Rotary Table Rack & Pinion Style Series MSQ Size: 1, 2, 3, 7, 10, 20, 30, 50, 70, 100, 200 1

MRQ DBasic type 11-MSQBA 11-MSQBR M5 x 0.8 depth 5 (Vacuum port) 20DC DB DA (mm) DA(h9) DB(h9) DC(H9) DD(h9) HB HC HD Size 10 20 30 50 46 45 20 35 20 5 59 HB 61 60 28 40 22 6 65 (HD) 11.5 67 65 32 48 22 6 68 5.5 HC 77 75 35 54 24 7 77 Dimensions other than above are identical to the basic type.

4-channel Flow Monitor ( compatible)

(page 72) Y S16 0x012C 3 R/W (300) P1H (Upper limit of the OUT1 window comparator) Setting of OUT1 upper limit of window comparator. (page 72) 0x04C4 (1220) 0x04C5 (1221) 0x04C6 (1222) 0x04C7 (1223) Y S16 0x0258 4 R/W (600) WH1 (Setting of OUT1 window comparator hysteresis) Setting of OUT1 window comparator hysteresis.

Direct Operated, 2 Port Solenoid Valve, For Water, Oil, Steam, Air, Series VX

/N.O. 1/2 to 2 N.C. 1/4 to 1/2 10 to 50 20 to 50 10 2 Port for Dust Collector (Solenoid type, Air Operated type) Air Operated 2/3 Port VXF21/22, VXFA21/22 VXA21/22, VXA31/32 For Air For Air, Vacuum, Water, Oil The VX series has been renewed as the new VX series, with a new construction Orifice size mm Valve type Port size Orifice size mm 3 to 10 1.5 to 4 Valve type Model Port size VXA21/22

XL

G C Electrical options G XSA122-8-4 XSA1 S S L, Z XSA2 1(100V) AC XSA232-8-4 XSA3 5(24V) DC 6(12V) 32 High Vacuum Angle Valve Series XSA Specifications XSA2-32 XSA3-32 XSA3-43 Model XSA1-12 XSA1-22 XSA2-22 Normally closed direct acting 2 port solenoid valve Action Non corrosive gas for stainless steel (SUS405 equivalent) Fluid 2 3 4.5 6 Orifice diameter mm 0.17 0.33 0.6 1.05 Cv factor 0.8

48

22 12 38 22 75 60 84 12.7 31 M5 x 0.8 7.5 4.5 32 (25 x 2) 5.4 9.5 5 M5 x 0.8 12.5 23 23 16 44 28 89 70 98 12.7 33 M6 x 1 9 6 40 (32 x 2) 6.7 11 6 Rc1/8 NPT1/8 G1/8 13 16.5 26 27.5 20 43 33 97 71 107 15.3 29 M8 x 1.25 10 7.1 7 Dual Rod Cylinder JMGP Series Bore Size 50 (40 x 2), 63 (45 x 2) Standard: JMGPM WA + Stroke/2 Z X 4 x YY depth YL Bottom view 2 x P (Plug) WA + Stroke/2 Z 4

PF-OMN0009_C

--T 109 71 PF3W511--T 135 92 PF3W521--T 115 74 PF3W521-F12-T 119 76 PF3W521-F14-T 123 78 -43No.PF-OMN0009CN-F PF3W504/520/540/() A AA B D F K L N P Q Q PF3W504S 104 50 63.6(Max. 68.6) 70.2 34 58.5 18 13.6 2.7 10 19 6 PF3W520S 112 54 63.6(Max. 68.6) 74.2 34 62.5 18 13.6 2.7 10 19 6 PF3W540S 142 71 75.25(Max. 81) 94.5 44 79 28 16.8 2.7 10 28 7 S T PF3W504S 56.5 22 PF3W520S 60.5 22 PF3W540S

HRX-OM-R028

PV SV 22. Select response delay time (simple communication protocol) from the table below with [] key or [] key, and confirm by pressing SEL.

Heavy Duty Stopper Cylinder Series RSH/RS1H

24.5 17 24.5 9.5 80 22(20.5) 37 37 23.5 37 16 The values inside ( ) are for D-Z73.

Pneumatic Transfer System Series MF

Refer to the detailed dimensions for mounting of the slide table and end unit, which are included with the SA (straight type) dimensions. 8 Series MF Dimensions Air Supply Unit 15 Air supply port B (hexagon socket head plug) Air supply ring 52 Air supply unit body IN IN 36 37 (Min. 22) 37 (Min. 22) 260 (Min. 230) + Stroke OUT Air supply ring 2-M5 x 0.8 Air supply port A (hexagon socket head

ZL3-OM00801

8.3 1) 2) 3)2 4) 5kPa 5) 6) 7) 20 No.ZL3-OM00801-A 9. 9.1 ZL3 ZL3M ZL3H [mm] 1.9 1.5 [MPa] 0.35 0.50 *1 -91 -93 [MPa] 280 [L/min(ANR)] + *2 300 [L/min(ANR)] 150 135 [MPa] 0.20.6 [] -550() 2] *2 20 [m/s 2] *3 100 [m /s *1 *22 2/V *310500Hz XYZ 2 *4XYZ 3 ZL6 ZL6M ZL6H [mm] 1.9x2 1.5x2 0.35 0.50 [MPa] 0.37 0.52 *1 -91 -93 [MPa] 580 [L/min(ANR)] + *2 600 [L/min(ANR)] 300 270

4 Way, 5 Port / Solenoid/Pilot Operated NVFR Series

Model Position /No. of solenoid Type Port size {NPTD Cv factor MaKOperating cycle CPM Response time (ms) Weight lbs (ks0 Plug-in Non Piug-in 2 position Single wFR2100 NVFR2110 Va 300 20 or less 0.75 (0.34) V1 Double wFR2200 NVFR2210 la 0.9 300 20 or less o.92 (0.421 Y.

Refrigerated Air dryer Series IDU/IDF

Refrigerant Air connection 300 2.2 IDU3D 350 Series IDU High inlet air temperature type Rated temperature of 50 to 60C Rc 3/8 60C 430 3.7 IDU4D 500 Small Medium Small Medium Large R134a 1 to 4 R 1/2 640 5.5 IDU6D 750 55C R 3/4 Air cooled Air cooled 850 7.5 IDU8D 1000 IDU11D R134a 1300 11 R 3/4 1500 IDU11C 1300 55C 2400 IDU15C 15 2050 R 1 3700 IDU22C/22C1 22 3150 R22 5 to 8 6100 IDU37C/37C1

VEX1

VEX AN AMC Effective area (mm2) Model Connection R(PT) Max.air flow (l/min) AMC310 300 3 8 16 55 165 330 550 AMC510 1,000 3 4 AMC610 AMC810 AMC910 3,000 1 1 6,000 10,000 1 2 2 99.9% of oil mist removal. Over 35dB noise reduction. Refer to p.5.3-1 for details. 5.1-36

Modular F.R.L. Units

EXH Flow Rate Characteristics Model Port size Flow rate characteristics Model Standard specifications P1 P2 A B C D E F G H I VHS20 1/8, 1/4 1/8 66.4 22.3 40 37.5 14 46.6 33.6 28 43 VHS30 1/4, 3/8 1/4 80.3 29.4 53 49 19 52 38 30 49 VHS40 1/4, 3/8, 1/2 3/8 104.9 38.5 70 63 22 58 44 36 63 VHS40-06 3/4 1/2 110.4 42 75 63 22 58 44 44 63 VHS50 3/4, 1 1/2 134.3 53 90 76 26 76 61 53 81 IN, OUT EXH

Compact Type

Auto switch model D-M9N D-M9B D-M9P 0.5 8 7 8 Lead wire length m 3 41 38 41 Dimensions D-M9 Auto Switch Internal Circuit Mounting screw M2.5 x 4 L Slotted set screw D-M9B, N, P D-M9N Indicator light DC (+) Brown 2.6 Switch main circuit Switch main circuit Switch main circuit OUT Black 2.7 2.8 4 22 DC () Blue 3.2 D-M9N, P (3-wire) D-M9P Most sensitive position 6 DC (+) Brown 22 3.2 D-M9B (

Environment

T4 = 0.05 [s] T1 = V/a1 = 300/5000 = 0.06 [s], T3 = V/a2 = 300/5000 = 0.06 [s] T2 = = = 0.94 [s] L 0.5 V (T1 + T3) V 300 0.5 300 (0.06 + 0.06) 300 T4 = 0.05 [s] Therefore, the cycle time can be obtained as follows.

VZ100/300/500

Applicable cable O.D.: 3.5 to 7 300 (Lead wire length) : With light/surge voltage suppressor 4-6-22 23 3 Port Solenoid Valve Rubber Seal, Body Ported/Base Mounted Series VZ300 For Internal Pilot Type 40 Manifold: Side Ported Rc 1/8 VV3Z3-40Stations 1-M5/01 Grommet (G), (H) (Die-cast hole) V100 (Mounting hole) (Mounting hole) SY 4-Rc 1/8 SYJ (P , R port) VK G: 300 mm H: 600 mm (Pitch) Manual

Mechanically Jointed Rodless Cylinder with Brake, Hy-rodless Cylinder Series ML1C ø25, ø32, ø40 1

Standard stroke Maximum manufacturable stroke (mm) Standard stroke (mm) Bore size (mm) Suffix for stroke adjusting unit 25 32 40 100, 200, 300, 400, 500, 600, 700, 800, 900, 1000 100, 200, 300, 400, 500, 600, 700, 800, 900, 1000 100, 200, 300, 400, 500, 600, 700, 800, 900, 1000 2000 2000 2000 Nil S 2 pcs. 1 pc.

Fieldbus system EtherNet/IP TM compatible SI Unit IO-Link Master Unit

to 2100 300 to 2100 +3.00 to +21.00 mA 1: Follow the methods below when assigning the user set upper and lower limit by E.O.

Mechanically Jointed Rodless Cylinder with Brake, Hy-rodless Cylinder Series ML1C ø25, ø32, ø40 1

Standard stroke Maximum manufacturable stroke (mm) Standard stroke (mm) Bore size (mm) Suffix for stroke adjusting unit 25 32 40 100, 200, 300, 400, 500, 600, 700, 800, 900, 1000 100, 200, 300, 400, 500, 600, 700, 800, 900, 1000 100, 200, 300, 400, 500, 600, 700, 800, 900, 1000 2000 2000 2000 Nil S 2 pcs. 1 pc.