End Lock Cylinder Series CBM2/ø20, ø25, ø32, ø40 Series CBA1/ø40, ø50, ø63, ø80, ø100 CL MLGC CNA CB CV/MVG Maintains the cylinder’s CXW original position even if the CXS air supply is interrupted. CXT MX

11 154 24 16 7 19 88 32 With rod boot h l Symbol f e 1 to 50 51 to 100 101 to 150 151 to 200 201 to 300 301 to 400 401 to 500 51 to 100 101 to 150 151 to 200 201 to 300 301 to 400 401 to 500 1 to 50 Bore (mm) 20 25 32 40 12.5 81 93 106 131 156 25 37.5 50 75 100 68 17 35 12.5 85 97 110 135 160 185 25 37.5 50 75 100 125 72 17 35 12.5 85 97 110 135 160 185 25 37.5 50 75 100 125 72 17 35 12.5

VZS

100 VAC, 50/60 Hz 200 VAC, 50/60 Hz Nil N T F Standard Rc Nil Z None With light/surge voltage suppressor NPT 1 110 VAC, 50/60 Hz Option NPTF S With surge voltage suppressor 220 VAC, 50/60 Hz G 2 position double 5 6 9 24 VDC 12 VDC Note) Indicator light is not available for grommet type.

JXCx-OMY0008

From the 100 mm point, the actuator must start a pushing operation of 10 mm/s speed and 50% or less force. (the pushing distance is up to 5 mm). Then, the actuator should move from the position where the pushing operation was completed (where INP turned ON) to a point 50 mm away at 50 mm/s. (Step Data No.2 is used for this operation).

Rotary Actuator Ｃ ( Ｄ ) ＲＡ１＊＊＊３０～１００－＊＊Ｚ

After assembly is completed, perform an operation test and check that there is no air leakage. 17 10 14 15 3 5 27 11 12 6 9 14 1 4 11 9 27 2 4 19 15 Cushion seal 8 Body Left cover Rack 18 Direction of the shaft(key) About10 Fig. (17) Direction of assembly of the shaft 42 - . Size 50 to 100 Disassembly procedure 1.

MB1

MM L1 E1 E1 L1 NDH10 NX U1 ND H10 NZ MM R1 U1 R1 NX A A1 32 40 50, 63 80 100 32 40 50, 63 80 100 M10 x 1.25 M14 x 1.5 M18 x 1.5 M22 x 1.5 M26 x 1.5 20 22 28 40 40 30 40 50 65 65 14 19 24 26 26 20 22 28 40 40 30 40 50 60 60 12 16 19 24 34 34 M10 x 1.25 M14 x 1.5 M18 x 1.5 M22 x 1.5 M26 x 1.5 10 11 14 20 20 16 19 24 34 34 40 50 64 80 80 10 10 14 22 22 14 14 20 30 30 28 28 40 60 60 10 10 14

Stopper Cylinder

82 54 25 64 8 28 7 50 50 6.6 11 depth 8 1/8 1/8 1/8 24.5 56 28 19 QW 1.8 Stroke 20 32 to 50 20 QU 29 QW 32 to 50 20 32 to 50 20 * Refer to pages 572 and 573 for the auto switch proper mounting position and mounting height. * For the single acting type, a One-touch fitting is on the rod end only. * The position of the width across flats (K) is arbitrary and is not specified. 566 B Stopper

Rotary Table/

M5 x 0.8 depth 5 M5 x 0.8 depth 5 (Vacuum port) DC DB DA High precision type 11-MSQAA 11-MSQAR Basic type 11-MSQBA 11-MSQBR DC DB DA (Vacuum port) HB HB HA HE (HD) (HD) 11.5 5.5 HC HC DD DD (mm) (mm) DA(h8) DB(h8) DC(h8) DD(h8) HA HB HC HD HE DA(h9) DB(h9) DC(h9) DD(h9) HB HC HD Size 10 20 30 50 Size 10 20 30 50 46 45 20 35 15.5 24 5 63 9.5 46 45 20 35 20 5 59 61 60 28 40 19.5 30 6 73 13.5

RLQ

YB-03 32, 40 12 7 25 9 34 11.5 depth 7.5 Joint YB-05 50, 63 12 9 32 11 42 14.5 depth 8.5 K ( across flats) H (With locking) Weight (g) Bore size (mm) RS T1 T2 V W Part No. YB-03 32, 40 80 9 6.5 10 18 50 d2 d1 YB-05 50, 63 120 11 6.5 12 22 60 L UT C UA (mm) Part No.

Thermo-chiller

Hz*3 kW 2.0/2.5 Temperature stability*4 C CH1: 0.1, CH2: 0.5 Circulating fluid system Rated flow 50/60 Hz*5,*11 L/min CH1: 25/35 (0.5 MPa), CH2: 2/2 (0.5 MPa) Max. flow rate 50/60 Hz*11 L/min 55/65 Max. pump head m 50 Settable pressure range (-P) MPa 0.1 to 0.5 Min. operating flow rate 50/60 Hz*6 L/min CH1: 25/35 (-P: 15), CH2: 1/1 Tank capacity (CH1, 2 total) L Approx. 18 Circulating fluid

CQS

Model C D 25 30 35 40 45 50 25 30 35 40 45 50 25 30 35 40 45 50 55 60 65 70 30 35 40 45 50 55 60 65 70 75 C' D' 30 35 40 45 50 55 30 35 40 45 50 55 30 35 40 45 50 55 60 65 70 75 35 40 45 50 55 60 65 70 75 80 Mounting bolt Mounting bolt CQSKB12-5D -10D -15D -20D -25D -30D CQSKB16-5D -10D -15D -20D -25D -30D CQSKB20-5D -10D -15D -20D -25D -30D -35D -40D -45D -50D CQSKB25-5D -10D -15D -20D -

Possible to transfer a workpiece at low-speed.

A S G D L TG effective depth TL TF effective depth TL TD TB TC (mm) D (g6) DD (h9) AU A B BA BB BC BD BE BU F H J JA JB JJ K Size Rotation angle 20 30 40 90, 180 50 25 2.5 63 (11) 14 34 14.5 30.4 10 30 M8 x 1.25 11 6.5 3 90, 180 M5 x 0.8 depth 6 68 30 3 69 (11) 14 39 16.5 49 16 34.7 12 32 M10 x 1.5 14 8.5 4 90, 180 M6 x 1 depth 7 76 32 3 78 (13) 16 47 18.5 55 16 40.4 15 36 M10 x 1.5 14

Compact Hydraulic Cylinder

(mm) H I J K L C D E F U A B Z M N O P S Bore size (mm) 32 M10 x 1.5 60 4.5 14 8.5 82 12 16 45 20 31.5 65 14 34 5.5 9 depth 7 Rc1/8 58.5 40 M10 x 1.5 69 5 14 8.5 84 12 16 52 22 35 67 14 40 5.5 9 depth 7 Rc1/8 66 50 M12 x 1.75 86 7 18 11 98 15 20 64 25 41 76 19 50 6.6 11 depth 8 Rc1/4 80 63 M12 x 1.75 103 7 18 11 102 15 20 77 27 47.5 80 19 60 9 14 depth 10.5 Rc1/4 93 80 M16 x 2 132 6 22 11

4-channel Flow Monitor ( compatible)

Normal output Reversed output -100No.PF-OMA1011-A Specifications Model PFG20# series PF2A5 PF3W5 PF2D5 Applicable flow sensor 10 50 11 21 51 04 20 40 11 25 04 20 40 Rated flow range 1 to 10 5 to 50 10 to 100 20 to 200 50 to 500 0.5 to 4 2 to 16 5 to 40 10 to 100 50 to 250 0.4 to 4 1.8 to 20 4 to 40 L/min L/min L/min L/min L/min L/min L/min L/min L/min L/min L/min L/min L/min 0.35 to 1.7 to

Prevents Micro-Bubbles

VX2 VX How to Order Manifold Base Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com VX3 LLC 2 A 02 11 S VXA Tubing size for P port and R side connection Body class Tubing size for P port and L side connection VN Symbol 00 06 07 08 10 11 10 11 12 13 12 13 19 12 13 19

CXS

How to Order 11 CXSJ M Bore size Stroke Auto switch Bore size/Stroke 6 10 10, 20, 30, 40, 50 10, 20, 30, 40, 50 Bearing type M L Slide bearing Ball bushing bearing Only ball bushing bearing is available for clean room specification 12-.

CXS

How to Order 11 CXSJ M Bore size Stroke Auto switch Bore size/Stroke 6 10 10, 20, 30, 40, 50 10, 20, 30, 40, 50 Bearing type M L Slide bearing Ball bushing bearing Only ball bushing bearing is available for clean room specification 12-.

JXCx-OMT0005CN

(P.23) 10.1 (P.33) 3.4 (P.16) 11.(P.42) (CN1: EMG 3.(P.12) ) INP ON 10.1 (P.33) (INP PLC ) 5 3.(P.12) PLC (PLC) 2 12.4 (P.50) 11.(P.42) 3.(P.12) 83 - 5.(P.23) 10.1 (P.33) 3.(P.12) PLC (PLC) 2 12.4 (P.50) () () (LED() 3.2 (P.13) ) 11.(P.42) 5 11.(P.42) 11.(P.42) 3.(P.12) (CN1: EMG 3.

Auto Switch Guide

Applicable bore size (mm) Cylinder series 32 40 50 63 80 100 MDB1 BMP1-032 10-20-78

Auto Switch Guide

Applicable bore size (mm) Cylinder series 32 40 50 63 80 100 MDB1 BMP1-032 9-15-78

Step Motor Driver （ Pulse input type ）

50 50 50 50 50 Trigger LV 50 50 50 50 50 50 Pushing speed 20 30 20 30 20 30 Moving force 100 100 100 100 100 100 Area1 0.00 0.00 0.00 0.00 0.00 0.00 Area2 0.00 0.00 0.00 0.00 0.00 0.00 In position 0.50 0.50 0.50 0.50 0.50 0.50 102 - LER Basic parameter default Model LER10K LER10J LER30K LER30J LER50K LER50J Gear Ratio [] 8 12 8 12 7.5 12 Controller ID 1 1 1 IO pattern 1 1 1 Acceleration/