CU 6 6 Built-in magnet Bore size 6 10 16 20 25 32 6 mm 10 mm 16 mm 20 mm 25 mm 32 mm Port thread type Symbol Nil TN TF Type M5 x 0.8 Rc 1/8 NPT 1/8 G 1/8 Bore size ø6, ø10, ø16, ø20, ø25 ø32 ø32 ø32 30 Standard stroke (mm) ø6, ø10, ø16 ø20, ø25, ø32 5, 1

1 (M) MU 3-wire (NPN) 3-wire (PNP) 2-wire 3-wire (NPN) 3-wire (PNP) 2-wire IC circuit IC circuit M9N M9P M9B M9NW M9PW M9BW M9NV M9PV M9BV M9NWV M9PWV M9BWV 5 V, 12 V Solid state switch Reed switch 12 V Relay, PLC Grommet 24 V Yes 5 V, 12 V Diagnostic indication (2-color indication) 12 V IC circuit IC circuit 3-wire A96 A96V (NPN equivalent) 5 V 12 V Yes Relay, PLC 24 V Grommet A93

Heavy Duty Stopper Cylinder

Consult with SMC regarding water resistant types with the above model numbers. 2 1 m type lead wire is only applicable to D-A93. Lead wire length symbols 0.5 mNil (Example) M9NW 1 m M (Example) M9NWM 3 m L (Example) M9NWL 5 m Z (Example) M9NWZ Solid state auto switches marked with a symbol are produced upon receipt of order.

High Precision Stroke Reading Cylinder Non-rotating Piston Type CEP1 Series ø 12, ø 20 Note) CE-compliant: When connecting to a multi-counter (CEU5  -D, power supply voltage 24 VDC). Refer to the multi-counter operation manual for details. Note)

Consult with SMC regarding water resistant types with the above model numbers. 2 1 m type lead wire is only applicable to D-A93. Solid state auto switches marked with are produced upon receipt of order.

Low-Speed Compact Rotary Actuator Rack & Pinion Type CRQ2X Series Size: 10, 15, 20, 30, 40

IC circuit A96 A96V 5 V Yes 24 V Grommet A93V2 A93 A90 100 V Relay, PLC 2-wire 12 V A90V No IC circuit 100 V or less 1Although it is possible to mount water resistant type auto switches, note that the rotary actuator itself is not of water resistant construction. 21 m type lead wire is only applicable to D-A93.

Mechanically Jointed Rodless Cylinder Linear Guide Type MY1H Series ø 25, ø 32, ø 40

Standard stroke (mm) Bore size (mm) 25, 32, 40 50, 100, 150, 200, 250, 300 350, 400, 450, 500, 550, 600 1500 Stroke adjustment unit symbol For stroke adjustment unit, refer to page 1209. Intermediate fixing spacer is not available for end lock mounting side. Strokes are manufacturable in 1 mm increments, up to the maximum stroke.

ø 20, ø 25, ø 32, ø 40, ø 50, ø 63 Compact Guide Cylinder/Wide Type MGPW Series

A water-resistant type cylinder is recommended for use in an environment which requires water resistance. 21 m type lead wire is only applicable to D-A93. Lead wire length symbols: 0.5 m Nil (Example) M9NW 1 m M (Example) M9NWM 3 m L (Example) M9NWL 5 m Z (Example) M9NWZ Solid state auto switches marked with are produced upon receipt of order.

High Vacuum Slit Valve

(for gate) 5 to 60 (for moving part) Operating fluid Inertia vacuum Operating times s 0.6 to 1 2 Position detection Auto switch (D-A93) Seal material FKM Main materials Material for mechanism Bellows : AM350, Gate : A6063, Body : A5052P, Bonnet : A5052, Others : SUS304 for vacuum part B Piping size Rc1/8 Exhaust direction Universal Mounting direction Vertical End lock mechanism With end

Microspeed Cylinder: Double Acting/Single Rod Series CQSX ø 12, ø 16, ø 20, ø 25 Dimensions and auto switch details are equivalent to those of the standard double acting single rod cylinder.

Grease pack GR-L-005 (5g) GR-L-010 (10g) GR-L-150 (150g) 6

Microspeed Cylinder: Double Acting/Single Rod Series CUX ø 10, ø 16, ø 20, ø 25, ø 32 Dimensions and auto switch details are equivalent to those of the standard double acting single rod cylinder.

Nil (Example) A93 3m . L (Example) A93L 5m . Z (Example) F9NWZ Solid state auto switches marked "" are produced upon receipt of order.

Hydraulic Cylinders

Nil (Example) A93 3m . L (Example) A93L 5m .

D-F6N/D-F6P/D-F6B

Applicable model: D-A73, A73H, A73C, A93, A93V, A53, A54, B53, B54, C73, C73C, E73A, Z73, D-R73, R73C, 97, 93A, A33, A34, A33A, A34A, A44, A44A 2) When using a 2-color indicator type auto switch (D-A79W, A59W and B59W), the auto switch will constantly remain ON if the connections are reversed. 1. Keep wiring as short as possible.

Slit Valve

Applicable wafer size 200 mm 300 mm XM XY Non-cassette type DXSA Auto switch and connector XVD Symbol Auto switch Connector Nil A None Lead wire: 0.5 m (without connector) XGT XGT For 200 mm wafer For 300 mm wafer CYV With multiple connector Note 1) C Cassette type D-A93 (With 2 pcs. for opening and closing) (T3106 000: Made by AMP) With D-sub connector Note 2) F (CDE-9PF05: Made by HIROSE

Please contact us for the latest version.sales@ocaire.com, SPACER -XC10, ACTUATOR, NCA1 TIE-ROD CYLINDER, M1, 1.5 INCH NCA1 PART, .04840 lb

Please contact us for the latest version.sales@ocaire.com, INTERMEDIATE RING (N/CQ2-XC10), ACTUATOR, CQ2 COMPACT CYLINDER, H1, 20MM CQ2 PART, .00367 lb

Please contact us for the latest version.sales@ocaire.com, HEAD COVER (XC10), ACTUATOR, 80MM CA1 PART, .00000 lb

Please contact us for the latest version.sales@ocaire.com, HEAD COVER (XC10), ACTUATOR, 80MM CA1 PART, .00000 lb

Please contact us for the latest version.sales@ocaire.com, SPACER (MB XC10, XC11, XC12), ACTUATOR, MB TIE-ROD CYLINDER, M1, 40MM MB PART, .09900 lb

Please contact us for the latest version.sales@ocaire.com, SPACER (MB XC10, XC11, XC12), ACTUATOR, MB TIE-ROD CYLINDER, N1, 50MM MB PART, .17600 lb

This is a legacy product, and replaced byCM2B40-40+40Z-XC10, CYL, RND BODY, DUAL OPR, ACTUATOR, CM2/CM3 ROUND BODY CYLINDER, MC, 40MM CM2 OTHERS (COMBO), 2.866 lb

This is a legacy product, and replaced byCG1KBN40-45+40Z-XC10, CYL, NON ROT, DUAL STROKE, ACTUATOR, CG/CG3 ROUND BODY CYLINDER, MC, 40MM CG OTHERS (COMBO), 3.32827 lb, SeriesDescriptionModelActionNoteVol. no. (for std model)CG1Air cylinderCG1Double acting, Single rodExcept with rubber bumper666