MLGP

250, 300, 350 84 36.5 30.5 M5 x 0.8 23.2 11.5 37.5 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350 91 41.5 31.5 Rc 1/8 30.2 12.5 37.5 WA Bore size (mm) ML T U VA VB OA OB OL PA PB PW Q R S MM NN st 25 24 24 st 30 30 < st 100 48 25 < st 100 100 < st 200 200 < st 300 300 < st 350 20 25 32 9.5 9.5 11 13 15 20 5.6 5.6 6.6 12.5 18 26 30 70 78 96 30 81 72 82 98 120 120 124 54 64 78

MLGP

250, 300, 350 84 36.5 30.5 M5 x 0.8 23.2 11.5 37.5 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350 91 41.5 31.5 Rc 1/8 30.2 12.5 37.5 WA Bore size (mm) ML T U VA VB OA OB OL PA PB PW Q R S MM NN st 25 24 24 st 30 30 < st 100 48 25 < st 100 100 < st 200 200 < st 300 300 < st 350 20 25 32 9.5 9.5 11 13 15 20 5.6 5.6 6.6 12.5 18 26 30 70 78 96 30 81 72 82 98 120 120 124 54 64 78

Swivels

Pressure 50 45 40 3/8" 45 40 35 40 35 Pressure Drop (psid) 30 1" 3/4" 35 Torque (in-lbs) 30 25 30 1" 1/2" 25 1/4" 1/4" RPM 25 20 1/2" 3/8" 20 3/4" 20 15 3/4" 15 15 1/2" 3/8" 10 1" 10 10 2" 1/4" 5 5 5 1-1/2" 0 0 0 0 2000 1000 3000 4000 5000 1000 0 2000 3000 4000 5000 0 10 20 30 40 50 60 70 80 90 Pressure (PSI) Pressure (PSI) Flow (USGPM) Quick Coupling Division 8145 Lewis Road Minneapolis

MGQ

Bore size Standard stroke (mm) MM YY L X K W J V H GA GB TA TB U G T F S DA R C Z NN Q B ML P PW YL (mm) 12 16 20 25 18 50 13 5 16 40 58 5 7.5 5 36 29 56 8 22 6 48 29 12 14 39 7 10, 20, 30, 40, 50, 75, 100 M4 x 0.7 10 M4 x 0.7 M5 x 0.8 7 M4 x 0.7 11 22 54 15 7 18 42 64 2.5 8 5.5 38 33 62 8 25 8 52 33 13 16 43 8 10, 20, 30, 40, 50, 75, 100 M5 x 0.8 13 M5 x 0.8 M5 x 0.8 5 M5 x 0.8 11 20, 30

MGC

View A-A Bore size (mm) Stroke range (mm) AF AE AD AC AB AA A G F E D C B AP H 20 25 32 40 50 75, 100, 125, 150, 200 25 62 15.5 13 11 84 5.6 90 45 24 106 M5 x 0.8 depth 10 9.5 depth 6 22 M6 x 1 depth 10 30 65 16.5 13 15 89 6.8 103 45 26.5 120 11 depth 8 M6 x 1 depth 12 M8 x 1.25 depth 14 27 75, 100 125, 150 200, 250 300 35 70 16.5 13 15 94 6.8 118 50 26.5 135 11 depth 8 M6 x 1 depth 12 M8

VCC

Indication of A B C D E F G H T VCKL1209-02F VCKL1008-02F VCKL1075-02F VCKL0806-02F VCKL0604-02F 19 9 to 12 Nm 12/9 13 43.5 33 30.5 10 18.5 17 6 to 9 Nm 10/8 11 42.5 33 30 9 18.5 17 6 to 9 Nm 1075 11 42.5 33 30 9 18.5 14 4 to 9 Nm 8/6 9 40 32 27.5 8 16 12 3 to 8 Nm 6/4 7 38.5 32 27.5 8 16 VNA VNB SGC SGH VNC VNH VND VCC VCC TQ 653 VCC Series Special Tools Tool for Attaching/Detaching Valve

Magnetically Coupled Rodless Cylinder

W 35 50 50 50 60 X 19 25 30 40 40 D 16.6 21.6 26.4 33.6 41.6 ZZ 103 132 137 156 182 E 3 2 2 2 3 N 11 18 18.5 20 26 F 10 13 13 16 16 MM M4 x 0.7 M4 x 0.7 M5 x 0.8 M6 x 1 M6 x 1 G 5.5 7.5 7.5 8 11 NN M10 x 1 M20 x 1.5 M26 x 1.5 M26 x 1.5 M32 x 2 H 13 20 20.5 22 29 I 12 15 18 23 J 6 6 8 8 10 K 11 8 10 15 16 L 57 66 70 80 92 P (Piping port) Model Mounting nut/Included in the package (2 pcs)

Table of Contents

Negative common specifications L dimension How to order negative COM manifold 11 12 13 14 15 16 17 18 19 20 148 160.5 173 185.5 198 210.5 223 235.5 248 260.5 No. L dimension L kit: 21 22 23 24 25 26 27 28 29 30 273 285.5 298 310.5 323 335.5 348 360.5 373 385.5 No. VV5Q13 L 08 N N 1 D L dimension 31 32 33 34 35 36 37 38 39 40 398 410.5 423 435.5 448 460.5 473 485.5 498 510.5 No.

AC Servo Motor Driver (SSCNET Type)

Parameter list (Driver side) . 13 6.

3/5 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ1000/2000/3000

23 or less 30 or less Exhaust center 3 position Rubber seal 12.6 (0.7) VQZ2451 25 or less 33 or less Metal seal 7.2 (0.4) VQZ2550 23 or less 30 or less Pressure center Rubber seal 9.0 (0.5) VQZ2551 25 or less 33 or less Metal seal 16.2 (0.9) VQZ3150 17 or less 22 or less Single 94 Rubber seal 21.6 (1.2) VQZ3151 25 or less 33 or less 2 position Metal seal 16.2 (0.9) VQZ3250 10 or less 13

Electric Actuator Series LJ1H/LJ1S Made to Order Specifications

Electric Actuator Series LJ1H/LJ1S Made to Order Specifications Made to Order Specifications Clean room specification Dust seal specification TSUBAKI CABLEVEYOR specification Clean room specification (-X60) LJ1H 10/20/30 (Horizontal mount/Vertical mount) Page 104 Dust seal specification (-X70) LJ1H 10/20/30 (Horizontal mount/Vertical mount) 110 LJ1S 10/20/30 (Horizontal mount) 116

Plate Cylinder with Lock Series MLU

I-MU02 I-MU03 I-MU04 I-MU05 R1 3 4 5 6 NZ 18 22 26 32 NX 9 11 13 16 NO 21 24 27 39 NL 8 10 10 16 R1 8.5 10 11 16 NDH10 NL 8.5 10 11 16 NX 9 11 13 16 NO 19.5 24 26 36 U1 11 14 15 20 U1 13 14 17 23 +0.058 0 +0.058 0 +0.058 0 +0.070 0 8 10 10 14 Knuckle pin and snap ring are included. Clevis pin and knuckle pin Rod end nut 30 d Dd9 d D C l m m t t L H B (mm) (mm) Part no.

Magnetically Coupled Rodless Cylinder Series CY3B/CY3R

150 W 35 50 50 50 60 X 19 25 30 40 40 D 16.6 21.6 26.4 33.6 41.6 ZZ 103 132 137 156 182 E 3 2 2 2 3 N 11 18 18.5 20 26 F 10 13 13 16 16 MM M4 x 0.7 M4 x 0.7 M5 x 0.8 M6 x 1 M6 x 1 G 5.5 7.5 7.5 8 11 NN M10 x 1 M20 x 1.5 M26 x 1.5 M26 x 1.5 M32 x 2 H 13 20 20.5 22 29 I 12 15 18 23 J 6 6 8 8 10 K 11 8 10 15 16 L 57 66 70 80 92 P (Piping port) Model Mounting nut/Included in the package (2 pcs

MY1

35 49 10 13 35 43 24 28 28 30 200 236 22 25 128 152 424 490 74 92 Hole Size for Centralized Piping on the Bottom (Mounting side should be machined to these dimensions.)

reduces flow setting time

thread Uni thread size Wrench tightening angle after hand-tightening [deg] Tightening torque [Nm] 1/8 30 to 45 3 to 4 1/4 15 to 30 4 to 5 3/8 15 to 30 8 to 9 1/2 15 to 30 14 to 15 By chamfering as shown in the table below, machining of threads is easier and effective for burr prevention.

IDX-OM-W023

-10 IDU Series 12-1 IDX-OM-W023 12.S 12-2 L N PE M3 6.5mm 2 1.25mm 12-3 1-1 IDU Series 12-2 IDX-OM-W023 13 T 13 T 13-1 IEC 13-2 AC200V / 2A DC24V / 2A ( 20V / 5mA) 13-3 ON 3 () 5 /1 () IDU Series 13-1 13 1 IDX-OM-W023 13 T 13-4 1 PE L N 3 2 L,N: PE: LN PE M3 (0.63Nm) 6.5mm 1.25mm 17 17 2 () () IDU Series 13-4 13 2 IDX-OM-W023 13 T 13-5 IDU8E-10-T IDU8E/11E-20-T GFCI

Thermo-chiller

40 Sensitivity of leak current mA 30 Rated operating current 50/60 Hz Note 5) A 13/14 16/19 Rated power consumption 50/60 Hz Note 5) kW 3.4/4.4 (4.4/5.0) 4.6/6.0 (5.6/6.6) Noise level (Front 1 m/Height 1 m) Note 5) dB (A) 70 70 Waterproof specication IPX4 Accessories Alarm code list stickers 2 pcs.

Rotary Table/

FU) 34.7 65h8 67h8 32H8 9 22H8 16.5 27 67 DL DK (Through) 51.7 75h8 77h8 35H8 10 26H8 17.5 30 76 (mm) AA A AU AV AW AX AY BA BB BC BD BE CA CB D DD DE DF DG FA FB FC FD H J JA JB Size 10 20 30 50 55.4 50 8.6 20 15.5 12 4 9.5 34.5 27.8 60 27 4.5 28.5 45h9 46h9 20H9 5 15H9 8 4 3 4.5 13 6.8 11 6.5 70.8 65 10.6 27.5 16 14 5 12 46 30 76 34 6 30.5 60h9 61h9 28H9 9 17H9 10 6 2.5 6.5 17 8.6 14 8.5

Miniature Fittings M3, R(PT) 1/8, M5 Series M

I.D. 40.9 40.3 27.6 27 15.5 15.2 1.5 1.6 13 17 23 22 KFH04-00 KFH06-00 KFH08U-00 KFH08N-00 KFH10U-00 KFH10N-00 KFH12U-00 KFH12N-00 2.5 4 5 6 6.5 7.5 8 9 4 6 8 10 10 12 6 11 17 21 30 35 45 3 4 5 5.5 6.5 7 8 8 16.2 41.3 28 12 14 36 10 18.8 17 17 44.6 30 42 41 12 19.3 17 19 45.5 32 Male elbow: KFL Applicable tube (mm) Thread R(PT) Part No. H1 (Hex.) H2 (Hex.)

IDX-OM-W014

.S 12-2 L N PE M3 6.5mm 2 1.25mm 12-3 1-1 IDU Series 12-2 12-2 IDX-OM-W014 13 T 13 T 13-1 IEC 13-2 AC200V / 2A DC24V / 2A ( 20V / 5mA) 13-3 ON 3 () 5 /1 () IDU Series 13-1 13 1 IDX-OM-W014 13 T 13-4 PE 1 2 3 LN PE PE: LN: M3 6.5mm 1.25mm 2 () () IDU Series 13-4 13 2 IDX-OM-W014 13 T 13-5 IDU3E/4E-10-T IDU3E/4E/6E-20/23-T AC200 / 200,220V (50,60Hz) AC100/100,110V