Dual Rod Cylinder: Basic Type Series CXS ø6, ø10, ø15, ø20, ø25, ø32 1

Width across flats 13 Width across flats 16 Width across flats 19 (mm) Symbol ZZ Z SS KK Stroke 20 10 50 40 30 75 100 100 20 30 10 10 75 50 10 20 20 40 40 75 75 30 30 50 50 100 100 40 Model CXS20-R CXS25-R CXS32-R 22 27 22 40 80 60 100 124 110 134 130 154 170 194 120 144 140 164 190 214 24.5 29.5 60 24.5 80 107 131 117 141 142 166 172 196 132 156 147 171 197 221 40 29 34 49 122 152 132 162

New

suppressor 5/32 4 N 100 VAC 10 one-touch fitting M 9/32 7 P 110 VAC A B C D E F 13/64 5 Q 200 VAC 1/4 5/16 8 R 230 VAC 25/64 10 S Conduit 24 VDC Aluminum 13/64 5 With surge voltage suppressor 3/8 5/16 8 VX2 T 100 VAC 25/64 10 Single U 110 VAC 3 Size 3 G H Unit 1/2 25/64 10 V 200 VAC N.C. 13/64 5 W 230 VAC J 10 one-touch fitting 5/16 8 K L 25/64 10 Faston terminal Resin 13/64 5 M N Y 12 one-touch

V

) Operating Pressure 2 Position Double 0.1 ~ 0.7 (14.5 ~ 100) Range MPa (PSI) 3 Position 0.2 ~ 0.7 (30 ~ 100) External Pilot 2 Position Single 0.25 ~ 0.7 (37 ~ 100) Operating Pressure 2 Position Double 0.25 ~ 0.7 (37 ~ 100) Range MPa (PSI) 3 Position 0.25 ~ 0.7 (37 ~ 100) Ambient & Fluid Temperature C / F Max 50C / 122F Max Operating 2 Position Single 10 5 Frequency Hz 3 Position 3 3 Manual

SZ3000

L n 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 Internal Pilot Manifold L Dimension n: Stations L1 L2 L3 L4 310.5 300 275 18 273 262.5 243.5 15 285.5 275 254 16 298 287.5 264.5 17 110.5 100 86 12 223 212.5 191 16 235.5 225 201.5 17 235.5 225 212 12 248 237.5 222.5 13 260.5 250 233 14 185.5 175 159.5 13 198 187.5 170 14 210.5 200 180.5 15 135.5 125 107 14 148 137.5 117.5 15 160.5 150

AC Servo Motor Driver (SSCNET /H Type)

Axis No. settings 13 5. Parameter list (Driver side) 15 6.

SZ3000

Double wiring specification specification 12 13 12 13 12 stations 12 stations 13 stations 13 stations Specified wiring Note 2) Specified wiring (up to 25 solenoids possible) ... ... ... ...

VQ7-6/7-8

: VQ7-6-FHG-D-SC Exhaust center : VQ7-6-FJG-D-SC Pressure center : VQ7-6-FIG-D-SC 145 86.5 155 68.5 76.5 50 50 68.5 50 50 Manual override 13 (port A) 13 (port B) Manual override 13 (port A) 13 (port B) B A B A 62 38 50 38 50 62 A B A B Prewired connector (M12) (L approx. 500) R1 R2 P Prewired connector (M12) (L approx. 500) R1 R2 P 42.5 42.5 42.5 42.5 2-6.5 Mounting hole Indicator light 2

Best Pneumatics Vol. 14

V or less 12 V to 24 VAC, DC: 50 mA 48 VAC, DC: 40 mA 100 VAC, DC: 20 mA IS1000E-3003 32 60.5 30 13 74.5 ITV IS1000E-3004 IS1000E-4002 IC AC40 AR40, AW40 AWM40, AWD40 IS1000E-4003 (2) 32 Maximum operating current 62.5 37 12.5 80.5 IS1000E-4004 VBA IS1000E-4006 Note 1) in the model numbers indicates a thread type.

KR

(100) 44.5 112 16 22 1 2 KGT16-04 40.5 46 116 Reference dimensions after R thread installation.

Ejector Valve Unit Series ZYY/ZYX 1

Y3 X3 ZY -07L Max. vacuum pressure: 53 kPa Y3 X3 ZY -07S Max. vacuum pressure: 84 kPa Exhaust Characteristics Flow Characteristics Exhaust Characteristics Flow Characteristics 50 50 100 100 100 100 Vacuum pressure Suction flow rate (l/min(ANR)) Air consumption flow rate (l/min(ANR)) Suction flow rate (l/min(ANR)) Air consumption flow rate (l/min(ANR)) 40 40 80 80 80 80 Vacuum pressure (kPa

JXCx-OMT0061CN

. () 13.1 )100mm/s 50mm (No.1 ) 50mm 50mm/s 10mm 5 100mm (No.2 ) [] No. 1 2 2 2 mm/s mm mm/s mm/s mm mm mm mm/s 0 1 ABS 100 50.00 1000 1000 0 0 0 100 0 0 0.1 2 INC 50 10.00 1000 1000 0 0 0 100 0 0 0.1 () 1No.1(IN0ON) / 2DRIVEON (2)(5)(10)(13) No.1 DRIVE (1) No.

KJ

Note) D1: Max. diameter 15-4-20 13 Inch-size One-touch Fittings Series KQ2 Branch Y: KQ2U Applicable tubing O.D.

5 Port Solenoid Valve/Body Ported, Cassette Type Manifold, Series SZ3000

Internal pilot manifold L: Dimensions n: Stations L n 2 110.5 100 86 12 3 123 112.5 96.5 13 4 135.5 125 107 14 5 148 137.5 117.5 15 6 160.5 150 128 16 7 173 162.5 138.5 17 8 173 162.5 149 12 9 185.5 175 159.5 13 10 198 187.5 170 14 11 210.5 200 180.5 15 12 223 212.5 191 16 13 235.5 225 201.5 17 14 235.5 225 212 12 15 248 237.5 222.5 13 16 260.5 250 233 14 17 273 262.5 243.5 15 18 285.5 275

Direct Operated Pilot Operated 2-Port Solenoid Valve Refer to pages 7, 9, 11, 25, 35, and 39 for details.

Refer to pages 13 to 24 for details. Stainless Steel Brass Aluminum Stainless Steel Brass Normally Closed (N.C.) Normally Closed (N.C.)

HRX-OM-Y098

Table 7.1-1 Quality criteria for clean water (tap water) Item Unit Criterion Circulating fluid Facility water pH (at 25 oC) 6.0 to 8.0 6.5 to 8.2 Electric conductance (at 25 oC) [S/cm] 100 to 300 100 to 800 Chloride ion [mg/L] 50 or less 200 or less Standard Sulphate ion [mg/L] 50 or less 200 or less item Acid consumption (at pH 4.8) [mg/L] 50 or less 100 or less Total hardness [mg/L] 70

5 Port Solenoid Valve Metal Seal/Rubber Seal Series SQ1000/2000 1

13 7 stations 7 stations (+) () () (+) 14 14 J.S.T.

4 Way • 4 and 5 Port, Rubber Seal • Solenoid Pilot Valve, Series SYJ3000

JIS symbol 5 Port 4 Port Fluid Specifications Air 22~100 (0.15~0.7) 15~100 (0.1~0.7) 22~100 (0.15~0.7) 2 Position single 2 Position single 2 Position single 2 Position double 3 Position 2 Position single 2 Position double 3 Position A B A B Operating pressure range PSI (MPa) P R R P R Operating pressure to 100 (Operating pressure to 0.7) 15~100 (0.1 to 0.7) 22~100 (0.15 to 0.7) Max.140 Not

MU

13 17 19 CI 17 22 27 32 38 DF 4 7 10 12 14 CH 11 13 13 17 19 DE 3.5 3.5 3.5 5.5 6 CF 4 7 10 12 14 DB 23 27 31 37 48 CE 3.5 3.5 3.5 5.5 6 DA 53 67 85 103 122 CB 23 27 31 37 48 CA 53 67 85 103 122 Size 25 32 40 50 63 Size 25 32 40 50 63 Part No.

Series 10-SV1000/2000/3000/4000 5 Port Solenoid Valve

385.7 406.2 426.7 447.2 467.7 488.2 508.7 139.7 12.5 15 17 13 15.5 17.5 13.5 16 12 14 16.5 12.5 14.5 17 13 15 17.5 13.5 16.5 117.5 138 158.5 179 199.5 220 240.5 261 281.5 302 322.5 343 363.5 384 404.5 425 445.5 466 97 223 Directional Control Valves Air Grippers Modular F.

CLK1

D-G5NTL 75 + 50 (n-2) 15 75 30.5 38 43 50 A B 0 (1) 0.5 2 2 D-A3 D-G3, D-K3 100 + 100 (n-2) 35 + 30 (n-2) 35 100 D-B5, D-B6 33.5 23.5 25 25 Approx. Hs 25.5 (28.5) 38 43.5 50.5 D-A4 35 + 30 (n-2) 50 + 50 (n-2) 35 55 A B 0 2 3.5 3.5 D-G5NTL 27 25 26.5 26.5 Approx. Hs 33.5 38 43.5 50.5 A B 0 1.5 1.5 D-A3 D-G3, D-K3 23 24.5 24.5 Approx.