Fieldbus system EtherNet/IP TM compatible SI Unit IO-Link Master Unit

Enable Generates an error. 1 Unit Disable Does not generate an error. -10..10 V -5..5 V -20..20 mA 0..10 V 2 Analogue input range Sets the analogue input device range. Selects the analogue input range. -10..10 V Channel 0..5 V 1..5 V 0..20 mA 4..20 mA Offset binary Offset binary.

T

The value at temperature of 20C. 15-6-18 1 Clean Series Tubing Series 10Polyurethane Tubing: Series 10-TU For details, refer to Pneumatic Clean Series catalog. 20 TU0425 10 BU Model/Specifications 20 m roll Tubing size Metric size (Series TU) K Color 10-TU1208 10-TU1065 10-TU0805 10-TU0604 10-TU0425 Tubing O.D. (mm) Model Clean series M B Black 8 10 5 6.5 12 8 2.5 6 4 4 Tubing I.D.

3/5 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ1000/2000/3000

SMC SMC B A 3 1 5 Cover diameter 1.6 Cross section 0.34mm2 Manual override 42 36 3 M5 X 0.8 External pilot port (Only external pilot style(R)) (47.5) 46.5 40.5 A, B port R1 R2 20 14.6 12 10 10 P 7.2 M5 X 0.8 (Not applicable to standard model.) 5-Rc(PT)1/8 (P, A, B, R1, R2 port) 2-PE port 1.1 13.4 13.4 0 1 0 1 L plug connector (L): VQZ125 (R)lLl01 M plug connector (M): VQZ125 (R)lMl01 Indicator

MLGP

DA IB VA VB R H T ID U X PW IG DB 2-Rc 3/8 (plug) IF unlocking port Unlocks when pressurized 6H7 depth 10 2-Rc 3/8 PB GA GC 10 GB Q G IE J JA JB K PA + Stroke 6H7 depth 10 S FA FB C + Stroke B + Stroke A + Stroke E Note 1) Intermediate strokes other than standard strokes are manufactured by installing spacers.

MLGP

DA IB VA VB R H T ID U X PW IG DB 2-Rc 3/8 (plug) IF unlocking port Unlocks when pressurized 6H7 depth 10 2-Rc 3/8 PB GA GC 10 GB Q G IE J JA JB K PA + Stroke 6H7 depth 10 S FA FB C + Stroke B + Stroke A + Stroke E Note 1) Intermediate strokes other than standard strokes are manufactured by installing spacers.

Series IDG

(G) B D Purge air discharge tubing port for dehumidification Applicable tube O.D.: J (NPT thread: K inch) Purge air for dehumidification Purge air for dehumidification (Maintenance space 100mm or more) Option: P Port size L A B C D E Model F G J H K 97 224 8 119 [126] 5/16 114 249 10 147 [154] 3/8 83 187 53 165 62 113 212 54 190 82 IDG10, IDG10H IDG20, IDG20H Values inside [ ] are for NPT

CL

TdH9 TB +0.036 0 +0.036 0 +0.043 0 CLG-020-24 CLG-025-24 CLG-032-24 CLG-040-24 20 25 32 40 42 48 53 60 10 10 10 10 5.5 5.5 6.6 6.6 31 37 38.5 42.5 40 47 47 55 20 25 32 40 36 43 50 58 10 10 10 10 5.5 5.5 6.6 6.6 25 30 35 40 (29.3) (33.1) (40.4) (49.2) 8 10 12 14 8 10 12 +0.043 0 14 CG-020-24A CG-025-24A CG-032-24A CG-040-24A Applicable bore size (mm) Applicable bore size (mm) Part no.

TABLE OF CONTENTS

DIA DIA DIA .468 (11.9) 7/8 (22.2) 7/16 (11.1) A B A B 7/16 (22.2) 7/8 (11.1) .939 (23.9) .935 (23.8) .437 (11.1) 13/64 (5.2) .255 (6.5) .200 (5.1) #10-32 UNF x 5/16 (7.9) THD 2 places .468 (11.9) A CAVITY PORT 1 19/32 (40.5) .127 (3.29) .125 (3.18) DIA. x 7/32 (5.6) DEEP 2 PLACES 2 7/8 (73) B ORIFICE PORT COAST PNEUMATICS 8055 E.

RZQ

Normally closed type (NC = b contact) solid state auto switches are also available (D-F9G, F9H, Y7G, Y7H) 10-10-14

ZX

Refer to page 13-2-10 for details. (1) Valve unit (4) Adsorption confirmation switch unit K1 A V ZX1 5 Z B D M L Unit for replacement 15 C 0X B ZSP1 D Piping specifications Applicable nozzle diameter Manifold All ports are equipped with plugs.

CM2

0() 0() A 6(4) 6(4) 7(5) 12 B B 0() 0() 1(0) 6 Hs 22.5 25 28.5 32.5 B 5(3) 5(3) 6(4) 11 A 7(5) 7(5) 8(6) 13 Hs 25 27.5 31 35 A B 6(4) 6(4) 7(5) 12 Hs 60 62.5 66 70 A 4(2) 4(2) 5(3) 10 Hs 69.5 72 75.5 79.5 B 3(1) 3(1) 4(2) 9 A 0.5() 2.5(0.5) 1.5(0) 0.5() 2.5(0.5) 1.5(0) 0.5(0) 5.5 2.5(0.5) 7.5 1.5(0) 6.5 3.5(1.5) 8.5 ( ): Denotes the values with air cushion.

Vacuum Pad: Ball Joint Type, Series ZPT/ZPR

Q Width across flats 12 N M5 x 0.8 Width across flats 10 8 3 5 Y R R F F Width across flats 12 Width across flats 3 Width across flats 10 Width across flats 2 E E D C D C 2 2 A A B B Dimensions A Dimensions A (mm) (mm) B B C D E F Y C D E F N Model Model ZPR10F-0-B5 ZPR20F-0-B5 10 12 10 12.5 23.4 39.5 1.5 M5 x 0.8 20 22 ZPR13F-0-B5 ZPR20F-0-B8 13 15 M8 x 1.25 23.9 10.5 13 40 2 12.5 15.5 29.3

Escapements Series MIW/MIS ø8, ø12, ø20, ø25, ø32 1

switch (3-wire, 2-wire) RE A B +1 0 Stroke tolerance mm Note) Refer to page 10-20-1 for auto switch specifications.

Escapements Series MIW/MIS ø8, ø12, ø20, ø25, ø32 1

switch (3-wire, 2-wire) RE A B +1 0 Stroke tolerance mm Note) Refer to page 10-20-1 for auto switch specifications.

MNB

A B B A A B A B A 32.5 25 24.5 35 8.5 32 32 4.5 9.5 12 8 5.5 0 1.5 2 13 36.5 27.5 27.5 38.5 8.5 40 40 4.5 9.5 12 8 5.5 0 1.5 2 13 41 34 34.5 43.5 9 50 50 5 10 14 10 7.5 0 3.5 2.5 15 46 39 39.5 48.5 9 63 63 5 10 14 10 7.5 0 3.5 2.5 15 52.5 46.5 46.5 55 13 80 80 9 14 15.5 11.5 9 2.5 5 6.5 16.5 59.5 55 55 62 13 100 100 9 14 15.5 11.5 9 2.5 5 6.5 16.5 12 Series MDNB Auto Switch Internal Circuits

NCA1

CA2 Auto switch Stroke B Dual operation Double rod Mounting Bore size CS1 Stroke A C76 Cushion Both ends N W/o cushions H Head end R Rod end Dimensions C85 C95 CP95 P + stroke A 4-EE (NPTF) P + stroke B 4-DD NCM D across flats D across flats NCA D-X Stroke A Stroke B SN + Stroke (A + B) 4-NT Depth ND 20LD + Stroke (A + B) Data ZZ + Stroke (A + B) Bore size (in) MM KK A AA B C D DD E EA

NCA1

Standard stroke 1, 2, 3, 4, 5, 6, 8, 10, 12, 14, 16, 18, 20 1, 2, 3, 4, 5, 6, 8, 10, 12, 14, 16, 18, 20, 24 1, 2, 3, 4, 5, 6, 8, 10, 12, 14, 16, 18, 20, 24, 28 Bore size (in) 1.50 2, 2.50 3.25, 4 How to Order NC D A1 B 150 0400 A XC9 Bore size Auto switch Adjustment range A: 0 to 1" B: 0 to 2" Mounting Adjustable StrokeReturn Stroke Dimensions P + Stroke LF + Stroke (2) EE (NPTF) 4-DD D across

Industrial Filters

574 70 634 574 70 665 3/8, 1/2, 3/4 3/8, 1/2, 3/4 A (L250) A (L250) 315 70 375 315 70 408 FGDT FGDF FGDT FGDF B (L500) B (L500) 574 70 636 574 70 665 28 B Industrial Filter FGE Series FGD How to Order FGE FGE FGG FGE S A 10 B N A 002 G1 FGES/FGEL type (V-band type) FGA Material Symbol Option FGC Symbol Body Gasket/O-ring NBR FKM Pressure gauge type G46-10-02M (Brass at wetted parts) G1 G2

CE

) 24VDC (10%) 24VDC (10%) 100 to 240VAC (10%) 100 to 240VAC (10%) 100 to 240VAC (10%) 24VDC (10%) 100 to 240VAC (10%) Power consumption 20VA or less 10W or less 20VA or less 10W or less 20VA or less 10W or less 10W or less 20VA or less Between case and AC line: 1500VAC for 1 min.

Conforming to ISO Standard Solenoid Valve (with M12 Connector) Series EVS7-6/7-8/7-10 (Size 1) (Size 2) (Size 3) 1

4, 2 5, 3 (A, B EA, EB) Bore size Positions C 10 12 10 12 10 11 10 11 10 13 7.2 7.2 b 0.18 0.24 0.18 0.24 0.28 0.25 0.16 0.26 0.26 0.27 Cv 2.4 3.0 2.4 3.0 2.4 2.8 2.4 2.8 2.4 3.3 b 0.24 0.27 0.24 0.27 0.24 0.27 0.20 0.27 0.25 0.29 Cv 3.0 3.3 3.0 3.3 2.4 2.8 2.4 3.3 2.8 3.0 C 12 13 12 13 10 11 10 13 11 12 7.0 7.0 Metal seal Rubber seal Metal seal Rubber seal Metal seal Rubber seal