Body Size: 10, Thread: Rc (Rc: for Sizes 20~60; M5: for Size 10), Port Size: M5 (M5 x 0.8), Mounting: None, Semi-Standard, Body Size 10: R (Flow Direction: Right to Left), Semi-Standard, Body Size 20: Z (Name Plate, Caution Plate for Bowl in Imperial Units: psi, °F), Semi-Standard, Body Size 30, 40, 50 & 60: Standard

Body Size: 10, Thread: Rc (Rc: for Sizes 20~60; M5: for Size 10), Port Size: M5 (M5 x 0.8), Mounting: None, Semi-Standard, Body Size 10: 6 (Nylon Bowl), Semi-Standard, Body Size 20: R (Flow Direction: Right to Left), Semi-Standard, Body Size 30, 40, 50 & 60: Standard

Body Size: 10, Thread: Rc (Rc: for Sizes 20~60; M5: for Size 10), Port Size: M5 (M5 x 0.8), Mounting: None, Semi-Standard, Body Size 10: R (Flow Direction: Right to Left), Semi-Standard, Body Size 20: Standard, Semi-Standard, Body Size 30, 40, 50 & 60: Standard

Body Size: 10, Thread: Rc (Rc: for Sizes 20~60; M5: for Size 10), Port Size: M5 (M5 x 0.8), Mounting: None, Semi-Standard, Body Size 10: Z (Name Plate, Caution Plate for Bowl in Imperial Units: psi, °F), Semi-Standard, Body Size 20: Standard, Semi-Standard, Body Size 30, 40, 50 & 60: Standard

Body Size: 10, Thread: Rc (Rc: for Sizes 20~60; M5: for Size 10), Port Size: M5 (M5 x 0.8), Mounting: None, Semi-Standard, Body Size 10: 3 (Drain Cock), Semi-Standard, Body Size 20: Standard, Semi-Standard, Body Size 30, 40, 50 & 60: Standard

Body Size: 10, Thread: Rc (Rc: for Sizes 20~60; M5: for Size 10), Port Size: M5 (M5 x 0.8), Mounting: None, Semi-Standard, Body Size 10: 3 (Drain Cock), Semi-Standard, Body Size 20: R (Flow Direction: Right to Left), Semi-Standard, Body Size 30, 40, 50 & 60: Z (Name Plate, Caution Plate for Bowl in Imperial Units: psi, °F)

Body Size: 10, Thread: Rc (Rc: for Sizes 20~60; M5: for Size 10), Port Size: M5 x 0.8, Mounting: None, Semi-Standard, Body Size 10: Metal Bowl, Semi-Standard, Body Size 20: Drain Cock, Semi-Standard, Body Size 30, 40, 50 & 60: Name Plate, Caution Plate for Bowl in Imperial Units: psi, °F

Body Size: 10, Thread: Rc (Rc: for Sizes 20~60; M5: for Size 10), Port Size: M5 x 0.8, Mounting: None, Semi-Standard, Body Size 10: Metal Bowl, Semi-Standard, Body Size 20: Flow Direction: Right to Left, Semi-Standard, Body Size 30, 40, 50 & 60: Standard

Body Size: 10, Thread: Rc (Rc: for Sizes 20~60; M5: for Size 10), Port Size: M5 x 0.8, Mounting: None, Semi-Standard, Body Size 10: Drain Cock, Semi-Standard, Body Size 20: Nylon Bowl, Semi-Standard, Body Size 30, 40, 50 & 60: Name Plate, Caution Plate for Bowl in Imperial Units: psi, °F

Body Size: 10, Thread: Rc (Rc: for Sizes 20~60; M5: for Size 10), Port Size: M5 x 0.8, Mounting: None, Semi-Standard, Body Size 10: Flow Direction: Right to Left, Semi-Standard, Body Size 20: Name Plate, Caution Plate for Bowl in Imperial Units: psi, °F, Semi-Standard, Body Size 30, 40, 50 & 60: Standard

Body Size: 10, Thread: Rc (Rc: for Sizes 20~60; M5: for Size 10), Port Size: M5 x 0.8, Mounting: None, Semi-Standard, Body Size 10: Nylon Bowl, Semi-Standard, Body Size 20: Flow Direction: Right to Left, Semi-Standard, Body Size 30, 40, 50 & 60: Standard

Body Size: 10, Thread: Rc (Rc: for Sizes 20~60; M5: for Size 10), Port Size: M5 x 0.8, Mounting: None, Semi-Standard, Body Size 10: Drain Cock, Semi-Standard, Body Size 20: Flow Direction: Right to Left, Semi-Standard, Body Size 30, 40, 50 & 60: Name Plate, Caution Plate for Bowl in Imperial Units: psi, °F

Body Size: 10, Thread: Rc (Rc: for Sizes 20~60; M5: for Size 10), Port Size: M5 (M5 x 0.8), Mounting: None, Semi-Standard, Body Size 10: 6 (Nylon Bowl), Semi-Standard, Body Size 20: Z (Name Plate, Caution Plate for Bowl in Imperial Units: psi, °F), Semi-Standard, Body Size 30, 40, 50 & 60: Standard

Shock Absorbers and Rate Controls

lrlA |.25N/A r{/A.1 3 .35 t ( l{/A 13.9 or.

Dedicated Controller

MS-DOS is a registered trade mark of Microsoft Corporation. Pentium is a trade mark of Intel Corporation.

15

+ A = 100 y, z + A 100 10 y, z + A = 200 y, z + A = 200 y, z + A = 300 y, z + A = 300 1 1 0 200 400 600 800 1000 1200 0 100 200 300 400 500 600 700 800 Stroke [mm] Stroke [mm] [Graph 6] Allowable load mass by stroke 32 [Graph 5] Allowable load mass by stroke 25 100 100 y, z + A = 0 y, z + A = 0 y, z + A = 50 y, z + A = 50 10 Load mass [kg] Load mass [kg] 10 y, z + A = 100 y, z + A = 100

IR1000/2000/3000

When a system hazard can be expected due to a drop in vacuum pressure caused by power loss or vacuum pump trouble, install a safety circuit and configure the system so that it can avoid the danger. 2. When a system hazard can be expected with a malfunction of the vacuum regulator, install a safety circuit and configure the system so that it can avoid the danger. 1.

IR1000/2000/3000

If a directional switching valve (solenoid valve, mechanical valve, etc.) is mounted on the supply side of the regulator and repeatedly switched ON and OFF, wear of the nozzle/flapper section will be accelerated and a discrepancy in the setting value may occur. Therefore, avoid using a directional switching valve on the supply side.

10

31 38.5 31 41 34 43.5 34.5 77 87 33.5 31 34.5 31 43 31 46.5 39 63 38.5 36 40.5 36 43 36 46 39 48.5 39.5 83.5 93.5 39 36 40 36 48 36 51.5 44 80 46.5 45 49 45 52 45 52.5 46.5 55 46.5 92.5 103 47.5 45 48.5 45 56.5 45 58 51.5 100 54 53.5 57 53.5 59.5 53.5 59.5 55 62 55 103 113.5 55.5 53.5 56.5 53.5 64.5 53.5 65.5 60.5 CS1 CS2 D-X Technical Data 427 A MB Series Minimum Stroke for Auto

CRQ2

When a load, such as a relay or solenoid, which generates surge is directly driven, use a type of switch with a built-in surge absorbing element. 8.