5 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported

L 60.5 3 48 2 85.5 5 73 4 110.5 7 98 6 135.5 9 123 8 160.5 11 148 10 185.5 13 173 12 210.5 15 198 14 235.5 17 223 16 19 248 18 20 260.5 VP7 285.5 21 273 No.

CUJ

CUJ (As compared with SMC Series CU cylinders without magnet) Dimensions (without magnet) (mm) b Bore Size A (a) B (b) C (c) B 4 6 8 10 10 () 15 () 13 () 13 (13) 19 (22) 13 (33) c + Stroke C + Stroke 13 () 21 () 13 () A 13.5 (15) 22 (24) 13 (36) a Numbers in parentheses are the dimensions of SMC Series CU cylinders.

VZS

For details, refer to pages 3-7-19 and 3-7-20.

180
Angular Style Air Gripper Series MHY2/MHW2 Cam Style Rack & Pinion Style 1

Workpiece weight: 0.05 kg 25 20 0.5 Gripping force (N) 0.4 15 13 0.3 10 0.2 5 0.1 0 20 30 40 50 60 70 Gripping point L (mm) When MHY2-16D is selected, the gripping force is determined to be 13 N according to the gripping point distance (L = 35 mm) and the pressure (0.6 MPa).

180
Angular Style Air Gripper Series MHY2/MHW2 Cam Style Rack & Pinion Style 1

Workpiece weight: 0.05 kg 25 20 0.5 Gripping force (N) Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 0.4 15 13 0.3 10 0.2 5 0.1 0 20 30 40 50 60 70 Gripping point L (mm) When MHY2-16D is selected, the gripping force is determined to be 13 N according to the gripping

Table of Contents

Polarity Flat ribbon cable connector SOL.A SOL.B 20 18 () () (+) (+) 1 station 19 17 15 13 11 9 10 12 14 16 18 20 2 stations SOL.A SOL.B () () (+) (+) 16 14 Flat Ribbon Cable Connector Assembly (Option) SOL.A SOL.B 12 10 () () (+) (+) 3 stations Note Assembly part no.

Title not found

(800) 526-7661 1/4 Female Pipe Thread to Tube 23/32 LTees: 1/4 NPT Female to Tube 21/32 9/16 31/32 13/16 29/32 27/32 11/16 9/16 9/16 11/16 Hex Typ. 13/16 13/16 15/16 19/32 Typ. 1 3/32 65 1/4 FLT2 1/4 FLT1 1/4 FLT4 1/4 FLT5 1/4 FLT6 1/4 FLT3 1/4 FLT2 1/2 111/16 Tees: 1/4 NPT Female to Tube 11/8 17/16 15/16 19/32 Typ. 11/16 Hex Typ. 13/4 11/8 13/8 15/16 11/16 Hex not shown 66 1/4 FT2 1/4

Series REC 10- ø20, ø25, ø32, ø40 11- Sine Cylinder

G FZ FT E 2 x 7 Mounting hole F FX FY AL A Bore size B2 24 22 22 18 D B B1 Stroke range 0 40 32 25 20 20-0.033 150 to 1000 150 to 700 150 to 700 41 32 32 26 14 12 10 8 16 13 13 13 5 4 4 4 12.5 11 10 10 50 45 45 41 75 19.5 19.5 15.5 . 40 40 34 60 60 60 17 17 13 FX 26-0.033 0 82 36 75 75 26-0.033 0 20, 25 and 32 200 to 1000 32-0.039 0 66 21 52 22 247 217 204 200 37 P S H2 H1 Bore size MM K

CUJ

Solid state switch D-F8 CUJ (As compared with SMC Series CU cylinders without magnet) Dimensions (Without magnet) Series Variations Bore size (mm) A(a) B(b) C(c) Bore size (mm) Rod end configuration Stroke (mm) Clean series 4 6 8 10 15 20 b Action Series Auto switch B Double acting Male thread Without thread None 4 10() 15() 13() 4 Single acting, Spring return 6 13(13) 19(22) 13(33) Double

IDX-OM-W014

1 IEC 13-2 AC200V / 2A DC24V / 2A ( 20V / 5mA) 13-3 ON 3 () 5 /1 () IDU Series 13-1 13 1 IDX-OM-W014 13 T 13-4 PE 1 2 3 LN PE PE: LN: M3 6.5mm 1.25mm 2 () () IDU Series 13-4 13 2 IDX-OM-W014 13 T 13-5 IDU3E/4E-10-T IDU3E/4E/6E-20/23-T AC200 / 200,220V (50,60Hz) AC100/100,110V (50/60Hz) PE N L 1 2 or AC230V (50Hz) TB 3 PE N L 1 2 TB 3 TDR MC TDR MC TDR ILS TDR ILS MC MC OLR

5 Port Solenoid Valve/Body Ported, Cassette Type Manifold, Series SY3000/5000/7000

SS5Y3-60Stations B (Light/surge voltage suppressor) Manual override (non-locking) Stations 2 3 4 5 6 7 8 9 10 (Station n) (Station 1) 43.3 (3.2) L1 110.5 123 135.5 148 160.5 173 173 185.5 198 33.4 (3) L2 100 112.5 125 137.5 150 162.5 162.5 175 187.5 L3 86 96.5 107 117.5 128 138.5 149 159.5 170 [44.7] L4 12 13 14 15 16 17 12 13 14 38.2 28.2 25.8 20.7 19.2 11 12 13 14 15 16 17 18 19 20 Stations

Thermo-chiller

Required Facility Water Flow Rate HRLE050-W-20 30 Facility water flow rate [L/min] 25 20 16 15 10 5 0 0 10 20 25 30 40 50 Facility water inlet temperature [C] * This is the facility water flow rate at the circulating fluid rated flow and the cooling capacity listed in the Cooling Capacity specifications. 13-2 A Thermo-chiller Compact Dual/Basic Type for Lasers HRLE Series Dimensions HRLE050

IDX-OM-W011

9.5mm 2 1.25mm L ,N N L () () IDF Series 12-1 12 1 IDX-OM-W011 12 R AC100V M4 () AC200V (M3) 12-4 () () ONOFF 12-5 1-1 IDF Series 12-4 12 2 IDX-OM-W011 13.S 13 S 13-1 IDF1E15E1-10 IDF Series 13-1 13-1 IDX-OM-W011 13.S 13-2 IDF1EIDF3E L N PE M3 6.5mm 2 1.25mm IDF4E15E1 L N PE M3 6.5mm 2 1.25mm 13-3 1-1 IDF Series 13-2 13-2 I D XO M W 011 14 T 14 T I D

HRX-OM-W032

20 15 15 10 10 5 5 0 0 5 10 15 20 25 30 35 5 10 15 20 25 30 35 Circulating fluid temperature [] Circulating fluid temperature [] 60Hz 50Hz Fig. 8-3: Cooling Capacity 8.5 Pump Capacity 0.6 60 Usable flow rate range 0.5 50 Circulating fluid outlet (60Hz) Lifting head [m] Pressure [MPa] 0.4 40 0.3 30 0.2 20 Circulating fluid outlet (50Hz) 0.1 10 Circulating fluid return 0.0 0 0 10 20 30 40

AC Servo Motor Driver (SSCNET Type)

Parameter list (Driver side) . 13 6.

3 Port Direct Operated Poppet Solenoid Valve Series VKF300 1

L Dimension n: Stations n L L1 L2 1 38 28 2 57 47 3 76 66 4 95 85 5 114 104 6 133 123 7 152 142 8 171 161 9 190 180 10 209 199 11 228 218 12 247 237 13 266 256 14 285 275 15 304 294 16 323 313 17 342 332 18 361 351 19 380 370 20 399 389 4-13-10

Silencers/Exhaust Cleaner Series AN
/Series AMC 1

Model Specifications AN101-01 AN110-01 AN120-M3 AN120-M5 R R M3 M5 1 8 1 8 Port size (1) Noise reduction (dB (A)) Fluid Max. operating pressure (2) 13 18 16 21 Compressed air 1.0 MPa 5 to 150C (3) Ambient and fluid temperature Effective area (mm2) Weight (g) 20 35 1 5 9.5 20 1 3.3 22.5 38 9 17 11 A B 13 6 8 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370

Speed Controller with Indicator Stainless Steel Type Elbow Type/Universal Type AS-FSG Series

Inch Size [mm] Model d T (R, NPT) H D1 D3 L1 L2 L3 L4 Note 1) A Note 2) M W1 W2 X Y Weight [g] Unlocked Locked Unlocked Locked AS221FSG-01-01 (S) 1/8" 7.2 12 19.1 26.2 19.1 43.9 42.4 40.8 39.3 13.3 20 21.5 6.5 15 13 (13) AS221FSG-01-03 (S) 5/32" 8.2 AS221FSG-01-07 (S) 1/4" 11.2 20.8 27.9 14 (13) AS221FSG-01-09 (S) 5/16" 13.2 22.4 29.5 14.2 15 (14) AS221FSG-02-01 (S) 1/8" 1/8 13 (12.7) 7.2

Multistage Ejector Series ZL112/212 1

90 100 90 ZQ Vacuum pressure (kPa) Vacuum pressure (kPa) 80 80 70 70 ZF 60 60 50 50 ZP 40 40 30 30 ZCU 20 20 10 10 AMJ 0 0 10 20 30 40 50 60 70 80 90 100 110 120 20 60 100 140 180 220 260 300 130 Suction flow rate (/min(ANR)) Suction flow rate (/min(ANR)) Misc.

High Vacuum Angle Valve

15 63 70 183 79 2 11 75 52 20 17.5 68 88 217 100 3 11 87 95 70 20 20 72 90 256 117 3 11 114 110 83 20 26.5 98 108 321 154 3 11 134 130 102 20 38 133 138 335 200 3 11 190 180 153 30 40 114 Note 1) Dimension E applies when heater option is included.