D. holding MHK2 series MHK2-16D MHK2-16D 50 50 Pressure 0.6MPa Pressure 0.6MPa 40 40 Holding force N Holding force N 0.5MPa 0.5MPa 30 30 L L 0.4MPa 0.4MPa 20 20 0.3MPa 0.3MPa 10 10 0.2MPa 0.2MPa 0 0 10 20 30 40 50 60 10 20 30 40 50 60 Holding point L mm Holding point L mm MHK2-20D MHK2-20D 80 60 70 Pressure 0.6MPa Pressure 0.6MPa 50 60 Holding force N Holding force N 50 40 0.5MPa 0.5MPa 40
MHKL2-16D MHS 50 50 MHC 40 40 Gripping force (N) Gripping force (N) Pressure 0.6 MPa Pressure 0.6 MPa Pressure 0.6 MPa Pressure 0.6 MPa MHT 30 30 0.5 MPa 0.5 MPa L L 0.4 MPa MHY 0.4 MPa 0.3 MPa 20 20 0.3 MPa MHW 10 10 0.2 MPa 0.2 MPa 0 0 MRHQ 10 20 30 40 50 60 10 20 30 40 50 60 Gripping point L (mm) Gripping point L (mm) Misc.
MPa 0.2 MPa 0 0 MRHQ 10 20 30 40 50 60 10 20 30 40 50 60 Gripping point L (mm) Gripping point L (mm) Misc.
400 35 32 65 27 50 18 38 10 9 55 11 M6 x 1 7 16 11 M18 x 1.5 18 1/8 63 129 63 Up to 400 35 32 70 27 55 18 38 6 11 51 11 M6 x 1 7 16 11 M18 x 1.5 22 1/4 73 135 67 Up to 400 35 32 75 27 58 18 38 6 11 51 11 M8 x 1.25 7 16 11 M18 x 1.5 22 1/4 73 135 80 Up to 500 40 37 88 32 69 22 45 12 13 62 13 M8 x 1.25 7 19 13 M22 x 1.5 26 1/4 83 158 85 Up to 500 40 37 95 32 74 22 45 12 13 62 13 M10 x 1.25
5 10 102.5 52.5 16.5 20 112.5 62.5 (Rotating angle) 40 19.5 13.5 50 40, 50 50 12 30 122.5 72.5 50 167.5 92.5 75 Vacuum inlet: One-touch fitting Applicable tubing O.D.
cap screw Stainless steel Special screw Caution 10 Hexagon socket head cap screw Stainless steel Special screw 11 Joint 1.
With (1) DIN connector DIN terminal without connector DIN connector DIN terminal without connector Without Coil voltage (1) With (1) 100V AC (50/60Hz) 200V AC (50/60Hz) 110V AC (50/60Hz) 220V AC (50/60Hz) 24V DC 12V DC Others 1 2 3 4 5 6 9 With (w/o light) (1) YOS Note 1) DIN is applicable to VQZ2000, 3000.
Refer to page 5-11-4.) Not required (Use turbine oil Class 1 ISO VG32, if lubricated.) Unrestricted Base mounted 300/50 SA Note 1) Be certain that pressure within operating pressure range be supplied to supply port, because return pressure is introduced from supply port {1(P)} for activation.
+ 45 (n 2) (n = 2, 3, 4, 5) 10 15 50 D(n = 2, 4, 6) Note 3) 15 + 50 (n 2) 2 65 + 50 (n 2) (n = 2, 3, 4, 5) 10 15 65 15 + 50 (n 2) 2 75 + 55 (n 2) (n = 2, 3, 4, 5) 10 15 75 (n = 2, 4, 6) Note 3) (n = 2, 4, 6) Note 3) 20 + 50 (n 2) 2 75 + 55 (n 2) (n = 2, 3, 4, 5) D-B59W 15 20 Note 3) When n is an odd number, an even number that is one larger than this odd number is used for the calculation
11 * ( ): Fluid: CO2 0.2 to 10 (5) l/min 1 to 50 (25) l/min 2 to 100 (50) l/min Panel mount adapter (For without flow adjustment valve) Port size ZS-33-J Symbol Description Flow rate range 10 Panel mount adapter A 50 11 C6 C8 6 One-touch fitting 8 (5/16") One-touch fitting Panel mount adapter B T Output specification B E 2 PNP outputs 1 PNP output + Analog (1 to 5 V) Panel Mounting bracket
0.34 40 0.28 30 0.21 20 0.14 0 10 0.00 0.07 0 50 100 150 200 Flow rate (slpm, N2) Hastelloy is a registered trademark of Haynes International.
Between external terminals and case 1000V AC 50/60Hz for 1 min.
, V = 200 mm/s or less 100 100 Load mass m (kg) Load mass m (kg) 50, 63 50, 63 50, 63 50, 63 32, 40 32, 40 10 10 32, 40 32, 40 25 25 25 20 25 20 20 20 1 1 10 100 50 51 200 10 100 50 51 200 Stroke (mm) Stroke (mm) (19) L = 50 mm, V = 400 mm/s (20) L = 100 mm, V = 400 mm/s 100 100 63 63 50 50, 63 50, 63 50 10 10 40 40 Load mass m (kg) Load mass m (kg) 40 40 32 32 32 32 25 25 25 25 20 20 20
Thread type Voltage Rc G NPT Nil F N 1 2 3 4 5 6 100VAC (50/60Hz) 200VAC (50/60Hz) 110VAC (50/60Hz) 210VAC (50/60Hz) 24VDC 12VDC Port size Contact SMC regarding other voltages.
(2 )(3 ) 1/2 ()(0[mm]) () LEHZ(J):5 50 mmsec LEHF10 :5 20 mmsec LEHF203240 :530 mmsec LEHS:5 50 mmsec () () (40%) INP 1) INP ON 0.50 2) ()INP ON a) b) INP ON c) INP ON 21 - INP SV1.0* () INP ON SV0.6* a.40%() () INP ON b. 40% ON INP OFF LEHZ LEHZJ LEHF LEHS SV10 [mm/sec] () 4150 50% 100% 540 40% 100% 3150 70% 100% 2130 50% 100% 520 40% 100% [mm/sec] () 4150 50%
-LEFS16 11-LEFS16 Without cable Nil Without cable Nil 11-LEFS25 11-LEFS25 Robotic type cable R Robotic type cable R 11-LEFS32 11-LEFS32 Standard cable S* Standard cable S* 11-LEFS40 11-LEFS40 *Only Step motorcan be selected AC Servo motor 11-LEFS 25 B A1 100 2 S S2 ize I/O connector 25 25 None None Nil Nil 32 32 With connector With connector D D 40 40 Motor Controller type Vacuum
(Equivalent tightening torque: T) 18.8 13.8 11.8 5.8 2.8 0.5 8.6 11 G1/4 (mm) Part no.
Q+Stroke (NA) Cylinder form 12 16 (mm) d Bore size (mm) Standard stroke (mm) A B C E G GP H HA HG HN HP HT J JK L LD Slide Ball bushing 12 15, 25 8 4 16 25 7.5 50 34 6 14.5 34 33 18 M5 X 0.8 9.5 68 4.3 8.5 10 16 15, 25 9.5 5 18 29 6.5 65 40 6.5 16 39.5 39 21 M6 X 1 9.5 75 5.2 7.5 12 20 25, 50 11 6.5 25 36 8.5 80 46 9 18 44.1 45 24 M8 X 1.25 10 86 6.9 9.5 16 25 25, 50 11 6.5 25 40 8.5 90 54
/32 10-32UNF 6, 10, 16, 20 Universal type AS221F-N01 AS231F-N01 NPT1/8 20, 25, 32 AS221F-N02 AS231F-N02 NPT1/4 20, 25, 32, 40 AS321F-N02 AS331F-N02 NPT1/4 40, 50, 63 AS321F-N03 AS331F-N03 NPT3/8 40, 50, 63 AS421F-N04 AS431F-N04 NPT1/2 63, 80, 100 Note 1) Elbow type only.