Series AP3500

Please refer to P.125. Specifications AP3200 Normally closed (N.C.)

ISO Standards Air Cylinder: Standard Double Acting with End of Stroke Cushioning ø 32, ø 40, ø 50, ø 63, ø 80, ø 100, ø 125 Series CP96

25 37.5 50 87 100 325 300 250 275 225 250 200 225 175 200 150 175 125 150 25 100 125 51 75 112 69 64 12.5 25 37.5 50 87 100 325 316 250 291 225 266 200 241 175 216 150 191 125 166 30 100 141 56 75 128 86 68 12.5 25 37.5 50 103 116 341 316 250 291 225 266 200 241 175 216 150 191 125 166 32 100 141 56 75 128 91 76 12.5 25 37.5 50 103 116 341 300 200 280 180 260 160 240 140 220 120 200 100 180

1

VX021S-1-16FB 12 VDC 100 VAC 110 VAC 200 VAC C18312G6GCU None 220 VAC 230 VAC 240 VAC 24 VAC 48 VAC 24 VDC GDM2A-L5 12 VDC GDM2A-L6 100 VAC GDM2A-L1 110 VAC GDM2A-L1 200 VAC GDM2A-L2 220 VAC GDM2A-L2 230 VAC GDM2A-L2 240 VAC GDM2A-L2 24 VAC GDM2A-L5 48 VAC GDM2A-L15 With light * Select an appropriate DIN connector suitable for the coil insulation type. 7 XSA Series Specific Product Precautions

MK

MK-F020 MK-F025 MK-F032 MK-F040 MK-F050 MK-F063 Bore size (mm) 20 25 32 40 50 63 Accessory With boss in head side 2 3 5 7 13 25 With arm 100 100 200 200 350 350 13 32 Centering location ring Set pin Bolt for cylinder body Rear flange type (including mounting bolt) 133 153 166 198 345 531 Calculation: (Example) MKG20-10RFN Standard calculation: MKB20-10R 250 g 6 g 133 g 2 g 100 g 491

3

Additional Weight Ensuring Safety Unit: g Caution 12 13 16 32 20 100 25 100 32 200 40 200 50 350 63 350 Bore size (mm) With arm Rod flange (including mounting bolt) If one side of the piston is pressurized by supplying air with the clamp arm attached, the piston will move vertically while the clamp arm rotates.

LX Series Compact Electric Actuators

Without brake C section details Cross section BB l\rodel D F L 1 5 4 231 LXPB B-50 L X P B B . 7 5 173 256 52 L X P B _ B _ 1 0 0 204 281 246 323 LXPB B -.125 L X P B B 1 5 0 271 348 120 90 L X P B _ B _ 1 7 5 296 373 LXPB_B_-200 321 394 ?$rc zs S8[i8$ [10 Camraclnectl' 0i|llomiom $lift $crExi tlE LXPB S With brake I I shows the localion at which origin point swiich operates.

High Vacuum L Type Valve

H4 S y m b o l Initial power / Power consumption (W) 100 VAC 200/40 200/50 400/100 600/150 200 VAC 800/40 800/50 1600/100 2400/150 Heater assembly number XL1A25-60S-1 XL1A25-60S-2 XL1A25-60S-2 XL1A25-60S-3 XL1A25-60S-2 No. of heater assemblies 1 pc. 1 pc. 1 pc. 1 pc. 2 pcs.

VXD21/22/23

DC AC, DC 60 40 1 80 60 10(1) 40 60 60 40 Maximum Minimum 10 5(2) Note 1) Dew point: 10C or less Note 2) 50 cSt or less Note 3) D, E, N, P etc. in parentheses are option symbols.

Electric Actuator High Rigidity and High Precision Slider Type Circular arc grooves allow for high rigidity and high precision. Moment resistance*1 *2 61% Improved by up to Table displacement*1 50% Reduced by up to With internal battery-less absolute e

800 800 Mey L5 [mm] L5 [mm] L5 [mm] 600 600 600 m Wall L5 Y 400 400 400 200 200 200 0 0 0 0 10 20 30 40 50 0 10 20 30 40 50 60 70 0 5 10 15 20 25 30 35 Work load [kg] Work load [kg] Work load [kg] 1000 1000 1000 800 800 800 L6 L6 [mm] L6 [mm] L6 [mm] 600 600 600 Z 400 400 400 200 200 200 0 0 0 0 10 20 30 40 50 0 5 10 15 20 25 30 35 0 10 20 30 40 50 60 70 Work load [kg] Work load [kg] Work

VCW

R C R C (44) G1/2 E A H 2-P Port size B (S) E G1/2 2-M Thread depth N D A H B 2-P Port size 2-M Thread depth N D L L K K N.O.

Soft Start-up Valve AV2000/3000/4000/5000 1

Operation of solenoid valves in the outlet side To operate solenoid valves mounted on this products outlet side (A port side), first confirm that the outlet sides pressure (P) has increased to become equal to the inlet sides pressure (P). 6.

SFOD-OMT0009CN

200 mm/s mm/s <> 100 500 100 500 1 1 200 1000 200 1000 2 2 50 200 50 200 3 3 2) AWG20 (0.5mm USB JXC-W1-2 -USB DC24V M PWR JXC-W1 2) C PWR DC24V 2) () <> 1.5m () 2) AWG16 (1.25mm JXC-C1 1) 2)PLCDC24V 12.

JXCx-OMT0001CN

200 mm/s mm/s 100 500 100 500 1 1 200 1000 200 1000 2 2 50 200 50 200 3 3 <> 2) AWG20 (0.5mm USB JXC-W1-2 DC24V USB M PWR 2) JXC-W1 C PWR DC24V 2) 1.5m () <> JXC-C1 2) AWG16 (1.25mm 1) 2) PLC5 EtherNet DC24V 3) P1 P2 EtherNet/IP 14 USB (JXC-W1-2) 34 CI3 4Modbus -9No.JXC-OMT0001CN-C 3.

CYV

P-80 (D) This catalog is printed on recycled paper with concern for the global environment.

AS-FG/ASD-FG

P-77.5 (YG)

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

Residence time of water at 20C is 5.5 x 10-6sec, whereas at 150C is 2.8 x 10-8 sec, or 200 times shorter.

MRQ

MSQ Backlash 2 or less For detailed explanation of effective output, refer to the description on p.1.5-5.

VNH

Supply pilot air higher than 0.25 MPa to P1 port Piping Inlet side (supply side): P port, Outlet side (exhaust side): A port Supply pilot air higher than 0.25 MPa to P1 port. PA VNH 12(P1) 12(P1) Nozzle 2(A) 1(P) PAX Nozzle 1(P) 2(A) 3(B) Stop valve Tank Coolant pump PB Tank Coolant pump For reducing load to pump, coolant liquid is returned from B port to tank each time.

25

[mm] Ionizer front back direction [mm] 150 100 50 0 50 100 150 150 100 50 0 50 100 150 250 200 150 100 50 0 50 100 150 200 250 0 0 50 50 100 100 1 s 0.5 s 150 150 0.5 s 200 200 2 s 1 s 2 s 250 250 5 s 5 s 300 300 3) With energy saving type de-ionizing cartridge, Supply pressure: 0.3 MPa Installation distance in height from ionizer to workpiece (Charged object location) [mm] Installation

Dual Rod Cylinder: Basic Type Series CXS ø6, ø10, ø15, ø20, ø25, ø32 1

120 178 60 10 130 20 198 70 Standard stroke Long stroke (-XB11) 2-5.7 140 218 30 80 44.5 44.5 150 238 90 40 4-M5 x 0.8 thread depth 4.5 (Piping port) (Opposite side: Same) 160 258 100 50 185 75 308 125 (Z) 4-M4 x 0.7 thread depth 6 6 (30) (30) 210 358 100 150 2-M6 x 1 thread depth 10 235 408 175 125 260 458 150 200 285 508 225 175 0.2 310 200 558 250 Only the CXSW20-10 has a groove cut