Line Filter Rated Pressure: 3.5, 7, 14, 21 MPa FH34/44/54/64 Series

92 65 18.1 120 160 4 x M12 x 1.75 22 65 (2 1/2B) 25 40 504 119 615 385 130 100 35.9 170 220 4 x M12 x 1.75 22 80 (3B) 0 209 62 285 147 70 45 5.2 86 105 2 x M8 x 1.25 14 0 1 0 1 0 1 0 1 0 1 15 (1/2B) 4 x M10 x 1.5 4 x M10 x 1.5 4 x M12 x 1.75 4 x M12 x 1.75 4 x M16 x 2 4 x M16 x 2 20 (3/4B) 0 250 73 330 177 100 56 9.7 108 145 2 x M10 x 1.5 18 25 (1B) 32 (1 1/4B) 0 50 342 87 435 255 100

10

, 18, 22 Pinion assembly MHL-AA1009 MHL-AA1609 MHL-AA2009 MHL-AA2509 5, 6, 7, 20, 21 Nut set MHL-A1017 MHL-A1617 MHL-A2017 MHL-A2517 15, 18, 22 U nut assembly MHL-A1017A MHL-A1617A MHL-A2017A MHL-A2517A 18, 22 Order one finger assembly, pinion assembly, nut set and U nut assembly per unit.

Cylinder with Lock Series CNS

BBA1 is also included when switches are shipped separately. 1pc. 110 15 2 pcs.

7

15 2 x M6 thread depth 11 (for YA type) 2 x M6 thread depth 11 (for IA type) 35 15 18 2 x M6 thread depth 11 (for IA type) 2 x M6 thread depth 11 (for YA type) 20 20 20 20 57 40 17 17 A 19.5 0.2 0.5 25 15 45 45 60 60 Material: Cast iron Unit: mm Material: Cast iron Part no.

MY2

steel Special resin NBR NBR NBR NBR NBR Description Seal belt Dust seal band Scraper Piston seal Cushion seal Tube gasket O-ring O-ring No. 14 15 18 39 40 41 42 43 Qty. 1 1 2 2 2 2 4 2 22 Series MY2H Single Axis Type 16, 25, 40 MY2H G Bore size Stroke PG Q + Stroke (LL) L LA 4-B depth of counter bore C LD through hole 4-MM, depth M Cylinder mounting center line PA Work piece mounting center

PFxx-OMO0007CN

No.PF-OMO0007CN / / PF2A7## 2 10 12 13 15 15 16 17 19 20 21 22 25 F_1 26 F_2 () 27 F_3 28 30 31 32 32 34 35 35 37 38 40 -1No.PF-OMO0007CN (ISO/IEC)(JIS) 1) 2) 1) ISO 4414: Pneumatic fluid power -General rules relating to systems ISO 4413: Hydraulic fluid power -General rules relating to systems IEC 60204-1: Safety of machinery -Electrical equipment of machines (

AC Servo Motor Driver (Pulse input type)

PD03 to PD12 Input signal assignment (CN1-15 to CN1-19, CN1-41, CN1-43 to CN1-45) PD13 to PD18 Output signal assignment (CN1-22 to CN1-25, CN1-49) Input signal points (10): (position control mode) and initial assignment Output signal points (6) (position control mode) and initial assignment See LECSB Operation Manual, section 3.5 for details regarding signals.

Vacuum Pad: Large/Heavy Duty Type Series ZPT/ZPX

Replacement Parts/Mounting Nut How to Order Dimensions d ZPNA M16 d M14 x 1 22 ZPNA-M16 25.4 M16 x 1.5 Model A 19 ZPNA-M14 B 21.9 H 5 6 9 8 M22 x 1.5 Mounting thread M14 M14 x 1 B M16 M16 x 1.5 27 ZPNA-M18 31.2 M18 x 1.5 M18 M18 x 1.5 30 ZPNA-M22 34.6 M22 M22 x 1.5 H A Bolts Dimensions A 11 d M3 x 0.5 12 7 M4 x 0.7 B 5.5 L 8 8 10 15 8.5 M5 x 0.8 1200 Series ZPT/ZPX Vacuum Pad: Large Size

Direct Operated, 2 Port Solenoid Valve, For Water, Oil, Steam, Air, Series VX

5 3 5 10 15 20 25 30 4.5 10 15 20 30 40 50 60 3 2 6 30 60 8 25 35 10 20 40 10 35 Flow rate Q kg/h Figures inside [ ] indicate the saturated steam holding heat (kcal/kg).

KS/KX

18.5 21 10 3 8 1 2 3 8 1 2 7 22 36.3 29.5 24 24 20.9 22 8 12 46.1 16.1 Reference dimensions after R(PT) thread installation.

High Precision Digital Pressure Switch, Series ZSE50F/ZSE60F, ISE50/ISE60

Piping port G 1/4 Piping port G 7 For General Fluids High Precision Digital Pressure Switch Series ZSE50F/ISE50 Dimensions Bracket A A 30 20 20 45 55 4.5 11.5 40 15 4.5 6.5 1.6 20 41.5 ZS-24-A Bracket A View A Bracket D A 30 20 20 45 55 4.2 4.5 40 11.5 15 7.2 7.5 1.6 41.5 35 22 ZS-24-D Bracket D View A Cutting dimensions for panel mounting 43 or more Panel mount 0 +0.5 36 42.4 7.8 25.4

F/ISE

Piping port G 1/4 Piping port G 7 For General Fluids High Precision Digital Pressure Switch Series ZSE50F/ISE50 Dimensions Bracket A A 30 20 20 45 55 4.5 11.5 40 15 4.5 6.5 1.6 20 41.5 ZS-24-A Bracket A View A Bracket D A 30 20 20 45 55 4.2 4.5 40 11.5 15 7.2 7.5 1.6 41.5 35 22 ZS-24-D Bracket D View A Cutting dimensions for panel mounting 43 or more Panel mount 0 +0.5 36 42.4 7.8 25.4 0

CLK1

15 35 18 15 2-M6 thread depth 11 2-M6 thread depth 11 20 20 A 17 17 40 A 20 20 15 45 60 25 45 60 A Applicable clamp cylinder A Applicable clamp cylinder Part no.

MXH Series Compact Slide

14 4 11 15 12 3 24 13 23 22 7 4 11 MXH16, 20 (16, 20) 20 6 21 17 2 1 19 5 18 18 8 10 4 7 22 23 13 24 3 12 11 Parts list Parts list Description Material Note Description Material No.

5 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported

33 or less Metal seal 6.3 (0.35) VQZ2520 23 or less 30 or less Pressure center Rubber seal 8.1 (0.45) VQZ2521 25 or less 33 or less Metal seal 12.6 (0.7) VQZ3120 17 or less 22 or less Single 109 Rubber seal 16.2 (0.9) VQZ3121 25 or less 33 or less 2 position Metal seal 12.6 (0.7) VQZ3220 10 or less 13 or less Double Rubber seal 16.2 (0.9) VQZ3221 15 or less 20 or less Metal seal 10.8 (0.6

VHK

VR D E F G J K C 18 1(P) 2(A) 4 4 VHK-04F-04F VHK-06F-04F VHK-06F-06F VHK-08F-06F VHK-08F-08F VHK-10F-08F VHK-10F-10F VHK-12F-10F VHK-12F-12F 31.5 21.8 17.5 3 port valve 41 3.5 1 27 22 26 47.6 23.8 23.8 16.5 15.8 15.8 11 3.4 1.2 15 VHK-B1A 44.5 14.5 16.5 VH 18 6 4 6 41 48 48.6 24.3 23.7 16.5 3.5 16.8 15.8 11 5.1 1.2 15 16 VHK-B1A 44.5 14.5 1 27 22 16.5 26 24.3 16.8 7.2 18 8 6 8 41 50.5 52.4

CJP

Symbol A A' Bore size (mm) NN MM K J H GB GA E D C CD B CK Q R 6 10 15 +0.040 0 3 M3 x 0.5 8 6 17 11 6 10.5 3 16.5 14 4 9 7 7 M10 x 1.0 0 0.5 17 +0.065 0 5 M4 x 0.7 8 7 20 17 6 13 5 20 15 6.5 12 8 10 M12 x 1.0 0 0.5 22 +0.065 0 6 M5 x 0.8 8 9 24 18.5 6 15.5 6 24.5 20 8 14 10 12 M14 x 1.0 Symbol Z S 5 st 10 st 15 st 20 st 30 st ZZ Bore size (mm) 5 st 10 st 15 st 20 st 30 st 5 st 10 st 15

CJP

Symbol A A' Bore size (mm) NN MM K J H GB GA E D C CD B CK Q R 6 10 15 +0.040 0 3 M3 x 0.5 8 6 17 11 6 10.5 3 16.5 14 4 9 7 M10 x 1.0 7 0 0.5 17 +0.065 0 5 M4 x 0.7 8 7 20 17 6 13 5 20 15 6.5 12 8 M12 x 1.0 10 0 0.5 22 +0.065 0 6 M5 x 0.8 8 9 24 18.5 6 15.5 6 24.5 20 8 14 10 M14 x 1.0 12 Symbol Z S 5 st 10 st 15 st 20 st 30 st ZZ Bore size (mm) 5 st 10 st 15 st 20 st 30 st 5 st 10 st 15

Dedicated Controller

Therefore, never connect it to other equipment as this may cause fire or malfunction. 86 15 Regenerative Absorption Unit Series LC7R Dimensions 52 97 35 38 96 Operation window Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 35 Label DIN rail holding plate 22 22 Connector

Slide Tables MX Series

(5.1) 45 (5.1) 72 (8.1) Vertical Mounting (Tapped Holes) Axial Mounting (Tapped Holes) l 4.8 6 6 8 l 4.8 6 6 8 Max. fastening torque in lb (N m) 9.7 (1.1) 22 (2.5) 22 (2.5) 45 (5.1) Max. fastening torque in lb (N m) 9.7 (1.1) 22 (2.5) 22 (2.5) 45 (5.1) Model MXH6 MXH10 MXH16 MXH20 Bolts M3 x 0.5 M4 x 0.7 M4 x 0.7 M5 x 0.8 Model MXH6 MXH10 MXH16 MXH20 Bolts M3 x 0.5 M4 x 0.7 M4 x 0.7