 54 29 66.5 Construction A-A Component Parts q
Flow Rate Characteristics Conditions/Fluid: Water, Port size: Rc1/4 WR110-02-X224 WR110-02-X215 Inlet pressure: 0.6 MPa Inlet pressure: 0.8 MPa 0.4 0.3 0.4 0.5 0.6 0.7 0.8 Outlet pressure [MPa] Outlet pressure [MPa] 0.3 0.2 0.1 0.2 0.1 Flow rate [L/min] 0 0 Flow rate [L/min] 0 0 1 2 3 4 5 6 1 2 3 4 5 6 Dimensions Construction 40.5 e w u 40.5 y IN OUT r M30 x 1.5 Panel cut dimension 30.5 q
The product should be operated after thoroughly reading the manual and understanding its contents. 530 Slit Valve XGT Series Construction i u w q !2 t !0 y r !1 OPEN o e CLOSE OPEN For 200 mm wafer For 300 mm wafer XGT22 XGT31 XGT22 (200 mm wafer type) Component Parts XLA No.
0 Initial air supply valve pilot port S @0 Bonnet assembly q Main air supply valve pilot port M !9 Diaphragm (Material: Stainless steel 304) u Valve seat (Material: FKM) y External seal (Material: FKM) e Bellows (Material: Stainless steel 316L) !
Emergency display Display: Red/display the error code on Lt;;D Pressure display 3 1/2 Digit LCD Se ~ diagnosIs functIOn Excess pressure/Data error/ NoIe2) Excess current/Pressure during O-clear Operating temp.range O~50 'C I Bottom mode Noise resistance 500Vp~p pulse width 1 itS standing 1 nS fbl/nn lULl Insulation resistance Between whole wires and case 2M Q (SOVDC by megameter) Vibration
If the piping diameter is reduced, it may lead to insufficient flow of supply air, reduction of suction flow and reduction in the vacuum pressure. 1 The values indicating characteristics are representative values, and may vary depending on the atmospheric pressure (weather, altitude, etc.). 2 Supply pressure: 0.45 MPa Construction Model Selection Caution q t w r e y 1.
JIS Symbol Construction/Dimensions AD402 AD600 Rc 1/4, 3/8, 1/2 Valve assembly Body Rc 3/4, 1 O-ring Body Gauze Lever Valve HA O-ring Chamber Piston assembly AT Float Spring Case ID Long hole of chamber Piston O-ring AMG Rc 3/4, 1 Drain guide Component Parts AFF Drain Rc 3/8 No. q Description Body Material Aluminum die-casted AM Working principle (AD402) When no pressure is applied internally
No. w q Description ADC12 ADC12 e Note) Description Cap Body Motor Cam SCS13 r t C3604B 20137-1A Valve assembly y NBR S-16 O-ring 14-20-50 Note) Motor port no. in the case of 100 VAC: 812PG-100VAC
Description q w e r t y u i o !0 !1 !2 !3 !4 Material Rod cover Head cover Cylinder tube Piston rod Piston Cushion ring Rod bushing Cushion valve Tie-rod Tie-rod nut Retaining ring Rod seal retainer Cushion seal Rod seal Piston seal Cushion valve seal Cylinder tube gasket Piston gasket Wear ring Rod jam nut Components included in a seal kit.
Stations: 3 Stations, Port Size: C6 (ø6 One-touch Fitting), Kit Name: F (D-sub Connector 25 Pin), Electrical Entry: S (Side), Cable Length: 0 (w/o Cable 25 Pin), Option 1: None, Option 2: None, Option 3: None, Option 4: None, Option 5: S (Built-in Silencer, Direct Exhaust), CE Compliant: Q (CE Compliant)
Manifold Type: 20 (Body Ported), Valve Stations: 8 Stations, A, B Port: 00T (NPTF), CE Marked: Q (CE Marked)
Stations: 10 Stations (Note: 2 Stations are Required for Serial Unit Mounting), Port Size: 03 (Rc3/8), Mounting Base: S (U Side), Kit Type: Q (DeviceNetâ„¢, 16 Output Points), Option 1: None, Option 2: W (Dust Poof IP65 Rated)