VP4

VFR VP450 VP470 VP4 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 82 (3 position: 98.5) 129 VZS 71(95.5) VFS 139.5 B A B A VS4 VQ7 (External pilot port) 1/8 (External pilot port) 1/8 EVS VFN A B B A B B B A EA P EB P EA EB ( ): Port size 3/4, 1 Dimensions: Port

Micro Mist Separator Series AMD Model Series AMD can separate and Model AMD450 AMD550 AMD650 AMD850 AMD150 AMD250 AMD350 remove aerosol state oil mist in Rated flow (l/min (ANR))(1) 2000 3500 6000 12000 200 500 1000 compressed air and remove Port size

Options J: With drain guide T: With element service indicator Element service indicator Dimensions with mounting bracket Model Port size (Nominal size B) A B C D E F G H 10 10 10 10 10 10 10 10 10 I 56 66 66 80 80 90 90 100 150 J 15 20 17 22 19 25 21 30 40 K 5 8 8 8 8 10 10 10 15 L 9 12 12 14 14 14 14 16 20 M 5.5 6 6 7 7 9 9 9 11 N 35 O 54 66 66 80 80 88 88 102 136 P 70 84 84 100 100 110

VP3145/3165/3185

In the case of -X80, VF3240(Pilot valve) will be mounted. 4-10-10

AMF

P . 14-20-57 14-20-42 2 Odor Removal Filter Series AMF How to Order AMF150 to AMF850 AMF 250 03 R B Option R IN-OUT reversal direction Body size Bracket Accessory (Option) 150 Standard 1 8 250 Standard 1 4 350 Standard 3 8 450 Standard 1 2 550 Standard 3 4 650 850 B 1 4 B 3 8 04 B 1 2 06 B Nil Nil B Piping port (B dimension) 1 Standard 11 2 Standard 01 B 1 8 02 03 Thread type Nil Rc F G N

ZB-OM00301

DC+COM A(-) C(+) COM B(-) 1N.C.ON 2 ZNR/ 3AB 23 - No.ZB-OM00301 (10ms ) 1 210ms 2 330m/s 4() A-C ON B-C ON N.C. A-C ON OFF 10msec ON 10 A B OFF 50 A B 10 1 50 3 3 24 - No.ZB-OM00301 ZB / / Assy /HNBR Assy //HNBR 25 - No.ZB-OM00301 2 ()() 5kPa () ZFAZFBZFC ON ZB1-VQ110U N.C (0.3 0.4 0.5 0.6) ZB1-VQ110L (0.30.4) ZB1-VQ120U N.C ZB1-VQ110N.C.

Stainless Steel Heat

(C) 50 55 60 65 70 80 15 15 15 15 15 15 10 10 10 10 10 10 5 5 5 5 5 5 1.64 1.37 1.30 1.23 1.16 1.09 1.26 1.05 1.00 0.95 0.89 0.84 0.88 0.74 0.70 0.66 0.62 0.59 30 1.56 1.30 1.24 1.17 1.11 1.04 1.20 1.00 0.95 0.90 0.85 0.80 0.84 0.70 0.67 0.63 0.60 0.56 32 1.50 1.25 1.19 1.12 1.06 1.00 1.15 0.96 0.91 0.86 0.82 0.77 0.81 0.67 0.64 0.60 0.57 0.54 35 1.40 1.17 1.11 1.05 0.99 0.94 1.08 0.90 0.86

AMH

Option J: With drain guide Bracket (Option) female thread T: With element service indicator Maintenance space Drain Element service indicator Dimensions with mounting bracket Model Port size (Nominal size B) A B C D E F G H 10 10 10 10 10 10 10 10 10 I 56 66 66 80 80 90 90 100 150 J 15 20 17 22 19 25 21 30 40 K 5 8 8 8 8 10 10 10 15 L 9 12 12 14 14 14 14 16 20 M 5.5 6 6 7 7 9 9 9 11 N 35

Water Separator Series AMG Please refer to page 14-20-62 for specific product precautions. 1

Made to Order Specifications (For details, refer to page 14-20-55.) 01 B 06 B 1 8 3 4 1B 02 03 10 14 B 1 4 B 3 8 04 B 1 2 Note) Refer to How to Order Bowl Assembly on page 14-20-59. 1 B 1 2 20 2B Caution Accessory/Option Combinations Available Not available Depends on model Be sure to read before handling.

CY1F

Replacement Actuator (Cylinder) CY1F R B 10 Stroke Cylinder identification symbol Piping direction suffix R L Centralized piping on right Centralized piping on left Piping thread type Bore size (mm) Thread type M Rc NPT G Bore size (mm) 10, 15 10 15 25 10 15 25 Symbol Nil 25 TN TF 11 Magnetically Coupled Rodless Cylinder Low Profile Guide Type Series CY1F Construction A A CY1F15 Detailed

3 Port Solenoid Valve Series SYJ300/500/700

(Example) SS3YJ3-20-03 . 1 set (manifold base) SYJ312-5LZ-M3 . 2 sets (valve) SYJ300-10-1A . 1 set (blanking plate assembly) SS3YJ3-42R-03-C4 . 1 set (manifold base) SYJ314R-5G . 2 sets (valve) SYJ300-10-2A . 1 set (blanking plate assembly) The asterisk denotes the symbol for assembly.

Compact

Without brake C section details Cross section BB l\rodel D F L 1 5 4 231 LXPB B-50 L X P B B . 7 5 173 256 52 L X P B _ B _ 1 0 0 204 281 246 323 LXPB B -.125 L X P B B 1 5 0 271 348 120 90 L X P B _ B _ 1 7 5 296 373 LXPB_B_-200 321 394 ?$rc zs S8[i8$ [10 Camraclnectl' 0i|llomiom $lift $crExi tlE LXPB S With brake I I shows the localion at which origin point swiich operates.

AME

size 01 B 1 8 B 1 4 B 3 8 04 B 1 2 06 B AFF 1 Standard 11 2 Standard Nil Rc Thread type 02 03 JIS Symbol AME AM F G N NPT P . 14-20-57 3 4 1B Misc. 10 14 1 B 1 2 20 2B Caution Note) Refer to How to Order Bowl Assembly on page 14-20-59.

AMF

550 3 4 650 1 850 11 2 1 4 3 8 04 1 2 06 10 14 None B With bracket Port size (Dimension B) 01 B 1 8 02 03 B B Thread B Rc(PT) F G(PF) N NPT 3 4 1B B Note) Refer to p.4.7-7 regarding How to Order of case assembly. 1 1 2 20 2B B AMF800 to AMF1000 (Standing style) AMF801/901 (Piping support style) 20 80 AMF 0 20 80 AMF 1 Body size Body size 80 90 80 90 Port size Port size 100 With bracket

FQ1

3 I.D. 10.8 x 2.4 O-ring JIS B2401-4D-P11 FPM 4 Series FQ1 Dimensions Bracket 32 V-band support 2.3 75 (25) 50 100 (80) 75 70 70 30 50 10 92 7 2-A 10 108 R3.5 R8 127 (60) R25 120 109 Part number A Applicable bore size Rc 1 Rc 3/4 Rc 1/2 BP-13S BP-14S BP-15S 34.5 27.5 22 120 50 AIR VENT 10 G1/4 10 92 7 R3.5 2-Rc P 102 (43) A I N INLET OUTLET B (108) Intermediate holder Note) Installed only

PSE200

B Released SET Work 1 Work 2 Work n Atmosphere Max. A: Maximum pressure value when work piece is adsorbed. A B 4 ON = A A B 4 SET OFF = B + Min. B: Minimum pressure value when work piece is not adsorbed. OUT1 auto preset For adsorption verification: In this mode, repeat the adsorption and release of the work piece for a few times. The optimum values will be set automatically.

SYJ300-OMU0003

A 18 SY3000-37-80A-2 B 20,40, 42,43SA SS5YJ5SY3000-37-80A-7 A 912 SY3000-37-80A-4 B SY3000-37-80A-9 A 1316 SY3000-37-80A-7 B SY3000-37-80A-7 A 18 SY3000-37-80A-3 B 21,41SA SS5YJ7SY3000-37-80A-10 A 912 SY3000-37-80A-6 B SY3000-37-80A-12 A 1316 SY3000-37-80A-9 B 1)Ass'y 2)Ass'y 3) 15 No.SYJ300-OMU0003 SYJ Series 16 No.SYJ300-OMU0003 SYJ300 1 SYJ300-9-1(-Q) 1 6 2 7 V111

Micro Mist Separator with Prefilter AMH Model Model AMH250 AMH350 AMH450 AMH550 AMH650 AMH850 AMH150 Series AMH can separate and (1) remove aerosol state oil mist in 500 1000 2000 3500 6000 12000 200 Rated flow (l/min(ANR)) compressed air and remove Po

Options J: With drain guide T: With element service indicator Element service indicator Dimensions with mounting bracket Model Port size (Nominal size B) A B C D E F G H 10 10 10 10 10 10 10 10 10 I 56 66 66 80 80 90 90 100 150 J 15 20 17 22 19 25 21 30 40 K 5 8 8 8 8 10 10 10 15 L 9 12 12 14 14 14 14 16 20 M 5.5 6 6 7 7 9 9 9 11 N 35 O 54 66 66 80 80 88 88 102 136 P 70 84 84 100 100 110

EXxx-OMY0006CN

LED 3 P LED FS LED Fig. 10-5 EX245-FPS1/2/3 LED 10.9.3.1. FS LED Table 10-27 FS LED LED F-iSI 10.9.3.2. P LED Table 10-28 P LED LED Acknowledgement 64 No.EX##-OMY0006CN 10.10. MAC FW/HW Firmware version (FW): 2.1.X Hardware version (HW): 03 and higher Fig. 10-6 10.11. DIP 10.11.1.

Low Differential Pressure Sensor

PSE531 PSE541 PSE561 Applicable pressure sensor PSE530 PSE560 PSE564 PSE550 PSE532 101 to 101 10 to 101 10 to 100 0.1 to 1 50 to 500 0.2 to 2.00 Set (differential) 5%R.D.

LX Series Compact Electric Actuators

Without brake C section details Cross section BB l\rodel D F L 1 5 4 231 LXPB B-50 L X P B B . 7 5 173 256 52 L X P B _ B _ 1 0 0 204 281 246 323 LXPB B -.125 L X P B B 1 5 0 271 348 120 90 L X P B _ B _ 1 7 5 296 373 LXPB_B_-200 321 394 ?$rc zs S8[i8$ [10 Camraclnectl' 0i|llomiom $lift $crExi tlE LXPB S With brake I I shows the localion at which origin point swiich operates.