Series: 11-LEFS (Clean Series Ball Screw Drive), Accuracy: Basic Type, Size: 40, Motor Type: Step Motor (Servo/24 VDC), Lead: A (LEFS16, 10mm; LEFS25, 12mm; LEFS32, 16mm; LEFS40, 20mm), Stroke: 850mm
Series: 11-LEFS (Clean Series Ball Screw Drive), Accuracy: Basic Type, Size: 40, Motor Type: Step Motor (Servo/24 VDC), Lead: A (LEFS16, 10mm; LEFS25, 12mm; LEFS32, 16mm; LEFS40, 20mm), Stroke: 650mm, Motor Option: B (w/Lock)
Series: 11-LEFS (Clean Series Ball Screw Drive), Accuracy: Basic Type, Size: 40, Motor Type: Step Motor (Servo/24 VDC), Lead: A (LEFS16, 10mm; LEFS25, 12mm; LEFS32, 16mm; LEFS40, 20mm), Stroke: 700mm, Motor Option: B (w/Lock)
Series: Clean Series Ball Screw Drive, Accuracy: Basic Type, Size: 40, Motor Type: Step Motor (Servo/24 VDC), Lead: LEFS16, 10mm; LEFS25, 12mm; LEFS32, 16mm; LEFS40, 20mm, Stroke: 500mm, Motor Option: -, Vacuum Port: -, Positioning Pin Hole: -, Actuator Cable Type: -, Actuator Cable Length: -, Controller Type: -, I/O Cable Length: -, Protocol: -, Suffix: -, Controller Mounting: -, Communication
Series: Clean Series Ball Screw Drive, Accuracy: Basic Type, Size: 40, Motor Type: Step Motor (Servo/24 VDC), Lead: LEFS16, 10mm; LEFS25, 12mm; LEFS32, 16mm; LEFS40, 20mm, Stroke: 500mm, Motor Option: w/o Lock, Vacuum Port: Right, Positioning Pin Hole: -, Actuator Cable Type: -, Actuator Cable Length: -, Controller Type: -, I/O Cable Length: -, Protocol: -, Suffix: -, Controller Mounting:
Series: Clean Series Ball Screw Drive, Accuracy: Basic Type, Size: 40, Motor Type: Step Motor (Servo/24 VDC), Lead: LEFS16, 10mm; LEFS25, 12mm; LEFS32, 16mm; LEFS40, 20mm, Stroke: 1000mm, Motor Option: -, Vacuum Port: -, Positioning Pin Hole: -, Actuator Cable Type: -, Actuator Cable Length: -, Controller Type: -, I/O Cable Length: -, Protocol: -, Suffix: -, Controller Mounting: -, Communication
Series: Clean Series Ball Screw Drive, Accuracy: Basic Type, Size: 40, Motor Type: Step Motor (Servo/24 VDC), Lead: LEFS16, 10mm; LEFS25, 12mm; LEFS32, 16mm; LEFS40, 20mm, Stroke: 700mm, Motor Option: -, Vacuum Port: -, Positioning Pin Hole: -, Actuator Cable Type: -, Actuator Cable Length: -, Controller Type: -, I/O Cable Length: -, Protocol: -, Suffix: -, Controller Mounting: -, Communication
Series: Clean Series Ball Screw Drive, Accuracy: Basic Type, Size: 40, Motor Type: Step Motor (Servo/24 VDC), Lead: LEFS16, 10mm; LEFS25, 12mm; LEFS32, 16mm; LEFS40, 20mm, Stroke: 200mm, Motor Option: -, Vacuum Port: -, Positioning Pin Hole: -, Actuator Cable Type: -, Actuator Cable Length: -, Controller Type: -, I/O Cable Length: -, Protocol: -, Suffix: -, Controller Mounting: -, Communication
Series: Clean Series Ball Screw Drive, Accuracy: Basic Type, Size: 40, Motor Type: Step Motor (Servo/24 VDC), Lead: LEFS16, 10mm; LEFS25, 12mm; LEFS32, 16mm; LEFS40, 20mm, Stroke: 650mm, Motor Option: -, Vacuum Port: -, Positioning Pin Hole: -, Actuator Cable Type: -, Actuator Cable Length: -, Controller Type: -, I/O Cable Length: -, Protocol: -, Suffix: -, Controller Mounting: -, Communication
Series: Clean Series Ball Screw Drive, Accuracy: Basic Type, Size: 40, Motor Type: Step Motor (Servo/24 VDC), Lead: LEFS16, 10mm; LEFS25, 12mm; LEFS32, 16mm; LEFS40, 20mm, Stroke: 150mm, Motor Option: w/Lock, Vacuum Port: Right, Positioning Pin Hole: -, Actuator Cable Type: -, Actuator Cable Length: -, Controller Type: -, I/O Cable Length: -, Protocol: -, Suffix: -, Controller Mounting: -
Series: Clean Series Ball Screw Drive, Accuracy: Basic Type, Size: 40, Motor Type: Step Motor (Servo/24 VDC), Lead: LEFS16, 10mm; LEFS25, 12mm; LEFS32, 16mm; LEFS40, 20mm, Stroke: 600mm, Motor Option: -, Vacuum Port: -, Positioning Pin Hole: -, Actuator Cable Type: -, Actuator Cable Length: -, Controller Type: -, I/O Cable Length: -, Protocol: -, Suffix: -, Controller Mounting: -, Communication
Series: Clean Series Ball Screw Drive, Accuracy: Basic Type, Size: 40, Motor Type: Step Motor (Servo/24 VDC), Lead: LEFS16, 10mm; LEFS25, 12mm; LEFS32, 16mm; LEFS40, 20mm, Stroke: 400mm, Motor Option: w/o Lock, Vacuum Port: Right, Positioning Pin Hole: -, Actuator Cable Type: -, Actuator Cable Length: -, Controller Type: -, I/O Cable Length: -, Protocol: -, Suffix: -, Controller Mounting:
Series: Clean Series Ball Screw Drive, Accuracy: Basic Type, Size: 40, Motor Type: Step Motor (Servo/24 VDC), Lead: LEFS16, 10mm; LEFS25, 12mm; LEFS32, 16mm; LEFS40, 20mm, Stroke: 850mm, Motor Option: -, Vacuum Port: -, Positioning Pin Hole: -, Actuator Cable Type: -, Actuator Cable Length: -, Controller Type: -, I/O Cable Length: -, Protocol: -, Suffix: -, Controller Mounting: -, Communication
Series: Clean Series Ball Screw Drive, Accuracy: Basic Type, Size: 40, Motor Type: Step Motor (Servo/24 VDC), Lead: LEFS16, 10mm; LEFS25, 12mm; LEFS32, 16mm; LEFS40, 20mm, Stroke: 650mm, Motor Option: w/Lock, Vacuum Port: -, Positioning Pin Hole: -, Actuator Cable Type: -, Actuator Cable Length: -, Controller Type: -, I/O Cable Length: -, Protocol: -, Suffix: -, Controller Mounting: -, Communication
Series: Clean Series Ball Screw Drive, Accuracy: Basic Type, Size: 40, Motor Type: Step Motor (Servo/24 VDC), Lead: LEFS16, 10mm; LEFS25, 12mm; LEFS32, 16mm; LEFS40, 20mm, Stroke: 700mm, Motor Option: w/Lock, Vacuum Port: -, Positioning Pin Hole: -, Actuator Cable Type: -, Actuator Cable Length: -, Controller Type: -, I/O Cable Length: -, Protocol: -, Suffix: -, Controller Mounting: -, Communication
psig (6.2 MPa) 14 to 160F (40 to 71C) (No freezing) 1) 0.3 2 x 10-11 Pam3/sec 2 x 10-10 Pam3/sec He Bubble tight Ra ma x 15 in. (0.4 m) Option: 10 in. (0.25 m), 7 in. (0.18 m), 5 in. (0.13 m) Face seal, Tube weld Bottom mount (Option: panel mount) 0.49 in3 (8 cm3) 2.65 lbs (1.2 kg) 2) Inboard leakage Outboard leakage Leak rate Across the seat leak Surface finish Connections Installation
Flow rate (L/min (ANR)) Inlet pressure (MPa) 1096 Direct Operated Precision Regulator Series ARP20 to ARP40 10211021Direct Operated Precision Regulator with Backflow Function Series ARP20K to ARP40K 10211021Dimensions 2 x P1 Port size A Pressure gauge (Option) Q C OUT IN K P2 Pressure gauge port size V B Tubing support 6/4 R Bleed port F S U D N Bracket (Option) J M T (11) Panel fitting
size (mm) 12 R E A 25 300 Cylinder stroke (mm) Type Port type Symbol Nil TN TF Rc NPT G Model Bore size (mm) Maximum manufacturable stroke (mm) Model Port size Lubrication Standard stroke (mm) 12-REA25 12-REA32 25 32 40 Rc1/8 NPT1/8 G1/8 Rc1/4 NPT1/4 G1/4 200, 250, 300, 350, 400, 450, 500, 600, 700, 800 12-REA40 12-REA50 50 1300 Non-lube 200, 250, 300, 350, 400, 450, 500, 600, 700, 800, 900
Description Material Qty. 11 Diaphragm assembly NBR, other P362010-1 1 1 1 1 1 P362020-13 P362020-2 P362020-13 P362020-2 12 Diaphragm assembly NBR, other P362010-2 1 1 1 1 1 P362020-5 P362020-5 P362030-34 P362030-34 13 Diaphragm NBR, other 1 1 P36202019 P36202019 14 Valve Stainless steel, NBR P36201058 1 15 Valve Stainless steel, H-NBR 1 1 P36202068#1 P36202068#1 16 Valve Brass
NBR FGFS5-60 AL-27S 1 FGFC5-60 11 O-ring FGFL3-40 AL-23S 1 FGFR3-40 FKM FGFL5-60 AL-24S 1 FGFR5-60 FGFS3-40 3 FGFC3-40 AL-20S NBR FGFS5-60 5 FGFC5-60 12 Gasket FGFL3-40 3 FGFR3-40 FKM AL-21S FGFL5-60 5 FGFR5-60 Note 1) Refer to How to Order on page 47 for the part of the model number.