25

75 50 50 30 Hz 0.1 Hz 30 Hz 25 25 0 0 0 500 1,000 1,500 2,000 0 500 1,000 1,500 2,000 Installation distance (mm) Installation distance (mm) 422 Technical Data IZS40/41/42 Series r Flow Rate Pressure Characteristics IZS IZS With high speed de-ionizing cartridge With energy saving type de-ionizing cartridge 0.6 0.6 IZN 460 640 640 580 460 580 400 0.5 0.5 1300 1300 2320 2320 1900 1900 1600

MHZ

DM3 x 0.5 (Finger closing port) 20M3 x 0.5 (Finger opening port) 4-M2 x 0.4 (Thread for mounting attachment) 0 -0.05 2.6 4 2.5 5 4.3 12.1 For single action, the port on one side is a breathing hole. 12-2-21 21 Series MHZA2-6 Finger Option Side Tapped Mounting [1] 4-M2 x 0.4 Thread for mounting attachment 2 2 5 2.5 Specifications and dimensions other than the above are the same as the basic

MHZ

DM3 x 0.5 (Finger closing port) 20M3 x 0.5 (Finger opening port) 4-M2 x 0.4 (Thread for mounting attachment) 0 -0.05 2.6 4 2.5 5 4.3 12.1 For single action, the port on one side is a breathing hole. 12-2-21 21 Series MHZA2-6 Finger Option Side Tapped Mounting [1] 4-M2 x 0.4 Thread for mounting attachment 2 2 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080

Air Pilot Operated Series NVSA

A B c D E F H J K M N o P o R s 2.95 (75) 2.52 {64) o.75 {t 9) 2.24 157't 0.91 123l 't.06 {271 1.97 {50) 0.83 {211 0.94 124) 0.16 t4) 1.34 (34) (31) 0.55 114l o.12 {3) 0.47 112't 0.73 (18.6) 0.98 125) lrillimeters in Parenthes PARTS LIST NOTES 1 Sp.ing t AXB3& O-Fim f aRp56+!

OMR0032

External Connections . 20 4.1 CN1: Power supply connector . 20 4.2 CN2: Motor connector . 20 4.3 CN3: Serial I/O connector . 20 4.4 CN4: Counter connector (option) . 21 4.5 CN5: Parallel I/O connector . 21 5. CN1: Power Supply Plug . 22 5.1 Power supply plug specifications . 22 5.2 Electrical wiring specifications . 22 5.3 Power supply plug wiring . 23 6.

Stopper Cylinder

. *1RSQB12-10m 5 45 CQ-M3X45L RSQB16-10m 7.5 55 CQ-M3X55L -15m 60 X60L RSQB20-10m 7 Example) CQ-M3X55L 2 pcs. 55 CQ-M5X55L -15m 60 X60L -20m 65 X65L RSQB32-10m 9 Mounting bolt 60 CQ-M5X60L -15m 65 X65L -20m 70 X70L RSQB40-20m 9.5 C D 75 CQ-M5X75L -25m 80 CQ-M5X80L -30m 85 X85L RSQB50-20m 9 75 CQ-M6X75L -25m 80 X80L -30m 85 X85L *1 Be sure to use the attached flat washers when mounting 12

Table of Contents - Tubing

TUB-21 Related Equipment .

VXA21/22

Refer to p.4.1-74, 4.1-75 for specifications and models.

Refrigerated Air Dryer

Inlet air temperature Data Outlet air pressure dew point Data Inlet air pressure Series IDF Series IDU Series IDF, IDU Series IDF, IDU Correction factor Correction factor Correction factor Correction factor Inlet air temperature (C) Inlet air temperature (C) Outlet air pressure dew point (C) Inlet air pressure (MPa) 0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.9 1 25 30 35 40 45 50 45 50 55 60 65 70 75

CC

Double acting, Single rod Double acting, Double rod CE1 50 63 10, 15, 20, 25, 30, 35 40, 45, 50, 75, 100 CE2 80 100 ML2B C J G5-S CHQB CHQWB CV MVGQ CC For details, refer to the catalog CAT. E111.

Series AK1000

600 Delivery pressure (kPa) -35 500 -48 400 -61 300 -75 200 -88 100 -101 0 0 1 2 3 4 5 6 7 8 9 10 Flow rate (slpm, N2) Hastelloy is a registered trademark of Haynes International.

Vane Type Rotary Actuator Series CRB1 New 63mm Bore Size

CRB1BW635 0.030 0 5 0.030 25 0 83 60 PORT 4-R7.5 Top ports (port position): CRB1BW63-SE, CRB1BW63-DE 75 0 0.052 28h9 17 0.006 0.017 15g6 5 B port B port 25 45 80 21 When the B port of body (B) is threaded, it is closed with a Rc 1/8 plug. 3 14 3 14 29 22 Body (B) 15 Body (A) 2-Rc 1/8 A port 14 14.9h9 0 0.043 12 15g6 0.006 0.017 28h9 0 0.052 25 A port B port 75 2-Rc 1/8 8 (8) 82 27

Cylinder

NN I.~ 6 7 12 13.9 6 12.5 19.5 26.5 85 9 3.5 M3XO.5 Ml0X 1.Q 9 18.5 25.5 32.5 3 27.5 34.5 41 .5 3 10 ' h-~o 19 22 6" 14\5 21 28 12 12 3.5 I M4 XO.7 I MI5 X 1.5 1.1 ~ 2075 27 34 4 32.5 39 ~46 5 Series CJP How To Order Pin cylinder e-' '-. Rod end thread J Nil-With thread BWithout thread Mountin9 ~ BPanel mount type ..

Vacuum Pad

4 2 Vertical Lateral Area 75% reduced Male thread Female thread Barb fitting (Applicable tubing: 2) One-touch fitting (Applicable tubing: 2) Female thread Barb fitting (Applicable tubing: 2) One-touch fitting (Applicable tubing: 2) 2 x 7 pcs. 4 x 7 pcs.

Conforming to OSHA Standard Pressure Relief 3 Port Valve With Locking Holes Series VHS20/30/40/50

H 28 30 36 44 54 E 22 21 26 F 45 55 58 65 76 G 33 42 44 50 61 D 34 46 63 67 78 A 59 78 107 110 134 B 20 29 39 42 53 C 40 53 70 75 90 I 45 55 63 69 81 Model Piping port VHS20 VHS30 VHS40 VHS40-06 VHS50 1/8, 1/4 1/4, 3/8 1/4, 3/8, 1/2 3/4 3/4, 1 1938 Series VHS20/30/40/50 Specific Product Precautions Be sure to read before handling.

EXxx-OMW0014CN

Y Y (EX245-DX1EX245-DY1) Y 2 2M12M12 2M8M12 PCA-1557785 Y (2M12M12) A code() A code() A code() . 11-2 Y (PCA-1557785) 75 No.EX-OMW0014CN-A PCA-1557798 Y (2M8M12) A code() . 11-3 Y (PCA-1557798) 76 No.EX-OMW0014CN-A 11.3.

HEC-OM-S008

[CR][LF] :01 06 0052 0032 75 [CR][LF] Set at 0.50 deg.C.

Dedicated Controller Series LC1 Uniaxial Type

BIT 4 Stp-No.bit3 (7) 20 Step designation BIT 5 Stp-No.bit4 (20) 8 BIT 6 Stp-No.bit5 (8) 21 BIT 7 Stp-No.bit6 (21) 9 Stp-No.bit7 (9) 22 SET-ON 10 Temporarily stops the program run by means of the ON input. (3) Temporary stop HOLD READY 23 BUSY < 2 > 11 (16) Emergency stop (nonlogical input) Performs an emergency stop when ON input stops.

Slide Tables MX Series

Bolt used Max. tightening torqueN.m{kgf.cm} l mm Model MXQ 6 MXQ 8 MXQ12 MXQ16 MXQ20 MXQ25 10.5 12.5 16 21 26 32 1.2{12.2} 1.2{12.2} 2.8{28.6} 5.7{58.1} 5.7{58.1} 10{100} M3 x 0.5 M3 x 0.5 M4 x 0.7 M5 x 0.8 M5 x 0.8 M6 x 1 3. Top body tapped A hand can be caught by an adjuster option.

Series MXP Precision Air Slide Table

Product Features .pages 158-159 Q Q MXP Series Q How to Order .page 160 Q Specifications .page 161 Q Table Accuracy .page 162 Q How to Select .pages 163-164 Q Table Deflection .page 165 Q Construction/ Parts List, Seal Kits .page 166 Q Dimensional Drawings.pages 167-170 Q Auto Switch Specifications and Mounting.pages 171 Q Please see safety instructions on pages 20-21