High Vacuum L Type Valve

H5 Initial power / 100 VAC 200/40 400/70 400/80 600/130 800/180 Power 200 VAC 800/40 1600/80 1600/80 2400/130 3200/180 consumption (W) Note 1) Initial power and power consumption are nominal values. Note 2) Heaters are not available for size 16.

XL-OMY0002

10 XLD-40 8 6 4 XLD-25 2 0 0.0 0.5 1.0 1.5 2.0 2.5 3.0 3.5 4.0 4.5 5.0 5.5 6.0 6.5 7.0 n n 9 XL-OMY0002 4-2 XLD-25 XLD-40 XLD-50 XLD-63 AC90240V XLA25-60S-1 XLA25-60S-1 XLA25-60S-2 1 1 1 H4 AC100V 200/40 200/50 400/100 / AC200V 800/40 800/50 800/100 XLA25-60S-1 XLA25-60S-2 XLA25-60S-2 XLA25-60S-3 1 1 1 1 H5 AC100V 200/40 400/70 400/80 600/130 / AC200V 800/40 1600/80 1600

CC

The speed will be approximately 1.4 times the date given on p.4.12-3.

Profile Design ISO/VDMA Air Cylinder Series CP95

250, 320, 400, 450, 500, 600, 700, 800 1500 Note: Intermediate strokes are also available 1.8-6 Series CP95 Theoretical output table [N] OUT IN Bore Rod diam.

Silencers/Exhaust Cleaner Series AN
/Series AMC 1

P 1 Exhaust cleaner Exhaust cleaner Solenoid Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Inlet pressure for exhaust cleaner Valve 3. If compressed air exhausted from the solenoid valve is not clean clogging may occur, 4.

LG1H

Refer to pages starting with 181 for mounting. 3-8H10 depth 10 30 A B Stroke Model LG1H202PC-500-F LG1H202PC-600-F LG1H202PC-700-F LG1H202PC-800-F LG1H202PC-900-F LG1H202PC-1000-F 350 450 550 650 750 850 370 470 570 670 770 870 500 600 700 800 900 1000 95 B 100 95 8-6.2 110 95 20 95 A Positioning Time Guide Positioning time Positioning time (sec.)

MLGC

B76 B73 I.C. 5V P P P P P P P P P P P P P P P P P 3 wire (Equiv.

125

Aluminum alloy 1728 3 Port 3 Position Valve VEX3 Series Working Principle Fig. (1) A R Fig. (2) Closed center Fig. (3) P A 3(R) 3(R) 3(R) 2(A) 2(A) 2(A) 1(P) 1(P) 1(P) This is a 3-port switch valve in which the shaft 7 extending from the driving piston 3 opens/closes a pair of poppet valves 6.

CXS

Port location 32 CXS P 6 M 50 F9BW J S Number of auto switches Compact type Nil S n 2 pcs. 1 pc. n pcs.

Modular F.R.L. Unit

Please contact P/A regarding their availability.

ZSE30/ISE30

Pressure Switch Specifications ZSE30 (Vacuum/Low pressure) 100.0 to 100.0 kPa 101.0 to 101.0 kPa 500 kPa 0.2 kPa ISE30 (Positive pressure) 0.000 to 1.000 MPa 0.100 to 1.000 MPa 1.5 MPa 0.001 MPa Rated pressure range Regulating pressure range Proof pressure Min. regulating unit Fluid Power supply voltage Current consumption Switch output Air, Inert gas, Non-flammable gas 12 to 24 VDC, Ripple (p-p

ISO Cylinder ISO Standard (15552) C96 Series ø32, ø40, ø50, ø63, ø80, ø100, ø125 Lightweight 17% Up C85 An adjustable position trunnion has been added. to C85W Weight reduced C85-S/T C85K * Compared with the previous C96 series (ø40, 100 mm stroke) C

1900 100 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500, 600, 700, 800 1900 125 2000 Made to Order (For details, refer to pages 190 to 199.)

RZQ

-X 20Data 10-10-9 10 Series RZQ Dimensions Basic style (Double end tapped): RZQA 3-P (port size) FA H effective thread depth C Q FB G I D M K E Z a' a M K L B + Full stroke A + Full stroke Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com J E 4-O1 effective thread depth

HRX-OM-Z002

(Note12) The capacity is 60Hz even in the 50Hz area when option P is selected. (Note13) The weight will increase by 4kg when option C and P is selected.

CLA

p>. .-~ --_1 124 (5000) ,/ /. / --/./-.P: 2 ;;; 900 (4000) !

Water-cooledThermo-chiller

50 or less Chloride ion (Cl) [mg/L] 50 or less Sulfuric acid ion (SO42) p p p p p [mg/L] 50 or less Acid consumption amount (at pH4.8) [mg/L] 70 or less Total hardness 1.Thoroughly read the Operation Manual.

Tie-rod Type Hydraulic Cylinder

Standard Strokes Bore size (mm) Standard strokes (mm) 40 50 63 80 100 125 160 25 to 800 25 to 800 25 to 800 25 to 1000 25 to 1000 Specifications with included auto switch are the same for Double Acting/Single Rod.

VHS20/30/40/50

G H F SMC P . U S Can be locked with a padlock in the exhaust condition. E C Padlock mounting position C D D Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com SUP SUP . A OUT IN A OUT IN 1 2 B 3 B EXH. EXH.

Hydraulic Cylinder 7MPa Nominal Pressure Series CHN

6 8 34 25f8 5.5 M10 x 1.25 17 15 M24 x 1.5 1/8 81 11 3.5 5.5 143 10 46 32 8 9 40 31f8 7.5 M14 x 1.5 18 15 M30 x 1.5 1/8 87 13 3 4 159 10 53 40 10 11 48 34f8 7.5 M16 x 1.5 22 21 M33 x 2 1/4 108 16 5 0 183 16 54 8 Series CHN Dimensions Single clevis type: CHNC Width across flats B1 MM GA2 NN Rc P GB2 Rc P Rc P Cushion valve Cushion valve GB1 V T Cushion valve H1 GA1 CD Push press fitting W

Multi-Axis Step Motor Controller

(Option) JXC-W1 p. 16 VUSB cable (Option) JXC-W1-2 Cable length: 3 m p. 16 VController setting software (Option) JXC-W1-1 p. 16 PC Provided by customer. *1 The connected actuators should be ordered separately.